FR2458599A1 - Cible a bombardement ionique montee sur un support - Google Patents

Cible a bombardement ionique montee sur un support Download PDF

Info

Publication number
FR2458599A1
FR2458599A1 FR8009870A FR8009870A FR2458599A1 FR 2458599 A1 FR2458599 A1 FR 2458599A1 FR 8009870 A FR8009870 A FR 8009870A FR 8009870 A FR8009870 A FR 8009870A FR 2458599 A1 FR2458599 A1 FR 2458599A1
Authority
FR
France
Prior art keywords
target
support
metal foil
layer
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR8009870A
Other languages
English (en)
French (fr)
Inventor
Hans Peter Wahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DEMETRON
Original Assignee
DEMETRON
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DEMETRON filed Critical DEMETRON
Publication of FR2458599A1 publication Critical patent/FR2458599A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
FR8009870A 1979-06-08 1980-04-30 Cible a bombardement ionique montee sur un support Withdrawn FR2458599A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792923174 DE2923174A1 (de) 1979-06-08 1979-06-08 Sputtertarget auf traegerplatte

Publications (1)

Publication Number Publication Date
FR2458599A1 true FR2458599A1 (fr) 1981-01-02

Family

ID=6072725

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8009870A Withdrawn FR2458599A1 (fr) 1979-06-08 1980-04-30 Cible a bombardement ionique montee sur un support

Country Status (3)

Country Link
DE (1) DE2923174A1 (de)
FR (1) FR2458599A1 (de)
GB (1) GB2053763A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU179895B (en) * 1980-09-09 1982-12-28 Egyesuelt Izzolampa Method for welding current inlets of molyadenum foil used light source industry and electrodes by the application of contacting materials applied by means of vacuum evaporation
DE3148354A1 (de) * 1981-12-07 1983-06-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur kathodenzerstaeubung eines metalles
DE3233215C1 (de) * 1982-09-07 1984-04-19 Siemens AG, 1000 Berlin und 8000 München Verfahren zum Befestigen von in Scheiben- oder Plattenform vorliegenden Targetmaterialien auf Kuehlteller fuer Aufstaeubanlagen
GB2137547B (en) * 1983-03-26 1986-10-22 Ferranti Plc Joints between articles of materials of different coefficients of thermal expansion
AT392291B (de) * 1987-09-01 1991-02-25 Miba Gleitlager Ag Stabfoermige sowie magnetron- bzw. sputterkathodenanordnung, sputterverfahren, und vorrichtung zur durchfuehrung des verfahrens
US7550055B2 (en) * 2005-05-31 2009-06-23 Applied Materials, Inc. Elastomer bonding of large area sputtering target
DE202009014959U1 (de) * 2009-10-23 2010-10-21 Sindlhauser Materials Gmbh Sputtertargetanordnung
AT14157U1 (de) * 2013-12-20 2015-05-15 Plansee Se W-Ni-Sputtertarget
JP6854306B2 (ja) * 2019-02-12 2021-04-07 Ｊｘ金属株式会社 スパッタリングターゲット−バッキングプレート接合体

Also Published As

Publication number Publication date
DE2923174A1 (de) 1980-12-11
GB2053763A (en) 1981-02-11

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