JP2001297876A - Manufacturing method and apparatus of organic el display element - Google Patents
Manufacturing method and apparatus of organic el display elementInfo
- Publication number
- JP2001297876A JP2001297876A JP2000110144A JP2000110144A JP2001297876A JP 2001297876 A JP2001297876 A JP 2001297876A JP 2000110144 A JP2000110144 A JP 2000110144A JP 2000110144 A JP2000110144 A JP 2000110144A JP 2001297876 A JP2001297876 A JP 2001297876A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- organic
- organic layer
- manufacturing
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 52
- 239000000758 substrate Substances 0.000 claims abstract description 111
- 239000012044 organic layer Substances 0.000 claims abstract description 76
- 239000000243 solution Substances 0.000 claims abstract description 53
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000002347 injection Methods 0.000 claims abstract description 21
- 239000007924 injection Substances 0.000 claims abstract description 21
- 239000002861 polymer material Substances 0.000 claims abstract description 10
- 239000010410 layer Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 41
- 238000001035 drying Methods 0.000 claims description 23
- 239000003595 mist Substances 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 12
- 238000007664 blowing Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 238000004020 luminiscence type Methods 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 14
- 238000010586 diagram Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 238000004220 aggregation Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 101710100266 Serine/threonine-protein phosphatase 6 catalytic subunit Proteins 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- -1 polyparaphenylene vinylene Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は有機ＥＬ表示素子の製造
方法および製造装置に関する。The present invention relates to a method and an apparatus for manufacturing an organic EL display device.
【０００２】[0002]
【従来の技術】有機ＥＬ表示素子は、ガラス等の透明或
いは半透明基板に正孔注入電極と発光層を含む有機層と
電子注入電極との積層体で構成され、この正孔注入電極
と電子注入電極に直流電源を接続し、電流を流すことで
有機層が発光する。2. Description of the Related Art An organic EL display device comprises a laminate of a hole injection electrode, an organic layer including a light emitting layer, and an electron injection electrode on a transparent or translucent substrate such as glass. The organic layer emits light when a direct current power supply is connected to the injection electrode and a current flows.
【０００３】正孔注入電極には錫ドープ酸化インジウム
（ＩＴＯ）などの透明導電膜が用いられ、その上に発光
層を含む有機層を積層する。有機層に用いられる導電性
高分子材料には、ポリパラフェニレンビニレン（ＰＰ
Ｖ）やそれに側鎖を導入したもの、あるいはポリビニル
カルバゾール（ＰＶＫ）などの低分子系材料を高分子の
主鎖や側鎖に導入したものなどがあり、正孔輸送性およ
び電子輸送性を示す材料を順次積層する。有機層の上に
は電子注入電極としてアルミニウム（Ａｌ）やマグネシ
ウム（Ｍｇ）などの仕事関数の小さな金属電極を形成す
る。[0003] A transparent conductive film such as tin-doped indium oxide (ITO) is used for the hole injection electrode, and an organic layer including a light emitting layer is laminated thereon. As the conductive polymer material used for the organic layer, polyparaphenylene vinylene (PP
V) or a material having a side chain introduced therein, or a material having a low molecular weight material such as polyvinylcarbazole (PVK) introduced into a main chain or a side chain of a polymer, and has a hole transporting property and an electron transporting property. The materials are sequentially laminated. On the organic layer, a metal electrode having a small work function such as aluminum (Al) or magnesium (Mg) is formed as an electron injection electrode.
【０００４】有機層を形成する高分子材料の成膜方法
は、その溶液からスピンコート法やディップコート法、
あるいはインクジェット法などのウエットプロセス法で
あり、数十ｎｍから数μｍ程の厚さで形成される。ウエ
ットプロセス法は成膜時間が短く、設備コストが安価な
ことから、低コスト大量生産が可能である。A method of forming a polymer material for forming an organic layer includes spin coating, dip coating, and the like from the solution.
Alternatively, it is a wet process such as an ink jet method, and is formed with a thickness of about several tens nm to several μm. Since the wet process method has a short film formation time and a low equipment cost, low-cost mass production is possible.
