GB1226872A - - Google Patents

Info

Publication number
GB1226872A
GB1226872A GB1226872DA GB1226872A GB 1226872 A GB1226872 A GB 1226872A GB 1226872D A GB1226872D A GB 1226872DA GB 1226872 A GB1226872 A GB 1226872A
Authority
GB
United Kingdom
Prior art keywords
lens
electron
maximum
march
analysing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1226872A publication Critical patent/GB1226872A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,226,872. Electron microscopes. T. ICHINOKAWA. 25 March, 1968 [30 March, 1967], No. 14319/68. Heading H1D. Means for analysing the energy of an electron beam, especially in an electron microscope. comprises an apertured member, such as the slit member 4, in combination with a magnetic lens of large chromatic aberration. Preferably the lens comprises two pairs of polepieces 1-1 and 2-2 adapted to refract the beam in opposite directions, and maximum resolution is achieved if where e and m are the charge and mass of an electron, H is the maximum magnetic field of the lens, a is the axial length of the lens, measured between points of half the maximum field intensity, and V r is the electron accelerating voltage corrected by a relativistic factor. The analysing means is preferably disposed between an objective lens and a projection lens of an electron microscope, and Fig. 2 illustrates the dispersion of the beam for different energy components, i.e. elastically and non-elastically scattered electrons.
GB1226872D 1967-03-30 1968-03-25 Expired GB1226872A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1953467 1967-03-30

Publications (1)

Publication Number Publication Date
GB1226872A true GB1226872A (en) 1971-03-31

Family

ID=12001980

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1226872D Expired GB1226872A (en) 1967-03-30 1968-03-25

Country Status (5)

Country Link
US (1) US3619607A (en)
DE (1) DE1639280C3 (en)
FR (1) FR1558166A (en)
GB (1) GB1226872A (en)
NL (1) NL153718B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145221B2 (en) * 1973-01-31 1976-12-02
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
KR920000941B1 (en) * 1988-02-16 1992-01-31 후지쓰 가부시끼가이샤 An electron beam exposure apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
US3374346A (en) * 1964-07-15 1968-03-19 Hitachi Ltd Spectroscopic electron microscope wherein a specimen is irradiated with x-rays and the electrons emitted are energy analyzed

Also Published As

Publication number Publication date
US3619607A (en) 1971-11-09
DE1639280A1 (en) 1972-03-16
NL6804435A (en) 1968-10-01
FR1558166A (en) 1969-02-21
DE1639280C3 (en) 1974-01-31
DE1639280B2 (en) 1973-07-12
NL153718B (en) 1977-06-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee