JP2001194540A - Optical path switching device and its manufacturing method - Google Patents

Optical path switching device and its manufacturing method

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Publication number
JP2001194540A
JP2001194540A JP2000002791A JP2000002791A JP2001194540A JP 2001194540 A JP2001194540 A JP 2001194540A JP 2000002791 A JP2000002791 A JP 2000002791A JP 2000002791 A JP2000002791 A JP 2000002791A JP 2001194540 A JP2001194540 A JP 2001194540A
Authority
JP
Japan
Prior art keywords
channel
optical waveguide
channel optical
optical path
path conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000002791A
Other languages
Japanese (ja)
Other versions
JP3833863B2 (en
Inventor
Yuko Tani
祐子 谷
Shinji Koike
真司 小池
Yoshimitsu Arai
芳光 新井
Yasuhiro Ando
泰博 安東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
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Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2000002791A priority Critical patent/JP3833863B2/en
Publication of JP2001194540A publication Critical patent/JP2001194540A/en
Application granted granted Critical
Publication of JP3833863B2 publication Critical patent/JP3833863B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain a multi-channel optical path switching device which is easily insertable to an arbitrary position in an optical wiring inside an equipment and which is small-sized and capable of optical path switching of high density, and also to obtain a multi-channel beam splitter. SOLUTION: This is an optical path or a multi-channel optical path switching device consisting of bend optical waveguides which have an entering end, an exiting end and a reflection area of light in the core of a three-dimensional optical waveguide and which deflects the propagating direction of light at a prescribed angle by utilizing reflection of the reflection area. The multi-channel optical path switching device is constituted of the plural bend optical waveguides having a roughly equal bend angle, with the entering end, the exiting end and the reflection area of light each laminated parallelly at prescribed spaces apart on an independent plane; and the cores of these waveguides, except the entering end, the exiting end and the reflection area of light, are covered with a material whose refractive index is lower than that of the core. This optical path switching device is employed in the multi-channel beam splitter.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、光を利用して信号
を伝送する交換装置、通信装置、及び情報処理装置等に
用いられる光配線を高密度に配線するための、多チャネ
ルの光路変換部品及びその作製方法に適用して有効な技
術に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-channel optical path conversion for high-density wiring of optical wiring used for switching equipment, communication equipment, information processing equipment and the like for transmitting signals using light. The present invention relates to a technique which is effective when applied to a component and a method for manufacturing the component.

【０００２】[0002]

【従来の技術】近年の情報通信装置の発展に伴い、これ
らの装置内部における信号配線の容量不足が問題となり
つつあり、これを解消するために装置内部への光配線の
導入が検討され始めている。装置内部においては、装置
間を接続する場合と異なり、高密度の光配線を限られた
スペースに収容する必要があるため、例えば狭い間隔で
並んだ光デバイス間の接続や、面型光素子と光配線との
光結合、あるいは光配線のコーナリングを行うにあた
り、光配線を急峻に曲げて光路を変換することが重要と
なる。光路変換に関する従来技術では、前記の用途に適
合する代表的な例として以下の方法などが報告されてい
る。2. Description of the Related Art With the recent development of information communication devices, the shortage of signal wiring capacity inside these devices has become a problem, and the introduction of optical wiring into devices has been studied to solve this problem. . Inside the device, unlike the case of connecting between devices, it is necessary to accommodate high-density optical wiring in a limited space, for example, connection between optical devices arranged at narrow intervals, and In performing optical coupling with an optical wiring or cornering of the optical wiring, it is important to sharply bend the optical wiring to convert the optical path. In the prior art relating to optical path conversion, the following methods are reported as typical examples suitable for the above-mentioned applications.

【０００３】（１）柔軟性に富む高分子系の光ファイバ
を所定の間隔で複数並列させ、前記光ファイバの端面を
面型光素子と対向させて光結合を行い、その先を半円柱
状の部材に沿わせて９０°に曲げる方法（A. Neyer et
al, “Plastic-Optical-Fiber-Based Parallel Optical
Interconnects”, IEEE Journal of Selected Topics
in Quantum Electronics, vol.5, No.2 pp.193-200, 19
99、参照）。図１３は、前記（１）の方法を説明するた
めの図であり、３０はプラスチック光ファイバ、３１は
面型光素子、３２は実装基板、３３は半円柱状部材であ
る。(1) A plurality of flexible polymer optical fibers are arranged in parallel at a predetermined interval, and an optical coupling is performed with an end face of the optical fiber facing a surface type optical element, and a tip of the optical fiber is formed in a semi-cylindrical shape. 90 ° bend along the member (A. Neyer et.
al, “Plastic-Optical-Fiber-Based Parallel Optical
Interconnects ”, IEEE Journal of Selected Topics
in Quantum Electronics, vol.5, No.2 pp.193-200, 19
99, see). FIG. 13 is a view for explaining the method (1), wherein 30 is a plastic optical fiber, 31 is a surface-type optical element, 32 is a mounting board, and 33 is a semi-cylindrical member.

【０００４】（２）特開平１０−３００９６１号公報に
代表されるように、多チャネル光導波路の一端に所定の
傾斜角度を有する傾斜端面を形成して反射面とし、光路
を概ね９０°変換させて、例えば面型光素子等と光結合
を行う方法。図１４は、前記（２）の方法を説明するた
めの図であり、３４はコア層、３５はクラッド層、３６
は傾斜端面、３７は面発光レーザ、３８はレーザ光であ
る。(2) As typified by Japanese Patent Application Laid-Open No. 10-30961, an inclined end face having a predetermined inclined angle is formed at one end of a multi-channel optical waveguide to serve as a reflective surface, and the optical path is converted by approximately 90 °. A method of optically coupling with, for example, a planar optical element. FIG. 14 is a view for explaining the method (2), wherein 34 is a core layer, 35 is a cladding layer, and 36 is a cladding layer.
Is an inclined end surface, 37 is a surface emitting laser, and 38 is a laser beam.

【０００５】[0005]

【発明が解決しようとする課題】しかしながら、前記
（１）の方法では、図１３に示すように、高密度に並列
した光配線を方向転換させる簡便な方法ではあるが、曲
げ半径を一定値以上に小さくすると曲げ損失が急増す
る、曲げ半径を固定する半円柱状部材３３の占める体積
が余分に必要となる、前記部材を用いないと多チャネル
光ファイバの曲げ半径が一定にならず損失等のばらつき
が生じる恐れがある、という問題があった。However, the method (1) described above is a simple method of changing the direction of optical wirings arranged in high density as shown in FIG. 13, but the bending radius is not less than a certain value. If the bending radius is reduced to a large value, the bending loss increases sharply, an extra volume occupied by the semi-cylindrical member 33 for fixing the bending radius is required, and the bending radius of the multi-channel optical fiber becomes inconsistent without using the member, and the There is a problem that variation may occur.

【０００６】また、前記（２）の方法は、図１４に示す
ように、小型かつ高密度の光路変換を実現する優れた方
法であるが、反射面（傾斜端面）３６から出射あるいは
反射面に入射する光はコア層３４に閉じ込められず空間
を伝播するため、反射した光や入射する光のビーム径の
広がりが問題となる場合があり、また、光配線の途中に
挿入することが難しいため、光配線のコーナリングなど
の用途には適さない。The above method (2) is an excellent method for realizing a small and high-density optical path conversion as shown in FIG. The incident light propagates through the space without being confined in the core layer 34, so that the beam diameter of the reflected light or the incident light may be problematic, and it is difficult to insert the light in the middle of the optical wiring. It is not suitable for applications such as cornering of optical wiring.

【０００７】前記課題を解決するためには、光を閉じ込
めたまま光路変換を行い、かつ光路変換を行うのに必要
なスペースを最小限にすることが望ましい。図１５に示
すような、反射を利用して光の伝搬方向を偏向する曲が
り光導波路（以下これを曲がり光導波路と称す）は、前
記の条件を満たす有力な候補の一つである。しかしなが
ら、コア層２を伝搬する光を反射させるには、一般に反
射面５を空気層に露出させてコア層２と空気との屈折率
差を利用するため、コア層２をクラッド層４０で埋め込
むことが難しく、多チャネル化を行うのが困難であっ
た。In order to solve the above problems, it is desirable to perform optical path conversion while keeping light confined, and to minimize the space required for performing optical path conversion. A bent optical waveguide that deflects the propagation direction of light by using reflection as shown in FIG. 15 (hereinafter referred to as a bent optical waveguide) is one of the promising candidates satisfying the above-mentioned conditions. However, in order to reflect light propagating through the core layer 2, the reflecting surface 5 is generally exposed to the air layer and the refractive index difference between the core layer 2 and air is used. And it is difficult to increase the number of channels.

【０００８】前記図１５において、２は曲がり光導波路
のコア層、４は入射端、５は反射面、６は出射端、３９
は基板、４０はクラッド層である。In FIG. 15, 2 is a core layer of a bent optical waveguide, 4 is an incident end, 5 is a reflecting surface, 6 is an emitting end, 39
Is a substrate, and 40 is a cladding layer.

【０００９】本発明の目的は、装置内光配線において、
光配線の任意の位置に容易に挿入でき、かつ小型で高密
度な光路変換が可能な多チャネル光路変換部品を提供す
ることにある。An object of the present invention is to provide an optical wiring in a device,
An object of the present invention is to provide a multi-channel optical path conversion component that can be easily inserted into an arbitrary position of an optical wiring, and that can perform a small-sized and high-density optical path conversion.

【００１０】本発明の他の目的は、装置内光配線におい
て、光配線の任意の位置に容易に挿入でき、かつ小型で
高密度な光路変換が可能な多チャネルビームスプリッタ
を提供することにある。Another object of the present invention is to provide a multi-channel beam splitter that can be easily inserted into an arbitrary position of an optical wiring in an optical wiring in a device, and that can perform a small and high-density optical path conversion. .

【００１１】本発明の他の目的は、光配線の任意の位置
に容易に挿入でき、かつ小型で高密度な光路変換が可能
な多チャネル光路変換部品及び多チャネルビームスプリ
ッタを容易に製作することが可能な技術を提供すること
にある。Another object of the present invention is to easily manufacture a multi-channel optical path conversion component and a multi-channel beam splitter which can be easily inserted into an arbitrary position of an optical wiring, and are capable of converting a small and high-density optical path. Is to provide a possible technology.

【００１２】本発明の前記ならびにその他の目的と新規
な特徴は、本明細書の記述及び添付図面によって明らか
にする。The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

【００１３】[0013]

【課題を解決するための手段】本願において開示される
発明のうち、代表的なものの概要を簡単に説明すれば、
以下のとおりである。SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

【００１４】（１）少なくとも片端に傾斜端面を有し、
かつ前記傾斜端面の傾斜角及び傾斜端面における光導波
路コアのサイズ、配置等が概ね等しい一対の光導波路
の、前記傾斜端面同士を対向させ、この傾斜端面におけ
る光導波路のコアが概ね一致するように前記傾斜端面同
士を接続し、前記一対の光導波路が概ねＶ字型に固定さ
れ、前記Ｖ字型の光導波路の頂部を除去してコアを所定
の位置まで露出させて反射面が設けられている光路変換
部品である。(1) At least one end has an inclined end face,
A pair of optical waveguides in which the inclination angle of the inclined end face and the size, arrangement, and the like of the optical waveguide cores in the inclined end face are substantially equal, the inclined end faces are opposed to each other, and the cores of the optical waveguides in the inclined end face are substantially matched. The inclined end faces are connected to each other, the pair of optical waveguides is fixed in a substantially V-shape, a top surface of the V-shaped optical waveguide is removed to expose a core to a predetermined position, and a reflection surface is provided. Optical path conversion components.

【００１５】（２）３次元光導波路のコアに、光の入射
端、出射端及び反射面を有し、前記反射面における反射
を利用して所定の角度に光の伝搬方向を偏向する曲がり
光導波路からなる多チャネル光路変換部品であって、前
記多チャネル光部品が、曲がり角の概ね等しい複数の前
記曲がり光導波路により構成され、前記複数の曲がり光
導波路は、その光の入射端、出射端及び反射面がそれぞ
れ独立の平面上に所定の間隔で並列に積層されており、
かつ前記複数の曲がり光導波路のコアは、光の入射端、
出射端及び反射面を除いて、コアより屈折率の低い物質
で覆っている多チャネル光路変換部品である。(2) A curved light guide having a light entrance end, a light exit end, and a reflection surface in a core of a three-dimensional optical waveguide, and deflecting a light propagation direction to a predetermined angle using reflection on the reflection surface. A multi-channel optical path conversion component comprising a waveguide, wherein the multi-channel optical component is configured by a plurality of the bent optical waveguides having substantially equal bending angles, and the plurality of the bent optical waveguides are an incident end, an output end, and a light incident end of the light. The reflecting surfaces are stacked in parallel at predetermined intervals on independent planes,
And the core of the plurality of bent optical waveguides is a light incident end,
Except for the emission end and the reflection surface, the multi-channel optical path conversion component is covered with a material having a lower refractive index than the core.

【００１６】（３）前記手段（２）の多チャネル光路変
換部品において、少なくとも片端に傾斜端面を有し、か
つ前記傾斜端面の傾斜角及び傾斜端面における複数の光
導波路コアのサイズ、配置等が概ね等しい一対の多チャ
ネル光導波路の、前記傾斜端面同士を対向させ、この傾
斜端面における光導波路のコアが概ね一致するように前
記傾斜端面同士を接続し、前記一対の多チャネル光導波
路を概ねＶ字型に固定し、前記Ｖ字型の多チャネル光導
波路の頂部を除去してコアを所定の位置まで露出させて
反射面を設けている。(3) In the multi-channel optical path conversion component of the means (2), at least one end has an inclined end surface, and the inclination angle of the inclined end surface and the size and arrangement of the plurality of optical waveguide cores on the inclined end surface are determined. The inclined end faces of a pair of substantially equal multi-channel optical waveguides are opposed to each other, and the inclined end faces are connected so that the cores of the optical waveguides at the inclined end faces are substantially coincident with each other. The V-shaped multi-channel optical waveguide is fixed, and the core is exposed to a predetermined position to provide a reflection surface.

【００１７】（４）前記手段（３）の多チャネル光路変
換部品において、一対の多チャネル光導波路の傾斜端面
におけるコアが概ね一致するように前記傾斜端面同士を
接続し、前記多チャネル光導波路のコアと屈折率が概ね
等しい液状の光学接着剤で接続部の間隙を充填して接着
し、前記光学接着剤あるいは他の接着剤で残部が埋めら
れている。(4) In the multi-channel optical path conversion component of the means (3), the inclined end faces are connected to each other such that the cores at the inclined end faces of the pair of multi-channel optical waveguides substantially coincide with each other. The gap between the connecting portions is filled and adhered with a liquid optical adhesive having a refractive index substantially equal to that of the core, and the remaining portion is filled with the optical adhesive or another adhesive.

【００１８】（５）前記手段（３）又は（４）の多チャ
ネル光路変換部品において、一対の多チャネル光導波路
の傾斜端面におけるコアが概ね一致するように前記傾斜
端面同士を接続し、前記多チャネル光導波路のコアと屈
折率が概ね等しい液状の光学接着剤で接続部の間隙を充
填し、液晶ポリマー等の有機高分子材料又はガラス等の
無機材料からなる、概ねＶ字型の断面形状を有する部材
を前記一対の多チャネル光導波路間に挿入し、接着剤等
を用いて多チャネル光導波路に固定した。(5) In the multi-channel optical path conversion component according to the means (3) or (4), the inclined end faces are connected to each other so that the cores at the inclined end faces of the pair of multi-channel optical waveguides substantially coincide with each other. Filling the gap of the connection portion with a liquid optical adhesive having a refractive index substantially equal to that of the core of the channel optical waveguide, and forming a substantially V-shaped cross-sectional shape made of an organic polymer material such as a liquid crystal polymer or an inorganic material such as glass. The member was inserted between the pair of multi-channel optical waveguides and fixed to the multi-channel optical waveguide using an adhesive or the like.

【００１９】（６）前記手段（２）乃至（５）のうちい
ずれか１つの多チャネル光路変換部品において、前記多
チャネル光路変換部品の反射面に、金属あるいは誘電体
多層膜をコーティングしたものである。(6) The multi-channel optical path conversion component according to any one of the means (2) to (5), wherein a reflecting surface of the multi-channel optical path conversion component is coated with a metal or dielectric multilayer film. is there.

【００２０】（７）前記手段（６）の多チャネル光路変
換部品において、前記多チャネル光路変換部品と概ね等
しい大きさのＶ字型の間隙を構成し、前記多チャネル光
路変換部品を、前記傾斜端面のコアが一致するように位
置合わせした一対の多チャネル光導波路間に挿入し、前
記多チャネル光導波路のコアと屈折率が概ね等しい液状
の光学接着剤で全ての間隙を充填して固定し、接続した
前記多チャネル光導波路の頂部を除去して前記多チャネ
ル光導波路のコアを所定の位置まで露出させて反射面を
構成し、この反射面に金属あるいは誘電体多層膜をコー
ティングし、反射を利用して光の伝搬方向を偏向する多
チャネルの曲がり光導波路の、光の入出射端をそれぞれ
２次元的に並列させたものである。(7) In the multi-channel optical path conversion component of the means (6), a V-shaped gap having a size substantially equal to that of the multi-channel optical path conversion component is formed, and the multi-channel optical path conversion component is provided with the inclined It is inserted between a pair of multi-channel optical waveguides aligned so that the cores of the end faces are aligned, and all gaps are filled and fixed with a liquid optical adhesive having a refractive index substantially equal to the core of the multi-channel optical waveguide. By removing the top of the connected multi-channel optical waveguide and exposing the core of the multi-channel optical waveguide to a predetermined position to form a reflecting surface, coating the reflecting surface with a metal or dielectric multilayer film, This is a multi-channel bent optical waveguide that deflects the propagation direction of light by utilizing the input and output ends of light in two dimensions in parallel.

【００２１】（８）前記手段（２）乃至（７）のうちい
ずれか１つの多チャネル光路変換部品において、前記傾
斜端面を有する多チャネル光導波路として、コアと平行
な側面のうち少なくとも一方を基板に垂直な平面とした
一対の多チャネル光導波路を用いたものである。(8) In the multi-channel optical path converting component according to any one of the means (2) to (7), at least one of the side faces parallel to the core is a substrate as the multi-channel optical waveguide having the inclined end face. This uses a pair of multi-channel optical waveguides which are perpendicular to the plane.

【００２２】（９）前記手段（１）乃至（８）のうちい
ずれか１つの光路変換部品において、前記光導波路とし
て、石英などの無機材料、エポキシ系樹脂、ポリイミ
ド、ポリメチルメタクリレートなどの有機高分子材料、
これらの組合わせのうちいずれか１つから成る、埋込型
の方形光導波路を用いたものである。(9) In the optical path conversion component according to any one of the means (1) to (8), the optical waveguide is made of an inorganic material such as quartz, an organic resin such as an epoxy resin, polyimide, or polymethyl methacrylate. Molecular materials,
An embedded rectangular optical waveguide made of any one of these combinations is used.

【００２３】（１０）前記手段（１）乃至（８）のうち
いずれか１つの光路変換部品において、前記光導波路と
して、石英系光ファイバ、ハードクラッド石英光ファイ
バ、プラスチック光ファイバのうちいずれか１つを用い
たものである。(10) In the optical path conversion component according to any one of the means (1) to (8), the optical waveguide may be any one of a silica optical fiber, a hard clad silica optical fiber, and a plastic optical fiber. One is used.