【０００５】[0005]
【発明が解決しようとする課題】ウェットプロセス法を
用いた有機ＥＬ表示素子の作製は、上記特徴がある反
面、以下の問題があった。スピンコート法やディップコ
ート法では、溶液の流れや浸積を利用しているため、基
板の全面に塗布される。したがって有機層の形成位置を
限定した成膜を行う場合、成膜部分の開口を持ったマス
ク板を用いたり、成膜部分以外をテープ等でマスクする
方法は、溶液の流れを妨げるため、形成位置を限定した
成膜は不可能であった。これは正孔注入電極を全て有機
層で覆うことになり、後で高価なエキシマレーザで有機
層を除去し電極を露出させる工程が必要であった。また
フルカラー表示素子の作製は基板上にＲ（赤）、Ｇ
（緑）、Ｂ（青）の３色に発光する有機層を、それぞれ
重ならない位置に開口を有したマスク板を用い成膜しな
ければならないが、上記の理由により従来のスピンコー
ト法やディップコート法では作製できない問題があっ
た。更に、基板上に形成される正孔注入電極は、発光形
状に合わせた配線を作るため、基板上に凹凸ができる。
この凹凸の上にスピンコート法やディップコート法で有
機層を形成する場合、凹凸で溶液の流れが妨げられ、均
一な膜厚は得られない問題があった。The production of an organic EL display element using a wet process method has the above-mentioned features, but has the following problems. In the spin coating method and the dip coating method, since the flow or immersion of the solution is used, the solution is applied to the entire surface of the substrate. Therefore, when performing film formation with a limited formation position of an organic layer, a method of using a mask plate having an opening of a film formation portion or a method of masking a portion other than the film formation portion with a tape or the like obstructs the flow of a solution. It was impossible to form a film at a limited position. This means that the hole injection electrode is entirely covered with the organic layer, and a step of removing the organic layer with an expensive excimer laser and exposing the electrode is required later. Further, a full-color display element is manufactured by forming R (red), G
Organic layers that emit light of three colors (green) and B (blue) must be formed using a mask plate having an opening at a position where they do not overlap each other. There was a problem that it could not be produced by the coating method. Further, the hole injection electrode formed on the substrate has irregularities on the substrate because wiring is formed in accordance with the light emission shape.
When an organic layer is formed on the unevenness by a spin coating method or a dip coating method, there is a problem that the flow of the solution is hindered by the unevenness and a uniform film thickness cannot be obtained.
【０００６】またスピンコート法では、基板を高速で回
転する必要があるため、大面積基板に成膜することは困
難であり、更に基板上の溶液は、基板中心から外周部に
向かって順次塗布されるため、基板外周部で塗布量が多
くなり、基板全面で均一な膜厚を得ることができず、有
機層材料の使用効率が悪くなる問題があった。In the spin coating method, it is difficult to form a film on a large-area substrate because the substrate must be rotated at a high speed. Further, the solution on the substrate is applied sequentially from the center of the substrate to the outer periphery. Therefore, there is a problem in that the coating amount is increased at the outer peripheral portion of the substrate, a uniform film thickness cannot be obtained over the entire surface of the substrate, and the use efficiency of the organic layer material is deteriorated.
【０００７】本発明は上記の課題を鑑みてなされたもの
で、有機ＥＬ表示素子の製造にあたり、特に高分子材料
を用いたウェットプロセス法において、マスク板を用い
た有機層の形成位置を限定した成膜を可能にし、高分子
材料を用いたフルカラー表示素子の作製を可能にし、ま
た基板に正孔注入電極の凹凸がある場合でも均一な有機
層の形成を可能にし、更に大面積基板上に均一な有機層
を形成できる、生産性が高く、生産コストが極めて低い
有機ＥＬ表示素子の製造方法および製造装置を提供する
ことにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and in manufacturing an organic EL display element, in particular, in a wet process method using a polymer material, the formation position of an organic layer using a mask plate is limited. Enables film formation, enables production of full-color display elements using polymer materials, enables uniform organic layer formation even when the substrate has irregularities of hole injection electrodes, An object of the present invention is to provide a method and an apparatus for manufacturing an organic EL display element which can form a uniform organic layer, has high productivity, and has extremely low production cost.
【０００８】[0008]
【課題を解決するための手段】本発明の第１は、この課
題を解決するため、有機層を形成する材料を含む溶液
を、ノズル先端から霧状に噴出させ、ノズルに対向する
位置に配置した基板上に塗布することを特徴とした有機
ＥＬ表示素子の製造方法である。According to a first aspect of the present invention, a solution containing a material for forming an organic layer is ejected in a mist form from the tip of a nozzle and disposed at a position facing the nozzle. A method for manufacturing an organic EL display element, characterized in that the method is applied on a substrate which has been prepared.
【０００９】本方法は、基板上面より、有機層を形成す
る材料を含む溶液を塗布するとこにより、基板上にマス
ク板を配置した場合、またはテープ等でマスクする場
合、あるいは基板上に正孔注入電極の凹凸がある場合で
も、塗布が可能となった。In this method, a solution containing a material for forming an organic layer is applied from the upper surface of the substrate, whereby a mask plate is disposed on the substrate, masking with a tape or the like is performed, or holes are formed on the substrate. Coating was possible even when the injection electrode had irregularities.
【００１０】第２の発明は、有機層を形成する部分に開
口を持つマスク板を、基板上に配置し、有機層を形成す
る材料を含む溶液を塗布することで、基板上の限定され
た部分のみに有機層を形成する第１の発明の有機ＥＬ表
示素子の製造方法である。According to a second aspect of the present invention, a mask plate having an opening at a portion where an organic layer is to be formed is disposed on a substrate, and a solution containing a material for forming an organic layer is applied to the substrate, thereby limiting the area of the substrate. This is a method for manufacturing an organic EL display element according to the first invention, in which an organic layer is formed only in a portion.
【００１１】本方法は正孔注入電極上の有機層の塗布領
域を特定できるので、従来のエキシマレーザを用いた高
価な後処理工程を無くし、またＲ、Ｇ、Ｂの３種類のマ
スク板と溶液を組み合わせることで、安価なフルカラー
表示素子の作製を可能にした。The present method can specify the coating region of the organic layer on the hole injection electrode, thereby eliminating the expensive post-processing step using a conventional excimer laser, and using three types of mask plates of R, G and B. By combining the solutions, it was possible to manufacture an inexpensive full-color display element.
【００１２】第３の発明は、ノズルを１個以上装備し、
且つノズルあるいは基板を移動させることで、大面積基
板上に連続で均一な膜を形成することができる第１およ
び第２の発明の有機ＥＬ表示素子の製造方法である。A third invention is provided with one or more nozzles,
In addition, the present invention provides a method for manufacturing an organic EL display element according to the first and second inventions, in which a nozzle or a substrate is moved to form a continuous and uniform film on a large-area substrate.
【００１３】基板の大きさに合わせ、ノズルあるいは基
板の移動範囲を設定することで、如何なる大きさの基板
にも溶液を塗布することが可能となる。By setting the range of movement of the nozzle or the substrate in accordance with the size of the substrate, the solution can be applied to substrates of any size.
【００１４】第４の発明は、基板上に塗布された溶液の
乾燥速度を制御し、適切な有機層の形成速度を得ること
で、有機層の凝集を避け、均一な膜厚を得ることができ
る第１〜第３の発明の有機ＥＬ表示素子の製造方法であ
る。According to a fourth aspect of the present invention, a uniform film thickness can be obtained by controlling the drying speed of the solution applied on the substrate and obtaining an appropriate organic layer forming speed, thereby avoiding aggregation of the organic layer. A method for manufacturing an organic EL display element according to the first to third aspects of the invention.
【００１５】第５の発明に係る有機ＥＬ表示素子の製造
装置は、有機層を形成する材料を含む溶液を入れる容器
と、溶液を噴出するノズルと、溶液を噴出する駆動源と
を備え、ノズルに対向した位置に配置した基板に溶液を
塗布し、有機層を形成する有機ＥＬ表示素子の製造装置
である。An apparatus for manufacturing an organic EL display device according to a fifth aspect of the present invention includes a container for containing a solution containing a material for forming an organic layer, a nozzle for ejecting the solution, and a driving source for ejecting the solution. This is an apparatus for manufacturing an organic EL display element, in which a solution is applied to a substrate disposed at a position facing the substrate to form an organic layer.
【００１６】本製造装置を用いることで有機層を形成す
る部分に開口を持つマスク板を用いた場合や、凹凸を有
する基板を用いた場合でも、基板上に均一に有機層を形
成することができる。By using this manufacturing apparatus, even when a mask plate having an opening at a portion where an organic layer is to be formed or a substrate having irregularities is used, an organic layer can be uniformly formed on the substrate. it can.
【００１７】第６の発明は、有機層を形成する部分に開
口を持ったマスク板を用いた、第５の発明の有機ＥＬ表
示素子の製造装置である。有機層を形成したい部分にの
み成膜することが可能である。According to a sixth aspect of the present invention, there is provided an apparatus for manufacturing an organic EL display element according to the fifth aspect of the invention, wherein a mask plate having an opening at a portion where an organic layer is formed is used. It is possible to form a film only on a portion where an organic layer is to be formed.
【００１８】第７の発明は、第６の発明のマスク板を交
換する交換機構と、マスク板を収納するマスク板収納室
と、溶液を入れた容器とノズルの交換機構を備えた第６
の発明の有機ＥＬ表示素子の製造装置である。According to a seventh aspect of the present invention, there is provided a sixth aspect of the present invention, comprising: an exchange mechanism for exchanging a mask plate according to the sixth invention; a mask plate storage chamber for accommodating the mask plate;
It is an apparatus for manufacturing an organic EL display element according to the invention.
【００１９】マスク板と有機層材料の組み合わせを変え
ることで、基板上の限定した領域に異なる有機層を、そ
れぞれ重なることなく形成することが可能で、本装置を
用いることで、フルカラー表示素子の作製が可能とな
る。By changing the combination of the mask plate and the material of the organic layer, different organic layers can be formed in limited areas on the substrate without overlapping each other. Production becomes possible.
【００２０】第８の発明に係る有機ＥＬ表示素子の製造
装置は、有機層を形成する材料を含む溶液を噴出するノ
ズルを１個以上備え、且つノズルまたは基板を移動する
ことで、大面積基板上に均一な膜厚の有機層を連続で得
ることができる第５〜第７の発明の有機ＥＬ表示素子の
製造装置。An apparatus for manufacturing an organic EL display device according to an eighth aspect of the present invention includes at least one nozzle for ejecting a solution containing a material for forming an organic layer, and moves the nozzle or the substrate to form a large-area substrate. The apparatus for manufacturing an organic EL display element according to any one of the fifth to seventh aspects of the present invention, in which an organic layer having a uniform thickness can be continuously obtained.
【００２１】第９の発明は、基板を保持する基板保持台
に乾燥源を備えた第５〜第８の発明の有機ＥＬ表示素子
の製造装置である。The ninth invention is the apparatus for manufacturing an organic EL display device according to the fifth to eighth inventions, wherein the substrate holding table for holding the substrate is provided with a drying source.
