GB920231A - Electro-magnetic lens assembly - Google Patents

Electro-magnetic lens assembly

Info

Publication number
GB920231A
GB920231A GB542161A GB542161A GB920231A GB 920231 A GB920231 A GB 920231A GB 542161 A GB542161 A GB 542161A GB 542161 A GB542161 A GB 542161A GB 920231 A GB920231 A GB 920231A
Authority
GB
United Kingdom
Prior art keywords
polepiece
plate
lens assembly
electro
feb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB542161A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesla AS
Original Assignee
Tesla AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesla AS filed Critical Tesla AS
Publication of GB920231A publication Critical patent/GB920231A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

920,231. Electron lenses. TESLA, NARODNI PODNIK. Feb. 14, 1961 [Feb. 25, 1960], No. 5421/61. Class 39 (1). An electromagnetic lens assembly for electronoptical instruments comprises a body 1 supporting at least two polepieces 6, 8, wherein one polepiece, 6, is firmly fixed in the opening of the lens body, while the other polepiece 8, formed by a plate which is provided with an opening 8<SP>1</SP> and mounted above the first polepiece 6, is movable in a plane at right angles to the axis of the first polepiece, wherein the plate is fitted with a control device 10, 11, which is brought out vacuum-tightly to the exterior surface of the electron lens body and effects movement of the plate 8 relative to the other polepiece 6. More than one control device may be provided to enable the plate to be shifted in any required direction within its plane.
GB542161A 1960-02-15 1961-02-14 Electro-magnetic lens assembly Expired GB920231A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS100260 1960-02-15

Publications (1)

Publication Number Publication Date
GB920231A true GB920231A (en) 1963-03-06

Family

ID=5343268

Family Applications (1)

Application Number Title Priority Date Filing Date
GB542161A Expired GB920231A (en) 1960-02-15 1961-02-14 Electro-magnetic lens assembly

Country Status (2)

Country Link
DE (1) DE1236685B (en)
GB (1) GB920231A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE904096C (en) * 1940-10-09 1954-02-15 Siemens Ag Corpuscular beam microscope

Also Published As

Publication number Publication date
DE1236685B (en) 1967-03-16

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