FR2417179A1 - Canon electronique a emission de champ - Google Patents

Canon electronique a emission de champ

Info

Publication number
FR2417179A1
FR2417179A1 FR7901902A FR7901902A FR2417179A1 FR 2417179 A1 FR2417179 A1 FR 2417179A1 FR 7901902 A FR7901902 A FR 7901902A FR 7901902 A FR7901902 A FR 7901902A FR 2417179 A1 FR2417179 A1 FR 2417179A1
Authority
FR
France
Prior art keywords
chamber
anode
cathode
field emission
evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7901902A
Other languages
English (en)
Other versions
FR2417179B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2417179A1 publication Critical patent/FR2417179A1/fr
Application granted granted Critical
Publication of FR2417179B1 publication Critical patent/FR2417179B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

Description d'un canon électronique à émission de champ qui comporte un système de chauffage pour chauffer une anode afin d'empêcher une émission de gaz provenant de cette anode en raison du bombardement de rayons d'électrons émis d'une cathode, un premier système d'évacuation qui délimite une première chambre comprenant la cathode et qui fait le vide dans ladite chambre, et un second système d'évacuation adjacent audit premier système via l'anode, qui délimite une chambre comprenant le système de chauffage de l'anode et capable de faire le vide dans cette chambre Indépendamment du premier système d'évacuation. Cette construction permet de maintenir la chambre comprenant la cathode constamment sous vide élevé.
FR7901902A 1978-02-08 1979-01-25 Canon electronique a emission de champ Granted FR2417179A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1372278 1978-02-08

Publications (2)

Publication Number Publication Date
FR2417179A1 true FR2417179A1 (fr) 1979-09-07
FR2417179B1 FR2417179B1 (fr) 1981-12-04

Family

ID=11841129

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7901902A Granted FR2417179A1 (fr) 1978-02-08 1979-01-25 Canon electronique a emission de champ

Country Status (5)

Country Link
US (1) US4295072A (fr)
DE (1) DE2904814C3 (fr)
FR (1) FR2417179A1 (fr)
GB (1) GB2018508B (fr)
NL (1) NL177784C (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2155201B (en) * 1984-02-24 1988-07-13 Canon Kk An x-ray exposure apparatus
JP2732961B2 (ja) * 1991-07-18 1998-03-30 株式会社日立製作所 荷電粒子線装置
JP5386229B2 (ja) 2009-05-22 2014-01-15 株式会社日立ハイテクノロジーズ 電子銃
WO2010146833A1 (fr) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ Dispositif de rayonnement à particules chargées
WO2016063325A1 (fr) 2014-10-20 2016-04-28 株式会社日立ハイテクノロジーズ Microscopie électronique à balayage
JP7068117B2 (ja) 2018-09-18 2022-05-16 株式会社日立ハイテク 荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3775630A (en) * 1971-07-19 1973-11-27 Hitachi Ltd Electron gun device of field emission type

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE576003A (fr) * 1942-12-01
GB1291221A (en) * 1968-07-07 1972-10-04 Smith Kenneth C A Electron probe forming system
JPS5518014B2 (fr) * 1974-12-20 1980-05-15
US4140905A (en) * 1977-05-02 1979-02-20 The Governing Council Of The University Of Toronto Laser-induced mass spectrometry

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3775630A (en) * 1971-07-19 1973-11-27 Hitachi Ltd Electron gun device of field emission type

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EXBK/70 *
EXBK/73 *

Also Published As

Publication number Publication date
GB2018508B (en) 1982-06-03
NL177784C (nl) 1985-11-18
DE2904814C3 (de) 1982-04-01
DE2904814B2 (de) 1981-07-23
NL177784B (nl) 1985-06-17
FR2417179B1 (fr) 1981-12-04
GB2018508A (en) 1979-10-17
NL7900970A (nl) 1979-08-10
DE2904814A1 (de) 1979-08-09
US4295072A (en) 1981-10-13

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