【００２２】本装置を用いることで、基板温度を制御
し、塗布された溶液の乾燥速度を調整し、有機層材料の
凝集や膜厚の不均一を無くすことができる。また乾燥速
度を速くすることで、基板を搬送しながら塗布、乾燥の
工程を連続で行える、生産性の高い装置である。By using the present apparatus, the substrate temperature can be controlled, the drying speed of the applied solution can be adjusted, and the aggregation of the organic layer material and the unevenness of the film thickness can be eliminated. Further, by increasing the drying speed, the coating and drying steps can be continuously performed while the substrate is being conveyed.
【００２３】第１０の発明は、第５〜第９の発明の有機
ＥＬ表示素子の製造装置と、基板搬送部と、基板乾燥部
を備えた有機ＥＬ表示素子の製造装置である。According to a tenth aspect, there is provided an apparatus for manufacturing an organic EL display device according to the fifth to ninth aspects, and an apparatus for manufacturing an organic EL display device including a substrate transport section and a substrate drying section.
【００２４】有機層の塗布工程と別に乾燥工程を設ける
ことで、乾燥時間の長い溶液を用いた場合でも塗布工程
を遅らせることはない。By providing a drying step separately from the organic layer coating step, the coating step is not delayed even when a solution having a long drying time is used.
【００２５】第１１の発明は、第１０の発明の基板乾燥
部に基板を保管する基板棚を備え、塗布工程を終えた基
板を順次乾燥保管できる第１０の発明の有機ＥＬ表示素
子の製造装置である。According to an eleventh aspect of the present invention, there is provided an apparatus for manufacturing an organic EL display element according to the tenth aspect of the present invention, wherein a substrate shelf for storing substrates is provided in the substrate drying section of the tenth aspect, and the substrates after the application step can be sequentially dried and stored. It is.
【００２６】[0026]
【実施例】以下に本発明に係る有機ＥＬ表示素子の製造
方法および製造装置の実施例を図１から図６を用いて説
明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a method and an apparatus for manufacturing an organic EL display device according to the present invention will be described below with reference to FIGS.
【００２７】図１は第１の発明の実施例の説明図で、有
機層を形成する材料を含む溶液１には、正孔輸送性を示
すポリビニルカルバゾールを、シクロヘキサノン溶媒で
１ｗｔ％に希釈したものを用い、容器２に充填した。溶
液の噴出源には空気圧縮機４を用い、その空気圧力によ
り溶液をノズル３先端から霧状に噴出させる。ノズル３
と対向する位置の基板保持台５上に、５００ｍｍ×５０
０ｍｍ×厚さ０．７ｍｍのガラス基板６を置き、前記溶
液を塗布する。ガラス基板６には正孔注入電極７として
ＩＴＯ膜が配線パターンを形成して成膜してある。ノズ
ル３とガラス基板６との距離は３０ｍｍであり、ノズル
３から円錐状に噴出した溶液８は、基板上に直径２０ｍ
ｍの円に塗布される。ノズル３を基板面に対し前後、左
右に移動することで、５００ｍｍ×５００ｍｍの大型ガ
ラス基板上にも均一な有機層９を形成することができ
る。また正孔注入電極７の配線パターンによる凹凸があ
っても、スピンコート法やディップ法で生じる様な凸部
による溶液の流れの阻止がなく、ノズル３の移動による
塗布なので、凹部にも十分溶液が行き渡り、均一な膜厚
が形成できる。また下記図２で説明するが、正孔注入電
極７上の有機層を形成しない部分をマスク板やテープ等
でマスクした場合でも、基板上面から溶液を塗布するた
め有機層の形成が可能である。尚、上記ノズル３から噴
出する溶液８の形状は円錐状に限ったものでなく、塗布
する基板６の形状に合わせ、例えば細い円柱状に噴出さ
せ、基板の隅部や奥部、段差などにも十分塗布すること
ができる。またノズル３と基板６の距離も上記の距離に
限らず、大面積基板に塗布する場合は、距離を長くし、
溶液の噴出径を２０ｍｍ以上に設定することが可能であ
る。FIG. 1 is an explanatory view of an embodiment of the first invention. A solution 1 containing a material for forming an organic layer is prepared by diluting polyvinyl carbazole having a hole transporting property to 1 wt% with a cyclohexanone solvent. And filled in the container 2. An air compressor 4 is used as a solution ejection source, and the solution is ejected in the form of a mist from the tip of the nozzle 3 by the air pressure. Nozzle 3
500 mm × 50 on the substrate holder 5 at a position facing
A glass substrate 6 of 0 mm × 0.7 mm thickness is placed and the solution is applied. An ITO film is formed on the glass substrate 6 as a hole injection electrode 7 by forming a wiring pattern. The distance between the nozzle 3 and the glass substrate 6 is 30 mm, and the solution 8 ejected in a conical shape from the nozzle 3 has a diameter of 20 m on the substrate.
m. By moving the nozzle 3 back and forth, right and left with respect to the substrate surface, a uniform organic layer 9 can be formed even on a large glass substrate of 500 mm × 500 mm. In addition, even if there is unevenness due to the wiring pattern of the hole injection electrode 7, the flow of the solution is not blocked by the convex portion caused by the spin coating method or the dipping method, and the coating is performed by moving the nozzle 3. And a uniform film thickness can be formed. As will be described with reference to FIG. 2 below, even when a portion on the hole injection electrode 7 where the organic layer is not formed is masked with a mask plate or a tape, the organic layer can be formed because the solution is applied from the upper surface of the substrate. . Note that the shape of the solution 8 ejected from the nozzle 3 is not limited to a conical shape, but is ejected in a thin column shape, for example, in accordance with the shape of the substrate 6 to be applied, and is applied to a corner, a depth, a step or the like of the substrate. Can also be applied sufficiently. In addition, the distance between the nozzle 3 and the substrate 6 is not limited to the above-described distance.
