GB1240744A - Rotary molecular vacuum pumps - Google Patents

Rotary molecular vacuum pumps

Info

Publication number
GB1240744A
GB1240744A GB56705/69A GB5670569A GB1240744A GB 1240744 A GB1240744 A GB 1240744A GB 56705/69 A GB56705/69 A GB 56705/69A GB 5670569 A GB5670569 A GB 5670569A GB 1240744 A GB1240744 A GB 1240744A
Authority
GB
United Kingdom
Prior art keywords
pump
vacuum
stage
molecular
nov
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB56705/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1240744A publication Critical patent/GB1240744A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
GB56705/69A 1968-11-20 1969-11-19 Rotary molecular vacuum pumps Expired GB1240744A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1809902A DE1809902C3 (de) 1968-11-20 1968-11-20 Mehrstufige Turbo Molekularhoch vakuumpumpe

Publications (1)

Publication Number Publication Date
GB1240744A true GB1240744A (en) 1971-07-28

Family

ID=5713816

Family Applications (1)

Application Number Title Priority Date Filing Date
GB56705/69A Expired GB1240744A (en) 1968-11-20 1969-11-19 Rotary molecular vacuum pumps

Country Status (9)

Country Link
US (1) US3666374A (xx)
JP (1) JPS5017687B1 (xx)
AT (1) AT299585B (xx)
CA (1) CA920107A (xx)
CH (1) CH501840A (xx)
DE (1) DE1809902C3 (xx)
FR (1) FR2023691A1 (xx)
GB (1) GB1240744A (xx)
NL (1) NL6917165A (xx)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
DE4427153A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Fluteinrichtung für magnetisch gelagerte Vakuumpumpen
DE19821634A1 (de) 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6261052B1 (en) * 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
DE19942410A1 (de) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10111603A1 (de) * 2001-03-10 2002-09-12 Pfeiffer Vacuum Gmbh Gasreibungspumpe mit zusätzlichem Gaseinlass
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
DE1809902C3 (de) 1973-11-15
DE1809902B2 (de) 1973-04-26
JPS5017687B1 (xx) 1975-06-23
NL6917165A (xx) 1970-05-22
FR2023691A1 (xx) 1970-08-21
US3666374A (en) 1972-05-30
CA920107A (en) 1973-01-30
CH501840A (de) 1971-01-15
DE1809902A1 (de) 1970-06-04
AT299585B (de) 1972-06-26

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