FR3120488B1 - Dispositif capteur a ondes acoustiques de surface - Google Patents
Dispositif capteur a ondes acoustiques de surface Download PDFInfo
- Publication number
- FR3120488B1 FR3120488B1 FR2102072A FR2102072A FR3120488B1 FR 3120488 B1 FR3120488 B1 FR 3120488B1 FR 2102072 A FR2102072 A FR 2102072A FR 2102072 A FR2102072 A FR 2102072A FR 3120488 B1 FR3120488 B1 FR 3120488B1
- Authority
- FR
- France
- Prior art keywords
- sensor device
- acoustic wave
- wave sensor
- surface acoustic
- reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010897 surface acoustic wave method Methods 0.000 title 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 238000002161 passivation Methods 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
- G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
- G01K11/265—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies using surface acoustic wave [SAW]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2462—Probes with waveguides, e.g. SAW devices
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/644—Coupled resonator filters having two acoustic tracks
- H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
- H03H9/6459—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/644—Coupled resonator filters having two acoustic tracks
- H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
- H03H9/6469—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes
- H03H9/6476—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes the tracks being electrically parallel
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
La présente invention concerne un dispositif capteur à ondes acoustiques, comprenant un premier transducteur interdigité, une première structure de réflexion, une deuxième structure de réflexion, une première cavité de résonance comprenant une première surface supérieure et formée entre le premier transducteur interdigité et la première structure de réflexion, et une deuxième cavité de résonance comprenant une deuxième surface supérieure et formée entre le premier transducteur interdigité et la deuxième structure de réflexion, et dans lequel au moins une des première et deuxième surfaces supérieures est recouverte au moins partiellement par une couche de métallisation ou une couche de passivation. Figure pour l’abrégé : Figure 2a
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2102072A FR3120488B1 (fr) | 2021-03-03 | 2021-03-03 | Dispositif capteur a ondes acoustiques de surface |
EP22708186.6A EP4302400A1 (fr) | 2021-03-03 | 2022-03-03 | Dispositif capteur d'ondes acoustiques de surface |
PCT/EP2022/055371 WO2022184815A1 (fr) | 2021-03-03 | 2022-03-03 | Dispositif capteur d'ondes acoustiques de surface |
JP2023547061A JP2024507713A (ja) | 2021-03-03 | 2022-03-03 | 表面弾性波センサデバイス |
US18/548,847 US20240159710A1 (en) | 2021-03-03 | 2022-03-03 | Surface acoustic wave sensor device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2102072A FR3120488B1 (fr) | 2021-03-03 | 2021-03-03 | Dispositif capteur a ondes acoustiques de surface |
FR2102072 | 2021-03-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3120488A1 FR3120488A1 (fr) | 2022-09-09 |
FR3120488B1 true FR3120488B1 (fr) | 2023-09-15 |
Family
ID=76283843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2102072A Active FR3120488B1 (fr) | 2021-03-03 | 2021-03-03 | Dispositif capteur a ondes acoustiques de surface |
Country Status (5)
Country | Link |
---|---|
US (1) | US20240159710A1 (fr) |
EP (1) | EP4302400A1 (fr) |
JP (1) | JP2024507713A (fr) |
FR (1) | FR3120488B1 (fr) |
WO (1) | WO2022184815A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3094484B1 (fr) * | 2019-03-29 | 2021-07-16 | Frecnsys | Dispositif résonateur |
FR3100330A1 (fr) * | 2019-09-04 | 2021-03-05 | Frec'n'sys | Capteurs de pression à ondes acoustiques différentiels |
WO2024027920A1 (fr) * | 2022-08-05 | 2024-02-08 | Huawei Technologies Co., Ltd. | Procédé de fabrication d'un résonateur à ondes acoustiques de surface |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2785473B1 (fr) * | 1998-10-30 | 2001-01-26 | Thomson Csf | Filtre faibles pertes a ondes acoustiques de surface sur substrat de quartz de coupe optimisee |
US20040244466A1 (en) * | 2003-06-06 | 2004-12-09 | Chi-Yen Shen | Ammonia gas sensor and its manufacturing method |
US7205701B2 (en) * | 2004-09-03 | 2007-04-17 | Honeywell International Inc. | Passive wireless acoustic wave chemical sensor |
JP5956901B2 (ja) * | 2011-12-22 | 2016-07-27 | 日本無線株式会社 | 被測定物特性測定装置 |
CN104768113B (zh) * | 2015-03-20 | 2018-05-18 | 南京航空航天大学 | 一种用于液体多参数传感的乐甫波器件结构及检测方法 |
FR3039708B1 (fr) | 2015-07-31 | 2019-08-09 | Senseor | Resonateur a ondes elastiques de surface simple port sur substrat a forte permittivite |
WO2019094388A1 (fr) * | 2017-11-07 | 2019-05-16 | Resonant Inc. | Capteur saw à bande ultra-large comprenant un réflecteur gravé à modulation de fréquence hyperbolique |
KR102671258B1 (ko) * | 2018-07-27 | 2024-06-03 | 소이텍 | 공동 공진 saw 필터 |
-
2021
- 2021-03-03 FR FR2102072A patent/FR3120488B1/fr active Active
-
2022
- 2022-03-03 JP JP2023547061A patent/JP2024507713A/ja active Pending
- 2022-03-03 WO PCT/EP2022/055371 patent/WO2022184815A1/fr active Application Filing
- 2022-03-03 EP EP22708186.6A patent/EP4302400A1/fr active Pending
- 2022-03-03 US US18/548,847 patent/US20240159710A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2024507713A (ja) | 2024-02-21 |
FR3120488A1 (fr) | 2022-09-09 |
US20240159710A1 (en) | 2024-05-16 |
WO2022184815A1 (fr) | 2022-09-09 |
EP4302400A1 (fr) | 2024-01-10 |
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Legal Events
Date | Code | Title | Description |
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20220909 |
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PLFP | Fee payment |
Year of fee payment: 3 |
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TP | Transmission of property |
Owner name: SOITEC, FR Effective date: 20230823 |
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PLFP | Fee payment |
Year of fee payment: 4 |