The ejection diameter of the solution can be set to 20 mm or more.
【００２８】図２は第２の発明の実施例を示す。有機層
９を形成する部分に開口１１を持つマスク板１０を基板
６上に設置し、ノズル３で溶液を噴出塗布するものであ
る。それにより基板６上のマスク板１０の開口１１位置
にのみ有機層９を形成することができる。本実施例では
第７の発明のマスク板交換ロボット１２を備えており、
Ｘ、Ｙ、Ｚおよびθ軸の駆動によりマスク板を交換す
る。赤、緑、青色に発光する、それぞれの有機層９の形
成位置に開口１１を持つ３種類のマスク板１０は、マス
ク板収納室１３内に備えておく。マスク板１０の成膜位
置（開口１１位置）は、３種類が重ならない様にしてあ
る。発光色に合わせ、塗布する溶液も３種類用意した。
容器２とノズル３の交換機構は、３種類の容器２とノズ
ル３を連結し、選択されたノズル３からのみ溶液が噴出
する。第１のマスク板で赤色の発光を示す溶液を塗布
し、次いで、第２のマスク板で緑色、第３のマスク板で
青色と、順次ノズル３とマスク板１０を交換し塗布して
いく。成膜後、図３に示す様に、基板６上にはＲＧＢの
有機層１４が形成され、フルカラー表示素子１５が製造
できる。その他、マスク板１０の形状を種々変えること
で、任意の形状の有機層を形成できる。例えば、道路標
識の文字や絵の形状にマスク板１０の形状を作製し、有
機層９を形成すれば、その文字や絵のみが発光する表示
板が得られる。尚、マスク交換ロボット１２は上記のも
のに限らず、Ｘ軸のみの搬送装置でも良い。容器２とノ
ズル３の交換機構も上記のものに限らず、Ｘ、Ｙ、Ｚお
よびθ軸を持ったノズル交換ロボットや、回転式の切換
機構を用いても良い。またマスク板は上記の３種類に限
ったものではなく、発光色、発光形状により、幾つもの
マスク板を備え、交換し成膜できる。FIG. 2 shows an embodiment of the second invention. A mask plate 10 having an opening 11 at a portion where an organic layer 9 is to be formed is placed on a substrate 6 and a solution is sprayed out and applied by a nozzle 3. Thereby, the organic layer 9 can be formed only at the position of the opening 11 of the mask plate 10 on the substrate 6. In the present embodiment, a mask plate exchange robot 12 of the seventh invention is provided,
The mask plate is replaced by driving the X, Y, Z, and θ axes. Three types of mask plates 10 that emit red, green, and blue light and have openings 11 at the positions where the respective organic layers 9 are formed are provided in the mask plate storage chamber 13. The three film formation positions (positions of the openings 11) of the mask plate 10 are set so as not to overlap. Three types of coating solutions were prepared according to the emission color.
The exchange mechanism of the container 2 and the nozzle 3 connects the three types of the container 2 and the nozzle 3, and the solution is ejected only from the selected nozzle 3. A solution that emits red light is applied on the first mask plate, then green on the second mask plate, blue on the third mask plate, and the nozzle 3 and the mask plate 10 are sequentially exchanged and applied. After the film formation, as shown in FIG. 3, an RGB organic layer 14 is formed on the substrate 6, and a full-color display element 15 can be manufactured. In addition, by changing the shape of the mask plate 10 variously, an organic layer having an arbitrary shape can be formed. For example, if the shape of the mask plate 10 is formed in the shape of a character or picture of a road sign and the organic layer 9 is formed, a display panel that emits only the character or picture is obtained. Incidentally, the mask exchange robot 12 is not limited to the above-described one, and may be a transfer device having only the X-axis. The mechanism for exchanging the container 2 and the nozzle 3 is not limited to the above, and a nozzle exchange robot having X, Y, Z, and θ axes, or a rotary switching mechanism may be used. Further, the mask plate is not limited to the above three types, but may be provided with a number of mask plates depending on the emission color and emission shape, and the film may be exchanged and formed.
【００２９】図４は第３の発明の実施例の説明図で、有
機層を形成する材料を含む溶液１を噴出するノズル３を
２５個並べた。基板６は５００ｍｍ×５００ｍｍの大き
さで、基板保持台５の一方向のみの移動で塗布が完了す
る。この場合、ノズル３の数量は基板サイズにより増減
でき、基板サイズが更に大きい場合にはノズル３の数量
を増やすことで対応でき、基板サイズの大型化による生
産性の低下は少ない。また本実施例では基板保持台５を
移動する方法を示したが、ノズル３を移動しても良い。FIG. 4 is an explanatory view of the third embodiment of the present invention, in which 25 nozzles 3 for ejecting a solution 1 containing a material for forming an organic layer are arranged. The substrate 6 has a size of 500 mm × 500 mm, and the coating is completed by moving the substrate holder 5 in only one direction. In this case, the number of the nozzles 3 can be increased or decreased according to the substrate size. If the substrate size is further increased, the number of the nozzles 3 can be increased, and the decrease in productivity due to the increase in the substrate size is small. In this embodiment, the method of moving the substrate holder 5 has been described, but the nozzle 3 may be moved.
【００３０】図５は第４の発明の実施例を示した。基板
保持台５に乾燥源として、ヒーター１６を設置し、熱電
対１７の温度モニタリングにより温度調節器１８でヒー
タ電源１９の電力を制御し、基板保持台５の温度をコン
トロールする。基板６上に塗布された溶液中の溶媒は、
基板６の温度により蒸発し、乾燥する。本実施例では基
板６の温度を５０℃に加熱し、塗布後約２秒間で溶媒を
蒸発、乾燥させた。これにより乾燥速度の違いから生じ
る有機層材料の凝集が無くなり、膜厚の面内分布が±７
％以下の均一な膜を形成できた。FIG. 5 shows an embodiment of the fourth invention. A heater 16 is installed on the substrate holder 5 as a drying source, and the power of a heater power supply 19 is controlled by a temperature controller 18 by monitoring the temperature of a thermocouple 17 to control the temperature of the substrate holder 5. The solvent in the solution applied on the substrate 6 is
It evaporates according to the temperature of the substrate 6 and is dried. In this example, the temperature of the substrate 6 was heated to 50 ° C., and the solvent was evaporated and dried about 2 seconds after the application. As a result, aggregation of the organic layer material caused by the difference in drying speed is eliminated, and the in-plane distribution of the film thickness is ± 7.
% Or less of a uniform film could be formed.
【００３１】図６は第１０および第１１の発明の実施例
を示す。図１に示した、有機層を形成する材料をい含む
溶液１の塗布装置２０と、それに隣接する位置に乾燥器
２１を配置し、塗布後の基板６を基板搬送ロボット２２
により乾燥器２１に挿入する。基板搬送ロボット２２
は、Ｘ、Ｙ、Ｚおよびθ軸の駆動が可能である。乾燥器
２１内は基板６を１０枚保管できる基板棚２３を有し、
そこに塗布後の基板６を順次収納する。本装置は乾燥時
間の長い溶液を塗布する場合でも塗布工程を遅らせるこ
となく高い生産性を確保できる。乾燥器２１は大気中で
の加熱乾燥の他、真空環境下での揮発乾燥や、それらを
併せた真空加熱乾燥によるものでも良い。また上記乾燥
器２１は、図示した様な容器構造の必要はなく、温調器
を備えた簡単なホットプレートでも良い。基板搬送ロボ
ット２２も上記の駆動軸を持ったものに限ったことでは
なく、例えばＸ軸のみの基板搬送装置でも良い。FIG. 6 shows the tenth and eleventh embodiments of the invention. A coating apparatus 20 for the solution 1 containing a material for forming an organic layer shown in FIG. 1 and a dryer 21 disposed at a position adjacent to the coating apparatus 20 for transferring the coated substrate 6 to a substrate transport robot 22
Into the dryer 21 by the Substrate transfer robot 22
Can drive the X, Y, Z, and θ axes. The dryer 21 has a substrate shelf 23 that can store 10 substrates 6,
The substrates 6 after application are sequentially stored therein. This apparatus can ensure high productivity without delaying the coating process even when applying a solution having a long drying time. The dryer 21 may be a method of drying by heating in the air, a method of volatilizing drying in a vacuum environment, or a method of drying by heating under vacuum. The dryer 21 does not need to have a container structure as shown in the figure, but may be a simple hot plate provided with a temperature controller. The substrate transfer robot 22 is not limited to one having the above-described drive shaft, and may be, for example, a substrate transfer device having only the X axis.
【００３２】[0032]
【発明の効果】上述したように本発明によれば、有機Ｅ
Ｌ表示素子の製造方法で、特に高分子材料を用いた有機
ＥＬ表示素子の製造方法において、有機層を形成する材
料を含む溶液をノズル先端から霧状に基板上に噴出する
ことで、基板上に有機層の形成位置を限定したマスク板
を用いた場合、あるいは正孔注入電極の凹凸のある場合
でも塗布が可能になり、また１個以上のノズルとノズル
あるいは基板を移動することで大型基板上への塗布を可
能にし、更に乾燥器や基板保持台内に乾燥源を備えるこ
とで、有機層の凝集が無くなり、均一な膜厚の有機層が
得られ、高い生産性と低い生産コストで、高品位な有機
ＥＬ表示素子、あるいは高分子材料によるフルカラー表
示素子を製造することができる。As described above, according to the present invention, the organic E
In a method of manufacturing an L display element, particularly in a method of manufacturing an organic EL display element using a polymer material, a solution containing a material for forming an organic layer is ejected onto the substrate in a mist form from the nozzle tip, so that the The coating can be performed even when a mask plate in which the formation position of the organic layer is limited is used, or when the hole injection electrode has irregularities, and by moving one or more nozzles and the nozzles or the substrate, a large substrate can be formed. Coating of the organic layer is possible by eliminating the cohesion of the organic layer and providing a uniform thickness of the organic layer by providing a drying source in the dryer and the substrate holding table, with high productivity and low production cost. A high-quality organic EL display element or a full-color display element made of a polymer material can be manufactured.
