IT1287016B1 - Pompa da vuoto. - Google Patents

Pompa da vuoto.

Info

Publication number
IT1287016B1
IT1287016B1 IT96TO000624A ITTO960624A IT1287016B1 IT 1287016 B1 IT1287016 B1 IT 1287016B1 IT 96TO000624 A IT96TO000624 A IT 96TO000624A IT TO960624 A ITTO960624 A IT TO960624A IT 1287016 B1 IT1287016 B1 IT 1287016B1
Authority
IT
Italy
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Application number
IT96TO000624A
Other languages
English (en)
Italian (it)
Inventor
Simon Mauro De
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT96TO000624A priority Critical patent/IT1287016B1/it
Publication of ITTO960624A0 publication Critical patent/ITTO960624A0/it
Priority to DE0819856T priority patent/DE819856T1/de
Priority to DE69700064T priority patent/DE69700064T2/de
Priority to EP97105458A priority patent/EP0819856B1/de
Publication of ITTO960624A1 publication Critical patent/ITTO960624A1/it
Application granted granted Critical
Publication of IT1287016B1 publication Critical patent/IT1287016B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
IT96TO000624A 1996-07-18 1996-07-18 Pompa da vuoto. IT1287016B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT96TO000624A IT1287016B1 (it) 1996-07-18 1996-07-18 Pompa da vuoto.
DE0819856T DE819856T1 (de) 1996-07-18 1997-04-02 Vakuumpumpe
DE69700064T DE69700064T2 (de) 1996-07-18 1997-04-02 Vakuumpumpe
EP97105458A EP0819856B1 (de) 1996-07-18 1997-04-02 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96TO000624A IT1287016B1 (it) 1996-07-18 1996-07-18 Pompa da vuoto.

Publications (3)

Publication Number Publication Date
ITTO960624A0 ITTO960624A0 (de) 1996-07-18
ITTO960624A1 ITTO960624A1 (it) 1998-01-18
IT1287016B1 true IT1287016B1 (it) 1998-07-24

Family

ID=11414799

Family Applications (1)

Application Number Title Priority Date Filing Date
IT96TO000624A IT1287016B1 (it) 1996-07-18 1996-07-18 Pompa da vuoto.

Country Status (3)

Country Link
EP (1) EP0819856B1 (de)
DE (2) DE819856T1 (de)
IT (1) IT1287016B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10151176B4 (de) * 2001-10-12 2008-02-28 Renner, Bernt Verdichteranlage mit mindestens einem wassereingespritzten Schraubenverdichter zum Verdichten von Gas
DE10305038A1 (de) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
CN107524579A (zh) * 2017-09-26 2017-12-29 安徽万瑞冷电科技有限公司 一种低温泵

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
EP0610666B1 (de) * 1993-01-11 1998-04-15 Applied Materials, Inc. Turbomolekularpumpe
US5337572A (en) * 1993-05-04 1994-08-16 Apd Cryogenics, Inc. Cryogenic refrigerator with single stage compressor
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump

Also Published As

Publication number Publication date
DE69700064T2 (de) 1999-07-15
DE819856T1 (de) 1998-05-14
ITTO960624A0 (de) 1996-07-18
ITTO960624A1 (it) 1998-01-18
DE69700064D1 (de) 1999-01-14
EP0819856A1 (de) 1998-01-21
EP0819856B1 (de) 1998-12-02

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Legal Events

Date Code Title Description
0001 Granted