NO930197L - Anordning for aa tilveiebringe sammenhengende registreringav halvlederskiver - Google Patents
Anordning for aa tilveiebringe sammenhengende registreringav halvlederskiverInfo
- Publication number
- NO930197L NO930197L NO93930197A NO930197A NO930197L NO 930197 L NO930197 L NO 930197L NO 93930197 A NO93930197 A NO 93930197A NO 930197 A NO930197 A NO 930197A NO 930197 L NO930197 L NO 930197L
- Authority
- NO
- Norway
- Prior art keywords
- semiconductor
- setting
- environment
- plate
- setting surface
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S269/00—Work holders
- Y10S269/903—Work holder for electrical circuit assemblages or wiring systems
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Drying Of Semiconductors (AREA)
- Jigs For Machine Tools (AREA)
- Clamps And Clips (AREA)
Abstract
En anordning (10) til oppnåelse av ensartet innstilling av en halvledersklve som underkastes bearbeiding innbefatter en plate (38) hvorpå en omgivelse (14) er stilt inn. Omgivelsen (14) er stilt inn på platen (38) ved sammenpassende to pinner (42), (40), som stikker opp fra platen (38) til et hull (44) og et spor (46) i omgivelsen (14). En første innstillingsflate (16) for innstilling av et flatt parti (20) på en halvlederskive (12) er fast montert på omgivelsen (14). En andre innstillingsflate (18) for innstilling av et punkt (24) på omkretsen av halvledersklven (12) er fast montert på omgivelsen (14). En tredje stillbar innstillingsflate (26) stiller også inn mot et punkt (28) på omkretsen av skiven (12). Denne tredje innstillingsflate (26) er fjærbelastet for å ta hensyn til små diametervaria- sjoner på på hverandre følgende behandlede halv- lederskiver og for å utøve en kraft som holder skiven (12 ) på plass.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/825,520 US5180150A (en) | 1992-01-24 | 1992-01-24 | Apparatus for providing consistent registration of semiconductor wafers |
Publications (2)
Publication Number | Publication Date |
---|---|
NO930197D0 NO930197D0 (no) | 1993-01-21 |
NO930197L true NO930197L (no) | 1993-07-26 |
Family
ID=25244210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO93930197A NO930197L (no) | 1992-01-24 | 1993-01-21 | Anordning for aa tilveiebringe sammenhengende registreringav halvlederskiver |
Country Status (6)
Country | Link |
---|---|
US (1) | US5180150A (no) |
EP (1) | EP0552966B1 (no) |
JP (1) | JPH0746695B2 (no) |
DE (1) | DE69300284T2 (no) |
IL (1) | IL104267A (no) |
NO (1) | NO930197L (no) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5352249A (en) * | 1992-08-28 | 1994-10-04 | Hughes Aircraft Company | Apparatus for providing consistent, non-jamming registration of semiconductor wafers |
US5700297A (en) * | 1992-08-28 | 1997-12-23 | Ipec Precision, Inc. | Apparatus for providing consistent, non-jamming registration of notched semiconductor wafers |
US5280894A (en) * | 1992-09-30 | 1994-01-25 | Honeywell Inc. | Fixture for backside wafer etching |
IL109193A0 (en) * | 1993-04-12 | 1994-06-24 | Hughes Aircraft Co | Apparatus and method for providing consistent, nonjamming registration of notched semiconductor wafers |
US5701013A (en) * | 1996-06-07 | 1997-12-23 | Mosel Viltelic, Inc. | Wafer metrology pattern integrating both overlay and critical dimension features for SEM or AFM measurements |
US6388226B1 (en) | 1997-06-26 | 2002-05-14 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US7569790B2 (en) * | 1997-06-26 | 2009-08-04 | Mks Instruments, Inc. | Method and apparatus for processing metal bearing gases |
US8779322B2 (en) | 1997-06-26 | 2014-07-15 | Mks Instruments Inc. | Method and apparatus for processing metal bearing gases |
US6150628A (en) * | 1997-06-26 | 2000-11-21 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US7166816B1 (en) | 1997-06-26 | 2007-01-23 | Mks Instruments, Inc. | Inductively-coupled torodial plasma source |
US6815633B1 (en) | 1997-06-26 | 2004-11-09 | Applied Science & Technology, Inc. | Inductively-coupled toroidal plasma source |
DE19856102C2 (de) * | 1998-12-04 | 2003-11-20 | Tyco Electronics Logistics Ag | Transportsystem für Kleinbauteile |
US6367635B1 (en) * | 1999-09-30 | 2002-04-09 | Auer Precision Company, Inc. | Ultra precision process carrier for semi-conductor manufacturing |
KR200435062Y1 (ko) * | 2006-08-22 | 2007-01-09 | (주)테크윙 | 테스트핸들러용 하이픽스보드 클램핑장치 |
US8749053B2 (en) | 2009-06-23 | 2014-06-10 | Intevac, Inc. | Plasma grid implant system for use in solar cell fabrications |
US8271120B2 (en) * | 2009-08-03 | 2012-09-18 | Lawrence Livermore National Security, Llc | Method and system for processing optical elements using magnetorheological finishing |
EP2777069A4 (en) | 2011-11-08 | 2015-01-14 | Intevac Inc | SUBSTRATE PROCESSING SYSTEM AND METHOD |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55148433A (en) * | 1979-05-08 | 1980-11-19 | Nec Corp | Manufacture of semiconductor device and device therefor |
GB2146935B (en) * | 1983-08-18 | 1986-10-22 | Plessey Co Plc | Jigs for locating electrical components |
US4703920A (en) * | 1986-08-25 | 1987-11-03 | Amp Incorporated | Manufacturing method for integrated circuit chip carriers and work holder for use in the method |
JP2508540B2 (ja) * | 1987-11-02 | 1996-06-19 | 三菱マテリアル株式会社 | ウェ―ハの位置検出装置 |
JPS63296237A (ja) * | 1988-04-22 | 1988-12-02 | Hitachi Ltd | ウエーハの自動アライメント方法 |
FR2633452B1 (fr) * | 1988-06-28 | 1990-11-02 | Doue Julien | Dispositif de support pour un substrat mince, notamment en un materiau semiconducteur |
US4970772A (en) * | 1989-12-05 | 1990-11-20 | Sulzer Brothers Limited | Wafer alignment fixture |
-
1992
- 1992-01-24 US US07/825,520 patent/US5180150A/en not_active Expired - Fee Related
- 1992-12-29 IL IL10426792A patent/IL104267A/en not_active IP Right Cessation
-
1993
- 1993-01-21 NO NO93930197A patent/NO930197L/no unknown
- 1993-01-22 DE DE69300284T patent/DE69300284T2/de not_active Expired - Fee Related
- 1993-01-22 EP EP93300454A patent/EP0552966B1/en not_active Expired - Lifetime
- 1993-01-25 JP JP1028093A patent/JPH0746695B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0613451A (ja) | 1994-01-21 |
US5180150A (en) | 1993-01-19 |
JPH0746695B2 (ja) | 1995-05-17 |
IL104267A0 (en) | 1993-05-13 |
EP0552966A1 (en) | 1993-07-28 |
IL104267A (en) | 1994-07-31 |
DE69300284D1 (de) | 1995-08-31 |
EP0552966B1 (en) | 1995-07-26 |
NO930197D0 (no) | 1993-01-21 |
DE69300284T2 (de) | 1995-12-21 |
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