【図１】本発明の実施例を示す有機ＥＬ表示素子の製造
方法を説明する図である。FIG. 1 is a diagram illustrating a method for manufacturing an organic EL display device according to an embodiment of the present invention.
【図２】本発明の実施例を示す有機ＥＬ表示素子の製造
方法を説明する図である。FIG. 2 is a diagram illustrating a method for manufacturing an organic EL display device according to an embodiment of the present invention.
【図３】本発明の製造方法で製造した有機ＥＬフルカラ
ー表示素子の構成例を示す図である。FIG. 3 is a diagram showing a configuration example of an organic EL full-color display element manufactured by the manufacturing method of the present invention.
【図４】本発明の実施例を示す有機ＥＬ表示素子の製造
方法を説明する図である。FIG. 4 is a diagram illustrating a method for manufacturing an organic EL display device according to an embodiment of the present invention.
【図５】本発明の実施例を示す有機ＥＬ表示素子の製造
方法を説明する図である。FIG. 5 is a diagram illustrating a method for manufacturing an organic EL display device according to an embodiment of the present invention.
【図６】本発明の実施例を示す有機ＥＬ表示素子の製造
方法を説明する図である。FIG. 6 is a diagram illustrating a method for manufacturing an organic EL display device according to an embodiment of the present invention.
１ 有機層を形成する材料を含む溶液 ２ 容器 ３ ノズル ４ 空気圧縮機 ５ 基板保持台 ６ 基板 ７ 正孔注入電極 ８ 噴出した溶液 ９ 有機層 １０ マスク板 １１ 開口 １２ マスク板交換ロボット １３ マスク板収納室 １４ ＲＧＢの有機層 １５ フルカラー表示素子 １６ ヒータ １７ 熱電対 １８ 温度調節器 １９ ヒータ電源 ２０ 塗布装置 ２１ 乾燥器 ２２ 基板搬送ロボット ２３ 基板棚 DESCRIPTION OF SYMBOLS 1 Solution containing the material which forms an organic layer 2 Container 3 Nozzle 4 Air compressor 5 Substrate holder 6 Substrate 7 Hole injection electrode 8 Ejected solution 9 Organic layer 10 Mask plate 11 Opening 12 Mask plate exchange robot 13 Mask plate storage Room 14 RGB organic layer 15 Full-color display element 16 Heater 17 Thermocouple 18 Temperature controller 19 Heater power supply 20 Coating device 21 Dryer 22 Substrate transfer robot 23 Substrate shelf
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ０５Ｄ 7/00 Ｂ０５Ｄ 7/00 Ｅ Ｇ０９Ｆ 9/00 ３６５ Ｇ０９Ｆ 9/00 ３６５Ｚ Ｈ０５Ｂ 33/14 Ｈ０５Ｂ 33/14 Ａ Ｆターム(参考） 3K007 AB04 AB18 BA06 CA01 CB01 DA01 DB03 EB00 FA01 4D073 AA01 BB03 CA20 CB19 DB03 4D075 AA02 AA36 AA39 AA65 AA85 AD08 BB23Y BB24Y CB08 DA06 DB13 DC24 5G435 AA17 BB05 CC09 CC12 KK05 KK10 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification code FI Theme coat ゛ (Reference) B05D 7/00 B05D 7/00 E G09F 9/00 365 G09F 9/00 365Z H05B 33/14 H05B 33/14 A F term (reference) 3K007 AB04 AB18 BA06 CA01 CB01 DA01 DB03 EB00 FA01 4D073 AA01 BB03 CA20 CB19 DB03 4D075 AA02 AA36 AA39 AA65 AA85 AD08 BB23Y BB24Y CB08 DA06 DB13 DC24 5G435 AA17 KK05 CC09
Claims (11)
層を含む有機層と電子注入電極を積層し、前記有機層が
高分子材料で形成された有機ＥＬ表示素子の製造方法に
おいて、前記有機層を形成する材料を含む溶液を、ノズ
ルから霧状に噴出し、ノズルと対向する位置に配置した
基板に塗布し、有機層を形成することを特徴とした、有
機ＥＬ表示素子の製造方法。1. A method for manufacturing an organic EL display device comprising a substrate and an organic layer including at least a hole injection electrode, a light emitting layer, and an electron injection electrode, wherein the organic layer is formed of a polymer material. A method for manufacturing an organic EL display element, comprising: spraying a solution containing a material for forming a layer in a mist form from a nozzle, applying the solution to a substrate disposed at a position facing the nozzle, and forming an organic layer.
つ、少なくとも１種類以上のマスク板を基板上に配置
し、有機層を形成する材料を含む溶液を塗布すること
で、基板上のマスク板の開口部分のみに有機層を形成す
る請求項１の有機ＥＬ表示素子の製造方法。2. A mask on a substrate, wherein at least one type of mask plate having an opening at a portion where the organic layer is to be formed is disposed on the substrate, and a solution containing a material for forming the organic layer is applied. 2. The method according to claim 1, wherein the organic layer is formed only in the opening of the plate.
いは基板の移動により大面積基板に連続で塗布できる請
求項１の有機ＥＬ表示素子の製造方法。3. The method for manufacturing an organic EL display element according to claim 1, wherein said method has one or more nozzles and can continuously apply a large area substrate by moving the nozzles or the substrate.
はその近傍に乾燥源を備え、基板上に塗布された、有機
層を形成する材料を含む溶液の乾燥速度を制御し、有機
層の形成速度を調整する請求項１および２の有機ＥＬ表
示素子の製造方法。4. A method for forming an organic layer, comprising: providing a drying source in or near a substrate holding table for holding the substrate; controlling a drying speed of a solution containing a material for forming an organic layer, applied on the substrate; 3. The method for manufacturing an organic EL display device according to claim 1, wherein the speed is adjusted.
層を含む有機層と電子注入電極を積層し、前記有機層が
高分子材料で形成された有機ＥＬ表示素子の製造装置に
おいて、前記有機層を形成する材料を含む溶液を入れる
容器と、溶液を噴出するノズルと、溶液を噴出する駆動
源とを備え、ノズルと対向する位置に配置した基板に、
溶液を塗布し有機層を形成することを特徴とした有機Ｅ
Ｌ表示素子の製造装置。5. An organic EL display device manufacturing apparatus in which at least a hole injection electrode, an organic layer including a light emitting layer, and an electron injection electrode are laminated on a substrate, and wherein the organic layer is formed of a polymer material. A container containing a solution containing a material for forming a layer, a nozzle for ejecting the solution, and a driving source for ejecting the solution, including a driving source for ejecting the solution, and a substrate disposed at a position facing the nozzle,
Organic E characterized by applying a solution to form an organic layer
An apparatus for manufacturing an L display element.
て、基板上の有機層形成領域に開口を有する、少なくと
も１種類以上のマスク板を備え、基板上にマスク板の開
口と同形状の有機層を形成することを特徴とする請求項
５の有機ＥＬ表示素子の製造装置。6. An apparatus for manufacturing an organic EL display device, comprising: at least one or more types of mask plates having an opening in an organic layer forming region on a substrate, wherein an organic layer having the same shape as the opening of the mask plate is formed on the substrate. 6. An apparatus for manufacturing an organic EL display element according to claim 5, wherein:
収納するマスク板収納室と、溶液を入れる容器およびノ
ズルの交換機構とを備えたことを特徴とする請求項６の
有機ＥＬ表示素子の製造装置。7. The organic EL display device according to claim 6, further comprising a mechanism for exchanging the mask plate, a mask plate storage chamber for accommodating the mask plate, and a mechanism for exchanging a container and a nozzle for storing a solution. Manufacturing equipment.
いは基板に移動機構を備え、大面積基板上に有機層を連
続で形成する請求項５〜７の有機ＥＬ表示素子の製造装
置。8. The apparatus for manufacturing an organic EL display element according to claim 5, wherein the apparatus has one or more nozzles, has a moving mechanism for the nozzles or the substrate, and continuously forms an organic layer on a large-area substrate.
を備えたことを特徴とする請求項５〜８の有機ＥＬ表示
素子の製造装置。9. An apparatus for manufacturing an organic EL display device according to claim 5, wherein a drying source is provided on a substrate holding table for holding said substrate.
装置と基板搬送部と基板乾燥部とを備え、有機層を形成
する材料を含む溶液を塗布した基板を、基板搬送部の搬
送機構により隣接する乾燥部に搬送し、基板の乾燥工程
を行うことを特徴とする有機ＥＬ表示素子の製造装置。10. An organic EL display device manufacturing apparatus according to claim 5, further comprising a substrate transport section and a substrate drying section, wherein the substrate coated with a solution containing a material for forming an organic layer is transported by the substrate transport section. An apparatus for manufacturing an organic EL display element, wherein the apparatus is transported to an adjacent drying section by a mechanism to perform a substrate drying step.
え、溶液を塗布した基板を順次乾燥保管することを特徴
とする請求項１０の有機ＥＬ表示素子の製造装置。11. An apparatus for manufacturing an organic EL display element according to claim 10, wherein a substrate shelf for storing the substrate is provided in said drying section, and the substrates coated with the solution are sequentially dried and stored.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000110144A JP2001297876A (en) | 2000-04-12 | 2000-04-12 | Manufacturing method and apparatus of organic el display element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000110144A JP2001297876A (en) | 2000-04-12 | 2000-04-12 | Manufacturing method and apparatus of organic el display element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001297876A true JP2001297876A (en) | 2001-10-26 |
Family
ID=18622712
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