GB2264954B - High-vacuum coating apparatus - Google Patents

High-vacuum coating apparatus

Info

Publication number
GB2264954B
GB2264954B GB9224787A GB9224787A GB2264954B GB 2264954 B GB2264954 B GB 2264954B GB 9224787 A GB9224787 A GB 9224787A GB 9224787 A GB9224787 A GB 9224787A GB 2264954 B GB2264954 B GB 2264954B
Authority
GB
United Kingdom
Prior art keywords
coating apparatus
vacuum coating
vacuum
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9224787A
Other languages
English (en)
Other versions
GB2264954A (en
GB9224787D0 (en
Inventor
Klaus Contzen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of GB9224787D0 publication Critical patent/GB9224787D0/en
Publication of GB2264954A publication Critical patent/GB2264954A/en
Application granted granted Critical
Publication of GB2264954B publication Critical patent/GB2264954B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
GB9224787A 1992-03-10 1992-11-26 High-vacuum coating apparatus Expired - Fee Related GB2264954B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4207527A DE4207527A1 (de) 1992-03-10 1992-03-10 Hochvakuum-beschichtungsanlage

Publications (3)

Publication Number Publication Date
GB9224787D0 GB9224787D0 (en) 1993-01-13
GB2264954A GB2264954A (en) 1993-09-15
GB2264954B true GB2264954B (en) 1995-09-06

Family

ID=6453648

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9224787A Expired - Fee Related GB2264954B (en) 1992-03-10 1992-11-26 High-vacuum coating apparatus

Country Status (3)

Country Link
DE (1) DE4207527A1 (de)
GB (1) GB2264954B (de)
IT (1) IT1272004B (de)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1204267A (en) * 1967-02-24 1970-09-03 Sverre Munck As A transport and storage system
GB2166125A (en) * 1984-07-16 1986-04-30 Okamura Corp Rototable stock container unit having reversible container-supporting turntable
GB2207928A (en) * 1987-08-06 1989-02-15 Leybold Ag Apparatus for coating continuous webs
GB2212518A (en) * 1987-11-14 1989-07-26 Leybold Ag Apparatus for coating continuous webs
GB2249145A (en) * 1990-10-22 1992-04-29 Tdk Corp Clean transfer method and system therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2548589B1 (fr) * 1983-07-07 1987-02-20 Aerospatiale Procede et dispositif d'impregnation metallique d'un substrat se presentant sous la forme d'une nappe de fibres conductrices du courant electrique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1204267A (en) * 1967-02-24 1970-09-03 Sverre Munck As A transport and storage system
GB2166125A (en) * 1984-07-16 1986-04-30 Okamura Corp Rototable stock container unit having reversible container-supporting turntable
GB2207928A (en) * 1987-08-06 1989-02-15 Leybold Ag Apparatus for coating continuous webs
GB2212518A (en) * 1987-11-14 1989-07-26 Leybold Ag Apparatus for coating continuous webs
GB2249145A (en) * 1990-10-22 1992-04-29 Tdk Corp Clean transfer method and system therefor

Also Published As

Publication number Publication date
ITMI930461A0 (it) 1993-03-10
GB2264954A (en) 1993-09-15
DE4207527A1 (de) 1993-09-16
ITMI930461A1 (it) 1994-09-10
GB9224787D0 (en) 1993-01-13
IT1272004B (it) 1997-06-10

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19991126