DE69508163D1 - Turbomolekular-Vakuumpumpe - Google Patents

Turbomolekular-Vakuumpumpe

Info

Publication number: DE69508163D1
Authority: DE; Germany
Prior art keywords: vacuum pump; turbomolecular vacuum; turbomolecular; pump; vacuum
Prior art date: 1994-08-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69508163T

Other languages

English (en)

Other versions

DE69508163T2 (de

Inventor

Denis Perrillat-Amede

Didier Pierrejean

Francois Reverdy

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Alcatel Lucent SAS

Original Assignee

Alcatel CIT SA

Alcatel SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-08-19

Filing date

1995-08-16

Publication date

1999-04-15

1995-08-16 Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA

1999-04-15 Publication of DE69508163D1 publication Critical patent/DE69508163D1/de

1999-08-05 Application granted granted Critical

1999-08-05 Publication of DE69508163T2 publication Critical patent/DE69508163T2/de

2015-08-17 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

DE69508163T 1994-08-19 1995-08-16 Turbomolekular-Vakuumpumpe Expired - Fee Related DE69508163T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9410147A FR2723767B1 (fr)	1994-08-19	1994-08-19	Pompe a vide turbomoleculaire

Publications (2)

Publication Number	Publication Date
DE69508163D1 true DE69508163D1 (de)	1999-04-15
DE69508163T2 DE69508163T2 (de)	1999-08-05

Family

ID=9466397

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69508163T Expired - Fee Related DE69508163T2 (de)	1994-08-19	1995-08-16	Turbomolekular-Vakuumpumpe

Country Status (5)

Country	Link
US (1)	US5542825A (de)
EP (1)	EP0697524B1 (de)
JP (1)	JPH0868388A (de)
DE (1)	DE69508163T2 (de)
FR (1)	FR2723767B1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE508445C2 (sv) *	1997-01-28	1998-10-05	Magnetal Ab	Vakuumpump av höghastighetstyp
DE19718791A1 (de) *	1997-05-03	1998-11-05	Mannesmann Vdo Ag	Fördereinheit
JP3013083B2 (ja) *	1998-06-23	2000-02-28	セイコー精機株式会社	ターボ分子ポンプ
US6412173B1 (en)	1999-07-26	2002-07-02	Phoenix Analysis And Design Technologies, Inc.	Miniature turbomolecular pump
JP3856661B2 (ja) *	2001-06-06	2006-12-13	株式会社荏原製作所	真空ポンプ
DE10211134C1 (de) *	2002-03-14	2003-08-14	Schwerionenforsch Gmbh	Turbomolekularpumpe mit koaxial zentralem Durchgang
ITTO20030421A1 (it) *	2003-06-05	2004-12-06	Varian Spa	Pompa da vuoto compatta
JP2007309245A (ja) *	2006-05-19	2007-11-29	Boc Edwards Kk	真空ポンプ
US8513826B2 (en) *	2008-06-26	2013-08-20	Ed Mazur	Wind turbine
FR2974175B1 (fr) *	2011-04-14	2013-10-11	Mecanique Magnetique Sa	Dispositif de detection de la position axiale d'un arbre tournant et application a une pompe turbo-moleculaire
DE202012000611U1 (de) *	2012-01-21	2013-04-23	Oerlikon Leybold Vacuum Gmbh	Turbomolekularpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH477629A (de) *	1967-08-18	1969-08-31	Pfeiffer Vakuumtechnik	Vakuumpumpe mit elektrischem Antrieb, insbesondere Turbomolekularpumpe
US3535052A (en) *	1967-08-18	1970-10-20	Pfeiffer Vakuumtechnik	Electrically driven vacuum pump
DE2554995A1 (de) *	1975-12-06	1977-06-16	Pfeiffer Vakuumtechnik	Turbomolekularpumpe
US4725750A (en) *	1980-11-20	1988-02-16	Hughes Aircraft Company	Permanent magnet rotary machine
JPS58163255A (ja) *	1982-03-24	1983-09-28	Okuma Mach Works Ltd	永久磁石式同期モ−タの回転子
US4629921A (en) *	1982-09-14	1986-12-16	Gavaletz John S	Dynamoelectric machine rotor
US4588914A (en) *	1984-06-05	1986-05-13	Westinghouse Electric Corp.	Permanent magnet rotor for high speed motors and generators
JPS62261696A (ja) *	1986-05-08	1987-11-13	Mitsubishi Electric Corp	タ−ボ分子ポンプ装置
JPS62282192A (ja) *	1986-05-30	1987-12-08	Mitsubishi Electric Corp	タ−ボ分子ポンプ装置
DE3931661A1 (de) *	1989-08-25	1991-04-04	Leybold Ag	Magnetgelagerte vakuumpumpe
FR2659396B1 (fr) *	1990-03-07	1992-05-15	Cit Alcatel	Pompe a vide pour vide moleculaire propre.
JPH04219493A (ja) *	1990-08-10	1992-08-10	Ebara Corp	ターボ分子ポンプ
JP2527398B2 (ja) *	1992-06-05	1996-08-21	財団法人真空科学研究所	タ―ボ分子ポンプ

1994
- 1994-08-19 FR FR9410147A patent/FR2723767B1/fr not_active Expired - Fee Related
1995
- 1995-08-16 DE DE69508163T patent/DE69508163T2/de not_active Expired - Fee Related
- 1995-08-16 EP EP95401896A patent/EP0697524B1/de not_active Expired - Lifetime
- 1995-08-18 JP JP7210660A patent/JPH0868388A/ja active Pending
- 1995-08-18 US US08/516,939 patent/US5542825A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0697524A1 (de)	1996-02-21
FR2723767B1 (fr)	1997-01-03
EP0697524B1 (de)	1999-03-10
FR2723767A1 (fr)	1996-02-23
DE69508163T2 (de)	1999-08-05
JPH0868388A (ja)	1996-03-12
US5542825A (en)	1996-08-06

Legal Events

Date	Code	Title	Description
2000-04-06	8364	No opposition during term of opposition
2007-06-06	8327	Change in the person/name/address of the patent owner	Owner name: ALCATEL LUCENT, PARIS, FR
2009-07-02	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE69310993D1 (de)	1997-07-03	Turbomolekularvakuumpumpen
DE69729686D1 (de)	2004-08-05	Vakuumpumpe
DE69625401T2 (de)	2003-10-30	Vakuumpumpe
DE69727514D1 (de)	2004-03-18	Verdrängungsvakuumpumpe
DE69717231T2 (de)	2003-09-11	Vakuumpumpgerät
DE69821453D1 (de)	2004-03-11	Vakuumpumpen
DE69125044D1 (de)	1997-04-17	Vakuumpumpe
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
DE69605461D1 (de)	2000-01-13	Spiralvakuumpumpe
DE69820547D1 (de)	2004-01-29	Vakuum-Pumpsystem
DE69600306D1 (de)	1998-06-25	Turbomolekularpumpe
DE69924558D1 (de)	2005-05-12	Vakuumpumpe
DE3891263T1 (de)	1990-03-15	Turbomolekular-vakuumpumpe
DE59805694D1 (de)	2002-10-31	Vakuumpumpe
DE59902761D1 (de)	2002-10-24	Vacuumpumpe
DE19981942D2 (de)	2001-10-18	Vakuumpumpe
DE19882987T1 (de)	2001-04-12	Vakuumpumpe
DE69508163D1 (de)	1999-04-15	Turbomolekular-Vakuumpumpe
DE69820824D1 (de)	2004-02-05	Vakuumpumpen
DE69409555T2 (de)	1998-12-03	Turbomolekularpumpe
DE59706325D1 (de)	2002-03-21	Reibungsvakuumpumpe
DE59708643D1 (de)	2002-12-12	Absaugpumpe
DE59307092D1 (de)	1997-09-11	Vakuum-pumpeinrichtung
DE69109424D1 (de)	1995-06-08	Turbovakuumpumpe.
DE69401600D1 (de)	1997-03-13	Vakuumpumpe