FR3114931B1 - Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW) - Google Patents

Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW) Download PDF

Info

Publication number
FR3114931B1
FR3114931B1 FR2010072A FR2010072A FR3114931B1 FR 3114931 B1 FR3114931 B1 FR 3114931B1 FR 2010072 A FR2010072 A FR 2010072A FR 2010072 A FR2010072 A FR 2010072A FR 3114931 B1 FR3114931 B1 FR 3114931B1
Authority
FR
France
Prior art keywords
acoustic wave
reflective structure
saw
surface acoustic
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2010072A
Other languages
English (en)
Other versions
FR3114931A1 (fr
Inventor
Sylvain Ballandras
Emilie Courjon
Florent Bernard
Thierry Laroche
Julien Garcia
Alexandre Clairet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Frecnsys SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Frecnsys SAS filed Critical Frecnsys SAS
Priority to FR2010072A priority Critical patent/FR3114931B1/fr
Priority to PCT/EP2021/076840 priority patent/WO2022069573A2/fr
Priority to US18/247,629 priority patent/US20230308074A1/en
Priority to EP21786397.6A priority patent/EP4222860A2/fr
Priority to JP2023518269A priority patent/JP2023544271A/ja
Publication of FR3114931A1 publication Critical patent/FR3114931A1/fr
Application granted granted Critical
Publication of FR3114931B1 publication Critical patent/FR3114931B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02566—Characteristics of substrate, e.g. cutting angles of semiconductor substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/0259—Characteristics of substrate, e.g. cutting angles of langasite substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02653—Grooves or arrays buried in the substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention concerne un dispositif à ondes acoustiques de surface (SAW), comprenant une structure de transducteur interdigité (102, 252) et au moins une structure réflectrice d'ondes acoustiques (104, 106, 254, 256) fournies es sur ou dans un substrat de propagation d'ondes acoustiques (114, 114’), caractérisé en ce que la structure de transducteur interdigité (102) comprend un premier matériau et la au moins une structure réflectrice d’ondes acoustiques (104, 106) comprend un deuxième matériau différent du premier matériau et/ou la structure réflectrice d'ondes acoustiques (104, 106) et la structure de transducteur interdigité (102) ont des paramètres géométriques différents. L’invention concerne en outre un capteur, comprenant un dispositif SAW tel que décrit précédemment, et un procédé pour fabriquer un dispositif SAW comprenant au moins une structure réflectrice d'ondes acoustiques. Figure pour abrégé : figure 1a
FR2010072A 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW) Active FR3114931B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2010072A FR3114931B1 (fr) 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)
PCT/EP2021/076840 WO2022069573A2 (fr) 2020-10-01 2021-09-29 Structure réfléchissante pour dispositifs à ondes acoustiques de surface (saw)
US18/247,629 US20230308074A1 (en) 2020-10-01 2021-09-29 Reflective structure for surface acoustic wave devices (saw)
EP21786397.6A EP4222860A2 (fr) 2020-10-01 2021-09-29 Structure réfléchissante pour dispositifs à ondes acoustiques de surface (saw)
JP2023518269A JP2023544271A (ja) 2020-10-01 2021-09-29 表面弾性波デバイス（ｓａｗ）用の反射構造体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2010072A FR3114931B1 (fr) 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)
FR2010072 2020-10-01

Publications (2)

Publication Number Publication Date
FR3114931A1 FR3114931A1 (fr) 2022-04-08
FR3114931B1 true FR3114931B1 (fr) 2022-12-30

Family

ID=74758877

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2010072A Active FR3114931B1 (fr) 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)

Country Status (5)

Country Link
US (1) US20230308074A1 (fr)
EP (1) EP4222860A2 (fr)
JP (1) JP2023544271A (fr)
FR (1) FR3114931B1 (fr)
WO (1) WO2022069573A2 (fr)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4290033A (en) * 1979-06-04 1981-09-15 Trw Inc. Shallow bulk acoustic wave devices employing energy trapping
US4353046A (en) * 1980-11-04 1982-10-05 R F Monolithics, Inc. Surface acoustic wave device with reflectors
JPS6278906A (ja) * 1985-10-01 1987-04-11 Kazuhiko Yamanouchi 弾性表面波装置の製造方法
US5418866A (en) * 1993-10-08 1995-05-23 E. I. Du Pont De Nemours And Company Surface acoustic wave devices for controlling high frequency signals using modified crystalline materials
US5568001A (en) * 1994-11-25 1996-10-22 Motorola, Inc. Saw device having acoustic elements with diverse mass loading and method for forming same
JP2003289234A (ja) * 2002-01-28 2003-10-10 Murata Mfg Co Ltd 弾性表面波装置、通信装置
JP2007202087A (ja) * 2005-05-11 2007-08-09 Seiko Epson Corp ラム波型高周波デバイス
JP6832737B2 (ja) * 2017-02-20 2021-02-24 京セラ株式会社 弾性表面波共振子、分波器および通信装置
DE102019102341A1 (de) * 2019-01-30 2020-07-30 RF360 Europe GmbH SAW-Vorrichtung

Also Published As

Publication number Publication date
WO2022069573A2 (fr) 2022-04-07
WO2022069573A3 (fr) 2022-05-27
JP2023544271A (ja) 2023-10-23
FR3114931A1 (fr) 2022-04-08
EP4222860A2 (fr) 2023-08-09
US20230308074A1 (en) 2023-09-28

Similar Documents

Publication Publication Date Title
FR3079053B1 (fr) Substrats composites pour les dispositifs d'etiquette a ondes acoustiques de surface pour applications de rfid et de capteurs
FR3120488B1 (fr) Dispositif capteur a ondes acoustiques de surface
FR3079667B1 (fr) Dispositif d'onde acoustique de surface sur substrat composite
FR3094484B1 (fr) Dispositif résonateur
FR3114875B1 (fr) Dispositif à résonateurs
FR3114931B1 (fr) Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)
FR3120489B1 (fr) Dispositif capteur à ondes acoustiques à deux ports
FR3100405B1 (fr) Capteur à ondes acoustiques différentiel
FR3096781B1 (fr) système de mesure acoustique picoseconde à double faisceaux sondes
FR3060121B1 (fr) Procede et dispositif de controle d'un collage entre deux substrats
FR3088721B1 (fr) Capteur capacitif pour la spectroscopie photo-acoustique, dispositif et procédé mettant en œuvre un tel capteur.
FR3094489A1 (fr) Appareil de mesure des propriétés de matériaux à précision améliorée par l’utilisation de capteurs laser
FR3115158B1 (fr) Pixel à SPAD
JP7072973B2 (ja) 糖薄膜の形成方法および弾性表面波センサ
JP7051207B2 (ja) 特性測定装置
JP3848673B2 (ja) 光学式形状測定装置
JP3785025B2 (ja) 光学式形状測定装置
FR2640106A1 (fr) Dispositif et procede pour corriger le signal de sortie d'un hydrophone en en eliminant la composante hydrostatique
CA2374218A1 (fr) Procede d'evaluation de resilience d'un assemblage soude et appareil d'analyse correspondant mesurant des vitesses d'ondes ultrasonores superficielles
JP2816514B2 (ja) 光学測定装置
SU1647379A1 (ru) Способ определени коэффициента затухани ультразвуковых колебаний в материале
JP2755126B2 (ja) タイヤ型超音波探触子
JP3407343B2 (ja) 膜厚測定方法及びその装置
JP2001108519A (ja) 振動振幅計測法及び装置
SU605170A1 (ru) Способ определени механической структуры изделий

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20220408

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

TP Transmission of property

Owner name: SOITEC, FR

Effective date: 20230823