AT299585B - Turbo-Molekularpumpe - Google Patents
Turbo-MolekularpumpeInfo
- Publication number
- AT299585B AT299585B AT1065069A AT1065069A AT299585B AT 299585 B AT299585 B AT 299585B AT 1065069 A AT1065069 A AT 1065069A AT 1065069 A AT1065069 A AT 1065069A AT 299585 B AT299585 B AT 299585B
- Authority
- AT
- Austria
- Prior art keywords
- molecular pump
- turbo molecular
- turbo
- pump
- molecular
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1809902A DE1809902C3 (de) | 1968-11-20 | 1968-11-20 | Mehrstufige Turbo Molekularhoch vakuumpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
AT299585B true AT299585B (de) | 1972-06-26 |
Family
ID=5713816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT1065069A AT299585B (de) | 1968-11-20 | 1969-11-13 | Turbo-Molekularpumpe |
Country Status (9)
Country | Link |
---|---|
US (1) | US3666374A (xx) |
JP (1) | JPS5017687B1 (xx) |
AT (1) | AT299585B (xx) |
CA (1) | CA920107A (xx) |
CH (1) | CH501840A (xx) |
DE (1) | DE1809902C3 (xx) |
FR (1) | FR2023691A1 (xx) |
GB (1) | GB1240744A (xx) |
NL (1) | NL6917165A (xx) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
DE3317868A1 (de) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
FR2641582B1 (fr) * | 1989-01-09 | 1991-03-22 | Cit Alcatel | Pompe a vide du type a canal de gaede |
DE4427153A1 (de) * | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Fluteinrichtung für magnetisch gelagerte Vakuumpumpen |
DE19821634A1 (de) | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
US6261052B1 (en) * | 1999-01-08 | 2001-07-17 | Fantom Technologies Inc. | Prandtl layer turbine |
DE19942410A1 (de) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE10111603A1 (de) * | 2001-03-10 | 2002-09-12 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe mit zusätzlichem Gaseinlass |
GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
-
1968
- 1968-11-20 DE DE1809902A patent/DE1809902C3/de not_active Expired
-
1969
- 1969-11-13 US US876250A patent/US3666374A/en not_active Expired - Lifetime
- 1969-11-13 AT AT1065069A patent/AT299585B/de active
- 1969-11-14 NL NL6917165A patent/NL6917165A/xx unknown
- 1969-11-17 JP JP44091762A patent/JPS5017687B1/ja active Pending
- 1969-11-18 FR FR6939574A patent/FR2023691A1/fr active Pending
- 1969-11-19 GB GB56705/69A patent/GB1240744A/en not_active Expired
- 1969-11-19 CH CH1718669A patent/CH501840A/de not_active IP Right Cessation
- 1969-11-20 CA CA067959A patent/CA920107A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1240744A (en) | 1971-07-28 |
DE1809902C3 (de) | 1973-11-15 |
DE1809902B2 (de) | 1973-04-26 |
JPS5017687B1 (xx) | 1975-06-23 |
NL6917165A (xx) | 1970-05-22 |
FR2023691A1 (xx) | 1970-08-21 |
US3666374A (en) | 1972-05-30 |
CA920107A (en) | 1973-01-30 |
CH501840A (de) | 1971-01-15 |
DE1809902A1 (de) | 1970-06-04 |
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