DE69700064T2 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE69700064T2
DE69700064T2 DE69700064T DE69700064T DE69700064T2 DE 69700064 T2 DE69700064 T2 DE 69700064T2 DE 69700064 T DE69700064 T DE 69700064T DE 69700064 T DE69700064 T DE 69700064T DE 69700064 T2 DE69700064 T2 DE 69700064T2
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69700064T
Other languages
English (en)
Other versions
DE69700064D1 (de
Inventor
Simon Mauro De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Application granted granted Critical
Publication of DE69700064D1 publication Critical patent/DE69700064D1/de
Publication of DE69700064T2 publication Critical patent/DE69700064T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE69700064T 1996-07-18 1997-04-02 Vakuumpumpe Expired - Fee Related DE69700064T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96TO000624A IT1287016B1 (it) 1996-07-18 1996-07-18 Pompa da vuoto.

Publications (2)

Publication Number Publication Date
DE69700064D1 DE69700064D1 (de) 1999-01-14
DE69700064T2 true DE69700064T2 (de) 1999-07-15

Family

ID=11414799

Family Applications (2)

Application Number Title Priority Date Filing Date
DE0819856T Pending DE819856T1 (de) 1996-07-18 1997-04-02 Vakuumpumpe
DE69700064T Expired - Fee Related DE69700064T2 (de) 1996-07-18 1997-04-02 Vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE0819856T Pending DE819856T1 (de) 1996-07-18 1997-04-02 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP0819856B1 (de)
DE (2) DE819856T1 (de)
IT (1) IT1287016B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10151176B4 (de) * 2001-10-12 2008-02-28 Renner, Bernt Verdichteranlage mit mindestens einem wassereingespritzten Schraubenverdichter zum Verdichten von Gas

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10305038A1 (de) 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
CN107524579A (zh) * 2017-09-26 2017-12-29 安徽万瑞冷电科技有限公司 一种低温泵

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
EP0610666B1 (de) * 1993-01-11 1998-04-15 Applied Materials, Inc. Turbomolekularpumpe
US5337572A (en) * 1993-05-04 1994-08-16 Apd Cryogenics, Inc. Cryogenic refrigerator with single stage compressor
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10151176B4 (de) * 2001-10-12 2008-02-28 Renner, Bernt Verdichteranlage mit mindestens einem wassereingespritzten Schraubenverdichter zum Verdichten von Gas

Also Published As

Publication number Publication date
DE69700064D1 (de) 1999-01-14
IT1287016B1 (it) 1998-07-24
ITTO960624A0 (de) 1996-07-18
EP0819856B1 (de) 1998-12-02
DE819856T1 (de) 1998-05-14
EP0819856A1 (de) 1998-01-21
ITTO960624A1 (it) 1998-01-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8370 Indication related to discontinuation of the patent is to be deleted
8339 Ceased/non-payment of the annual fee