ITTO20030421A1 - Pompa da vuoto compatta - Google Patents

Pompa da vuoto compatta

Info

Publication number
ITTO20030421A1
ITTO20030421A1 IT000421A ITTO20030421A ITTO20030421A1 IT TO20030421 A1 ITTO20030421 A1 IT TO20030421A1 IT 000421 A IT000421 A IT 000421A IT TO20030421 A ITTO20030421 A IT TO20030421A IT TO20030421 A1 ITTO20030421 A1 IT TO20030421A1
Authority
IT
Italy
Prior art keywords
vacuum pump
compact vacuum
compact
pump
vacuum
Prior art date
Application number
IT000421A
Other languages
English (en)
Inventor
Fausto Casaro
Missier Cinzia Del
Romina Silvia Gotta
Cristian Maccarrone
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT000421A priority Critical patent/ITTO20030421A1/it
Priority to EP04009519A priority patent/EP1484508B1/en
Priority to DE602004011583T priority patent/DE602004011583T2/de
Priority to US10/857,192 priority patent/US7354254B2/en
Priority to JP2004166376A priority patent/JP2004360698A/ja
Publication of ITTO20030421A1 publication Critical patent/ITTO20030421A1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
IT000421A 2003-06-05 2003-06-05 Pompa da vuoto compatta ITTO20030421A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT000421A ITTO20030421A1 (it) 2003-06-05 2003-06-05 Pompa da vuoto compatta
EP04009519A EP1484508B1 (en) 2003-06-05 2004-04-22 Compact vacuum pump
DE602004011583T DE602004011583T2 (de) 2003-06-05 2004-04-22 Kompakte Vakuumpumpe
US10/857,192 US7354254B2 (en) 2003-06-05 2004-05-28 Compact vacuum pump
JP2004166376A JP2004360698A (ja) 2003-06-05 2004-06-03 小型真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000421A ITTO20030421A1 (it) 2003-06-05 2003-06-05 Pompa da vuoto compatta

Publications (1)

Publication Number Publication Date
ITTO20030421A1 true ITTO20030421A1 (it) 2004-12-06

Family

ID=33156376

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000421A ITTO20030421A1 (it) 2003-06-05 2003-06-05 Pompa da vuoto compatta

Country Status (5)

Country Link
US (1) US7354254B2 (it)
EP (1) EP1484508B1 (it)
JP (1) JP2004360698A (it)
DE (1) DE602004011583T2 (it)
IT (1) ITTO20030421A1 (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US20080129135A1 (en) * 2006-11-07 2008-06-05 Inventec Corporation Motor structure
EP2096317B1 (en) 2008-02-27 2012-08-15 Agilent Technologies, Inc. Method for manufacturing the rotor assembly of a rotating vacuum pump
DE102009035332A1 (de) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202009013629U1 (de) * 2009-10-09 2011-02-24 Oerlikon Leybold Vacuum Gmbh Vakuum-Wälzlageranordnung sowie Vakuumpumpe
JP5763660B2 (ja) * 2010-09-28 2015-08-12 エドワーズ株式会社 排気ポンプ
JP5919745B2 (ja) * 2011-11-15 2016-05-18 株式会社島津製作所 真空ポンプ
DE102012005931B4 (de) * 2012-03-26 2014-08-21 Thyssenkrupp Presta Aktiengesellschaft Grundlast für eine KGT-Anordnung
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
GB2579028A (en) * 2018-11-14 2020-06-10 Edwards Ltd Molecular drag stage
GB2607339A (en) * 2021-06-04 2022-12-07 Edwards Ltd Holweck drag pump

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US2313682A (en) * 1940-11-05 1943-03-09 Bendix Aviat Corp Compass system
US2653257A (en) * 1952-03-22 1953-09-22 Singer Mfg Co Low inertia type drag cup motor
DE2433770C2 (de) * 1974-07-13 1982-09-02 Interelectric AG, 6072 Sachseln Verfahren zum Herstellen eines Stators für eine elektrische Maschine
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
US4491753A (en) * 1981-03-19 1985-01-01 Mitsubishi Denki Kabushiki Kaisha Low inertial variable speed induction motor
DE3526948A1 (de) * 1984-07-28 1986-01-30 Papst-Motoren GmbH & Co KG, 7742 St Georgen Gehaeuseglocke fuer einen elektrokleinmotor
JPS6365883A (ja) * 1986-09-05 1988-03-24 三菱電機株式会社 ゴルフのパタ−練習装置
US4854034A (en) * 1988-05-27 1989-08-08 General Electric Company Method for producing a stack of laminations with skewed conductor slots
JPH0786550B2 (ja) * 1988-06-13 1995-09-20 三菱原子燃料株式会社 下部ノズルの取付装置
JPH03237297A (ja) * 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
JPH03237296A (ja) * 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
JP3102488B2 (ja) * 1990-04-25 2000-10-23 株式会社日立製作所 液晶表示装置の駆動方法
JPH07264810A (ja) * 1994-03-17 1995-10-13 Okuma Mach Works Ltd 液冷モータ
FR2723767B1 (fr) * 1994-08-19 1997-01-03 Cit Alcatel Pompe a vide turbomoleculaire
ITPN960017A1 (it) * 1996-03-12 1997-09-12 Sole Spa Macchina elettrica, in particolare motore elettrico
JPH09303288A (ja) * 1996-05-16 1997-11-25 Daikin Ind Ltd ターボ分子ポンプの翼
US5965274A (en) * 1997-11-13 1999-10-12 Lockheed Martin Energy Research Corporation Electronic circuits having NiAl and Ni3 Al substrates
JP4520636B2 (ja) * 1998-05-26 2010-08-11 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
ITTO980453A1 (it) * 1998-05-27 1999-11-29 Varian Spa Pompa da vuoto compatta
JP2000110758A (ja) * 1998-10-06 2000-04-18 Aiteku Kk 空気機械及びこれに用いるエレメント
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
US7354254B2 (en) 2008-04-08
DE602004011583T2 (de) 2009-01-29
EP1484508B1 (en) 2008-01-30
EP1484508A2 (en) 2004-12-08
US20040265152A1 (en) 2004-12-30
EP1484508A3 (en) 2006-01-04
JP2004360698A (ja) 2004-12-24
DE602004011583D1 (de) 2008-03-20

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