IL104267A - A device that provides a permanent registration of a lead woofer - Google Patents

A device that provides a permanent registration of a lead woofer

Info

Publication number
IL104267A
IL104267A IL10426792A IL10426792A IL104267A IL 104267 A IL104267 A IL 104267A IL 10426792 A IL10426792 A IL 10426792A IL 10426792 A IL10426792 A IL 10426792A IL 104267 A IL104267 A IL 104267A
Authority
IL
Israel
Prior art keywords
registration
wafer
semiconductor wafer
surround
adjustable
Prior art date
Application number
IL10426792A
Other languages
English (en)
Hebrew (he)
Other versions
IL104267A0 (en
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL104267A0 publication Critical patent/IL104267A0/xx
Publication of IL104267A publication Critical patent/IL104267A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/903—Work holder for electrical circuit assemblages or wiring systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
  • Jigs For Machine Tools (AREA)
  • Clamps And Clips (AREA)
IL10426792A 1992-01-24 1992-12-29 A device that provides a permanent registration of a lead woofer IL104267A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/825,520 US5180150A (en) 1992-01-24 1992-01-24 Apparatus for providing consistent registration of semiconductor wafers

Publications (2)

Publication Number Publication Date
IL104267A0 IL104267A0 (en) 1993-05-13
IL104267A true IL104267A (en) 1994-07-31

Family

ID=25244210

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10426792A IL104267A (en) 1992-01-24 1992-12-29 A device that provides a permanent registration of a lead woofer

Country Status (6)

Country Link
US (1) US5180150A (ja)
EP (1) EP0552966B1 (ja)
JP (1) JPH0746695B2 (ja)
DE (1) DE69300284T2 (ja)
IL (1) IL104267A (ja)
NO (1) NO930197L (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5352249A (en) * 1992-08-28 1994-10-04 Hughes Aircraft Company Apparatus for providing consistent, non-jamming registration of semiconductor wafers
US5700297A (en) * 1992-08-28 1997-12-23 Ipec Precision, Inc. Apparatus for providing consistent, non-jamming registration of notched semiconductor wafers
US5280894A (en) * 1992-09-30 1994-01-25 Honeywell Inc. Fixture for backside wafer etching
IL109193A0 (en) * 1993-04-12 1994-06-24 Hughes Aircraft Co Apparatus and method for providing consistent, nonjamming registration of notched semiconductor wafers
US5701013A (en) * 1996-06-07 1997-12-23 Mosel Viltelic, Inc. Wafer metrology pattern integrating both overlay and critical dimension features for SEM or AFM measurements
US6388226B1 (en) 1997-06-26 2002-05-14 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US7569790B2 (en) * 1997-06-26 2009-08-04 Mks Instruments, Inc. Method and apparatus for processing metal bearing gases
US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases
US6150628A (en) * 1997-06-26 2000-11-21 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US7166816B1 (en) 1997-06-26 2007-01-23 Mks Instruments, Inc. Inductively-coupled torodial plasma source
US6815633B1 (en) 1997-06-26 2004-11-09 Applied Science & Technology, Inc. Inductively-coupled toroidal plasma source
DE19856102C2 (de) * 1998-12-04 2003-11-20 Tyco Electronics Logistics Ag Transportsystem für Kleinbauteile
US6367635B1 (en) * 1999-09-30 2002-04-09 Auer Precision Company, Inc. Ultra precision process carrier for semi-conductor manufacturing
KR200435062Y1 (ko) * 2006-08-22 2007-01-09 (주)테크윙 테스트핸들러용 하이픽스보드 클램핑장치
US8749053B2 (en) 2009-06-23 2014-06-10 Intevac, Inc. Plasma grid implant system for use in solar cell fabrications
US8271120B2 (en) * 2009-08-03 2012-09-18 Lawrence Livermore National Security, Llc Method and system for processing optical elements using magnetorheological finishing
EP2777069A4 (en) 2011-11-08 2015-01-14 Intevac Inc SUBSTRATE PROCESSING SYSTEM AND METHOD

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148433A (en) * 1979-05-08 1980-11-19 Nec Corp Manufacture of semiconductor device and device therefor
GB2146935B (en) * 1983-08-18 1986-10-22 Plessey Co Plc Jigs for locating electrical components
US4703920A (en) * 1986-08-25 1987-11-03 Amp Incorporated Manufacturing method for integrated circuit chip carriers and work holder for use in the method
JP2508540B2 (ja) * 1987-11-02 1996-06-19 三菱マテリアル株式会社 ウェ―ハの位置検出装置
JPS63296237A (ja) * 1988-04-22 1988-12-02 Hitachi Ltd ウエーハの自動アライメント方法
FR2633452B1 (fr) * 1988-06-28 1990-11-02 Doue Julien Dispositif de support pour un substrat mince, notamment en un materiau semiconducteur
US4970772A (en) * 1989-12-05 1990-11-20 Sulzer Brothers Limited Wafer alignment fixture

Also Published As

Publication number Publication date
JPH0613451A (ja) 1994-01-21
US5180150A (en) 1993-01-19
NO930197L (no) 1993-07-26
JPH0746695B2 (ja) 1995-05-17
IL104267A0 (en) 1993-05-13
EP0552966A1 (en) 1993-07-28
DE69300284D1 (de) 1995-08-31
EP0552966B1 (en) 1995-07-26
NO930197D0 (no) 1993-01-21
DE69300284T2 (de) 1995-12-21

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Legal Events

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