FR2380232A1 - Procede et dispositif pour la fabrication d'une fibre optique a depot dans un tube active par plasma - Google Patents

Procede et dispositif pour la fabrication d'une fibre optique a depot dans un tube active par plasma

Info

Publication number
FR2380232A1
FR2380232A1 FR7803695A FR7803695A FR2380232A1 FR 2380232 A1 FR2380232 A1 FR 2380232A1 FR 7803695 A FR7803695 A FR 7803695A FR 7803695 A FR7803695 A FR 7803695A FR 2380232 A1 FR2380232 A1 FR 2380232A1
Authority
FR
France
Prior art keywords
tube
optical fiber
manufacture
plasma
plasma active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7803695A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Northern Telecom Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd filed Critical Northern Telecom Ltd
Publication of FR2380232A1 publication Critical patent/FR2380232A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01876—Means for heating tubes or rods during or immediately prior to deposition, e.g. electric resistance heaters
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/80—Apparatus for specific applications
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1221—Features relating to the reactor or vessel the reactor per se
    • B01J2219/1224—Form of the reactor
    • B01J2219/1227—Reactors comprising tubes with open ends
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/04—Electric heat

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

Procédé et dispositif de fabrication d'une fibre optique permettant d'obtenir une température élevée et d'utiliser une pression voisine de la pression atmosphérique. Une fibre optique est fabriquée en formant une couche de silice fondue, qui peut être ou non dopée, sur la paroi intérieure d'un tube 10 en silice fondue, en produisant un plasma 16 dans les gaz de réaction 14 circulant dans le tube. Une température élevée peut ainsi être maintenue à l'intérieur du tube, température supérieure à celle de la paroi extérieure du tube. Le plasma est produit à une pression sensiblement voisine de la pression atmosphérique. Un gaz de refroidissement 15 passe le long de la paroi extérieure du tube. Application à la fabrication de fibres optiques.
FR7803695A 1977-02-10 1978-02-09 Procede et dispositif pour la fabrication d'une fibre optique a depot dans un tube active par plasma Withdrawn FR2380232A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA271,515A CA1080562A (fr) 1977-02-10 1977-02-10 Methode et appareil de fabrication de fibres optiques par depot active par plasma dans un tube
US05/768,068 US4090055A (en) 1977-02-10 1977-02-14 Apparatus for manufacturing an optical fibre with plasma activated deposition in a tube

Publications (1)

Publication Number Publication Date
FR2380232A1 true FR2380232A1 (fr) 1978-09-08

Family

ID=25668452

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7803695A Withdrawn FR2380232A1 (fr) 1977-02-10 1978-02-09 Procede et dispositif pour la fabrication d'une fibre optique a depot dans un tube active par plasma

Country Status (8)

Country Link
US (1) US4090055A (fr)
JP (1) JPS53100258A (fr)
CA (1) CA1080562A (fr)
DE (1) DE2804125A1 (fr)
FR (1) FR2380232A1 (fr)
GB (1) GB1567876A (fr)
NL (1) NL7714590A (fr)
SE (1) SE7801606L (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0005963A1 (fr) * 1978-05-30 1979-12-12 International Standard Electric Corporation Procédé de dépôt de verre à l'aide d'un plasma; préforme pour fibre optique en verre ou silice obtenue par ledit procédé, et procédé de fabrication d'une fibre optique en silice à partir de ladite préforme
EP0019549A1 (fr) * 1979-05-18 1980-11-26 Thomson-Csf Dispositif hyperfréquence pour le dépôt de films minces sur des solides
FR2489297A1 (fr) * 1980-08-26 1982-03-05 Western Electric Co Procede de fabrication d'une preforme pour guide de lumiere et preforme ainsi obtenue

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JPS5939178B2 (ja) * 1977-04-25 1984-09-21 株式会社東芝 活性化ガス発生装置
US4276072A (en) * 1977-06-07 1981-06-30 International Telephone And Telegraph Corporation Optical fiber fabrication
US4253863A (en) * 1977-06-07 1981-03-03 International Telephone And Telegraph Corporation Apparatus for mass producing fiber optic preforms and optic fibers
US4179596A (en) * 1978-04-27 1979-12-18 Litton Systems, Inc. Method for processing fiberoptic electronic components of electronic vacuum devices
US4312654A (en) * 1978-06-08 1982-01-26 Corning Glass Works Method and apparatus for making large diameter optical waveguide preforms
JPS5510469A (en) * 1978-07-10 1980-01-24 Nippon Telegr & Teleph Corp <Ntt> Production of glass fiber for light communication
US4235616A (en) * 1979-05-14 1980-11-25 Corning Glass Works Optical waveguide manufacturing process and article
US4423303A (en) * 1980-05-06 1983-12-27 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for treating powdery materials utilizing microwave plasma
DE3222189A1 (de) * 1982-06-12 1984-01-26 Hans Dr.Rer.Nat. 5370 Kall Beerwald Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material
GB2133786A (en) * 1983-01-24 1984-08-01 Ass Elect Ind Silica tube manufacture
DE3326043A1 (de) * 1983-07-20 1985-02-07 Licentia Gmbh Verfahren zur herstellung eines aerosolstromes und dessen verwendung
US4557742A (en) * 1984-07-02 1985-12-10 Polaroid Corporation Polarized optical fiber and method of forming same
DE3568570D1 (en) * 1984-07-03 1989-04-13 Stiftelsen Inst Mikrovags Method and apparatus for heating thick-walled glass tubes
DE3427323A1 (de) * 1984-07-25 1986-03-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung eines aerosolstromes
DE3434674A1 (de) * 1984-09-21 1986-04-03 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung eines aerosolstromes
GB2208656B (en) * 1985-06-29 1990-01-17 Stc Plc Pulsed radio frequency plasma apparatus and process
SE448297B (sv) * 1985-09-27 1987-02-09 Stiftelsen Inst Mikrovags Forfarande och anordning for uppvermning av glasror
DE3830216A1 (de) * 1988-09-06 1990-03-15 Schott Glaswerke Verfahren und vorrichtung zum herstellen einer lichtwellenleiter-preform
US7797966B2 (en) * 2000-12-29 2010-09-21 Single Crystal Technologies, Inc. Hot substrate deposition of fused silica
US20020083740A1 (en) * 2000-12-29 2002-07-04 Pandelisev Kiril A. Process and apparatus for production of silica grain having desired properties and their fiber optic and semiconductor application
US20020083739A1 (en) * 2000-12-29 2002-07-04 Pandelisev Kiril A. Hot substrate deposition fiber optic preforms and preform components process and apparatus
US20020117625A1 (en) * 2001-02-26 2002-08-29 Pandelisev Kiril A. Fiber optic enhanced scintillator detector
EP1361437A1 (fr) * 2002-05-07 2003-11-12 Centre National De La Recherche Scientifique (Cnrs) Un nouveau marqueur biologique pour des tumeurs et des méthodes pour la détection de phénotype cancéreux ou non-cancéreux de cellules
CN1324931C (zh) 2002-05-08 2007-07-04 达纳公司 辐射装置、等离子体装置和采用多个辐射源的方法
US7432470B2 (en) 2002-05-08 2008-10-07 Btu International, Inc. Surface cleaning and sterilization
US7498066B2 (en) * 2002-05-08 2009-03-03 Btu International Inc. Plasma-assisted enhanced coating
US7638727B2 (en) * 2002-05-08 2009-12-29 Btu International Inc. Plasma-assisted heat treatment
US7465362B2 (en) * 2002-05-08 2008-12-16 Btu International, Inc. Plasma-assisted nitrogen surface-treatment
US20050233091A1 (en) * 2002-05-08 2005-10-20 Devendra Kumar Plasma-assisted coating
US20060228497A1 (en) * 2002-05-08 2006-10-12 Satyendra Kumar Plasma-assisted coating
US20060062930A1 (en) * 2002-05-08 2006-03-23 Devendra Kumar Plasma-assisted carburizing
US7445817B2 (en) * 2002-05-08 2008-11-04 Btu International Inc. Plasma-assisted formation of carbon structures
US7560657B2 (en) * 2002-05-08 2009-07-14 Btu International Inc. Plasma-assisted processing in a manufacturing line
US7494904B2 (en) * 2002-05-08 2009-02-24 Btu International, Inc. Plasma-assisted doping
JP4163681B2 (ja) * 2002-05-08 2008-10-08 レオナード クルツ シュティフトゥング ウント コンパニー カーゲー 大型のプラスチック製三次元物体の装飾方法
US20060233682A1 (en) * 2002-05-08 2006-10-19 Cherian Kuruvilla A Plasma-assisted engine exhaust treatment
US20060057016A1 (en) * 2002-05-08 2006-03-16 Devendra Kumar Plasma-assisted sintering
US20060237398A1 (en) * 2002-05-08 2006-10-26 Dougherty Mike L Sr Plasma-assisted processing in a manufacturing line
US7497922B2 (en) * 2002-05-08 2009-03-03 Btu International, Inc. Plasma-assisted gas production
JP2006507545A (ja) * 2002-11-22 2006-03-02 オムニガイド コミュニケーションズ インコーポレイテッド 誘電体導波路およびその製造方法
US7189940B2 (en) * 2002-12-04 2007-03-13 Btu International Inc. Plasma-assisted melting
DE10323453B4 (de) * 2003-05-21 2005-08-04 Rehau Ag + Co. Verfahren zur Erzeugung von Gradientenschichten im Inneren von polymeren Rohren und Vorrichtung zu dessen Durchführung
US20050022561A1 (en) * 2003-08-01 2005-02-03 Guskov Michael I. Ring plasma jet method and apparatus for making an optical fiber preform
WO2006127037A2 (fr) * 2004-11-05 2006-11-30 Dana Corporation Traitement atmospherique effectue au moyen de plasmas generes par des micro-ondes
DE102006012021A1 (de) * 2006-03-14 2007-09-20 Viega Gmbh & Co. Kg Verfahren und Vorrichtung zum Beschichten einer Innenfläche einer hohlen Endlosgeometrie, insbesondere eines Rohres
NL2007917C2 (en) * 2011-12-01 2013-06-06 Draka Comteq Bv A device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform.
WO2018200512A1 (fr) * 2017-04-24 2018-11-01 Markforged, Inc. Frittage dans un four à micro-ondes de pièces obtenues par fabrication additive

