FR2497568A1 - Procede photo-electrique et dispositif recepteur pour deceler la position de structures angulaires a mesurer - Google Patents

Procede photo-electrique et dispositif recepteur pour deceler la position de structures angulaires a mesurer Download PDF

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Publication number
FR2497568A1
FR2497568A1 FR8200081A FR8200081A FR2497568A1 FR 2497568 A1 FR2497568 A1 FR 2497568A1 FR 8200081 A FR8200081 A FR 8200081A FR 8200081 A FR8200081 A FR 8200081A FR 2497568 A1 FR2497568 A1 FR 2497568A1
Authority
FR
France
Prior art keywords
central
receiving
signal
peripheral
receiving surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR8200081A
Other languages
English (en)
French (fr)
Inventor
Rainer Endter
Herbert Schulze
Hans-Gunter Woschni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of FR2497568A1 publication Critical patent/FR2497568A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8200081A 1981-01-07 1982-01-06 Procede photo-electrique et dispositif recepteur pour deceler la position de structures angulaires a mesurer Withdrawn FR2497568A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22686181A DD156290A1 (de) 1981-01-07 1981-01-07 Fotoelektrisches verfahren und empfaengeranordnung zur lageerkennung kantenfoermiger messstrukturen

Publications (1)

Publication Number Publication Date
FR2497568A1 true FR2497568A1 (fr) 1982-07-09

Family

ID=5528539

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8200081A Withdrawn FR2497568A1 (fr) 1981-01-07 1982-01-06 Procede photo-electrique et dispositif recepteur pour deceler la position de structures angulaires a mesurer

Country Status (4)

Country Link
DD (1) DD156290A1 (de)
DE (1) DE3143948A1 (de)
FR (1) FR2497568A1 (de)
GB (1) GB2090657A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984004586A1 (en) * 1983-05-17 1984-11-22 Matsushita Electric Ind Co Ltd Position-detecting apparatus
JPS6177701A (ja) * 1984-09-25 1986-04-21 Mitsutoyo Mfg Co Ltd 光学式測定機器におけるエツジ検出装置
DD228053A1 (de) * 1984-11-01 1985-10-02 Zeiss Jena Veb Carl Verfahren zum fotoelektrischen antasten von kanten und strukturen
JPS61128105A (ja) * 1984-11-26 1986-06-16 Mitsutoyo Mfg Co Ltd 光学式測定機器におけるエツジ検出装置
DD249525A1 (de) * 1986-06-02 1987-09-09 Zeiss Jena Veb Carl Anordnung zum fotoelektrischen erkennen des zusammenfallens zweier objektbilder
DE4115534A1 (de) * 1991-05-13 1992-11-19 Horst Dr Ahlers Optoelektronische einrichtung zur vermessung von strukturkanten
DE19713336C1 (de) * 1997-03-29 1998-07-02 Zeiss Carl Jena Gmbh Ortsempfindlicher fotoelektrischer Sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1391064A (en) * 1971-03-16 1975-04-16 Sira Institute Electrooptical lens position detection apparatus
GB1520693A (en) * 1976-04-01 1978-08-09 Crosfield Electronics Ltd Detecting lateral position of webs

Also Published As

Publication number Publication date
GB2090657A (en) 1982-07-14
DD156290A1 (de) 1982-08-11
DE3143948A1 (de) 1982-08-12

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