AT299585B - Turbo-Molekularpumpe - Google Patents

Turbo-Molekularpumpe

Info

Publication number
AT299585B
AT299585B AT1065069A AT1065069A AT299585B AT 299585 B AT299585 B AT 299585B AT 1065069 A AT1065069 A AT 1065069A AT 1065069 A AT1065069 A AT 1065069A AT 299585 B AT299585 B AT 299585B
Authority
AT
Austria
Prior art keywords
molecular pump
turbo molecular
turbo
pump
molecular
Prior art date
Application number
AT1065069A
Other languages
English (en)
Original Assignee
Pfeiffer Vakuumtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik
Application granted granted Critical
Publication of AT299585B publication Critical patent/AT299585B/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
AT1065069A 1968-11-20 1969-11-13 Turbo-Molekularpumpe AT299585B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1809902A DE1809902C3 (de) 1968-11-20 1968-11-20 Mehrstufige Turbo Molekularhoch vakuumpumpe

Publications (1)

Publication Number Publication Date
AT299585B true AT299585B (de) 1972-06-26

Family

ID=5713816

Family Applications (1)

Application Number Title Priority Date Filing Date
AT1065069A AT299585B (de) 1968-11-20 1969-11-13 Turbo-Molekularpumpe

Country Status (9)

Country Link
US (1) US3666374A (de)
JP (1) JPS5017687B1 (de)
AT (1) AT299585B (de)
CA (1) CA920107A (de)
CH (1) CH501840A (de)
DE (1) DE1809902C3 (de)
FR (1) FR2023691A1 (de)
GB (1) GB1240744A (de)
NL (1) NL6917165A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
DE4427153A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Fluteinrichtung für magnetisch gelagerte Vakuumpumpen
DE19821634A1 (de) 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6261052B1 (en) * 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
DE19942410A1 (de) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10111603A1 (de) * 2001-03-10 2002-09-12 Pfeiffer Vacuum Gmbh Gasreibungspumpe mit zusätzlichem Gaseinlass
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
GB1240744A (en) 1971-07-28
DE1809902C3 (de) 1973-11-15
DE1809902B2 (de) 1973-04-26
JPS5017687B1 (de) 1975-06-23
NL6917165A (de) 1970-05-22
FR2023691A1 (de) 1970-08-21
US3666374A (en) 1972-05-30
CA920107A (en) 1973-01-30
CH501840A (de) 1971-01-15
DE1809902A1 (de) 1970-06-04

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