【００２４】（１１）３次元光導波路のコアに、光の入
射端、出射端及び反射面を有し、前記反射面における反
射を利用して所定の角度に光の伝搬方向を偏向する曲が
り光導波路からなる多チャネル光路変換部品製作方法で
あって、少なくとも片端に傾斜端面を有し、かつ前記傾
斜端面の傾斜角及び傾斜端面における複数の光導波路コ
アのサイズ、配置等が概ね等しい一対の光導波路を形成
し、前記傾斜端面同士を対向させ、この傾斜端面におけ
る光導波路のコアが概ね一致するように前記傾斜端面同
士を接続し、前記一対の光導波路を概ねＶ字型に固定
し、前記Ｖ字型の多チャネル光導波路の頂部を除去して
コアを所定の位置まで露出させて反射面を形成する。(11) A three-dimensional optical waveguide core has a light entrance end, a light exit end, and a reflection surface, and a bent light guide for deflecting a light propagation direction to a predetermined angle by using reflection on the reflection surface. What is claimed is: 1. A method for manufacturing a multi-channel optical path conversion component comprising a waveguide, comprising: a pair of optical waveguides having an inclined end surface at least at one end, and having substantially the same angle of inclination and a plurality of optical waveguide cores at the inclined end surface. Forming a wave path, the inclined end faces are opposed to each other, the inclined end faces are connected to each other such that the cores of the optical waveguides at the inclined end faces are substantially coincident, and the pair of optical waveguides is fixed in a substantially V-shape; A top surface of the V-shaped multi-channel optical waveguide is removed to expose the core to a predetermined position to form a reflection surface.

【００２５】（１２）前記手段（１１）の多チャネル光
路変換部品作製方法において、一対の多チャネル光導波
路の傾斜端面におけるコアが概ね一致するように前記傾
斜端面同士を位置合わせして接続し、前記多チャネル光
導波路のコアと屈折率が概ね等しい液状の光学接着剤で
接続部の間隙を充填して接着し、さらに前記光学接着剤
あるいは他の接着剤で残部を埋める。(12) In the method of manufacturing a multi-channel optical path conversion component according to the above means (11), the inclined end faces are aligned and connected so that the cores on the inclined end faces of the pair of multi-channel optical waveguides substantially coincide with each other; The gap between the connecting portions is filled and bonded with a liquid optical adhesive having a refractive index substantially equal to that of the core of the multi-channel optical waveguide, and the remaining portion is filled with the optical adhesive or another adhesive.

【００２６】（１３）前記手段（１２）の多チャネル光
路変換部品作製方法において、一対の多チャネル光導波
路の傾斜端面におけるコアが概ね一致するように前記傾
斜端面同士を位置合わせして接続し、前記多チャネル光
導波路のコアと屈折率が概ね等しい液状の光学接着剤で
接続部の間隙を充填して接着し、さらに液晶ポリマー等
の有機高分子材料又はガラス等の無機材料からなる、概
ねＶ字型の断面形状を有する部材を前記一対の多チャネ
ル光導波路間に挿入し、接着剤等を用いて多チャネル光
導波路に固定する。(13) In the method of manufacturing a multi-channel optical path conversion component according to the means (12), the inclined end faces are aligned and connected so that the cores on the inclined end faces of the pair of multi-channel optical waveguides substantially coincide with each other; A liquid optical adhesive having a refractive index substantially equal to that of the core of the multi-channel optical waveguide fills and adheres the gap between the connecting portions, and further comprises an organic polymer material such as a liquid crystal polymer or an inorganic material such as glass. A member having a U-shaped cross section is inserted between the pair of multi-channel optical waveguides, and fixed to the multi-channel optical waveguide using an adhesive or the like.

【００２７】（１４）前記手段（１２）又は（１３）の
多チャネル光路変換部品作製方法において、前記多チャ
ネル光路変換部品の反射面に、金属あるいは誘電体多層
膜をコーティングする。(14) In the method of manufacturing a multi-channel optical path conversion component according to the above means (12) or (13), a reflective surface of the multi-channel optical path conversion component is coated with a metal or dielectric multilayer film.

【００２８】（１５）前記手段（１２）乃至（１４）の
うちいずれか１つの多チャネル光路変換部品作製方法に
おいて、前記多チャネル光路変換部品と概ね等しい大き
さのＶ字型の間隙を構成し、前記多チャネル光路変換部
品を、前記傾斜端面のコアが一致するように位置合わせ
した一対の多チャネル光導波路間に挿入し、前記多チャ
ネル光導波路のコアと屈折率が概ね等しい液状の光学接
着剤を用いて全ての間隙を充填して固定し、接続した前
記多チャネル光導波路の頂部を除去して前記多チャネル
光導波路のコアを所定の位置まで露出させて反射面を形
成したのち、金属あるいは誘電体多層膜をコーティング
して、この工程を少なくとも１回以上繰り返すことによ
り、反射を利用して光の伝搬方向を偏向する多チャネル
の曲がり光導波路の、光の入出射端をそれぞれ２次元的
に並列させる。(15) In the method of manufacturing a multi-channel optical path conversion component according to any one of the means (12) to (14), a V-shaped gap having substantially the same size as the multi-channel optical path conversion component is formed. The multi-channel optical path conversion component is inserted between a pair of multi-channel optical waveguides positioned such that the cores of the inclined end faces coincide with each other, and a liquid optical adhesive having a refractive index substantially equal to that of the core of the multi-channel optical waveguide. After filling and fixing all gaps with an agent, removing the top of the connected multi-channel optical waveguide and exposing the core of the multi-channel optical waveguide to a predetermined position to form a reflective surface, Alternatively, by coating a dielectric multilayer film and repeating this process at least once, a multi-channel bent optical waveguide that deflects the propagation direction of light using reflection. , Is parallel input and output end of light, respectively two-dimensionally.

【００２９】（１６）前記手段（１２）乃至（１５）の
うちいずれか１つの多チャネル光路変換部品作製方法に
おいて、前記傾斜端面を有する多チャネル光導波路とし
て、コアと平行な側面のうち少なくとも一方を基板に垂
直な平面とした一対の多チャネル光導波路を用い、前記
側面を基準面とすることにより、コアを横断する方向の
位置合わせを概ね受動的に行う。(16) In the method of manufacturing a multi-channel optical path conversion component according to any one of the means (12) to (15), the multi-channel optical waveguide having the inclined end face may be at least one of side faces parallel to a core. By using a pair of multi-channel optical waveguides having a plane perpendicular to the substrate and using the side surfaces as reference planes, alignment in a direction crossing the core is performed substantially passively.

【００３０】（１７）前記手段（１２）乃至（１６）の
うちいずれか１つの多チャネル光路変換部品作製方法に
おいて、同一基板上に作製し、あるいは整列させて固定
した多チャネル光導波路を、概ねＶ字型の断面形状を有
する切削刃を用いてコアを横断する方向に切削すること
により、傾斜端面におけるコアのサイズや間隔が概ね等
しく、さらに位置や形状等が概ね左右対称である一対の
多チャネル光導波路を作製し、これを請求項２に記載の
一対の多チャネル光導波路として用いる。(17) In any one of the above-mentioned means (12) to (16), in the method of manufacturing a multi-channel optical path conversion component, the multi-channel optical waveguide manufactured or aligned and fixed on the same substrate is generally used. By cutting in a direction crossing the core using a cutting blade having a V-shaped cross-sectional shape, the size and spacing of the cores on the inclined end surface are substantially equal, and the positions and shapes are generally symmetrical. A channel optical waveguide is manufactured and used as a pair of multi-channel optical waveguides according to the present invention.

【００３１】（１８）前記手段（１１）乃至（１７）の
うちいずれか１つの光路変換部品作製方法において、前
記光導波路として、石英などの無機材料、エポキシ系樹
脂、ポリイミド、ポリメチルメタクリレートなどの有機
高分子材料、これらの組合わせのうちいずれか１つから
成る、埋込型の方形光導波路を用いる。(18) In the method of manufacturing an optical path-changing component according to any one of the means (11) to (17), the optical waveguide may be made of an inorganic material such as quartz, an epoxy resin, polyimide, polymethyl methacrylate, or the like. A buried rectangular optical waveguide made of one of an organic polymer material and a combination thereof is used.

【００３２】（１９）前記手段（１１）乃至（１７）の
うちいずれか１つの光路変換部品作製方法において、前
記光導波路として、石英系光ファイバ、ハードクラッド
石英光ファイバ、プラスチック光ファイバのうちいずれ
か１つを用いる。(19) In any one of the means (11) to (17), any one of a silica-based optical fiber, a hard clad silica optical fiber, and a plastic optical fiber may be used as the optical waveguide. Use one or the other.

【００３３】（２０）３次元光導波路のコアに、光の入
射端、出射端及び反射面を有し、前記反射面における反
射を利用して所定の角度に光の伝搬方向を偏向する曲が
り光導波路からなる光路変換部品が、曲がり角の概ね等
しい複数の前記曲がり光導波路により構成される光路変
換部品を有する、３次元光導波路で構成されたビームス
プリッタであって、前記曲がり光導波路で、反射面に所
定の反射率及び透過率を有する金属膜あるいは誘電体多
層膜を有するものに、透過光を伝搬するための別の３次
元光導波路あるいは曲がり光導波路を接続した構造を有
し、前記ビームスプリッタが光を入射あるいは出射する
コア端面を除いて、コアより屈折率の低い物質で覆われ
ている。(20) A bent light guide having a light entrance end, a light exit end, and a reflection surface in a core of a three-dimensional optical waveguide, and deflecting a light propagation direction to a predetermined angle by utilizing reflection on the reflection surface. A beam splitter comprising a three-dimensional optical waveguide, wherein the optical path conversion component comprising a wave path has an optical path conversion component comprising a plurality of the bent optical waveguides having substantially the same bending angles; and Having a structure in which another three-dimensional optical waveguide or a bent optical waveguide for transmitting transmitted light is connected to a metal film or a dielectric multilayer film having predetermined reflectance and transmittance. Are covered with a substance having a lower refractive index than the core, except for the end face of the core from which light enters or exits.

【００３４】（２１）３次元光導波路のコアに、光の入
射端、出射端及び反射面を有し、前記反射面における反
射を利用して所定の角度に光の伝搬方向を偏向する曲が
り光導波路からなる多チャネル光路変換部品が、曲がり
角の概ね等しい複数の前記曲がり光導波路により構成さ
れる多チャネル光路変換部品を有する、３次元光導波路
で構成された多チャネルのビームスプリッタであって、
前記曲がり光導波路で、反射面に所定の反射率及び透過
率を有する金属膜あるいは誘電体多層膜を有するもの
に、透過光を伝搬するための別の３次元光導波路あるい
は曲がり光導波路を接続した構造を有し、前記多チャネ
ルビームスプリッタが、複数の前記ビームスプリッタを
光の入出射方向を揃えて積層した構造を有し、かつ前記
複数のビームスプリッタが光を入射あるいは出射するコ
ア端面を除いて、コアより屈折率の低い物質で覆われて
いる。(21) The core of the three-dimensional optical waveguide has a light entrance end, a light exit end, and a reflection surface, and uses a reflection at the reflection surface to deflect the light propagation direction to a predetermined angle by using a bent light guide. A multi-channel optical path conversion component composed of a wave path, a multi-channel beam splitter including a three-dimensional optical waveguide having a multi-channel optical path conversion component including a plurality of the bent optical waveguides having substantially the same bending angles,
Another three-dimensional optical waveguide or bent optical waveguide for transmitting transmitted light was connected to the bent optical waveguide having a metal film or a dielectric multilayer film having predetermined reflectance and transmittance on the reflection surface. Having a structure in which the multi-channel beam splitter has a structure in which a plurality of the beam splitters are stacked with light input and output directions aligned, and excluding a core end face through which the plurality of beam splitters input or output light. And is covered with a substance having a lower refractive index than the core.

【００３５】（２２）前記手段（２）乃至（１０）のう
ちいずれか１つの多チャネル光路変換部品のうち、曲が
り光導波路のなす角が概ね９０°である部品の反射面
に、所定の反射率及び透過率を得るよう、金属あるいは
誘電体多層膜の膜厚を制御しながらコーティングしたの
ち、少なくとも片端に概ね４５°の傾斜端面を有し、前
記傾斜端面におけるコアの配列が前記多チャネル光路変
換部品の反射面と概ね等しいもう一つの多チャネル光導
波路を、前記傾斜端面におけるコアが前記多チャネル光
路変換部品の反射面におけるコアと一致するように位置
合わせして、その接続部の間隙を前記多チャネル光導波
路あるいは多チャネル光路変換部品のコアと概ね等しい
屈折率を有する液状の光学接着剤を用いて充填し固定す
ることにより、小型かつ多チャネルの１×２ビームスプ
リッタを得る。(22) Among the multi-channel optical path conversion components of any one of the means (2) to (10), a predetermined reflection is formed on the reflection surface of the component having an angle of about 90 ° between the bent optical waveguides. After coating while controlling the thickness of the metal or dielectric multilayer film so as to obtain the transmittance and the transmittance, at least one end has an inclined end surface of approximately 45 °, and the arrangement of the cores at the inclined end surface corresponds to the multi-channel optical path. Another multi-channel optical waveguide substantially equal to the reflection surface of the conversion component is aligned such that the core at the inclined end face coincides with the core at the reflection surface of the multi-channel optical path conversion component, and the gap between the connection portions is reduced. By filling and fixing with a liquid optical adhesive having a refractive index substantially equal to that of the core of the multi-channel optical waveguide or the multi-channel optical path conversion component, One multi-channel 1 × 2 beam splitter is obtained.

【００３６】（２３）前記手段（２）乃至（１０）のう
ちいずれか１つの多チャネル光路変換部品の反射面に、
所定の反射率及び透過率を得るよう、金属あるいは誘電
体多層膜の膜厚を制御しながらコーティングしたのち、
反射面におけるコアの配列が前記多チャネル光路変換部
品と概ね等しく、かつ反射面に金属あるいは誘電体多層
膜のコーティングを施さないもう一つの前記手段（２）
乃至（１０）のうちいずれか１の多チャネル光路変換部
品を、それぞれの反射面におけるコアが一致するように
位置合わせして、その接続部の間隙を前記多チャネル光
導波路あるいは多チャネル光路変換部品のコアと概ね等
しい屈折率を有する液状の光学接着剤を用いて充填し固
定することにより、小型かつ多チャネルの２×２のビー
ムスプリッタを得る。(23) The reflecting surface of any one of the means (2) to (10) is provided on the reflecting surface of the multi-channel optical path conversion component.
After coating while controlling the thickness of the metal or dielectric multilayer film to obtain the predetermined reflectance and transmittance,
Another means (2) wherein the arrangement of the cores on the reflection surface is substantially equal to that of the multi-channel optical path conversion component, and the reflection surface is not coated with a metal or dielectric multilayer film (2).
To any one of (10) to (10) such that the cores on the respective reflection surfaces coincide with each other, and the gap between the connecting portions is set to the multi-channel optical waveguide or the multi-channel optical path conversion component. A small, multi-channel 2 × 2 beam splitter is obtained by filling and fixing with a liquid optical adhesive having a refractive index substantially equal to that of the core.

【００３７】（２４）前記手段（２２）又は（２３）の
多チャネルビームスプリッタ作製方法において、傾斜端
面を有する多チャネル光導波路として、コアと平行な側
面のうち少なくとも一方を基板に垂直な平面とした一対
の多チャネル光導波路を用い、前記側面を基準面とする
ことにより、コアを横断する方向の位置合わせを概ね受
動的に行う。(24) In the method for manufacturing a multi-channel beam splitter according to the means (22) or (23), at least one of the side faces parallel to the core is formed as a multi-channel optical waveguide having an inclined end face with a plane perpendicular to the substrate. By using the pair of multi-channel optical waveguides and using the side surface as a reference surface, positioning in the direction crossing the core is performed substantially passively.

【００３８】（２５）前記手段（２１）乃至（２４）の
うちいずれか１つ多チャネルビームスプリッタ作製方法
において、同一基板上に作製し、あるいは整列させて固
定した多チャネル光導波路を、概ねＶ字型の断面形状を
有する切削刃を用いてコアを横断する方向に切削するこ
とにより、傾斜端面におけるコアのサイズや間隔が概ね
等しく、さらに位置や形状等が概ね左右対称である一対
の多チャネル光導波路を作製し、これを請求項２に記載
の一対の多チャネル光導波路として用いる。(25) In the method for manufacturing a multi-channel beam splitter according to any one of the means (21) to (24), a multi-channel optical waveguide manufactured or aligned and fixed on the same substrate is substantially V By cutting in the direction crossing the core using a cutting blade having a U-shaped cross-sectional shape, the size and spacing of the core on the inclined end surface are approximately equal, and furthermore, a pair of multi-channels whose position and shape are generally symmetrical An optical waveguide is manufactured and used as a pair of multi-channel optical waveguides according to the present invention.

【００３９】（２６）前記手段（２０）乃至（２５）の
うちいずれか１つビームスプリッタ作製方法において、
前記光導波路として、石英などの無機材料、エポキシ系
樹脂、ポリイミド、ポリメチルメタクリレートなどの有
機高分子材料、これらの組合わせのうちいずれか１つか
ら成る、埋込型の方形光導波路を用いる。(26) In any one of the means (20) to (25), in the beam splitter manufacturing method,
As the optical waveguide, a buried rectangular optical waveguide made of any one of an inorganic material such as quartz, an epoxy resin, an organic polymer material such as polyimide and polymethyl methacrylate, and a combination thereof is used.

【００４０】（２７）前記手段（２０）乃至（２５）の
うちいずれか１つビームスプリッタ作製方法において、
前記光導波路として、石英系光ファイバ、ハードクラッ
ド石英光ファイバ、プラスチック光ファイバのうちいず
れか１つを用いる。(27) In any one of the means (20) to (25), in the beam splitter manufacturing method,
As the optical waveguide, any one of a silica-based optical fiber, a hard clad silica optical fiber, and a plastic optical fiber is used.

【００４１】本発明のポイントは、前記曲がり光導波路
を多チャネル化するために、あらかじめ平面上にコアを
複数並列させた光導波路（多チャネル光導波路）を用い
ることを特徴とし、前記多チャネル光導波路の少なくと
も一方の端部に所定の傾斜角を有する傾斜端部を設けた
ものを一対用意して前記傾斜端面同士を対向させ、傾斜
端面におけるコアが概ね一致するように接続し、見かけ
上コアがＶ字型に折れ曲がった状態として多チャネル光
導波路を固定したのちに、前記Ｖ字型の多チャネル光導
波路の頂部を所定の位置まで除去して複数のコアを一括
して空気層に露出させ、反射面とすることにより、図１
に示すような複数の曲がり光導波路を積層し、かつコア
の反射面のみを空気層に露出させた構造を得ることであ
る。The point of the present invention is that an optical waveguide having a plurality of cores arranged in parallel on a plane (multi-channel optical waveguide) is used in order to make the bent optical waveguide multi-channel. At least one end of the wave path provided with an inclined end having a predetermined inclination angle is prepared in a pair, the inclined end faces are opposed to each other, and the cores on the inclined end face are connected so that they substantially coincide with each other, and an apparent core is provided. After the multi-channel optical waveguide is fixed in a V-shaped state, the top of the V-shaped multi-channel optical waveguide is removed to a predetermined position to expose a plurality of cores to the air layer at once. By using a reflective surface, FIG.
In order to obtain a structure in which a plurality of bent optical waveguides are stacked and only the reflection surface of the core is exposed to the air layer as shown in FIG.

