FR2955211B1 - Element de capteur pour la mesure d'un champ magnetique, capteur realise avec un tel element et son procede de realisation - Google Patents

Element de capteur pour la mesure d'un champ magnetique, capteur realise avec un tel element et son procede de realisation

Info

Publication number
FR2955211B1
FR2955211B1 FR1150125A FR1150125A FR2955211B1 FR 2955211 B1 FR2955211 B1 FR 2955211B1 FR 1150125 A FR1150125 A FR 1150125A FR 1150125 A FR1150125 A FR 1150125A FR 2955211 B1 FR2955211 B1 FR 2955211B1
Authority
FR
France
Prior art keywords
sensor
measuring
producing
component
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1150125A
Other languages
English (en)
French (fr)
Other versions
FR2955211A1 (fr
Inventor
Torsten Ohms
Marian Keck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2955211A1 publication Critical patent/FR2955211A1/fr
Application granted granted Critical
Publication of FR2955211B1 publication Critical patent/FR2955211B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/072—Constructional adaptation of the sensor to specific applications
    • G01R33/075—Hall devices configured for spinning current measurements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)
FR1150125A 2010-01-11 2011-01-07 Element de capteur pour la mesure d'un champ magnetique, capteur realise avec un tel element et son procede de realisation Expired - Fee Related FR2955211B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010000769A DE102010000769A1 (de) 2010-01-11 2010-01-11 Sensorelement zur Magnetfeldmessung, Magnetfeld-Sensor und Verfahren zur Herstellung eines Sensorelements

Publications (2)

Publication Number Publication Date
FR2955211A1 FR2955211A1 (fr) 2011-07-15
FR2955211B1 true FR2955211B1 (fr) 2016-02-19

Family

ID=43975353

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1150125A Expired - Fee Related FR2955211B1 (fr) 2010-01-11 2011-01-07 Element de capteur pour la mesure d'un champ magnetique, capteur realise avec un tel element et son procede de realisation

Country Status (4)

Country Link
CN (1) CN102169955B (de)
DE (1) DE102010000769A1 (de)
FR (1) FR2955211B1 (de)
IT (1) IT1403298B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2778704B1 (de) * 2013-03-11 2015-09-16 Ams Ag Magnetfeldsensorsystem
DE102013209514A1 (de) 2013-05-22 2014-11-27 Micronas Gmbh Dreidimensionaler Hallsensor zum Detektieren eines räumlichen Magnetfeldes
CN107966669B (zh) * 2017-12-19 2019-11-08 大连理工大学 适用于高温工作环境的半导体三维霍尔传感器及其制作方法
DE102018009110A1 (de) * 2018-11-21 2020-05-28 Tdk-Micronas Gmbh SCI-Halbleiterstruktur und Verfahren zur Herstellung einer SOI-Halbleiterstruktur
DE102018009162A1 (de) * 2018-11-22 2020-05-28 Tdk-Micronas Gmbh Halbleitersensorstruktur
DE102019000165B4 (de) * 2019-01-14 2024-06-27 Tdk-Micronas Gmbh Halbleitersensorstruktur
CN117098447B (zh) * 2023-10-20 2024-02-06 北京智芯微电子科技有限公司 垂直霍尔传感器及制造方法、芯片

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5543988A (en) * 1993-04-30 1996-08-06 International Business Machines Corporation Hall sensor with high spatial resolution in two directions concurrently
DE10244096B4 (de) * 2002-09-23 2015-05-28 Robert Bosch Gmbh Spinning-Current-Hallsensor mit homogener Raumladungszone
DE10313642A1 (de) 2003-03-26 2004-10-14 Micronas Gmbh Offset-reduzierter Hall-sensor
JP4466276B2 (ja) * 2004-08-17 2010-05-26 株式会社デンソー 縦型ホール素子およびその製造方法
JP4674578B2 (ja) * 2006-01-13 2011-04-20 株式会社デンソー 磁気センサ及び磁気検出方法

Also Published As

Publication number Publication date
CN102169955A (zh) 2011-08-31
IT1403298B1 (it) 2013-10-17
CN102169955B (zh) 2015-09-09
ITMI20110008A1 (it) 2011-07-12
FR2955211A1 (fr) 2011-07-15
DE102010000769A1 (de) 2011-07-14

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