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
DE2328930A1 (de) * 1972-06-08 1974-01-03 Int Standard Electric Corp Innenbeschichtetes glasrohr und verfahren zur herstellung der beschichtung
FR2261992A1 (fr) * 1974-02-22 1975-09-19 Western Electric Co
FR2284572A1 (fr) * 1974-09-14 1976-04-09 Philips Nv Procede pour la realisation de tubes en verre a revetement interieur pour l'etirage de fibres optiques
DE2712993A1 (de) * 1976-03-25 1977-10-06 Western Electric Co Verfahren zum herstellen einer optischen glasfaser-uebertragungsleitung

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GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
DE2328930A1 (de) * 1972-06-08 1974-01-03 Int Standard Electric Corp Innenbeschichtetes glasrohr und verfahren zur herstellung der beschichtung
FR2261992A1 (fr) * 1974-02-22 1975-09-19 Western Electric Co
FR2284572A1 (fr) * 1974-09-14 1976-04-09 Philips Nv Procede pour la realisation de tubes en verre a revetement interieur pour l'etirage de fibres optiques
DE2712993A1 (de) * 1976-03-25 1977-10-06 Western Electric Co Verfahren zum herstellen einer optischen glasfaser-uebertragungsleitung
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0005963A1 (fr) * 1978-05-30 1979-12-12 International Standard Electric Corporation Procédé de dépôt de verre à l'aide d'un plasma; préforme pour fibre optique en verre ou silice obtenue par ledit procédé, et procédé de fabrication d'une fibre optique en silice à partir de ladite préforme
EP0019549A1 (fr) * 1979-05-18 1980-11-26 Thomson-Csf Dispositif hyperfréquence pour le dépôt de films minces sur des solides
FR2456787A1 (fr) * 1979-05-18 1980-12-12 Thomson Csf Dispositif hyperfrequence pour le depot de films minces sur des solides
FR2489297A1 (fr) * 1980-08-26 1982-03-05 Western Electric Co Procede de fabrication d'une preforme pour guide de lumiere et preforme ainsi obtenue

Also Published As

Publication number Publication date
DE2804125A1 (de) 1978-08-17
GB1567876A (en) 1980-05-21
NL7714590A (nl) 1978-08-14
US4090055A (en) 1978-05-16
CA1080562A (fr) 1980-07-01
SE7801606L (sv) 1978-08-11
JPS53100258A (en) 1978-09-01

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