GB1398167A - High pressure ion sources - Google Patents

High pressure ion sources

Info

Publication number
GB1398167A
GB1398167A GB4002872A GB4002872A GB1398167A GB 1398167 A GB1398167 A GB 1398167A GB 4002872 A GB4002872 A GB 4002872A GB 4002872 A GB4002872 A GB 4002872A GB 1398167 A GB1398167 A GB 1398167A
Authority
GB
United Kingdom
Prior art keywords
chamber
electrode
ions
metallic
torr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4002872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNOF H
Original Assignee
KNOF H
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KNOF H filed Critical KNOF H
Publication of GB1398167A publication Critical patent/GB1398167A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Abstract

1398167 Ion sources H KNOF 29 Aug 1972 [31 Aug 1971] 40028/72 Heading H1D In an ion source comprising an ionization chamber 1Q wherein gas or vapour at a pressure of 1 Torr is ionized by an electron beam issuing from a cylindrical anode tube 13, the path of the ions leaving the chamber is screened by an electrode 1 maintained at substantially the same potential as the ionization chamber. Gas or vapour is supplied to the chamber from a source 12 via a pressure reducing valve 11 and a duct 2 which is electrically connected to the chamber and insulated from the outer enclosure; the valve 11 is preferably metallic but may be non-metallic. The outer chamber QR is exhausted to 1À5 x 10<SP>-3</SP> Torr by two diffusion pumps 16 and 17, and a third pump 18 may exhaust a mass spectrometer to which the ions are supplied. The anode tube 13 may be cooled by liquid nitrogen in a flask 21 and may be exhausted through a metallic screen near the cathode by means of a fourth pump 22. Electrons from the cathode are accelerated to about 800 volts by the anode 13 and focused by a magnetic field and by electrode 3 which extends into the ionization chamber, and a further focusing magnet (19, Fig. 2, not shown) may be provided behind collector A. The chamber and electrode 1 may be at - 2-9 kV, the envelope being earthed, and electrodes S and H may be at - 2-9 kV, 2À895 kV and - 2À830kV to focus the ions on an output slit 14; further electrodes F focus the ion beam on the output multiplier SEM of the mass spectrometer.
GB4002872A 1971-08-31 1972-08-29 High pressure ion sources Expired GB1398167A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2143460A DE2143460C3 (en) 1971-08-31 1971-08-31 Ion source

Publications (1)

Publication Number Publication Date
GB1398167A true GB1398167A (en) 1975-06-18

Family

ID=5818212

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4002872A Expired GB1398167A (en) 1971-08-31 1972-08-29 High pressure ion sources

Country Status (4)

Country Link
US (1) US3860848A (en)
DE (1) DE2143460C3 (en)
FR (1) FR2153239B1 (en)
GB (1) GB1398167A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2183902A (en) * 1985-10-30 1987-06-10 Hitachi Ltd Atmospheric pressure ionization mass spectrometer
GB2203887A (en) * 1987-01-23 1988-10-26 Univ Ramot Method and apparatus for producing ions by surface ionization of energy-rich molecules and atoms
CN111971778A (en) * 2017-09-29 2020-11-20 珀金埃尔默保健科学公司 Off-axis ionization device and system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4240007A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Microchannel ion gun
JPS6056342A (en) * 1983-09-08 1985-04-01 Anelva Corp Ion beam generating apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2601097A (en) * 1949-07-20 1952-06-17 Arthur R Crawford Mass spectrometer for simultaneous multiple gas determinations

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2183902A (en) * 1985-10-30 1987-06-10 Hitachi Ltd Atmospheric pressure ionization mass spectrometer
US4769540A (en) * 1985-10-30 1988-09-06 Hitachi, Ltd. Atmospheric pressure ionization mass spectrometer
GB2183902B (en) * 1985-10-30 1990-02-14 Hitachi Ltd Atmospheric pressure ionization mass spectrometer
USRE35681E (en) * 1985-10-30 1997-12-02 Hitachi, Ltd. Atmospheric pressure ionization mass spectrometer
GB2203887A (en) * 1987-01-23 1988-10-26 Univ Ramot Method and apparatus for producing ions by surface ionization of energy-rich molecules and atoms
GB2203887B (en) * 1987-01-23 1990-08-15 Univ Ramot Method and apparatus for producing ions by surface ionization of energy-rich molecules and atoms
CN111971778A (en) * 2017-09-29 2020-11-20 珀金埃尔默保健科学公司 Off-axis ionization device and system
JP2020535622A (en) * 2017-09-29 2020-12-03 パーキンエルマー・ヘルス・サイエンシーズ・カナダ・インコーポレイテッドＰｅｒｋｉｎｅｌｍｅｒ Ｈｅａｌｔｈ Ｓｃｉｅｎｃｅｓ Ｃａｎａｄａ， Ｉｎｃ． Off-axis ionization devices and systems
EP3688789A4 (en) * 2017-09-29 2021-09-29 Perkinelmer Health Sciences Canada, Inc Off-axis ionization devices and systems

Also Published As

Publication number Publication date
DE2143460C3 (en) 1974-05-16
US3860848A (en) 1975-01-14
DE2143460B2 (en) 1973-10-18
FR2153239B1 (en) 1976-10-29
DE2143460A1 (en) 1973-03-15
FR2153239A1 (en) 1973-05-04

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee