JP2001271868A5 - - Google Patents
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- Publication number
- JP2001271868A5 JP2001271868A5 JP2000084188A JP2000084188A JP2001271868A5 JP 2001271868 A5 JP2001271868 A5 JP 2001271868A5 JP 2000084188 A JP2000084188 A JP 2000084188A JP 2000084188 A JP2000084188 A JP 2000084188A JP 2001271868 A5 JP2001271868 A5 JP 2001271868A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000084188A JP2001271868A (ja) | 2000-03-24 | 2000-03-24 | 除振装置 |
| US09/797,884 US6518721B2 (en) | 2000-03-24 | 2001-03-05 | Oscillation isolator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000084188A JP2001271868A (ja) | 2000-03-24 | 2000-03-24 | 除振装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001271868A JP2001271868A (ja) | 2001-10-05 |
| JP2001271868A5 true JP2001271868A5 (ja) | 2007-05-17 |
Family
ID=18600697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000084188A Withdrawn JP2001271868A (ja) | 2000-03-24 | 2000-03-24 | 除振装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6518721B2 (ja) |
| JP (1) | JP2001271868A (ja) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6408526B1 (en) * | 1999-04-12 | 2002-06-25 | The Regents Of The University Of California | Ultra-precision positioning assembly |
| GB0202348D0 (en) * | 2002-02-01 | 2002-03-20 | Bae Systems Plc | Damping of vibrations |
| JP3936621B2 (ja) * | 2002-04-30 | 2007-06-27 | 隆夫 ▲高▼松 | 遊隙充填引張型制震構造 |
| JP3809497B2 (ja) * | 2003-03-31 | 2006-08-16 | 財団法人 日本宇宙フォーラム | 宇宙機搭載ペイロードの振動・姿勢制御装置 |
| DE10344538A1 (de) * | 2003-09-25 | 2005-05-12 | Integrated Dynamics Eng Gmbh | Verfahren und Vorrichtung zur Schwingungsisolation, insbesondere für Elektronenstrahl-Meßwerkzeuge |
| WO2005038895A1 (ja) * | 2003-10-21 | 2005-04-28 | Dainippon Ink And Chemicals, Inc. | 液供給方法および装置 |
| US20060054432A1 (en) * | 2004-09-16 | 2006-03-16 | Yu-Yen Chiu | Anti-shock system |
| JP4071227B2 (ja) * | 2004-09-28 | 2008-04-02 | 株式会社新川 | ボンディング装置 |
| WO2008019296A2 (en) * | 2006-08-04 | 2008-02-14 | Ikonisys, Inc. | Z-motion microscope slide mount |
| EP1921502B1 (de) * | 2006-11-08 | 2011-02-02 | Integrated Dynamics Engineering GmbH | Kombiniertes Motion-Control-System |
| EP2075484A1 (en) * | 2007-12-31 | 2009-07-01 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | An active vibration isolation system having an inertial reference mass |
| JP5064316B2 (ja) * | 2008-07-01 | 2012-10-31 | 特許機器株式会社 | 除振装置 |
| DE102009009562A1 (de) * | 2009-02-19 | 2010-09-09 | Integrated Dynamics Engineering Gmbh | Kombinierter Bewegungssensor zum Einsatz in Feedback-Regelsystemen zur Schwingungsisolation |
| EP2261530A1 (en) * | 2009-06-12 | 2010-12-15 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active vibration isolation and damping system |
| JP6213763B2 (ja) * | 2013-04-30 | 2017-10-18 | 清水建設株式会社 | 免震装置、免震構造物、免震構造物における免震性能の調整方法 |
| KR101759178B1 (ko) | 2016-05-27 | 2017-07-20 | 한국생산기술연구원 | 반력보상모듈을 갖는 생산 장비 및 이를 이용한 진동 제어방법 |
| WO2019009440A1 (ko) * | 2017-07-04 | 2019-01-10 | 한국생산기술연구원 | 반력보상모듈을 갖는 생산 장비 및 이를 이용한 진동 제어방법 |
| CN109537521B (zh) * | 2018-11-25 | 2023-11-24 | 中国船舶重工集团公司第七一九研究所 | 一种可实现大范围位移补偿的可拆式过道 |
| EP3964893A1 (de) * | 2020-06-29 | 2022-03-09 | Carl Zeiss SMT GmbH | Kompensation von kriecheffekten in einer abbildungseinrichtung |
| CN112053740B (zh) * | 2020-09-12 | 2021-09-14 | 河南大学 | 一种多用途自动水平调节装置及调平方法 |
| CN114542291A (zh) * | 2022-02-22 | 2022-05-27 | 中国联合重型燃气轮机技术有限公司 | 一种气缸的支撑装置、支撑***及支撑***的控制方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4509002A (en) * | 1983-12-20 | 1985-04-02 | International Business Machines Corporation | Precision X-Y positioner |
| US4643385A (en) * | 1984-11-15 | 1987-02-17 | Rca Corporation | Anti-vibration system |
| IL77057A (en) * | 1985-03-26 | 1990-03-19 | Wright Barry Corp | Active vibration isolation system |
| US5012174A (en) * | 1988-06-20 | 1991-04-30 | Sperry Marine Inc. | Method and apparatus for countering vibrations of a platform |
| US5442960A (en) * | 1993-07-28 | 1995-08-22 | Southwest Research Institute | Measurement of mass using angular simple harmonic motion |
| JP3372635B2 (ja) * | 1994-03-14 | 2003-02-04 | キヤノン株式会社 | 制御装置 |
| JPH09236150A (ja) * | 1996-02-29 | 1997-09-09 | Nikon Corp | 防振装置 |
| JPH09236149A (ja) * | 1996-02-29 | 1997-09-09 | Nikon Corp | 防振装置の制御方法及び該方法を使用する防振装置 |
| JPH1089403A (ja) * | 1996-09-10 | 1998-04-07 | Nikon Corp | 防振装置 |
| US6128552A (en) | 1996-11-08 | 2000-10-03 | Canon Kabushiki Kaisha | Anti-vibration apparatus and method |
| JP3825869B2 (ja) | 1997-03-19 | 2006-09-27 | キヤノン株式会社 | 能動除振装置 |
| US6107770A (en) * | 1998-01-27 | 2000-08-22 | Lockheed Martin Corporation | Control system for counter-oscillating masses |
| JP3661424B2 (ja) * | 1998-07-28 | 2005-06-15 | 松下電工株式会社 | リニア振動モータの駆動制御方法 |
| JP2000136844A (ja) | 1998-10-30 | 2000-05-16 | Canon Inc | 変位発生形アクチュエータ能動振動絶縁装置 |
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2000
- 2000-03-24 JP JP2000084188A patent/JP2001271868A/ja not_active Withdrawn
-
2001
- 2001-03-05 US US09/797,884 patent/US6518721B2/en not_active Expired - Fee Related