【００４２】なお、前記光路変換機能を有する光導波路
としては、方形の埋込型光導波路と光ファイバ型光導波
路とがある。以下、本発明で単に光導波路と記した場合
は、これら方形の埋込型光導波路と光ファイバ型光導波
路とを含むものとし、それぞれを特に示す場合は、一方
を埋込型光導波路、他方を光ファイバと称する。As the optical waveguide having the optical path conversion function, there are a buried rectangular optical waveguide and an optical fiber optical waveguide. Hereinafter, when simply referred to as an optical waveguide in the present invention, it is assumed that these rectangular embedded optical waveguide and optical fiber optical waveguide are included, and when each is particularly indicated, one is an embedded optical waveguide and the other is an embedded optical waveguide. It is called an optical fiber.

【００４３】以上説明したように、本発明による多チャ
ネル光路変換部品及び多チャネル光路変換部品作製方法
を用いると、簡易な工程により曲がり光導波路を積層し
て多チャネル化することができる。As described above, by using the multi-channel optical path conversion component and the method of manufacturing the multi-channel optical path conversion component according to the present invention, it is possible to stack bent optical waveguides by a simple process to achieve multi-channel.

【００４４】また、基板上にエッチング、パターニン
グ、リソグラフィ等により作製するか、あるいは位置決
め溝等を有する基板に整列させて固定した、傾斜端面を
有する多チャネル光導波路を、コアと平行する方向に切
り出して基板に垂直かつ平坦な側面を形成するか、ある
いは予めコアと平行する方向に切り出した基板に前記傾
斜端面を有する多チャネル光導波路を作製することによ
り、前記基板に垂直な側面を基準面として、コアを横断
する方向の位置合わせを精度よくかつ受動的に行うこと
ができる。Further, a multi-channel optical waveguide having an inclined end face, which is formed on a substrate by etching, patterning, lithography or the like, or is aligned and fixed to a substrate having a positioning groove or the like, is cut out in a direction parallel to the core. By forming a multi-channel optical waveguide having the inclined end surface on a substrate cut in a direction parallel to the core, or forming a flat side surface perpendicular to the substrate by using the side surface perpendicular to the substrate as a reference plane. The positioning in the direction crossing the core can be performed accurately and passively.

【００４５】さらに、同一基板上にエッチング、パター
ニング、リソグラフィ等により作製し、あるいは位置決
め溝等を有する基板に整列させて固定した傾斜端面を有
する多チャネル光導波路を、例えば、所定の角度を有す
る概ねＶ字型の断面形状を有する切削刃を用いてコアを
横断する方向に切削するなどの手段を用いて（特開平１
０−３００９６１号公報、参照）その途中に左右対称の
一対の傾斜端面を形成し、前記左右対称の多チャネル光
導波路を用いて前前記光路変換部品を作製することによ
り、傾斜端面におけるコアのサイズや形状、コアの間
隔、基板裏面からコアまでの厚み等が概ね一致し、これ
らのばらつきが無視できるようになる。Further, a multi-channel optical waveguide having an inclined end face formed on the same substrate by etching, patterning, lithography, or the like, or aligned and fixed to a substrate having a positioning groove or the like is formed, for example, at a predetermined angle. Using means such as cutting in a direction crossing the core using a cutting blade having a V-shaped cross section (Japanese Patent Laid-Open No.
The size of the core at the inclined end face is formed by forming a pair of symmetric inclined end faces in the middle thereof and manufacturing the optical path conversion component using the symmetric multi-channel optical waveguide. The shape, the interval between the cores, the thickness from the back surface of the substrate to the core, and the like generally match, and these variations can be ignored.

【００４６】また、積層した曲がり光導波路のコアにつ
いて、反射面のみを空気中に露出させ、それ以外の部分
をコアより屈折率の低いクラッドに埋め込むことができ
るため、反射面に金属あるいは誘電体多層膜をコーティ
ングすることが可能となる。In the laminated bent optical waveguide core, only the reflection surface can be exposed to air, and the other portions can be embedded in a clad having a lower refractive index than the core. It becomes possible to coat a multilayer film.

【００４７】これにより、例えば、前記多チャネル光路
変換部品をコネクタ等の筐体に封止したりボード等に埋
め込むことが可能となり、実装の自由度を広げることが
できる。As a result, for example, the multi-channel optical path conversion component can be sealed in a housing such as a connector or embedded in a board or the like, and the degree of freedom in mounting can be increased.

【００４８】さらに、反射面にコーティングする金属あ
るいは誘電体多層膜の膜厚を注意深く制御することによ
り、反射面に任意の反射率及び透過率を付与することが
可能となるため、反射面に所定の膜厚のコーティングを
施した多チャネル光路変換部品に、コーティングを施さ
ないもう一つの多チャネル光路変換部品、あるいは傾斜
端面を有する多チャネル光導波路を接続すれば、光バス
等に応用可能な小型の１×２あるいは２×２ビームスプ
リッタを作製することができる。Further, by carefully controlling the film thickness of the metal or dielectric multilayer film coated on the reflecting surface, it is possible to impart an arbitrary reflectance and transmittance to the reflecting surface. By connecting another multi-channel optical path conversion component without coating or a multi-channel optical waveguide with an inclined end face to a multi-channel optical path conversion component coated with a thickness of 1 × 2 or 2 × 2 beam splitter can be manufactured.

【００４９】以上の説明からわかるように、本発明によ
る光路変換部品の作製方法を用いると、高密度な多チャ
ネル光路変換部品ならびに多チャネルビームスプリッタ
を容易に作製することができる。As can be seen from the above description, by using the method for manufacturing an optical path-changing component according to the present invention, a high-density multi-channel optical path-changing component and a multi-channel beam splitter can be easily manufactured.

【００５０】以下、本発明について、図面を参照して実
施の形態（実施例）とともに詳細に説明する。Hereinafter, the present invention will be described in detail together with embodiments (examples) with reference to the drawings.

【００５１】なお、実施例を説明するための全図におい
て、同一機能を有するものは、同一符号をつけ、その繰
り返しの説明は省略する。In all the drawings for explaining the embodiments, parts having the same functions are denoted by the same reference numerals, and their repeated description will be omitted.

【００５２】[0052]

【発明の実施の形態】（実施例１）本発明による実施例
１の多チャネル光路変換部品は、反射を利用して所定の
角度に光の伝搬方向を変更する、３次元光導波路からな
る曲がり光導波路を、その光の入射端、出射端及び反射
面を除いてコアより屈折率の低いクラッドで埋め込み、
これを積層する方向に多チャネル化した光路変換部品で
ある。図１は、本実施例１の多チャネル光路変換部品の
概略構成を示す図であり、図１（ａ）は、多チャネル光
路変換部品の斜視図、図１（ｂ）は、多チャネル光路変
換部品を上から見た上平面図である。(Embodiment 1) A multi-channel optical path conversion component according to Embodiment 1 of the present invention is a bend formed of a three-dimensional optical waveguide that changes the propagation direction of light to a predetermined angle using reflection. Embedding the optical waveguide with a clad having a lower refractive index than the core except for the light incident end, the light emitting end and the reflection surface of the light,
This is an optical path conversion component having a multi-channel structure in the stacking direction. FIG. 1 is a diagram showing a schematic configuration of a multi-channel optical path conversion component according to the first embodiment. FIG. 1A is a perspective view of the multi-channel optical path conversion component, and FIG. FIG. 4 is an upper plan view of the component as viewed from above.

【００５３】図１（ａ）及び図１（ｂ）に示すように、
本実施例１の多チャネル光路変換部品１は、例えば、９
０°に折れ曲がった前記曲がり光導波路のコア層２を、
クラッド層３を挟んで一定の間隔をおいて８チャネル積
層させることにより、それぞれの入射端４、反射面５、
出射端６をそれぞれ独立の平面７、８、９に８個ずつ並
列させた光路変換部品である。As shown in FIGS. 1A and 1B,
The multi-channel optical path conversion component 1 according to the first embodiment includes, for example, 9
The core layer 2 of the bent optical waveguide bent at 0 °
By stacking eight channels at regular intervals with the cladding layer 3 interposed therebetween, the respective incident ends 4, reflecting surfaces 5,
This is an optical path conversion component in which eight emission ends 6 are arranged in parallel on independent planes 7, 8, and 9, respectively.

【００５４】前記多チャネル光路変換部品１において、
入射端４に入射した光は、反射面５において空気層とコ
ア層２の屈折率差によりほぼ全反射されてその伝搬方向
を９０°偏向し、出射端６から出射される。In the multi-channel optical path conversion component 1,
The light incident on the incident end 4 is almost totally reflected on the reflection surface 5 by the difference in the refractive index between the air layer and the core layer 2, deflects the propagation direction by 90 °, and is emitted from the emission end 6.

【００５５】従って、入射端４が並列した平面７と出射
端６が並列した平面９に例えば８チャネルの光ファイバ
アレイを接続すれば、前記光ファイバアレイ間で９０°
の光路変換をコンパクトに行うことが可能となる。Therefore, if an optical fiber array of, for example, 8 channels is connected to the plane 7 where the input ends 4 are arranged in parallel and the plane 9 where the emission ends 6 are arranged in parallel, 90 ° is formed between the optical fiber arrays.
Can be compactly performed.

【００５６】なお、本実施例１では主に９０°の光路変
換を取り上げたが、本実施例１の内容を逸脱しない範囲
であれば、光路変換の角度は任意で構わない。また、チ
ャネル数として８チャネルの例を取り上げたが、本実施
例１の内容を逸脱しない範囲であれば、チャネル数は任
意で構わず、さらに、隣り合う曲がり光導波路の間隔は
必ずしも等間隔でなくても構わない。また、光路変換は
光ファイバ同士だけでなく、光導波路、光素子、あるい
はそれらの任意の組み合わせの間で行っても構わない。Although the optical path conversion of 90 ° is mainly described in the first embodiment, the angle of the optical path conversion may be arbitrarily set as long as the contents do not deviate from the contents of the first embodiment. Although an example of eight channels is taken as the number of channels, the number of channels may be set arbitrarily as long as the content does not deviate from the contents of the first embodiment, and the intervals between adjacent bent optical waveguides are not necessarily equal. You don't have to. The optical path conversion may be performed not only between optical fibers, but also between optical waveguides, optical elements, or any combination thereof.

【００５７】（実施例２）図２は、本発明による実施例
２の光路変換部品の作製方法の例を示し、（ａ）、
（ｂ）、（ｃ）、（ｄ）は、本実施例２の光路変換部品
の作製方法における各工程時の構成を示す模式図であ
る。(Embodiment 2) FIG. 2 shows an example of a method of manufacturing an optical path-changing component according to Embodiment 2 of the present invention.
(B), (c), (d) is a schematic diagram showing a configuration at each step in the method for manufacturing an optical path conversion component of the second embodiment.

【００５８】本実施例２の光路変換部品の作製方法は、
図２（ａ）に示すように、片端に傾斜角４５°の斜め研
磨面（傾斜端面）１０を有する、コア径５０μｍ、クラ
ッド径１２５μｍの短尺の石英系マルチモード光ファイ
バ１１を１６本用意し、２５０μｍ間隔で８本のＶ溝を
有する２つのガラスブロック１２に、斜め研磨面１０の
先端がガラスブロック１２より一定量突き出し、かつ研
磨面が上を向くようにそれぞれ整列させ、接着剤１３を
用いて前記マルチモード光ファイバ１１とガラスブロッ
ク１２を固定する 次に、図２（ｂ）に示すように、前
記ガラスブロック１２を、光ファイバの斜め研磨面１０
Ａ，１０Ｂ同士が向き合うように対向させ、前記研磨面
における光ファイバのコア層１４Ａ，１４Ｂ同士が一致
するようにガラスブロック１２をそれぞれ４５°ずつ傾
けてＶ字型に接続する。The manufacturing method of the optical path conversion component of the second embodiment is as follows.
As shown in FIG. 2A, 16 short quartz-based multimode optical fibers 11 having a core diameter of 50 μm and a cladding diameter of 125 μm, each of which has an obliquely polished surface (inclined end surface) 10 with an inclination angle of 45 ° at one end, are prepared. The two ends of the oblique polished surface 10 project from the glass block 12 by a predetermined amount and are laid out on two glass blocks 12 having eight V grooves at intervals of 250 μm, and the polished surface faces upward. Next, as shown in FIG. 2B, the glass block 12 is fixed to the obliquely polished surface 10 of the optical fiber.
A and 10B are opposed to each other so as to face each other, and the glass blocks 12 are each inclined by 45 ° so that the core layers 14A and 14B of the optical fiber on the polished surface coincide with each other, and are connected in a V-shape.

【００５９】次に、図２（ｃ）に示すように、ガラスブ
ロック間及び光ファイバ接続部にコア層１４と等しい屈
折率を有する液状の紫外線硬化型（以下、ＵＶ硬化型と
称す）光学接着剤１５を滴下し、紫外線を照射して硬化
させ固定する。Next, as shown in FIG. 2C, a liquid ultraviolet curing type (hereinafter, referred to as a UV curing type) optical adhesive having a refractive index equal to that of the core layer 14 between the glass blocks and the optical fiber connection portion. The agent 15 is dropped, and is cured by irradiation with ultraviolet rays and fixed.

【００６０】続いて、前記Ｖ字型に固定した光ファイバ
の接続部の先端部１６を水平に研磨して除去し、図２
（ｄ）に示すように、接続部における光ファイバのコア
層１４を露出させて反射面５を一括形成し、図１に示す
ような８チャネルの多チャネル光路変換部品１を作製し
た。Subsequently, the distal end portion 16 of the connection portion of the optical fiber fixed in the V-shape is horizontally polished and removed.
As shown in (d), the reflection surface 5 was formed at a time by exposing the core layer 14 of the optical fiber at the connection portion, and an eight-channel multi-channel optical path conversion component 1 as shown in FIG. 1 was produced.

【００６１】作製した多チャネル光路変換部品１の光の
入射端４から波長１３００ｎｍのレーザ光を入射し、出
射端６における光強度を測定することにより反射面５の
反射効率を測定したところ、８チャネルの平均で９０％
であった。また、光路の変換角度は９０°であった。When a laser beam having a wavelength of 1300 nm was incident from the light incident end 4 of the manufactured multi-channel optical path conversion component 1 and the light intensity at the output end 6 was measured, the reflection efficiency of the reflecting surface 5 was measured. 90% on channel average
Met. The conversion angle of the optical path was 90 °.

【００６２】なお、本実施例２では主に８チャネルの光
導波路を用いた９０°の光路変換を取り上げたが、本実
施例２の内容を逸脱しない範囲であれば、光路変換の角
度及び光導波路の本数は任意で構わない。また、光導波
路として基板上に整列させた光ファイバの一例を取り上
げたが、基板上に作製した埋込型光導波路等を用いても
よいことは言うまでもない。In the second embodiment, the optical path conversion of 90 ° using the eight-channel optical waveguide is mainly taken up. However, as long as the contents do not deviate from the contents of the second embodiment, the angle of the optical path conversion and the light guide The number of wave paths may be arbitrary. Further, an example of an optical fiber aligned on a substrate has been described as an optical waveguide, but it is needless to say that a buried optical waveguide manufactured on the substrate may be used.

【００６３】また、光導波路の材料としては、石英系の
材料を一例に取り上げたが、本実施例２の内容を逸脱し
ない範囲で、ガラス等の無機材料から高分子系光学材料
まで、任意の材料を組み合わせても構わない。さらに、
基板としてはガラス基板の他に、例えば、シリコン基板
等を用いてもよいことは言うまでもない。なお、光導波
路を整列させる方法としてＶ溝を取り上げたが、光導波
路を整列させる機能を有する構造であれば矩形の溝やブ
ロック間、あるいは丸穴のキャピラリー等に整列させて
も構わない。As a material of the optical waveguide, a quartz-based material is taken as an example, but any material from an inorganic material such as glass to a polymer-based optical material can be used without departing from the contents of the second embodiment. Materials may be combined. further,
It goes without saying that, for example, a silicon substrate or the like may be used as the substrate in addition to the glass substrate. Although the V-groove has been described as a method of aligning the optical waveguides, the V-grooves may be aligned between rectangular grooves or blocks or a capillary with a round hole as long as the structure has a function of aligning the optical waveguides.

【００６４】（実施例３）図３は、本発明による実施例
３の光路変換部品の作製方法の例を示し、（ａ）、
（ｂ）、（ｃ）、（ｄ）、（ｅ）は、本実施例３の光路
変換部品の作製方法における各工程時の構成を示す模式
図である。(Embodiment 3) FIG. 3 shows an example of a method of manufacturing an optical path-changing component according to Embodiment 3 of the present invention.
(B), (c), (d), and (e) are schematic diagrams illustrating the configuration at each step in the method of manufacturing the optical path conversion component of the third embodiment.

【００６５】本実施例３の光路変換部品の作製方法は、
図３（ａ）に示すように、シリコン基板１８上に膜厚３
μｍの水溶性の樹脂層１９を挟んで作製された、ＵＶ硬
化型のエポキシ系樹脂を材料とした下部クラッド２０、
コア層２１、及び上部クラッド２２からなる埋込型の直
線光導波路の片端を、傾斜角が４５°となるように研磨
した８チャネルの光導波路を２つ用意した。前記光導波
路のコア層２１の屈折率は１.５２７、上部及び下部ク
ラッド２０、２２の屈折率はいずれも１.５１０であ
る。また、前記一対の多チャネル光導波路１７Ａ，１７
Ｂの傾斜端面２３Ａ，２３Ｂにおいて、コア層２１の断
面形状はいずれも幅４０μｍ、高さ５６μｍの矩形であ
り、コア間隔は２５０μｍである。The manufacturing method of the optical path conversion component of the third embodiment is as follows.
As shown in FIG.
a lower clad 20 made of a UV-curable epoxy resin, sandwiched between a water-soluble resin layer 19 μm,
Two 8-channel optical waveguides were prepared by polishing one end of a buried linear optical waveguide composed of the core layer 21 and the upper clad 22 so that the inclination angle was 45 °. The refractive index of the core layer 21 of the optical waveguide is 1.527, and the refractive indexes of the upper and lower claddings 20 and 22 are both 1.510. Further, the pair of multi-channel optical waveguides 17A, 17A
In each of the inclined end surfaces 23A and 23B of B, the cross-sectional shape of the core layer 21 is a rectangle having a width of 40 μm and a height of 56 μm, and the core interval is 250 μm.

【００６６】続いて、図３（ｂ）に示すように、前記一
対の多チャネル光導波路の４５°傾斜端面２３Ａ，２３
Ｂを対向させ、傾斜端面におけるコア層２１Ａ，２１Ｂ
が互いに一致するようにＶ字型に接続し、図３（ｃ）に
示すように、コア層２１と屈折率の等しい液状のＵＶ硬
化型光学接着剤１５をＶ字型の間隙に充填して紫外線を
照射し、前記一対の多チャネル光導波路１７Ａ，１７Ｂ
をＶ字型に固定する。Subsequently, as shown in FIG. 3B, the 45 ° inclined end surfaces 23A, 23A of the pair of multi-channel optical waveguides are used.
B and the core layers 21A and 21B on the inclined end faces.
Are connected in a V-shape so that they match each other, and as shown in FIG. 3C, a liquid UV-curable optical adhesive 15 having the same refractive index as the core layer 21 is filled in the V-shaped gap. The pair of multi-channel optical waveguides 17A and 17B are irradiated with ultraviolet rays.
Is fixed in a V-shape.

【００６７】次に、図３（ｄ）に示すように、これを温
水中に４０分間浸けて水溶性の樹脂層１９を溶解させ、
シリコン基板１８を剥離する。Next, as shown in FIG. 3 (d), this was immersed in warm water for 40 minutes to dissolve the water-soluble resin layer 19,
The silicon substrate 18 is peeled off.

【００６８】その後、前記Ｖ字型の多チャネル光導波路
における接続部分の先端部１６を水平に研磨して除去
し、図３（ｅ）に示すように、反射面５を一括形成し、
図１に示すような多チャネル光路変換部品１を作製し
た。Thereafter, the tip portion 16 of the connection portion in the V-shaped multi-channel optical waveguide is horizontally polished and removed, and as shown in FIG.
A multi-channel optical path conversion component 1 as shown in FIG. 1 was produced.

【００６９】作製した多チャネル光路変換部品１の光の
入射端４から波長８５０ｎｍのレーザ光を入射し、出射
端６における光強度を測定することにより反射面５の反
射効率を測定したところ、８チャネルの平均で９０％で
あった。また、光路の変換角度は９０°であった。When the laser light having a wavelength of 850 nm was incident from the light incident end 4 of the manufactured multi-channel optical path conversion component 1 and the light intensity at the output end 6 was measured, the reflection efficiency of the reflecting surface 5 was measured. The average of the channels was 90%. The conversion angle of the optical path was 90 °.

【００７０】なお、本実施例３では、主に８チャネルの
光導波路を用いた９０°の光路変換を取り上げたが、本
実施例３の内容を逸脱しない範囲であれば、光路変換の
角度、及び光導波路の本数は任意で構わない。また、光
導波路として基板上に整列させた埋込型光導波路の一例
を取り上げたが、光ファイバを用いてもよいことは言う
までもない。また、光導波路の材料としては、ＵＶ硬化
型エポキシ系樹脂を一例に取り上げたが、本実施例３の
内容を逸脱しない範囲で、ガラス等の無機材料から高分
子系光学材料まで、任意の材料を組み合わせても構わな
い。さらに、基板としてはシリコン基板の他に、ガラス
基板などを用いてもよいことはいうまでもない。また、
多チャネル光導波路間を充填する液状の光学接着剤とし
てＵＶ硬化型エポキシ系樹脂を取り上げたが、本実施例
３の内容を逸脱しない範囲であれば、熱硬化型の光学接
着剤などを用いてもよく、また一対の傾斜端面の接続部
分が前記樹脂で保護されていれば、本実施例３の内容を
逸脱しない範囲で、光学接着剤以外の他の接着剤を用い
てもよいことはいうまでもない。In the third embodiment, an optical path conversion of 90 ° using an eight-channel optical waveguide is mainly described. However, as long as the contents do not deviate from the contents of the third embodiment, the angle of the optical path conversion, The number of optical waveguides may be arbitrary. Further, an example of a buried optical waveguide aligned on a substrate has been described as an optical waveguide, but it goes without saying that an optical fiber may be used. Further, as a material of the optical waveguide, a UV-curable epoxy resin is taken as an example, but any material from an inorganic material such as glass to a polymer optical material can be used without departing from the contents of the third embodiment. May be combined. Further, it goes without saying that a glass substrate or the like may be used as the substrate in addition to the silicon substrate. Also,
Although a UV-curable epoxy resin is used as a liquid optical adhesive for filling the space between the multi-channel optical waveguides, a thermosetting optical adhesive or the like may be used as long as the content does not deviate from the contents of the third embodiment. Alternatively, as long as the connection between the pair of inclined end surfaces is protected by the resin, an adhesive other than the optical adhesive may be used without departing from the contents of the third embodiment. Not even.

【００７１】なお、基板は光導波路の研磨に影響を与え
なければ、光導波路から剥離しなくてもよく、また剥離
する必要がある場合には、基板と光導波路を剥離させる
ための犠牲層として、水溶性樹脂以外に、希塩酸によっ
て容易に溶解する銅薄膜等を用いても構わない。If the substrate does not affect the polishing of the optical waveguide, the substrate does not need to be separated from the optical waveguide. If the substrate needs to be separated, it may be used as a sacrificial layer for separating the substrate and the optical waveguide. In addition to the water-soluble resin, a copper thin film or the like that is easily dissolved by dilute hydrochloric acid may be used.

【００７２】（実施例４）図４は、本発明による実施例
４の光路変換部品の作製方法の例を示し、（ａ）、
（ｂ）、（ｃ）、（ｄ）は、本実施例４の光路変換部品
の作製方法における各工程時の構成を示す模式図であ
る。(Embodiment 4) FIGS. 4A and 4B show an example of a method of manufacturing an optical path-changing component according to Embodiment 4 of the present invention.
(B), (c), (d) is a schematic diagram showing a configuration at each step in the method for manufacturing an optical path conversion component of the fourth embodiment.

【００７３】本実施例４の光路変換部品の作製方法は、
まず、前記実施例３と同様に、シリコン基板１８上に膜
厚３μｍの水溶性の樹脂層１９を挟んで作製された、Ｕ
Ｖ硬化型のエポキシ系樹脂を材料とした下部クラッド２
０、コア層２１、及び上部クラッド２２からなる埋込型
の直線光導波路の片端を、傾斜角が４５°となるように
研磨した８チャネルの光導波路を２つ用意した。前記光
導波路のコア層の屈折率は１.５２７、上部及び下部ク
ラッド２０，２２の屈折率はいずれも１.５１０であ
る。また、前記一対の多チャネル光導波路１７Ａ，１７
Ｂの傾斜端面２３Ａ，２３Ｂにおいて、コア層２１の断
面形状はいずれも幅４０μｍ、高さ５６μｍの矩形であ
り、コア間隔は２５０μｍである。The manufacturing method of the optical path conversion component of the fourth embodiment is as follows.
First, in the same manner as in the third embodiment, a U-shaped resin film having a 3 μm-thick water-soluble resin layer 19 sandwiched on a silicon substrate 18 was manufactured.
Lower cladding 2 made of V-curable epoxy resin
Two 8-channel optical waveguides were prepared by polishing one end of a buried-type linear optical waveguide composed of 0, the core layer 21 and the upper cladding 22 so that the inclination angle was 45 °. The refractive index of the core layer of the optical waveguide is 1.527, and the refractive indexes of the upper and lower claddings 20 and 22 are both 1.510. Further, the pair of multi-channel optical waveguides 17A, 17A
In each of the inclined end surfaces 23A and 23B of B, the cross-sectional shape of the core layer 21 is a rectangle having a width of 40 μm and a height of 56 μm, and the core interval is 250 μm.

【００７４】続いて、図４（ａ）に示すように、前記一
対の多チャネル光導波路の４５°傾斜端面２３Ａ，２３
Ｂを対向させ、傾斜端面におけるコアが互いに一致する
ようにＶ字型に接続し、コアと屈折率の等しい液状のＵ
Ｖ硬化型光学接着剤１５をＶ字型の間隙に充填して紫外
線照射により固定したのち、図４（ｂ）に示すように、
前記Ｖ字型に接続した多チャネル光導波路の間隙より一
回り小さいガラスブロック２４を挿入し、残りの間隙に
ＵＶ硬化型光学接着剤１５を充填して硬化させ、前記一
対の多チャネル光導波路をＶ字型に固定する。Subsequently, as shown in FIG. 4A, the 45 ° inclined end surfaces 23A, 23A of the pair of multi-channel optical waveguides.
B, facing each other and connected in a V-shape such that the cores on the inclined end faces coincide with each other, and a liquid U having the same refractive index as the core is used.
After filling the V-curable optical adhesive 15 into the V-shaped gap and fixing it by ultraviolet irradiation, as shown in FIG.
A glass block 24, which is slightly smaller than the gap between the V-shaped multi-channel optical waveguides, is inserted, and the remaining gap is filled with a UV-curable optical adhesive 15 and cured. Fix to V-shape.

【００７５】次に、図４（ｃ）に示すように、これを温
水中に４０分間浸けて水溶性の樹脂層１９を溶解させ、
シリコン基板１８を剥離する。Next, as shown in FIG. 4C, this was immersed in warm water for 40 minutes to dissolve the water-soluble resin layer 19,
The silicon substrate 18 is peeled off.

【００７６】その後、前記Ｖ字型の多チャネル光導波路
における接続部分の先端部１６を水平に研磨して除去
し、図４（ｄ）に示すように、反射面５を一括形成し、
図１に示すような多チャネル光路変換部品１を作製し
た。Thereafter, the tip portion 16 of the connection portion in the V-shaped multi-channel optical waveguide is horizontally polished and removed, and as shown in FIG.
A multi-channel optical path conversion component 1 as shown in FIG. 1 was produced.

【００７７】作製した多チャネル光路変換部品１の光の
入射端４から波長８５０ｎｍのレーザ光を入射し、出射
端６における光強度を測定することにより反射面５の反
射効率を測定したところ、８チャネルの平均で９０％で
あった。また、光路の変換角度は９０°であった。When the laser light having a wavelength of 850 nm was incident from the light incident end 4 of the manufactured multi-channel optical path conversion component 1 and the light intensity at the output end 6 was measured, the reflection efficiency of the reflecting surface 5 was measured. The average of the channels was 90%. The conversion angle of the optical path was 90 °.

【００７８】なお、本実施例４では、主に８チャネルの
光導波路を用いた９０°の光路変換を取り上げたが、本
実施例４の内容を逸脱しない範囲であれば、光路変換の
角度、及び光導波路の本数は任意で構わない。また、Ｖ
字型に固定した多チャネル光導波路間に挿入する部材の
形状は、本実施例４の内容を逸脱しない範囲で任意の形
状で差し支えなく、部材の材料は、ガラスの他、液晶ポ
リマーなど熱による体積変化が小さい材料であれば望ま
しいが、それに限定するものではない。さらに、前記部
材と多チャネル光導波路を固定する接着剤としては、Ｕ
Ｖ硬化型接着剤の他、必要に応じて熱硬化型接着剤等を
用いてもよいことは言うまでもない。In the fourth embodiment, the optical path conversion of 90 ° using mainly the eight-channel optical waveguide is taken up. However, the angle of the optical path conversion, the angle of the optical path conversion, The number of optical waveguides may be arbitrary. Also, V
The shape of the member to be inserted between the multi-channel optical waveguides fixed in the shape of a letter may be any shape without departing from the contents of the fourth embodiment. It is desirable that the material has a small volume change, but the material is not limited thereto. Further, as the adhesive for fixing the member and the multi-channel optical waveguide, U
Needless to say, a thermosetting adhesive or the like may be used as necessary in addition to the V-curing adhesive.

【００７９】なお、光導波路として埋込型光導波路の一
例を取り上げたが、光ファイバを用いてもよいことは言
うまでもない。また、光導波路の材料としては、ＵＶ硬
化型エポキシ系樹脂を一例に取り上げたが、本実施例４
の内容を逸脱しない範囲で、ガラス等の無機材料から高
分子系光学材料まで、任意の材料を組み合わせても構わ
ない。さらに、基板としてはシリコン基板の他に、ガラ
ス基板などを用いてもよいことはいうまでもない。な
お、基板は光導波路の研磨に影響を与えなければ、光導
波路から剥離しなくてもよく、また、剥離する必要があ
る場合には、基板と光導波路を剥離させるための犠牲層
として、水溶性樹脂以外に、希塩酸によって容易に溶解
する銅薄膜等を用いても構わない。Although an example of a buried optical waveguide has been described as an optical waveguide, it goes without saying that an optical fiber may be used. As a material of the optical waveguide, a UV-curable epoxy resin is taken as an example.
Any material from an inorganic material such as glass to a polymer optical material may be used without departing from the scope of the above. Further, it goes without saying that a glass substrate or the like may be used as the substrate in addition to the silicon substrate. If the substrate does not affect the polishing of the optical waveguide, the substrate does not have to be peeled off from the optical waveguide. If it is necessary to peel off the substrate, a water-soluble layer is used as a sacrificial layer for peeling off the substrate and the optical waveguide. In addition to the conductive resin, a copper thin film or the like that is easily dissolved by dilute hydrochloric acid may be used.

【００８０】（実施例５）本発明による実施例５の多チ
ャネル光路変換部品について以下に説明する。図５は、
本実施例５の多チャネル光路変換部品の概略構成を示す
図であり、図５（ａ）は、多チャネル光路変換部品の斜
視図、図５（ｂ）は、多チャネル光路変換部品を上から
見た上平面図である。(Embodiment 5) A multi-channel optical path conversion component according to Embodiment 5 of the present invention will be described below. FIG.
FIG. 5A is a diagram illustrating a schematic configuration of a multi-channel optical path conversion component according to a fifth embodiment. FIG. 5A is a perspective view of the multi-channel optical path conversion component, and FIG. It is the top plan view seen.

【００８１】本実施例５の多チャネル光路変換部品は、
前記実施例３と同様の方法で作製した８チャネルの光路
変換部品の反射面５に、金薄膜２５を３００ｎｍの膜厚
となるよう均一に真空蒸着した。しかる後、前記多チャ
ネル光路変換部品の反射面５の反射効率を測定したとこ
ろ、８チャネルの平均で９６％となった。The multi-channel optical path conversion component of the fifth embodiment is
A gold thin film 25 was vacuum-deposited uniformly on the reflecting surface 5 of the 8-channel optical path changing component manufactured in the same manner as in Example 3 so as to have a thickness of 300 nm. Thereafter, when the reflection efficiency of the reflection surface 5 of the multi-channel optical path conversion component was measured, it was 96% on average for 8 channels.

【００８２】なお、本実施例５では、反射面にコーティ
ングする材料として金を用いたが、用いる波長等に応じ
て銀、アルミニウム、銅等の金属、あるいは誘電体多層
膜等を用いてよいことは言うまでもなく、また、膜厚も
必要に応じて変更して構わない。さらに、前記薄膜をコ
ーティングした上に、保護層として樹脂等のコーティン
グを施しても構わない。また、前記金属等をコーティン
グする方法として、真空蒸着の他にイオンビームスパッ
タやメッキ等の技術を適用してもよい。In the fifth embodiment, gold is used as a material for coating the reflection surface. However, a metal such as silver, aluminum, copper, or a dielectric multilayer film may be used according to the wavelength used. Needless to say, the film thickness may be changed as needed. Further, after coating the thin film, a coating of a resin or the like may be applied as a protective layer. Further, as a method of coating the metal or the like, a technique such as ion beam sputtering or plating may be applied in addition to vacuum deposition.

【００８３】（実施例６）本発明による実施例６の多チ
ャネル光路変換部品について以下に説明する。図６は、
本実施例６の多チャネル光路変換部品の概略構成を示す
図であり、図６（ａ）は、多チャネル光路変換部品の斜
視図、図６（ｂ）は、多チャネル光路変換部品を上から
見た上平面図である。図７は、本実施例６の多チャネル
光路変換部品の製作方法における各工程時の概略構成例
を示す図である。(Embodiment 6) A multi-channel optical path conversion component according to Embodiment 6 of the present invention will be described below. FIG.
FIG. 6A is a diagram illustrating a schematic configuration of a multi-channel optical path conversion component according to a sixth embodiment. FIG. 6A is a perspective view of the multi-channel optical path conversion component, and FIG. It is the top plan view seen. FIG. 7 is a diagram illustrating a schematic configuration example at each step in the method of manufacturing the multi-channel optical path conversion component of the sixth embodiment.

【００８４】本実施例６の多チャネル光路変換部品は、
前記実施例３の方法と同様に作製し、かつ入射端４から
反射面５までの光導波路コアの長さが概ね３ｍｍである
８チャネルの光路変換部品１Ａの反射面５が並列した平
面８に、前記実施例５と同様に金薄膜２５Ａを３００ｎ
ｍの膜厚となるように蒸着した。The multi-channel optical path conversion component of the sixth embodiment is
On the plane 8 where the reflecting surfaces 5 of the eight-channel optical path conversion component 1A are manufactured in the same manner as in the above-described embodiment 3 and the length of the optical waveguide core from the incident end 4 to the reflecting surface 5 is approximately 3 mm. In the same manner as in the fifth embodiment, the gold thin film 25A is
m was deposited.

【００８５】これを、図７（ａ）に示すように、前記実
施例３と同様に準備した幅３ｍｍ、長さ３.１ｍｍの一
対の８チャネル光導波路１７Ａ，１７Ｂで、傾斜端面同
士を位置合わせしてＶ字型に接続したものの間に挿入
し、顕微鏡で観察しながら前記多チャネル光路変換部品
１Ａと前記一対の多チャネル光導波路１７Ａ，１７Ｂの
間で、コアの１チャネル目から８チャネル目までがそれ
ぞれ揃うように位置合わせをし、図７（ｂ）に示すよう
に、コアと屈折率の等しい液状のＵＶ硬化型光学接着剤
１５で全ての間隙を充填して紫外線を側方から照射する
ことにより、前記多チャネル光路変換部品１及び前記一
対の多チャネル光導波路１７Ａ，１７Ｂを固定した。As shown in FIG. 7A, the inclined end faces are positioned by a pair of 8-channel optical waveguides 17A and 17B having a width of 3 mm and a length of 3.1 mm prepared in the same manner as in the third embodiment. And inserted between those connected in a V-shape, and while observing with a microscope, 8 channels from the first channel of the core between the multi-channel optical path conversion component 1A and the pair of multi-channel optical waveguides 17A and 17B. The alignment is performed so that the eyes are aligned with each other, and as shown in FIG. 7B, all gaps are filled with a liquid UV-curable optical adhesive 15 having the same refractive index as the core, and ultraviolet light is irradiated from the side. By irradiating, the multi-channel optical path conversion component 1 and the pair of multi-channel optical waveguides 17A and 17B were fixed.

【００８６】続いて、図７（ｃ）に示すように、温水中
に４０分間浸けて水溶性の樹脂層１９を溶解させ、シリ
コン基板１８を剥離した。その後、前記実施例３と同様
に、前記Ｖ字型の多チャネル光導波路における接続部分
の先端部１６を水平に研磨して除去し、反射面５を一括
形成して金薄膜２５Ｂを３００ｎｍの膜厚となるように
蒸着することにより、図６に示すように、光の入射端
４、出射端６がそれぞれ８心×２列の、２次元的に並列
した多チャネル光路変換部品１を作製した。Then, as shown in FIG. 7C, the silicon substrate 18 was peeled off by immersing it in warm water for 40 minutes to dissolve the water-soluble resin layer 19. Thereafter, similarly to the third embodiment, the tip 16 of the connection portion in the V-shaped multi-channel optical waveguide is horizontally polished and removed, and the reflection surface 5 is formed at a time to form a gold thin film 25B having a thickness of 300 nm. As shown in FIG. 6, a two-dimensionally parallel multi-channel optical path conversion component 1 having a light entrance end 4 and a light exit end 6 each having 8 cores × 2 rows was produced by vapor deposition so as to be thick. .

【００８７】作製した多チャネル光路変換部品１の反射
面の反射効率ならびに光路変換角を測定したところ、そ
れぞれ９６％、９０°となった。なお、光の入射端４、
及び出射端６の、列の上下におけるコアの相対的な位置
ずれは±２μｍであった。When the reflection efficiency and the optical path conversion angle of the reflection surface of the manufactured multi-channel optical path conversion component 1 were measured, they were 96% and 90 °, respectively. In addition, the light incident end 4,
The relative displacement of the cores in the upper and lower rows of the emission end 6 was ± 2 μm.

