FR2947629B1 - Dispositif de mesure de pression et son procede de fabrication - Google Patents
Dispositif de mesure de pression et son procede de fabricationInfo
- Publication number
- FR2947629B1 FR2947629B1 FR0954667A FR0954667A FR2947629B1 FR 2947629 B1 FR2947629 B1 FR 2947629B1 FR 0954667 A FR0954667 A FR 0954667A FR 0954667 A FR0954667 A FR 0954667A FR 2947629 B1 FR2947629 B1 FR 2947629B1
- Authority
- FR
- France
- Prior art keywords
- manufacturing
- same
- measuring device
- pressure measuring
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0954667A FR2947629B1 (fr) | 2009-07-06 | 2009-07-06 | Dispositif de mesure de pression et son procede de fabrication |
PCT/FR2010/051415 WO2011004113A1 (fr) | 2009-07-06 | 2010-07-05 | Dispositif de mesure de pression et son procédé de fabrication |
EP10742200A EP2452174A1 (fr) | 2009-07-06 | 2010-07-05 | Dispositif de mesure de pression et son procédé de fabrication |
US13/379,399 US20120096944A1 (en) | 2009-07-06 | 2010-07-05 | Device for measuring pressure, and method for manufacturing same |
IL217358A IL217358A0 (en) | 2009-07-06 | 2012-01-04 | Device for measuring pressure, and method for manufacturing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0954667A FR2947629B1 (fr) | 2009-07-06 | 2009-07-06 | Dispositif de mesure de pression et son procede de fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2947629A1 FR2947629A1 (fr) | 2011-01-07 |
FR2947629B1 true FR2947629B1 (fr) | 2012-03-30 |
Family
ID=41665255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0954667A Expired - Fee Related FR2947629B1 (fr) | 2009-07-06 | 2009-07-06 | Dispositif de mesure de pression et son procede de fabrication |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120096944A1 (fr) |
EP (1) | EP2452174A1 (fr) |
FR (1) | FR2947629B1 (fr) |
IL (1) | IL217358A0 (fr) |
WO (1) | WO2011004113A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10139313B2 (en) * | 2015-07-22 | 2018-11-27 | Teknologian Tutkimuskeskus Vtt Oy | Capacitive cylinder pressure sensor |
CN105136378B (zh) * | 2015-09-24 | 2018-04-20 | 京东方科技集团股份有限公司 | 一种显示基板及显示装置 |
JP6889061B2 (ja) * | 2017-07-27 | 2021-06-18 | アズビル株式会社 | 静電容量型圧力センサ |
FR3072772B1 (fr) * | 2017-10-24 | 2019-10-11 | Mistic | Capteur monolithique integre biocompatible, notamment pour dispositif medical implantable actif |
CN112161730A (zh) * | 2020-09-27 | 2021-01-01 | 张红卫 | 一种压力传感器及保护套结构 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4977480A (en) * | 1988-09-14 | 1990-12-11 | Fuji Koki Mfg. Co., Ltd. | Variable-capacitance type sensor and variable-capacitance type sensor system using the same |
US5792597A (en) * | 1991-02-28 | 1998-08-11 | Fuji Photo Film Co., Ltd. | Image forming method |
US5445031A (en) * | 1991-11-28 | 1995-08-29 | Endress+Hauser Gmbh+Co. | Pressure-measuring arrangement with high linearity |
JP2678880B2 (ja) * | 1994-03-17 | 1997-11-19 | 株式会社タニタ | 一体構成の薄型重量センサ |
FI100918B (fi) * | 1995-02-17 | 1998-03-13 | Vaisala Oy | Pintamikromekaaninen, symmetrinen paine-eroanturi |
US5911162A (en) * | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
US5983727A (en) * | 1997-08-19 | 1999-11-16 | Pressure Profile Systems | System generating a pressure profile across a pressure sensitive membrane |
US6568274B1 (en) * | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
WO1999053286A1 (fr) * | 1998-04-09 | 1999-10-21 | Ploechinger Heinz | Structure capacitive detectrice de pression ou de force et son procede de production |
US6772640B1 (en) * | 2000-10-10 | 2004-08-10 | Mks Instruments, Inc. | Multi-temperature heater for use with pressure transducers |
US6813954B2 (en) * | 2001-05-25 | 2004-11-09 | Panametrics, Inc. | High sensitivity pressure sensor with long term stability |
US7024936B2 (en) * | 2002-06-18 | 2006-04-11 | Corporation For National Research Initiatives | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
JP2007502416A (ja) * | 2003-08-11 | 2007-02-08 | アナログ デバイシーズ インク | 容量型センサ |
US7258028B2 (en) * | 2003-08-12 | 2007-08-21 | Park Heung Joon | Load measuring transducer including elastic structure and gauge using induced voltage, and load measuring system using the same |
EP1548409A1 (fr) * | 2003-12-23 | 2005-06-29 | Dialog Semiconductor GmbH | Mesure de capacité différentielle |
US7137301B2 (en) * | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
WO2007061841A2 (fr) * | 2005-11-18 | 2007-05-31 | Cardiomems, Inc. | Electrode de condensateur formee a la surface d'une puce de circuit integre |
EP2021757B1 (fr) * | 2006-05-17 | 2011-04-06 | CardioMems, Inc. | Chambre hermétique avec des traversées électriques |
WO2009077463A1 (fr) * | 2007-12-14 | 2009-06-25 | Siemens Aktiengesellschaft | Cellule de mesure |
-
2009
- 2009-07-06 FR FR0954667A patent/FR2947629B1/fr not_active Expired - Fee Related
-
2010
- 2010-07-05 US US13/379,399 patent/US20120096944A1/en not_active Abandoned
- 2010-07-05 WO PCT/FR2010/051415 patent/WO2011004113A1/fr active Application Filing
- 2010-07-05 EP EP10742200A patent/EP2452174A1/fr not_active Withdrawn
-
2012
- 2012-01-04 IL IL217358A patent/IL217358A0/en unknown
Also Published As
Publication number | Publication date |
---|---|
EP2452174A1 (fr) | 2012-05-16 |
FR2947629A1 (fr) | 2011-01-07 |
IL217358A0 (en) | 2012-02-29 |
WO2011004113A1 (fr) | 2011-01-13 |
US20120096944A1 (en) | 2012-04-26 |
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Legal Events
Date | Code | Title | Description |
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PLFP | Fee payment |
Year of fee payment: 8 |
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PLFP | Fee payment |
Year of fee payment: 9 |
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PLFP | Fee payment |
Year of fee payment: 10 |
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PLFP | Fee payment |
Year of fee payment: 11 |
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PLFP | Fee payment |
Year of fee payment: 12 |
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PLFP | Fee payment |
Year of fee payment: 13 |
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PLFP | Fee payment |
Year of fee payment: 14 |
|
ST | Notification of lapse |
Effective date: 20240305 |