【００８８】なお、本実施例では８心×２列の入出射端
を有した９０°の光路変換を取り上げたが、本実施例６
の内容を逸脱しない範囲であれば、光路変換の角度、及
び光導波路の本数等は任意で構わない。また、光導波路
として埋込型光導波路の一例を取り上げたが、光ファイ
バを用いてもよいことは言うまでもない。また、光導波
路の材料としては、ＵＶ硬化型エポキシ系樹脂を一例に
取り上げたが、本実施例６の内容を逸脱しない範囲で、
ガラス等の無機材料から高分子系光学材料まで、任意の
材料を組み合わせても構わない。さらに、基板としては
シリコン基板の他に、ガラス基板などを用いてもよいこ
とはいうまでもない。In the present embodiment, a 90 ° optical path conversion having an input / output end of 8 cores × 2 rows has been described.
The angle of optical path conversion, the number of optical waveguides, and the like may be arbitrarily set as long as they do not deviate from the contents of the above. Although an example of a buried optical waveguide has been described as an optical waveguide, it goes without saying that an optical fiber may be used. Further, as a material of the optical waveguide, a UV-curable epoxy-based resin is taken as an example, but within a range not departing from the content of the sixth embodiment,
Arbitrary materials may be combined from inorganic materials such as glass to high-molecular optical materials. Further, it goes without saying that a glass substrate or the like may be used as the substrate in addition to the silicon substrate.

【００８９】また、基板は光導波路の研磨に影響を与え
なければ、光導波路から剥離しなくてもよく、また剥離
する必要がある場合には、基板と光導波路を剥離させる
ための犠牲層として、水溶性樹脂以外に、希塩酸によっ
て容易に溶解する銅薄膜等を用いても構わない。また、
本実施例６では、反射面にコーティングする材料として
金を用いたが、用いる波長等に応じて銀、アルミニウ
ム、銅等の金属、あるいは誘電体多層膜等を用いても構
わず、また膜厚も必要に応じて変更して構わない。さら
に、前記薄膜をコーティングした上に、保護層として樹
脂等のコーティングを施しても構わない。また、前記金
属等をコーティングする方法として、真空蒸着の他にイ
オンビームスパッタやメッキ等の技術を適用してもよ
い。If the substrate does not affect the polishing of the optical waveguide, the substrate does not have to be separated from the optical waveguide. If the substrate needs to be separated, it can be used as a sacrificial layer for separating the substrate and the optical waveguide. In addition to the water-soluble resin, a copper thin film or the like that is easily dissolved by dilute hydrochloric acid may be used. Also,
In the sixth embodiment, gold is used as a material for coating the reflection surface. However, a metal such as silver, aluminum, or copper, or a dielectric multilayer film or the like may be used according to the wavelength to be used. May be changed as needed. Further, after coating the thin film, a coating of a resin or the like may be applied as a protective layer. Further, as a method of coating the metal or the like, a technique such as ion beam sputtering or plating may be applied in addition to vacuum deposition.

【００９０】（実施例７）図８は、本発明による実施例
７の多チャネルビームスプリッタの概略構成を示す図で
あり、図８（ａ）は、多チャネルビームスプリッタの斜
視図、図８（ｂ）は、多チャネルビームスプリッタの作
用を説明するための図である。(Embodiment 7) FIG. 8 is a diagram showing a schematic configuration of a multi-channel beam splitter according to a seventh embodiment of the present invention. FIG. 8 (a) is a perspective view of the multi-channel beam splitter, and FIG. (b) is a diagram for explaining the operation of the multi-channel beam splitter.

【００９１】本実施例７の多チャネルビームスプリッタ
は、図８（ａ）及び図８（ｂ）に示すように、３次元光
導波路からなるビームスプリッタで、前記図１に記載の
曲がり光導波路の反射面５に膜厚を制御した金薄膜２５
をコーティングして所望の反射率及び透過率を付与し、
さらに透過光を伝搬するための別の３次元光導波路ある
いは曲がり導波路を接続して１×２あるいは２×２のビ
ームスプリッタとしたものを、その光の入出射方向を揃
えて積層した多チャネルビームスプリッタである。As shown in FIGS. 8A and 8B, the multi-channel beam splitter according to the seventh embodiment is a beam splitter composed of a three-dimensional optical waveguide, and is different from the bent optical waveguide shown in FIG. Gold film 25 with controlled thickness on reflection surface 5
To impart the desired reflectance and transmittance,
Further, a multi-channel structure in which another three-dimensional optical waveguide or bent waveguide for transmitting transmitted light is connected to form a 1 × 2 or 2 × 2 beam splitter and the light input and output directions are aligned and stacked. It is a beam splitter.

【００９２】本実施例７の多チャネルビームスプリッタ
は、例えば、反射光の伝搬方向を９０°偏向させ、また
透過光は直進させる１×２のビームスプリッタを、その
光の入出射端を除いてクラッドに埋め込み、これを一定
の間隔をおいて８チャネル積層した例である。The multi-channel beam splitter according to the seventh embodiment includes, for example, a 1 × 2 beam splitter which deflects the propagation direction of reflected light by 90 ° and transmits transmitted light straight, except for the input and output ends of the light. In this example, eight channels are buried in a clad and are stacked at regular intervals.

【００９３】該ビームスプリッタにおいて、入射端４に
入射した光は、反射面５において、その反射率が５０％
となるよう金薄膜２５の膜厚を設定した場合、反射光と
透過光に概ね１対１の割合で分岐され、それぞれの出射
端６、２７から出射される。In the beam splitter, the light incident on the incident end 4 has a reflectance of 50% on the reflection surface 5.
When the thickness of the gold thin film 25 is set so as to satisfy the following conditions, the light is branched into reflected light and transmitted light at a ratio of approximately one to one, and emitted from the respective emission ends 6 and 27.

【００９４】従って、入射端４、反射光の出射端６、透
過光の出射端２７に例えばそれぞれ８チャネルの光ファ
イバアレイを接続すれば、上記の光分岐を８チャネル同
時に行うことができる。また、反射面５にコーティング
する金薄膜２５の膜厚を注意深く制御することにより、
反射率を任意に変化させることも可能である。Therefore, if, for example, an eight-channel optical fiber array is connected to the input end 4, the reflected light output end 6, and the transmitted light output end 27, the above-described optical branching can be performed simultaneously for eight channels. Also, by carefully controlling the thickness of the gold thin film 25 coated on the reflection surface 5,
It is also possible to change the reflectivity arbitrarily.

【００９５】なお、本実施例７では、主に１×２のビー
ムスプリッタを取り上げたが、本実施例７の内容を逸脱
しない範囲であれば、２×２のビームスプリッタでも構
わない。また、反射光の反射角として９０°の例を取り
上げたが、本実施例７の内容を逸脱しない範囲であれば
任意で構わない。また、チャネル数として８チャネルの
例を取り上げたが、本実施例７の内容を逸脱しない範囲
であれば、チャネル数は任意で構わず、さらに、隣り合
うビームスプリッタの間隔は必ずしも等間隔でなくても
構わない。また、光の分岐比は、本実施例７の内容を逸
脱しない範囲であれば、任意に設定して構わないことは
言うまでもない。また、本実施例７のビームスプリッタ
に接続する光部品として光ファイバを一例に示したが、
光導波路、光素子、あるいはこれらの任意の組合せを用
いても差し支えない。In the seventh embodiment, a 1 × 2 beam splitter is mainly used. However, a 2 × 2 beam splitter may be used as long as the content of the seventh embodiment is not deviated. Further, an example in which the reflection angle of the reflected light is 90 ° has been described, but any angle may be used as long as it does not deviate from the contents of the seventh embodiment. Although the example of eight channels is taken as the number of channels, the number of channels may be arbitrarily set as long as the content does not deviate from the contents of the seventh embodiment, and the intervals between adjacent beam splitters are not necessarily equal. It does not matter. It goes without saying that the light branching ratio may be set arbitrarily as long as it does not deviate from the contents of the seventh embodiment. Although an optical fiber is shown as an example as an optical component connected to the beam splitter of the seventh embodiment,
An optical waveguide, an optical element, or any combination thereof may be used.

【００９６】なお、本実施例７では、反射面にコーティ
ングする材料として金を用いたが、用いる波長等に応じ
て銀、アルミニウム、銅等の金属、あるいは誘電体多層
膜等を用いてよいことは言うまでもなく、また、膜厚も
必要に応じて変更して構わない。さらに、前記薄膜をコ
ーティングした上に、保護層として樹脂等のコーティン
グを施しても構わない。In the seventh embodiment, gold is used as a material for coating the reflection surface. However, a metal such as silver, aluminum, copper, or a dielectric multilayer film may be used according to the wavelength used. Needless to say, the film thickness may be changed as needed. Further, after coating the thin film, a coating of a resin or the like may be applied as a protective layer.

【００９７】（実施例８）図９は、本実施例８の多チャ
ネル光路変換部品及びビームスプリッタの製作方法にお
ける各工程時の概略構成例を示す図である。(Embodiment 8) FIG. 9 is a diagram showing a schematic configuration example at each step in a method of manufacturing a multi-channel optical path conversion component and a beam splitter according to an eighth embodiment.

【００９８】本実施例８の多チャネル光路変換部品は、
まず、図９（ａ）に示すように、前記実施例３と同様に
作製した、一辺が３ｍｍの８心の多チャネル光路変換部
品１の反射面５に、金薄膜２５を１００ｎｍの膜厚で蒸
着して反射率を概ね５０％としたのち、片端に４５°の
傾斜端面２３を有し、かつ前記多チャネル光路変換部品
１とコアの配列等が一致する幅３ｍｍ、長さ３ｍｍの多
チャネル光導波路１７を実施例３と同様に準備して、図
９（ｂ）に示すように、前記傾斜端面２３におけるコア
層２１を前記多チャネル光路変換部品の反射面５におけ
るコア層２と一致させるため、多チャネル光路変換部品
１のコア層２に可視光を入射し、多チャネル光導波路１
７のコア層２１に光が入る位置を目安として位置合わせ
を行った。The multi-channel optical path conversion component according to the eighth embodiment includes:
First, as shown in FIG. 9A, a gold thin film 25 having a thickness of 100 nm is formed on the reflection surface 5 of an eight-core multi-channel optical path conversion component 1 having a side of 3 mm and manufactured in the same manner as in the third embodiment. After vapor deposition to make the reflectivity approximately 50%, a multi-channel having a 45 ° inclined end face 23 at one end and a width of 3 mm and a length of 3 mm matching the arrangement of the multi-channel optical path conversion component 1 and the core and the like. An optical waveguide 17 is prepared in the same manner as in the third embodiment, and as shown in FIG. 9B, the core layer 21 on the inclined end surface 23 is made to coincide with the core layer 2 on the reflection surface 5 of the multi-channel optical path conversion component. Therefore, visible light is incident on the core layer 2 of the multi-channel optical path conversion component 1, and the multi-channel optical waveguide 1
The alignment was performed using the position where light enters the core layer 21 of No. 7 as a guide.

【００９９】続いて、図９（ｃ）に示すように、コアと
屈折率の等しい液状のＵＶ硬化型光学接着剤１５で全て
の間隙を充填して紫外線を照射し、前記多チャネル光路
変換部品１と多チャネル光導波路１７を固定した。Subsequently, as shown in FIG. 9C, all gaps are filled with a liquid UV-curable optical adhesive 15 having the same refractive index as that of the core and irradiated with ultraviolet rays, thereby obtaining the multi-channel optical path conversion component. 1 and the multi-channel optical waveguide 17 were fixed.

【０１００】これを温水中に４０分間浸けて水溶性の樹
脂層１９を溶解させ、多チャネル光導波路１７側に付着
していたシリコン基板１８を剥離して、多チャネルビー
ムスプリッタ（８心の１×２ビームスプリッタ）２６を
作製した。This was immersed in warm water for 40 minutes to dissolve the water-soluble resin layer 19, and the silicon substrate 18 attached to the multi-channel optical waveguide 17 was peeled off. × 2 beam splitter) 26 was produced.

【０１０１】作製した多チャネルビームスプリッタの光
分岐比を測定したところ、反射光と透過光の比は概ね１
対１となった。When the light branching ratio of the manufactured multi-channel beam splitter was measured, the ratio of the reflected light to the transmitted light was about 1.
It became one.

【０１０２】なお、本実施例８では８心の光導波路を用
いた１×２のビームスプリッタを取り上げたが、本実施
例８の内容を逸脱しない範囲であれば、光導波路の本数
等は任意で構わない。また、基板は、取扱う上で支障な
ければ光導波路から剥離しなくてもよく、また剥離する
必要のある場合には、基板と光導波路を剥離させるため
の犠牲層として、水溶性樹脂以外に、希塩酸によって容
易に溶解する銅薄膜等を用いても構わない。さらに、基
板としてはシリコン基板の他に、ガラス基板などを用い
てもよいことはいうまでもない。In the eighth embodiment, a 1 × 2 beam splitter using an eight-core optical waveguide is described. However, the number of optical waveguides and the like can be set as desired without departing from the contents of the eighth embodiment. It does not matter. In addition, the substrate does not have to be peeled from the optical waveguide if it does not hinder handling, and when it is necessary to peel, as a sacrificial layer for peeling the substrate and the optical waveguide, in addition to the water-soluble resin, A copper thin film or the like easily dissolved by dilute hydrochloric acid may be used. Further, it goes without saying that a glass substrate or the like may be used as the substrate in addition to the silicon substrate.

【０１０３】なお、本実施例８では、反射面にコーティ
ングする材料として金を用いたが、用いる波長等に応じ
て銀、アルミニウム、銅等の金属、あるいは誘電体多層
膜等を用いてよいことは言うまでもなく、また膜厚につ
いても、制御が行える範囲内で任意に設定して構わな
い。さらに、上記薄膜をコーティングした上に、保護層
として樹脂等のコーティングを施しても構わない。ま
た、前記金属等をコーティングする方法として、真空蒸
着の他にイオンビームスパッタやメッキ等の技術を適用
してもよい。In the eighth embodiment, gold is used as a material for coating the reflection surface. However, a metal such as silver, aluminum, or copper, or a dielectric multilayer film may be used according to the wavelength used. Needless to say, the film thickness may be arbitrarily set as long as the control can be performed. Further, after coating the thin film, a coating of a resin or the like may be applied as a protective layer. Further, as a method of coating the metal or the like, a technique such as ion beam sputtering or plating may be applied in addition to vacuum deposition.

【０１０４】（実施例９）図１０は、本実施例９の多チ
ャネル光路変換部品及びビームスプリッタの製作方法に
おける各工程時の概略構成例を示す図である。(Embodiment 9) FIG. 10 is a diagram showing a schematic configuration example at each step in a method of manufacturing a multi-channel optical path conversion component and a beam splitter according to a ninth embodiment.

【０１０５】本実施例９の多チャネル光路変換部品は、
まず、図１０（ａ）に示すように、前記実施例３と同様
に作製した、一辺が３ｍｍの８心の多チャネル光路変換
部品１Ａ，１Ｂを２つ用意し、一方の多チャネル光路変
換部品１Ａの反射面５Ａに金薄膜２５を１００ｎｍの厚
みに蒸着して反射率を概ね５０％としたのち、もう一方
の多チャネル光路変換部品１Ｂの反射面５Ｂを、それぞ
れの反射面が一致するよう向かい合わせ、どちらか一方
の多チャネル光路変換部品のコアに可視光を入射し、他
方の多チャネル光路変換部品のコアに光が入る位置を目
安として位置合わせを行う。The multi-channel optical path conversion component of the ninth embodiment is
First, as shown in FIG. 10 (a), two 8-channel multi-channel optical path conversion components 1A and 1B each having a side of 3 mm and prepared in the same manner as in the third embodiment are prepared. After the gold thin film 25 is vapor-deposited to a thickness of 100 nm on the reflection surface 5A of 1A to make the reflectance approximately 50%, the reflection surface 5B of the other multi-channel optical path conversion component 1B is made to match the respective reflection surfaces. Face-to-face alignment is performed using visible light incident on the core of one of the multi-channel optical path conversion components and light entering the core of the other multi-channel optical path conversion component as a guide.

【０１０６】続いて、図１０（ｂ）に示すように、コア
と屈折率の等しい液状のＵＶ硬化型光学接着剤１５を用
いて前記反射面の接続部及びその周辺部を固定し、８心
の２×２ビームスプリッタ２６を作製した。Subsequently, as shown in FIG. 10B, the connection portion of the reflection surface and the peripheral portion thereof are fixed by using a liquid UV-curable optical adhesive 15 having the same refractive index as that of the core, and the eight cores are formed. 2 × 2 beam splitter 26 was manufactured.

【０１０７】作製した多チャネルビームスプリッタの光
分岐比を測定したところ、４つの光導波路コア端面のど
れに光を入射しても、出射する反射光と透過光の比は概
ね１対１となった。When the light splitting ratio of the manufactured multi-channel beam splitter was measured, the ratio of the reflected light to the transmitted light was approximately 1: 1 regardless of the light incident on any of the four optical waveguide core end faces. Was.

【０１０８】なお、本実施例９では、それぞれ８心の光
導波路コアが並列した２×２のビームスプリッタを取り
上げたが、本実施例９の内容を逸脱しない範囲であれ
ば、光導波路の分岐角、及び光導波路の本数等は任意で
構わない。In the ninth embodiment, a 2 × 2 beam splitter in which eight optical waveguide cores are arranged in parallel has been described. However, as long as the content of the ninth embodiment is not deviated, the branching of the optical waveguide is performed. The angle, the number of optical waveguides, and the like may be arbitrary.

【０１０９】また、本実施例９では、反射面にコーティ
ングする材料として金を用いたが、用いる波長等に応じ
て、銀、アルミニウム、銅等の金属、あるいは誘電体多
層膜を用いてよいことは言うまでもなく、また、膜厚に
ついても、制御が行える範囲内で任意に設定して構わな
い。さらに、前記薄膜をコーティングした上に、保護層
として樹脂等のコーティングを施しても構わない。ま
た、前記金属等をコーティングする方法として、真空蒸
着の他にイオンビームスパッタやメッキ等の技術を適用
してもよい。In the ninth embodiment, gold is used as the material for coating the reflection surface. However, a metal such as silver, aluminum, or copper, or a dielectric multilayer film may be used according to the wavelength used. Needless to say, the film thickness may be arbitrarily set as long as the control can be performed. Further, after coating the thin film, a coating of a resin or the like may be applied as a protective layer. Further, as a method of coating the metal or the like, a technique such as ion beam sputtering or plating may be applied in addition to vacuum deposition.

【０１１０】（実施例１０）本発明による実施例１０
は、本発明の多チャネル光路変換部品作製方法及び多チ
ャネルビームスプリッタ作製方法のうち、多チャネル光
路変換部品を作製する例について示すものである。(Embodiment 10) Embodiment 10 according to the present invention
Fig. 2 shows an example of manufacturing a multi-channel optical path conversion component among the multi-channel optical path conversion component manufacturing method and the multi-channel beam splitter manufacturing method of the present invention.

【０１１１】図１１は、本実施例１０の多チャネル光路
変換部品の製作方法における各工程時の概略構成例を示
す図である。FIG. 11 is a diagram showing a schematic configuration example at each step in the method of manufacturing the multi-channel optical path conversion component of the tenth embodiment.

【０１１２】本実施例１０の多チャネル光路変換部品
は、まず、図１１（ａ）に示すように、シリコン基板１
８上に膜厚３μｍの水溶性の樹脂層１９を挟んで作製さ
れた、ＵＶ硬化型のエポキシ系樹脂を材料とした下部ク
ラッド２０、コア層２１、及び上部クラッド２２からな
る埋込型の８チャネルの直線光導波路を、幅３ｍｍ、長
さ６ｍｍに切り出して基板に垂直な側壁を作製した。前
記光導波路のコア層２１の屈折率は１.５２７、上部及
び下部クラッド２０、２２の屈折率はいずれも１.５１
０である。また、８チャネルのコア層２１の断面形状は
いずれも幅４０μｍ、高さ４０μｍの矩形であり、コア
間隔は２５０μｍである。The multi-channel optical path conversion component according to the tenth embodiment includes a silicon substrate 1 as shown in FIG.
An embedded type 8 comprising a lower clad 20, a core layer 21, and an upper clad 22 made of a UV-curable epoxy resin and formed with a 3 μm-thick water-soluble resin layer 19 interposed therebetween. The straight optical waveguide of the channel was cut out to a width of 3 mm and a length of 6 mm to produce a side wall perpendicular to the substrate. The refractive index of the core layer 21 of the optical waveguide is 1.527, and the refractive indices of the upper and lower claddings 20 and 22 are both 1.51.
0. The cross-sectional shape of each of the core layers 21 of eight channels is a rectangle having a width of 40 μm and a height of 40 μm, and the core interval is 250 μm.

【０１１３】次に、図１１（ｂ）に示すように、前記直
線光導波路の中央をコアを横断する方向に分断し、続け
て図１１（ｃ）に示すように、それぞれの多チャネル光
導波路の分断された断面を傾斜角が４５°となるよう研
磨して傾斜端面２３Ａ，２３Ｂを作製し、片端に４５°
の傾斜端面を有する、幅３ｍｍ、長さ３ｍｍの一対の多
チャネル光導波路１７Ａ，１７Ｂを作製する。これによ
り、該傾斜端面２３Ａ，２３Ｂにおいて、コアと平行な
側壁からコアまでの間隔は左右対称となった。Next, as shown in FIG. 11B, the center of the linear optical waveguide is divided in a direction transverse to the core, and then, as shown in FIG. The cut sections are polished so that the inclination angle becomes 45 ° to produce inclined end faces 23A and 23B, and 45 ° is applied to one end.
A pair of multi-channel optical waveguides 17A and 17B having a width of 3 mm and a length of 3 mm having the inclined end surfaces described above is manufactured. As a result, at the inclined end surfaces 23A and 23B, the distance from the side wall parallel to the core to the core is symmetrical.

【０１１４】続いて、図１１（ｄ）に示すように、作製
した一対の多チャネル光導波路の４５°傾斜端面２３
Ａ，２３Ｂを向かい合わせ、該一対の多チャネル光導波
路のコアと平行な側面を、平坦な部材に押し当てて揃
え、傾斜端面におけるコア層２１Ａ，２１Ｂのコアを横
断する方向の位置合わせを概ね受動的に行い、引き続き
高さ方向にコアを位置合わせしてＶ字型に接続する。Subsequently, as shown in FIG. 11D, the 45 ° inclined end faces 23 of the pair of multi-channel optical waveguides thus manufactured are formed.
A, 23B are opposed to each other, and the side surfaces parallel to the cores of the pair of multi-channel optical waveguides are pressed against a flat member to be aligned, and the alignment of the inclined end surfaces in the direction crossing the cores of the core layers 21A, 21B is generally performed. This is done passively, and then the core is aligned in the height direction and connected in a V-shape.

【０１１５】引き続き、図１１（ｅ）に示すように、コ
アと屈折率の等しい液状のＵＶ硬化型光学接着剤１５を
Ｖ字型の間隙に充填して紫外光を照射し、該一対の多チ
ャネル光導波路１７Ａ，１７ＢをＶ字型に固定する。Subsequently, as shown in FIG. 11 (e), a liquid UV-curable optical adhesive 15 having the same refractive index as the core is filled in the V-shaped gap and irradiated with ultraviolet light, whereby the pair of multi-layers is irradiated. The channel optical waveguides 17A and 17B are fixed in a V-shape.

【０１１６】次に、図１１（ｆ）に示すように、これを
温水中に４０分間浸けて水溶性の樹脂層１９を溶解さ
せ、シリコン基板１８を剥離する。Next, as shown in FIG. 11 (f), this is immersed in warm water for 40 minutes to dissolve the water-soluble resin layer 19, and the silicon substrate 18 is peeled off.

【０１１７】その後、前記Ｖ字型の多チャネル光導波路
における接続部分の先端部１６を水平に研磨して除去
し、反射面５を一括して形成し、図１に示すような多チ
ャネル光路変換部品１を作製した。Thereafter, the tip portion 16 of the connection portion in the V-shaped multi-channel optical waveguide is horizontally polished and removed, and the reflection surface 5 is formed at a time. Part 1 was produced.

【０１１８】作製した多チャネル光路変換部品１の光の
入射端４から波長８５０ｎｍのレーザ光を入射し、出射
端６における光強度を測定することにより、反射面５の
反射効率を測定したところ、８チャネルの平均で９２％
であった。また、光路の変換角度は９０°であった。The laser light having a wavelength of 850 nm was incident from the light incident end 4 of the manufactured multi-channel optical path conversion component 1 and the light intensity at the output end 6 was measured to measure the reflection efficiency of the reflecting surface 5. 92% on average for 8 channels
Met. The conversion angle of the optical path was 90 °.

【０１１９】なお、本実施例１０では、主に８チャネル
の光導波路を用いた９０°の多心光路変換部品作製方法
を取り上げたが、本実施例１０の内容を逸脱しない範囲
であれば、光路変換の角度、及び光導波路の本数は任意
で構わない。また、本実施例１０の作製方法は、多チャ
ネルビームスプリッタの作製に適用してもよいことは言
うまでもない。さらに、光導波路として埋込型光導波路
の一例を取り上げたが、光ファイバを用いてもよいこと
は言うまでもない。また、光導波路の材料としては、Ｕ
Ｖ硬化型エポキシ系樹脂を一例に取り上げたが、本実施
例の内容を逸脱しない範囲で、ガラス等の無機材料から
高分子系光学材料まで、任意の材料を組合せても構わな
い。さらに、基板としてはシリコン基板の他に、ガラス
基板などを用いてもよいことはいうまでもない。In the tenth embodiment, a method of manufacturing a 90 ° multi-core optical path conversion component using an eight-channel optical waveguide is mainly described. However, as long as the contents do not deviate from the contents of the tenth embodiment, The angle of optical path conversion and the number of optical waveguides may be arbitrary. Further, it goes without saying that the manufacturing method of the tenth embodiment may be applied to the manufacturing of a multi-channel beam splitter. Further, an example of a buried optical waveguide has been described as an optical waveguide, but it goes without saying that an optical fiber may be used. As a material of the optical waveguide, U
Although the V-curable epoxy resin is taken as an example, any material from an inorganic material such as glass to a polymer optical material may be combined without departing from the contents of the present embodiment. Further, it goes without saying that a glass substrate or the like may be used as the substrate in addition to the silicon substrate.

【０１２０】また、多チャネル光導波路間を充填する液
状の光学接着剤としてＵＶ硬化型エポキシ系樹脂を一例
に取り上げたが、本実施例の内容を逸脱しない範囲であ
れば、熱硬化型の光学接着剤などを用いてもよく、また
一対の傾斜端面の接続部分が上記樹脂で保護されていれ
ば、本実施例の内容を逸脱しない範囲で、光学接着剤以
外の他の接着剤を用いてもよいことはいうまでもない。Further, a UV-curable epoxy resin is taken as an example of the liquid optical adhesive for filling the space between the multi-channel optical waveguides, but a thermosetting optical resin may be used as long as it does not deviate from the contents of the present embodiment. An adhesive or the like may be used, and if the connection between the pair of inclined end surfaces is protected by the above resin, using an adhesive other than the optical adhesive without departing from the contents of the present embodiment. Needless to say, it is good.

【０１２１】また、基板は光導波路の研磨に影響を与え
なければ、光導波路から剥離しなくてもよく、また剥離
する必要のある場合には、基板と光導波路を剥離させる
ための犠牲層として、水溶性樹脂以外に、希塩酸によっ
て容易に溶解する銅薄膜等を用いても構わない。If the substrate does not affect the polishing of the optical waveguide, the substrate does not have to be peeled off from the optical waveguide. If the substrate needs to be peeled off, the substrate serves as a sacrificial layer for peeling off the substrate and the optical waveguide. In addition to the water-soluble resin, a copper thin film or the like that is easily dissolved by dilute hydrochloric acid may be used.

【０１２２】（実施例１１）本発明による実施例１１
は、本発明の多チャネル光路変換部品作製方法及び多チ
ャネルビームスプリッタ作製方法のうち、多チャネル光
路変換部品を作製する例について示すものである。(Embodiment 11) Embodiment 11 of the present invention
Fig. 2 shows an example of manufacturing a multi-channel optical path conversion component among the multi-channel optical path conversion component manufacturing method and the multi-channel beam splitter manufacturing method of the present invention.

【０１２３】図１２は、本実施例１１の多チャネル光路
変換部品の製作方法における各工程時の概略構成例を示
す図である。FIG. 12 is a diagram showing an example of a schematic configuration at each step in the method of manufacturing a multi-channel optical path conversion component according to the eleventh embodiment.

【０１２４】本実施例１１の多チャネル光路変換部品
は、まず、図１２（ａ）に示すように、シリコン基板１
８上に膜厚３μｍの水溶性の樹脂層１９を挟んで作製さ
れた、ＵＶ硬化型のエポキシ系樹脂を材料とした下部ク
ラッド２０、コア層２１、及び上部クラッド２２からな
る埋込型の８チャネルの直線光導波路を、幅３ｍｍ、長
さ６ｍｍに切り出して基板に垂直な側壁を作製した。前
記光導波路のコア層２１の屈折率は１.５２７、上部及
び下部クラッド２０、２２の屈折率はいずれも１.５１
０である。また、８チャネルのコア層２１の断面形状は
いずれも幅４０μｍ、高さ４０μｍの矩形であり、コア
間隔は２５０μｍである。The multi-channel optical path conversion component of the eleventh embodiment is, as shown in FIG.
An embedded type 8 comprising a lower clad 20, a core layer 21, and an upper clad 22 made of a UV-curable epoxy resin and formed with a 3 μm-thick water-soluble resin layer 19 interposed therebetween. The straight optical waveguide of the channel was cut out to a width of 3 mm and a length of 6 mm to produce a side wall perpendicular to the substrate. The refractive index of the core layer 21 of the optical waveguide is 1.527, and the refractive indices of the upper and lower claddings 20 and 22 are both 1.51.
0. The cross-sectional shape of each of the core layers 21 of eight channels is a rectangle having a width of 40 μm and a height of 40 μm, and the core interval is 250 μm.

【０１２５】次に、図１２（ｂ）に示すように、断面形
状が頂角８８°のＶ字型に加工された切削刃２８を用い
て、コア層２１を横断する方向に前記多チャネル光導波
路を切削し分断することにより、切削した溝に沿って傾
斜角が４５°で、かつ傾斜端面２３Ａ，２３Ｂにおける
コアのサイズや基板裏面からコアまでの厚み等が概ね等
しく、コアの間隔や形状が概ね左右対称である、一対の
多チャネル光導波路１７Ａ，１７Ｂを作製する。Next, as shown in FIG. 12 (b), the multi-channel optical waveguide is traversed through the core layer 21 by using a cutting blade 28 having a V-shaped cross section with an apex angle of 88 °. By cutting and dividing the wave path, the inclination angle is 45 ° along the cut groove, and the core size and the thickness from the back surface of the substrate to the core at the inclined end surfaces 23A and 23B are substantially equal, and the interval and shape of the cores A pair of multi-channel optical waveguides 17A and 17B, which are generally symmetrical, are manufactured.

【０１２６】続いて、図１２（ｃ）に示すように、作製
した一対の多チャネル光導波路の４５°の傾斜端面２３
Ａ，２３Ｂを向かい合わせ、該一対の多チャネル光導波
路のコアと平行な側面を、平坦な部材に押し当てて揃
え、傾斜端面におけるコア層２１Ａ，２１Ｂのコアを横
断する方向の位置合わせを概ね受動的に行い、引き続き
傾斜端面接続部の先端を揃えることにより高さ方向にも
コアを概ね受動的に位置合わせをしてＶ字型に接続す
る。Subsequently, as shown in FIG. 12C, the 45 ° inclined end faces 23 of the pair of multi-channel optical waveguides thus manufactured are formed.
A, 23B are opposed to each other, and the side surfaces parallel to the cores of the pair of multi-channel optical waveguides are pressed against a flat member to be aligned, and the alignment of the inclined end surfaces in the direction crossing the cores of the core layers 21A, 21B is generally performed. The cores are passively connected, and the cores are generally passively aligned in the height direction by aligning the tips of the inclined end face connection portions, and connected in a V-shape.

【０１２７】引き続き、図１２（ｄ）に示すように、コ
アと屈折率の等しい液状のＵＶ硬化型光学接着剤１５を
Ｖ字型の間隙に充填して紫外光を照射し、前記一対の多
チャネル光導波路１７Ａ，１７ＢをＶ字型に固定する。Subsequently, as shown in FIG. 12 (d), a liquid UV curable optical adhesive 15 having the same refractive index as the core is filled in the V-shaped gap, and irradiated with ultraviolet light, whereby the pair of multi-layered adhesives is irradiated. The channel optical waveguides 17A and 17B are fixed in a V-shape.

【０１２８】次に、図１２（ｅ）に示すように、これを
温水中に４０分間浸けて水溶性の樹脂層１９を溶解さ
せ、シリコン基板１８を剥離する。Next, as shown in FIG. 12E, this is immersed in warm water for 40 minutes to dissolve the water-soluble resin layer 19, and the silicon substrate 18 is peeled off.

【０１２９】その後、前記Ｖ字型の多チャネル光導波路
における接続部分の先端１６を水平に研磨して除去し、
反射面５を一括して形成し、図１に示すような多チャネ
ル光路変換部品１を作製した。Thereafter, the tip 16 of the connection portion in the V-shaped multi-channel optical waveguide is horizontally polished and removed.
The reflection surface 5 was formed at a time, and the multi-channel optical path conversion component 1 as shown in FIG. 1 was manufactured.

【０１３０】作製した多チャネル光路変換部品１の光の
入射端４から波長８５０ｎｍのレーザ光を入射し、出射
端６における光強度を測定することにより反射面５の反
射効率を測定したところ、８チャネルの平均で９４％で
あった。また、光路の変換角度は９０°であった。A laser beam having a wavelength of 850 nm was incident from the light incident end 4 of the manufactured multi-channel optical path conversion component 1 and the light intensity at the output end 6 was measured to measure the reflection efficiency of the reflecting surface 5. The average for the channel was 94%. The conversion angle of the optical path was 90 °.

【０１３１】なお、本実施例１１では、主に８チャネル
の光導波路を用いた９０°の多心光路変換部品作製方法
を取り上げたが、本実施例１１の内容を逸脱しない範囲
であれば、光路変換の角度、及び光導波路の本数は任意
で構わない。また、本作製方法は多チャネルビームスプ
リッタの作製に適用してもよいことは言うまでもない。
さらに、光導波路として埋込型光導波路の一例を取り上
げたが、光ファイバを用いてもよいことは言うまでもな
い。また、光導波路の材料としては、ＵＶ硬化型エポキ
シ系樹脂を一例に取り上げたが、本実施例１１の内容を
逸脱しない範囲で、ガラス等の無機材料から高分子系光
学材料まで、任意の材料を組合せても構わない。さら
に、基板としてはシリコン基板の他に、ガラス基板など
を用いてもよいことはいうまでもない。In the eleventh embodiment, a method of manufacturing a 90 ° multi-core optical path conversion component using an eight-channel optical waveguide is mainly described. However, if it does not deviate from the contents of the eleventh embodiment, The angle of optical path conversion and the number of optical waveguides may be arbitrary. Needless to say, the present manufacturing method may be applied to the manufacture of a multi-channel beam splitter.
Further, an example of a buried optical waveguide has been described as an optical waveguide, but it goes without saying that an optical fiber may be used. In addition, as a material of the optical waveguide, a UV-curable epoxy resin is taken as an example, but any material from an inorganic material such as glass to a polymer optical material can be used without departing from the contents of Example 11. May be combined. Further, it goes without saying that a glass substrate or the like may be used as the substrate in addition to the silicon substrate.

【０１３２】また、多チャネル光導波路間を充填する液
状の光学接着剤として、ＵＶ硬化型エポキシ系樹脂を一
例に取り上げたが、本実施例１１の内容を逸脱しない範
囲であれば、熱硬化型の光学接着剤などを用いてもよ
く、また一対の傾斜端面の接続部分が前記樹脂で保護さ
れていれば、本実施例１１の内容を逸脱しない範囲で、
光学接着剤以外の他の接着剤を用いてもよいことは言う
までもない。The UV-curable epoxy resin is taken as an example of the liquid optical adhesive for filling the space between the multi-channel optical waveguides. Optical adhesive or the like may be used, and if the connection between the pair of inclined end faces is protected by the resin, the content of the eleventh embodiment is not deviated.
It goes without saying that an adhesive other than the optical adhesive may be used.

【０１３３】なお、基板は光導波路の研磨に影響を与え
なければ、光導波路から剥離しなくてもよく、また剥離
する必要のある場合には、基板と光導波路を剥離させる
ための犠牲層として、水溶性樹脂以外に、希塩酸によっ
て容易に剥離する銅薄膜を用いても構わない。The substrate does not need to be separated from the optical waveguide as long as it does not affect the polishing of the optical waveguide. If the substrate needs to be separated, it may be used as a sacrificial layer for separating the substrate and the optical waveguide. In addition to the water-soluble resin, a copper thin film which is easily peeled off with diluted hydrochloric acid may be used.

【０１３４】以上の実施例１乃至１１において、光導波
路としては、石英系光ファイバならびにＵＶ硬化型エポ
キシ樹脂からなる埋込型光導波路を用いた例を示した
が、光ファイバとしては、他に例えば石英系の多成分ガ
ラス光ファイバ、ハードクラッド石英光ファイバ、ある
いはプラスチック光ファイバ等を用いてもよく、また埋
込型光導波路としては、例えば、アクリル系樹脂、ポリ
イミド、ポリアクリレート、ポリカーボネート、シリコ
ーン樹脂等の高分子材料や、ガラス系等の無機材料から
なる光導波路等を用いてもよいことはいうまでもない。In the first to eleventh embodiments, a quartz optical fiber and a buried optical waveguide made of a UV-curable epoxy resin are used as the optical waveguides. For example, a silica-based multi-component glass optical fiber, a hard clad silica optical fiber, or a plastic optical fiber may be used.As the embedded optical waveguide, for example, acrylic resin, polyimide, polyacrylate, polycarbonate, silicone It goes without saying that an optical waveguide made of a polymer material such as a resin or an inorganic material such as a glass may be used.

【０１３５】また、光導波路を整列させ、あるいは作製
する基板としては、ガラス及びシリコンを材料として例
に挙げたが、前記実施例１乃至１１の範囲を逸脱しない
範囲であれば、セラミックスやアクリル樹脂等を材料と
して用いても構わない。Further, as a substrate on which the optical waveguides are aligned or formed, glass and silicon are taken as examples, but ceramics and acrylic resin may be used as long as they do not deviate from the range of the above-mentioned Examples 1 to 11. Etc. may be used as a material.

【０１３６】以上、本発明を、前記実施例に基づき具体
的に説明したが、本発明は、前記実施例に限定されるも
のではなく、その要旨を逸脱しない範囲において種々変
更可能であることは勿論である。As described above, the present invention has been specifically described based on the above-described embodiment. However, the present invention is not limited to the above-described embodiment, and may be variously modified without departing from the gist thereof. Of course.

【０１３７】[0137]

【発明の効果】本願において開示される発明のうち、代
表的なものによって得られる効果を簡単に説明すれば、
以下のとおりである。Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

【０１３８】本発明によれば、装置内光配線において、
光配線の任意の位置に容易に挿入でき、かつ小型で高密
度な光路変換が可能な多チャネルの光路変換部品を得る
ことができる。According to the present invention, in the optical wiring in the device,
It is possible to obtain a multi-channel optical path conversion component that can be easily inserted into an arbitrary position of the optical wiring, and that can perform a small-sized and high-density optical path conversion.

【０１３９】また、前記多チャネルの光路変換部品を用
いて小型で高密度な光路変換が可能な多チャネルビーム
スプリッタを容易に得ることができる。Further, it is possible to easily obtain a small-sized multi-channel beam splitter capable of high-density optical path conversion by using the multi-channel optical path conversion component.

【０１４０】すなわち、本発明による多チャネル光路変
換部品作製方法及び多チャネルビームスプリッタ作製方
法を用いると、装置内光配線の高密度化あるいは光モジ
ュールの高集積化に有効な光部品として期待されている
小型の光路変換部品、及び多チャネルビームスプリッタ
を簡易かつ高密度に作製することができる。That is, when the method for manufacturing a multi-channel optical path conversion component and the method for manufacturing a multi-channel beam splitter according to the present invention are used, they are expected to be effective optical components for increasing the density of optical wiring in a device or for highly integrating optical modules. A small optical path conversion component and a multi-channel beam splitter can be easily and densely manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明による実施例１の多チャネル光路変換部
品の概略構成を示す模式図である。FIG. 1 is a schematic diagram illustrating a schematic configuration of a multi-channel optical path conversion component according to a first embodiment of the present invention.

【図２】本発明による実施例２の多チャネル光路変換部
品の作製方法を説明するための図である。FIG. 2 is a view for explaining a method of manufacturing a multi-channel optical path conversion component according to a second embodiment of the present invention.

【図３】本発明による実施例３の多チャネル光路変換部
品の作製方法を説明するための図である。FIG. 3 is a view for explaining a method of manufacturing a multi-channel optical path conversion component according to a third embodiment of the present invention.

【図４】本発明による実施例４の多チャネル光路変換部
品の作製方法を説明するための図である。FIG. 4 is a view for explaining a method of manufacturing a multi-channel optical path conversion component of Example 4 according to the present invention.

【図５】本発明による実施例５の多チャネル光路変換部
品の概略構成を示す模式図である。FIG. 5 is a schematic diagram showing a schematic configuration of a multi-channel optical path conversion component according to a fifth embodiment of the present invention.

【図６】本発明による実施例６の多チャネル光路変換部
品の概略構成を示す模式図である。FIG. 6 is a schematic diagram illustrating a schematic configuration of a multi-channel optical path conversion component according to a sixth embodiment of the present invention.

【図７】本実施例６の多チャネル光路変換部品の作製方
法を説明するための図である。FIG. 7 is a diagram for explaining a method of manufacturing the multi-channel optical path conversion component of the sixth embodiment.

【図８】本発明による実施例７の多チャネルビームスプ
リッタの概略構成を示す模式図である。FIG. 8 is a schematic diagram illustrating a schematic configuration of a multi-channel beam splitter according to a seventh embodiment of the present invention.

【図９】本発明による実施例８の多チャネルビームスプ
リッタの作製方法を説明するための図である。FIG. 9 is a diagram for explaining a method of manufacturing a multi-channel beam splitter according to an eighth embodiment of the present invention.

【図１０】本発明による実施例９の多チャネルビームス
プリッタの作製方法を説明するための図である。FIG. 10 is a diagram for explaining a method of manufacturing a multi-channel beam splitter according to a ninth embodiment of the present invention.

【図１１】本発明による実施例１０の多チャネル光路変
換部品の作製方法を説明するための図である。FIG. 11 is a view for explaining a method of manufacturing a multi-channel optical path conversion component of Example 10 according to the present invention.

【図１２】本発明による実施例１１の多チャネル光路変
換部品の作製方法を説明するための図である。FIG. 12 is a diagram for explaining a method of manufacturing a multi-channel optical path conversion component of Example 11 according to the present invention.

【図１３】従来の光路変換方法を示す模式図である。FIG. 13 is a schematic diagram showing a conventional optical path conversion method.

【図１４】従来の別の光路変換方法を示す模式図であ
る。FIG. 14 is a schematic diagram showing another conventional optical path conversion method.

【図１５】曲がり光導波路を用いた光路変換方法を示す
模式図である。FIG. 15 is a schematic diagram showing an optical path conversion method using a bent optical waveguide.

【符号の説明】[Explanation of symbols]

１，１Ａ，１Ｂ…光路変換部品（多チャネル光路変換部
品）、２…曲がり光導波路のコア層、３…クラッド層、
４…入射端、５，５Ａ，５Ｂ…反射面、６…反射光の出
射端、７…入射端が並列した平面、８…反射面が並列し
た平面、９…出射端が並列した平面、１０，１０Ａ，１
０Ｂ…傾斜端面、１１，１１Ａ，１１Ｂ…マルチモード
光ファイバ、１２…ガラスブロック、１３…接着剤、１
４Ａ，１４Ｂ…光ファイバのコア層、１５…光学接着
剤、１６…先端部、１７，１７Ａ，１７Ｂ…多チャネル
光導波路、１８…シリコン基板、１９…水溶性の樹脂
層、２０，２０Ａ，２０Ｂ…下部クラッド、２１，２１
Ａ，２１Ｂ…コア層、２２，２２Ａ，２２Ｂ…上部クラ
ッド、２３，２３Ａ，２３Ｂ…傾斜端面、２４…三角柱
状のガラスブロック、２５，２５Ａ，２５Ｂ…金薄膜、
２６…多チャネルビームスプリッタ、２７…透過光の出
射端、２８…切削刃、３０…プラスチック光ファイバ、
３１…面型光素子、３２…実装基板、３３…半円柱状部
材、３４…コア層、３５…クラッド層、３６…傾斜端
面、３７…面発光レーザ、３８…レーザ光、３９…基
板、４０…クラッド層。1, 1A, 1B: optical path conversion component (multi-channel optical path conversion component), 2: core layer of bent optical waveguide, 3: clad layer,
4 incident end, 5, 5A, 5B reflecting surface, 6 reflected light emitting end, 7 plane incident side parallel, 8 plane reflecting side parallel, 9 plane exiting side parallel, 10 , 10A, 1
0B: inclined end face, 11, 11A, 11B: multimode optical fiber, 12: glass block, 13: adhesive, 1
4A, 14B: Optical fiber core layer, 15: Optical adhesive, 16: Tip, 17, 17A, 17B: Multi-channel optical waveguide, 18: Silicon substrate, 19: Water-soluble resin layer, 20, 20A, 20B ... Lower cladding, 21, 21
A, 21B: core layer, 22, 22A, 22B: upper clad, 23, 23A, 23B: inclined end face, 24: triangular prism-shaped glass block, 25, 25A, 25B: gold thin film,
26: Multi-channel beam splitter, 27: Exit end of transmitted light, 28: Cutting blade, 30: Plastic optical fiber,
DESCRIPTION OF SYMBOLS 31 ... Surface type optical element, 32 ... Mounting board, 33 ... Semi-cylindrical member, 34 ... Core layer, 35 ... Cladding layer, 36 ... Sloped end face, 37 ... Surface emitting laser, 38 ... Laser light, 39 ... Substrate, 40 ... cladding layer.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 新井 芳光 東京都千代田区大手町二丁目３番１号 日 本電信電話株式会社内 (72)発明者 安東 泰博 東京都千代田区大手町二丁目３番１号 日 本電信電話株式会社内 Ｆターム(参考） 2H047 KA03 KA12 KB01 KB03 KB08 LA09 QA04 QA05 RA00 TA04 2H050 AB03Z AB42Z AC01 AC81 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Yoshimitsu Arai Inventor, 2-3-1 Otemachi, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (72) Yasuhiro Ando 2-3-3, Otemachi, Chiyoda-ku, Tokyo No. 1 F-term in Nippon Telegraph and Telephone Corporation (reference) 2H047 KA03 KA12 KB01 KB03 KB08 LA09 QA04 QA05 RA00 TA04 2H050 AB03Z AB42Z AC01 AC81

Claims (27)

【特許請求の範囲】[Claims] 【請求項１】 少なくとも片端に傾斜端面を有し、かつ
前記傾斜端面の傾斜角及び傾斜端面における光導波路コ
アのサイズ、配置等が概ね等しい一対の光導波路の、前
記傾斜端面同士を対向させ、この傾斜端面における光導
波路のコアが概ね一致するように前記傾斜端面同士を接
続し、前記一対の光導波路が概ねＶ字型に固定され、前
記Ｖ字型の光導波路の頂部を除去してコアを所定の位置
まで露出させて反射面が設けられていることを特徴とす
る光路変換部品。1. A pair of optical waveguides having an inclined end face at least at one end, and having substantially the same inclination angle and an optical waveguide core size, arrangement, and the like at the inclined end face, wherein the inclined end faces are opposed to each other, The inclined end faces are connected to each other so that the cores of the optical waveguides at the inclined end faces are substantially coincident with each other, the pair of optical waveguides is fixed in a substantially V-shape, and the top of the V-shaped optical waveguide is removed. An optical path conversion component characterized in that a reflection surface is provided by exposing the light to a predetermined position. 【請求項２】 ３次元光導波路のコアに、光の入射端、
出射端及び反射面を有し、前記反射面における反射を利
用して所定の角度に光の伝搬方向を偏向する曲がり光導
波路からなる多チャネル光路変換部品であって、前記多
チャネル光部品が、曲がり角の概ね等しい複数の前記曲
がり光導波路により構成され、前記複数の曲がり光導波
路は、その光の入射端、出射端及び反射面がそれぞれ独
立の平面上に所定の間隔で並列に積層されており、かつ
前記複数の曲がり光導波路のコアは、光の入射端、出射
端及び反射面を除いて、コアより屈折率の低い物質で覆
っていることを特徴とする多チャネル光路変換部品。2. A light incident end, a core of a three-dimensional optical waveguide,
A multi-channel optical path conversion component comprising a bent optical waveguide having an emission end and a reflection surface, and deflecting a propagation direction of light to a predetermined angle using reflection at the reflection surface, wherein the multi-channel optical component is A plurality of the bent optical waveguides having substantially equal bending angles are formed, and the plurality of the bent optical waveguides are such that the light incident end, the light emitting end, and the reflection surface thereof are stacked in parallel at predetermined intervals on independent planes, respectively. And a core of the plurality of bent optical waveguides is covered with a material having a lower refractive index than the core except for an incident end, an exit end, and a reflection surface of light. 【請求項３】 少なくとも片端に傾斜端面を有し、かつ
前記傾斜端面の傾斜角及び傾斜端面における複数の光導
波路コアのサイズ、配置等が概ね等しい一対の多チャネ
ル光導波路の、前記傾斜端面同士を対向させ、この傾斜
端面における光導波路のコアが概ね一致するように前記
傾斜端面同士を接続し、前記一対の多チャネル光導波路
を概ねＶ字型に固定し、前記Ｖ字型の多チャネル光導波
路の頂部を除去してコアを所定の位置まで露出させて反
射面を設けていることを特徴とする請求項２に記載の多
チャネル光路変換部品。3. A pair of multi-channel optical waveguides having a pair of multi-channel optical waveguides having a slanted end surface at least at one end and having substantially the same angle of inclination and a plurality of optical waveguide cores on the slanted end surface in terms of size and arrangement. The inclined end faces are connected to each other so that the cores of the optical waveguides at the inclined end faces substantially coincide with each other, and the pair of multi-channel optical waveguides are fixed in a substantially V-shape, and the V-shaped multi-channel optical waveguide is fixed. The multi-channel optical path conversion component according to claim 2, wherein a reflection surface is provided by exposing the core to a predetermined position by removing a top portion of the wave path. 【請求項４】 一対の多チャネル光導波路の傾斜端面に
おけるコアが概ね一致するように前記傾斜端面同士を接
続し、前記多チャネル光導波路のコアと屈折率が概ね等
しい液状の光学接着剤で接続部の間隙を充填して接着
し、前記光学接着剤あるいは他の接着剤で残部が埋めら
れていることを特徴とする請求項３に記載の多チャネル
光路変換部品。4. The pair of multi-channel optical waveguides are connected to each other so that the cores at the inclined end surfaces of the multi-channel optical waveguides substantially coincide with each other, and are connected by a liquid optical adhesive having a refractive index substantially equal to that of the core of the multi-channel optical waveguide. 4. The multi-channel optical path changing component according to claim 3, wherein a gap between the portions is filled and bonded, and the remaining portion is filled with the optical adhesive or another adhesive. 【請求項５】 一対の多チャネル光導波路の傾斜端面に
おけるコアが概ね一致するように前記傾斜端面同士を接
続し、前記多チャネル光導波路のコアと屈折率が概ね等
しい液状の光学接着剤で接続部の間隙を充填し、液晶ポ
リマー等の有機高分子材料又はガラス等の無機材料から
なる、概ねＶ字型の断面形状を有する部材を前記一対の
多チャネル光導波路間に挿入し、接着剤等を用いて多チ
ャネル光導波路に固定したことを特徴とする請求項３又
は４に記載の多チャネル光路変換部品。5. The inclined end faces of the pair of multi-channel optical waveguides are connected to each other so that the cores at the inclined end faces are substantially coincident with each other, and are connected by a liquid optical adhesive having a refractive index substantially equal to that of the core of the multi-channel optical waveguide. A member having a generally V-shaped cross-sectional shape made of an organic polymer material such as a liquid crystal polymer or an inorganic material such as glass is inserted between the pair of multi-channel optical waveguides, and an adhesive or the like is filled. The multi-channel optical path conversion component according to claim 3, wherein the multi-channel optical path conversion component is fixed to the multi-channel optical waveguide by using. 【請求項６】 前記多チャネル光路変換部品の反射面
に、金属あるいは誘電体多層膜をコーティングしたこと
を特徴とする請求項１乃至５のうちいずれか１項に記載
の光路変換部品。6. The optical path conversion component according to claim 1, wherein a reflection surface of the multi-channel optical path conversion component is coated with a metal or a dielectric multilayer film. 【請求項７】 前記多チャネル光路変換部品と概ね等し
い大きさのＶ字型の間隙を構成し、前記多チャネル光路
変換部品を、前記傾斜端面のコアが一致するように位置
合わせした一対の多チャネル光導波路間に挿入し、前記
多チャネル光導波路のコアと屈折率が概ね等しい液状の
光学接着剤で全ての間隙を充填して固定し、接続した前
記多チャネル光導波路の頂部を除去して前記多チャネル
光導波路のコアを所定の位置まで露出させて反射面を構
成し、この反射面に金属あるいは誘電体多層膜をコーテ
ィングし、反射を利用して光の伝搬方向を偏向する多チ
ャネルの曲がり光導波路の、光の入出射端をそれぞれ２
次元的に並列させたことを特徴とする請求項６に記載の
多チャネル光路変換部品。7. A pair of multi-paths, which form a V-shaped gap having a size substantially equal to that of the multi-channel optical path conversion component, and align the multi-channel optical path conversion components such that the cores of the inclined end surfaces coincide with each other. Inserted between the channel optical waveguides, filling and fixing all the gaps with a liquid optical adhesive having a refractive index substantially equal to the core of the multi-channel optical waveguide, and removing the top of the connected multi-channel optical waveguide. The core of the multi-channel optical waveguide is exposed to a predetermined position to form a reflection surface, and the reflection surface is coated with a metal or dielectric multilayer film, and the multi-channel optical waveguide deflects the propagation direction of light using reflection. The light input and output ends of the bent optical waveguide are
7. The multi-channel optical path conversion component according to claim 6, wherein the components are arranged in a dimensionally parallel manner. 【請求項８】 前記傾斜端面を有する多チャネル光導波
路として、コアと平行な側面のうち少なくとも一方を基
板に垂直な平面とした一対の多チャネル光導波路の、前
記側面を位置合わせの基準面として用いることを特徴と
する請求項２乃至７のうちいずれか１項に記載の多チャ
ネル光路変換部品。8. A pair of multi-channel optical waveguides having at least one of a side surface parallel to a core and a plane perpendicular to a substrate as the multi-channel optical waveguide having the inclined end surface, wherein the side surfaces are used as reference surfaces for positioning. The multi-channel optical path conversion component according to claim 2, wherein the component is used. 【請求項９】 前記光導波路として、石英などの無機材
料、エポキシ系樹脂、ポリイミド、ポリメチルメタクリ
レートなどの有機高分子材料、これらの組合わせのうち
いずれか１つから成る、埋込型の方形光導波路を用いた
ことを特徴とする請求項１乃至８のうちいずれか１項に
記載の光路変換部品。9. A buried rectangle made of one of an inorganic material such as quartz, an organic resin material such as epoxy resin, polyimide, and polymethyl methacrylate, and a combination thereof as the optical waveguide. The optical path conversion component according to claim 1, wherein an optical waveguide is used. 【請求項１０】 前記光導波路として、石英系光ファイ
バ、ハードクラッド石英光ファイバ、プラスチック光フ
ァイバのうちいずれか１つを用いたことを特徴とする請
求項１乃至８のうちいずれか１項に記載の光路変換部
品。10. The optical waveguide according to claim 1, wherein one of a silica-based optical fiber, a hard clad silica optical fiber, and a plastic optical fiber is used as the optical waveguide. Optical path conversion component as described. 【請求項１１】 ３次元光導波路のコアに、光の入射
端、出射端及び反射面を有し、前記反射面における反射
を利用して所定の角度に光の伝搬方向を偏向する曲がり
光導波路からなる多チャネル光路変換部品製作方法であ
って、少なくとも片端に傾斜端面を有し、かつ前記傾斜
端面の傾斜角及び傾斜端面における複数の光導波路コア
のサイズ、配置等が概ね等しい一対の光導波路を形成
し、前記傾斜端面同士を対向させ、この傾斜端面におけ
る光導波路のコアが概ね一致するように前記傾斜端面同
士を接続し、前記一対の光導波路を概ねＶ字型に固定
し、前記Ｖ字型の多チャネル光導波路の頂部を除去して
コアを所定の位置まで露出させて反射面を形成すること
を特徴とする光路変換部品製作方法。11. A curved optical waveguide having a light input end, an output end, and a reflection surface in a core of a three-dimensional optical waveguide, and deflecting a light propagation direction to a predetermined angle by using reflection on the reflection surface. A method of manufacturing a multi-channel optical path conversion component comprising: a pair of optical waveguides having at least one end having an inclined end face, and having a substantially equal size and arrangement of a plurality of optical waveguide cores on the inclined end face and the inclined end face. Are formed, the inclined end faces are opposed to each other, the inclined end faces are connected so that the cores of the optical waveguides at the inclined end faces are substantially coincident with each other, and the pair of optical waveguides are fixed in a substantially V-shape. A method of manufacturing an optical path-changing component, comprising removing a top of a U-shaped multi-channel optical waveguide, exposing a core to a predetermined position, and forming a reflection surface. 【請求項１２】 一対の多チャネル光導波路の傾斜端面
におけるコアが概ね一致するように前記傾斜端面同士を
位置合わせして接続し、前記多チャネル光導波路のコア
と屈折率が概ね等しい液状の光学接着剤で接続部の間隙
を充填して接着し、さらに前記光学接着剤あるいは他の
接着剤で残部を埋めることを特徴とする請求項１１に記
載の多チャネル光路変換部品作製方法。12. A liquid optical device having a pair of multi-channel optical waveguides, the inclined end surfaces of which are aligned and connected so that the cores at the inclined end surfaces of the pair of multi-channel optical waveguides substantially coincide with each other. The method of manufacturing a multi-channel optical path conversion component according to claim 11, wherein the gap between the connecting portions is filled with an adhesive and bonded, and the remaining portion is filled with the optical adhesive or another adhesive. 【請求項１３】 一対の多チャネル光導波路の傾斜端面
におけるコアが概ね一致するように前記傾斜端面同士を
位置合わせして接続し、前記多チャネル光導波路のコア
と屈折率が概ね等しい液状の光学接着剤で接続部の間隙
を充填して接着し、さらに液晶ポリマー等の有機高分子
材料又はガラス等の無機材料からなる、概ねＶ字型の断
面形状を有する部材を前記一対の多チャネル光導波路間
に挿入し、接着剤等を用いて多チャネル光導波路に固定
することを特徴とする請求項１２に記載の多チャネル光
路変換部品作製方法。13. A liquid optical device having a pair of multi-channel optical waveguides, wherein the inclined end surfaces are aligned and connected so that the cores at the inclined end surfaces of the pair of multi-channel optical waveguides substantially coincide with each other, and the refractive index of the liquid optical system is substantially equal to that of the core of the multi-channel optical waveguide. A member having a substantially V-shaped cross-sectional shape, made of an organic polymer material such as a liquid crystal polymer or an inorganic material such as glass, is bonded to the pair of multi-channel optical waveguides by filling the gaps between the connecting portions with an adhesive and bonding. 13. The method for manufacturing a multi-channel optical path conversion component according to claim 12, wherein the multi-channel optical path conversion component is inserted between the optical fibers and fixed to the multi-channel optical waveguide using an adhesive or the like. 【請求項１４】 前記多チャネル光路変換部品の反射面
に、金属あるいは誘電体多層膜をコーティングすること
を特徴とする請求項１２又は１３に記載の多チャネル光
路変換部品作製方法。14. The method for manufacturing a multi-channel optical path conversion component according to claim 12, wherein a reflection surface of the multi-channel optical path conversion component is coated with a metal or a dielectric multilayer film. 【請求項１５】 前記多チャネル光路変換部品と概ね等
しい大きさのＶ字型の間隙を構成し、前記多チャネル光
路変換部品を、前記傾斜端面のコアが一致するように位
置合わせした一対の多チャネル光導波路間に挿入し、前
記多チャネル光導波路のコアと屈折率が概ね等しい液状
の光学接着剤を用いて全ての間隙を充填して固定し、接
続した前記多チャネル光導波路の頂部を除去して前記多
チャネル光導波路のコアを所定の位置まで露出させて反
射面を形成したのち、金属あるいは誘電体多層膜をコー
ティングして、この工程を少なくとも１回以上繰り返す
ことにより、反射を利用して光の伝搬方向を偏向する多
チャネルの曲がり光導波路の、光の入出射端をそれぞれ
２次元的に並列させることを特徴とする請求項１２乃至
１４のうちいずれか１項に記載の多チャネル光路変換部
品作製方法。15. A pair of multi-paths, which form a V-shaped gap having a size substantially equal to that of the multi-channel optical path conversion component, and position the multi-channel optical path conversion component such that the cores of the inclined end surfaces coincide with each other. It is inserted between the channel optical waveguides, and all gaps are filled and fixed using a liquid optical adhesive having a refractive index substantially equal to the core of the multi-channel optical waveguide, and the top of the connected multi-channel optical waveguide is removed. After exposing the core of the multi-channel optical waveguide to a predetermined position to form a reflection surface, coating a metal or dielectric multilayer film, and repeating this process at least once, thereby utilizing reflection. 15. The multi-channel bent optical waveguide for deflecting the light propagation direction by two-dimensionally arranging the light input and output ends of the light. 2. The method for producing a multi-channel optical path conversion component according to claim 1. 【請求項１６】 前記傾斜端面を有する多チャネル光導
波路として、コアと平行な側面のうち少なくとも一方を
基板に垂直な平面とした一対の多チャネル光導波路を用
い、前記側面を基準面とすることにより、コアを横断す
る方向の位置合わせを概ね受動的に行うことを特徴とす
る請求項１２乃至１５のうちいずれか１項に記載の多チ
ャネル光路変換部品作製方法。16. A pair of multi-channel optical waveguides having at least one of a side surface parallel to a core and a plane perpendicular to a substrate is used as the multi-channel optical waveguide having the inclined end surface, and the side surface is used as a reference surface. 16. The method of manufacturing a multi-channel optical path conversion component according to claim 12, wherein the alignment in the direction crossing the core is performed substantially passively. 【請求項１７】 同一基板上に作製し、あるいは整列さ
せて固定した多チャネル光導波路を、概ねＶ字型の断面
形状を有する切削刃を用いてコアを横断する方向に切削
することにより、傾斜端面におけるコアのサイズや間隔
が概ね等しく、さらに位置や形状等が概ね左右対称であ
る一対の多チャネル光導波路を作製し、これを請求項２
に記載の一対の多チャネル光導波路として用いることを
特徴とする請求項１２乃至１６のうちいずれか１項に記
載の多チャネル光路変換部品作製方法。17. A multi-channel optical waveguide fabricated or aligned and fixed on the same substrate is cut in a direction traversing the core by using a cutting blade having a substantially V-shaped cross section. A pair of multi-channel optical waveguides having substantially equal core sizes and spacings at the end faces, and further having substantially symmetrical positions and shapes, are manufactured.
The method for manufacturing a multi-channel optical path conversion component according to any one of claims 12 to 16, wherein the method is used as a pair of multi-channel optical waveguides. 【請求項１８】 前記光導波路として、石英などの無機
材料、エポキシ系樹脂、ポリイミド、ポリメチルメタク
リレートなどの有機高分子材料、これらの組合わせのう
ちいずれか１つから成る、埋込型の方形光導波路を用い
ることを特徴とする請求項１１乃至１７のうちいずれか
１項に記載の光路変換部品製作方法。18. A buried rectangle made of one of an inorganic material such as quartz, an organic resin material such as epoxy resin, polyimide and polymethyl methacrylate, and a combination thereof as the optical waveguide. The method for manufacturing an optical path-changing component according to any one of claims 11 to 17, wherein an optical waveguide is used. 【請求項１９】 前記光導波路として、石英系光ファイ
バ、ハードクラッド石英光ファイバ、プラスチック光フ
ァイバのうちいずれか１つを用いることを特徴とする請
求項１１乃至１７のうちいずれか１項に記載の光路変換
部品製作方法。19. The optical waveguide according to claim 11, wherein one of a silica-based optical fiber, a hard clad silica optical fiber, and a plastic optical fiber is used as the optical waveguide. Optical path conversion parts manufacturing method. 【請求項２０】 ３次元光導波路のコアに、光の入射
端、出射端及び反射面を有し、前記反射面における反射
を利用して所定の角度に光の伝搬方向を偏向する曲がり
光導波路からなる光路変換部品が、曲がり角の概ね等し
い複数の前記曲がり光導波路により構成される光路変換
部品を有する、３次元光導波路で構成されたビームスプ
リッタであって、前記曲がり光導波路で、反射面に所定
の反射率及び透過率を有する金属膜あるいは誘電体多層
膜を有するものに、透過光を伝搬するための別の３次元
光導波路あるいは曲がり光導波路を接続した構造を有
し、前記ビームスプリッタが光を入射あるいは出射する
コア端面を除いて、コアより屈折率の低い物質で覆われ
ていることを特徴とするビームスプリッタ。20. A bent optical waveguide having a light input end, a light output end, and a reflection surface in a core of a three-dimensional optical waveguide, and deflecting a light propagation direction to a predetermined angle using reflection on the reflection surface. Is a beam splitter configured with a three-dimensional optical waveguide, which has an optical path conversion component configured by a plurality of bent optical waveguides having substantially the same bending angles, wherein the bent optical waveguide has a reflection surface. It has a structure in which another three-dimensional optical waveguide or a bent optical waveguide for transmitting transmitted light is connected to a metal film or a dielectric multilayer film having a predetermined reflectance and transmittance, and the beam splitter has A beam splitter characterized by being covered with a material having a lower refractive index than that of a core, except for a core end surface from which light enters or exits. 【請求項２１】 ３次元光導波路のコアに、光の入射
端、出射端及び反射面を有し、前記反射面における反射
を利用して所定の角度に光の伝搬方向を偏向する曲がり
光導波路からなる多チャネル光路変換部品が、曲がり角
の概ね等しい複数の前記曲がり光導波路により構成され
る多チャネル光路変換部品を有する、３次元光導波路で
構成された多チャネルのビームスプリッタであって、前
記曲がり光導波路で、反射面に所定の反射率及び透過率
を有する金属膜あるいは誘電体多層膜を有するものに、
透過光を伝搬するための別の３次元光導波路あるいは曲
がり光導波路を接続した構造を有し、前記多チャネルビ
ームスプリッタが、複数の前記ビームスプリッタを光の
入出射方向を揃えて積層した構造を有し、かつ前記複数
のビームスプリッタが光を入射あるいは出射するコア端
面を除いて、コアより屈折率の低い物質で覆われている
ことを特徴とする多チャネルビームスプリッタ。21. A bent optical waveguide having a light input end, an output end, and a reflection surface in a core of a three-dimensional optical waveguide, and deflecting a light propagation direction to a predetermined angle by using reflection on the reflection surface. A multi-channel optical path conversion component comprising: a multi-channel optical path conversion component having a plurality of bent optical waveguides having substantially the same bend angles, wherein the bend is a multi-channel beam splitter configured by a three-dimensional optical waveguide. In an optical waveguide having a metal film or a dielectric multilayer film having a predetermined reflectance and transmittance on the reflection surface,
It has a structure in which another three-dimensional optical waveguide or a bent optical waveguide for transmitting transmitted light is connected, and the multi-channel beam splitter has a structure in which a plurality of the beam splitters are stacked with light input and output directions aligned. A multi-channel beam splitter, wherein the plurality of beam splitters are covered with a material having a lower refractive index than the core, except for an end face of the core from which light enters or exits. 【請求項２２】 請求項２乃至１０のうちいずれか１項
に記載の多チャネル光路変換部品のうち、曲がり光導波
路のなす角が概ね９０°である部品の反射面に、所定の
反射率及び透過率を得るよう、金属あるいは誘電体多層
膜の膜厚を制御しながらコーティングしたのち、少なく
とも片端に概ね４５°の傾斜端面を有し、前記傾斜端面
におけるコアの配列が前記多チャネル光路変換部品の反
射面と概ね等しいもう一つの多チャネル光導波路を、前
記傾斜端面におけるコアが前記多チャネル光路変換部品
の反射面におけるコアと一致するように位置合わせし
て、その接続部の間隙を前記多チャネル光導波路あるい
は多チャネル光路変換部品のコアと概ね等しい屈折率を
有する液状の光学接着剤を用いて充填し固定することに
より、小型かつ多チャネルの１×２ビームスプリッタを
得ることを特徴とする多チャネルビームスプリッタ作製
方法。22. The multi-channel optical path conversion component according to claim 2, wherein a bent surface of the bent optical waveguide has an angle of approximately 90 °, and the reflection surface has a predetermined reflectance and After coating while controlling the thickness of the metal or dielectric multilayer film so as to obtain the transmittance, at least one end has an inclined end surface of approximately 45 °, and the core arrangement on the inclined end surface is such that the multi-channel optical path conversion component Another multi-channel optical waveguide, which is substantially equal to the reflection surface of the multi-channel optical path conversion component, is positioned so that the core at the inclined end face coincides with the core at the reflection surface of the multi-channel optical path conversion component. By filling and fixing with a liquid optical adhesive having a refractive index approximately equal to that of the core of the channel optical waveguide or the multi-channel optical path conversion component, a compact and multi-channel Multichannel beam splitter manufacturing method characterized by obtaining a 1 × 2 beam splitter of Le. 【請求項２３】 請求項２乃至１０のうちいずれか１項
に記載の多チャネル光路変換部品の反射面に、所定の反
射率及び透過率を得るよう、金属あるいは誘電体多層膜
の膜厚を制御しながらコーティングしたのち、反射面に
おけるコアの配列が前記多チャネル光路変換部品と概ね
等しく、かつ反射面に金属あるいは誘電体多層膜のコー
ティングを施さないもう一つの請求項２乃至１０のうち
いずれか１項に記載の多チャネル光路変換部品を、それ
ぞれの反射面におけるコアが一致するように位置合わせ
して、その接続部の間隙を前記多チャネル光導波路ある
いは多チャネル光路変換部品のコアと概ね等しい屈折率
を有する液状の光学接着剤を用いて充填し固定すること
により、小型かつ多チャネルの２×２のビームスプリッ
タを得ることを特徴とする請求項２２に記載の多チャネ
ルビームスプリッタ作製方法。23. The metal or dielectric multilayer film is formed on the reflection surface of the multi-channel optical path conversion component according to claim 2 so as to obtain predetermined reflectance and transmittance. 11. The method according to claim 2, wherein after coating under control, the arrangement of the cores on the reflection surface is substantially equal to that of the multi-channel optical path conversion component, and the reflection surface is not coated with a metal or dielectric multilayer film. The multi-channel optical path conversion component according to claim 1 or 2 is aligned so that the cores on the respective reflection surfaces coincide with each other, and the gap between the connecting portions is substantially equal to the core of the multi-channel optical waveguide or the multi-channel optical path conversion component. A small and multi-channel 2 × 2 beam splitter is obtained by filling and fixing with a liquid optical adhesive having an equal refractive index. Multichannel beam splitter manufacturing method according to claim 22. 【請求項２４】 傾斜端面を有する多チャネル光導波路
として、コアと平行な側面のうち少なくとも一方を基板
に垂直な平面とした一対の多チャネル光導波路を用い、
前記側面を基準面とすることにより、コアを横断する方
向の位置合わせを概ね受動的に行うことを特徴とする請
求項２２又は２３に記載の多チャネルビームスプリッタ
作製方法。24. As the multi-channel optical waveguide having an inclined end face, a pair of multi-channel optical waveguides having at least one of a side surface parallel to the core and a plane perpendicular to the substrate is used.
24. The method for manufacturing a multi-channel beam splitter according to claim 22, wherein the positioning in the direction crossing the core is performed substantially passively by using the side surface as a reference surface. 【請求項２５】 同一基板上に作製し、あるいは整列さ
せて固定した多チャネル光導波路を、概ねＶ字型の断面
形状を有する切削刃を用いてコアを横断する方向に切削
することにより、傾斜端面におけるコアのサイズや間隔
が概ね等しく、さらに位置や形状等が概ね左右対称であ
る一対の多チャネル光導波路を作製し、これを請求項２
に記載の一対の多チャネル光導波路として用いることを
特徴とする請求項２２乃至２４のうちいずれか１項に記
載の多チャネルビームスプリッタ作製方法。25. A multi-channel optical waveguide manufactured or aligned and fixed on the same substrate is cut in a direction crossing the core by using a cutting blade having a substantially V-shaped cross-sectional shape. A pair of multi-channel optical waveguides having substantially equal core sizes and spacings at the end faces, and further having substantially symmetrical positions and shapes, are manufactured.
The method of manufacturing a multi-channel beam splitter according to any one of claims 22 to 24, wherein the method is used as a pair of multi-channel optical waveguides described in (1). 【請求項２６】 前記光導波路として、石英などの無機
材料、エポキシ系樹脂、ポリイミド、ポリメチルメタク
リレートなどの有機高分子材料、これらの組合わせのう
ちいずれか１つから成る、埋込型の方形光導波路を用い
ることを特徴とする請求項２０乃至２５のうちいずれか
１項に記載のビームスプリッタ作製方法。26. A buried rectangle made of one of an inorganic material such as quartz, an organic resin material such as an epoxy resin, polyimide, and polymethyl methacrylate, and a combination thereof as the optical waveguide. 26. The method for manufacturing a beam splitter according to claim 20, wherein an optical waveguide is used. 【請求項２７】 前記光導波路として、石英系光ファイ
バ、ハードクラッド石英光ファイバ、プラスチック光フ
ァイバのうちいずれか１つを用いることを特徴とする請
求項２０乃至２５のうちいずれか１項に記載のビームス
プリッタ作製方法。27. The optical waveguide according to claim 20, wherein one of a silica optical fiber, a hard clad silica optical fiber, and a plastic optical fiber is used as the optical waveguide. Beam splitter manufacturing method.
JP2000002791A 2000-01-11 2000-01-11 Multi-channel optical path changing component and manufacturing method thereof, and multi-channel beam splitter and manufacturing method thereof Expired - Fee Related JP3833863B2 (en)

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JP2006184773A (en) * 2004-12-28 2006-07-13 Mitsui Chemicals Inc Optical waveguide and opto-electric hybrid substrate having the same
JP2006276892A (en) * 2006-07-07 2006-10-12 Mitsubishi Electric Corp Method for manufacturing optical path conversion connector
JP2007148455A (en) * 2002-09-20 2007-06-14 Toppan Printing Co Ltd Optical waveguide
JP2008293040A (en) * 2003-10-06 2008-12-04 Mitsui Chemicals Inc Optical waveguide having micromirror formed by laser beam machining
JP2008304615A (en) * 2007-06-06 2008-12-18 Hitachi Cable Ltd Optical waveguide with mirror and method of manufacturing the same
JP2009223339A (en) * 2009-07-06 2009-10-01 Mitsubishi Electric Corp Optical path changing connector, its manufacturing method and circuit board equipped with the optical path changing connector
JP2013076893A (en) * 2011-09-30 2013-04-25 National Institute Of Advanced Industrial & Technology Multilayer waveguide type optical input/output terminal

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007148455A (en) * 2002-09-20 2007-06-14 Toppan Printing Co Ltd Optical waveguide
JP4501949B2 (en) * 2002-09-20 2010-07-14 凸版印刷株式会社 Manufacturing method of optical waveguide
JP2004280009A (en) * 2003-03-19 2004-10-07 Toppan Printing Co Ltd Optical waveguide and its manufacturing method
JP2008293040A (en) * 2003-10-06 2008-12-04 Mitsui Chemicals Inc Optical waveguide having micromirror formed by laser beam machining
JP2006184773A (en) * 2004-12-28 2006-07-13 Mitsui Chemicals Inc Optical waveguide and opto-electric hybrid substrate having the same
JP2006276892A (en) * 2006-07-07 2006-10-12 Mitsubishi Electric Corp Method for manufacturing optical path conversion connector
JP4607063B2 (en) * 2006-07-07 2011-01-05 三菱電機株式会社 Manufacturing method of optical path conversion connector
JP2008304615A (en) * 2007-06-06 2008-12-18 Hitachi Cable Ltd Optical waveguide with mirror and method of manufacturing the same
JP2009223339A (en) * 2009-07-06 2009-10-01 Mitsubishi Electric Corp Optical path changing connector, its manufacturing method and circuit board equipped with the optical path changing connector
JP2013076893A (en) * 2011-09-30 2013-04-25 National Institute Of Advanced Industrial & Technology Multilayer waveguide type optical input/output terminal

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