FR2244261A1 - Adjusting semiconductor discs relative to a mask - for subsequent exposure to radiation particularly X-rays - Google Patents
Adjusting semiconductor discs relative to a mask - for subsequent exposure to radiation particularly X-raysInfo
- Publication number
- FR2244261A1 FR2244261A1 FR7430737A FR7430737A FR2244261A1 FR 2244261 A1 FR2244261 A1 FR 2244261A1 FR 7430737 A FR7430737 A FR 7430737A FR 7430737 A FR7430737 A FR 7430737A FR 2244261 A1 FR2244261 A1 FR 2244261A1
- Authority
- FR
- France
- Prior art keywords
- rays
- mask
- radiation
- exposure
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19732346720 DE2346720C3 (de) | 1973-09-17 | Vorrichtung zum Justieren von Halbleiterscheiben bezüglich einer Bestrahlungsmaske |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2244261A1 true FR2244261A1 (en) | 1975-04-11 |
Family
ID=5892800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7430737A Withdrawn FR2244261A1 (en) | 1973-09-17 | 1974-09-11 | Adjusting semiconductor discs relative to a mask - for subsequent exposure to radiation particularly X-rays |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS5057656A (fr) |
BE (1) | BE820006A (fr) |
CH (1) | CH572664A5 (fr) |
DK (1) | DK481574A (fr) |
FR (1) | FR2244261A1 (fr) |
IT (1) | IT1021303B (fr) |
LU (1) | LU70922A1 (fr) |
NL (1) | NL7412033A (fr) |
SE (1) | SE7411634L (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2483641A1 (fr) * | 1980-06-02 | 1981-12-04 | Zeiss Jena Veb Carl | Montage optique pour dispositifs de projection lithophotographique |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5267570A (en) * | 1975-12-03 | 1977-06-04 | Hitachi Ltd | Pattern printing device |
JPS5313879A (en) * | 1976-07-23 | 1978-02-07 | Nec Corp | Silicon mask for x-ray exposure and its production |
DE2942990A1 (de) * | 1979-10-24 | 1981-05-07 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur automatischen justierung von strukturen in zwei parallelen ebenen, insbesondere bei der herstellung von integrierten halbleiterschaltungen |
GB2089524B (en) * | 1980-12-17 | 1984-12-05 | Westinghouse Electric Corp | High resolution lithographic process |
JPS61111535A (ja) * | 1985-09-30 | 1986-05-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | X線露光方法 |
JPS61111534A (ja) * | 1985-09-30 | 1986-05-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | X線露光装置 |
-
1974
- 1974-09-10 NL NL7412033A patent/NL7412033A/xx unknown
- 1974-09-11 FR FR7430737A patent/FR2244261A1/fr not_active Withdrawn
- 1974-09-12 DK DK481574A patent/DK481574A/da unknown
- 1974-09-12 IT IT27200/74A patent/IT1021303B/it active
- 1974-09-12 CH CH1240374A patent/CH572664A5/xx not_active IP Right Cessation
- 1974-09-16 SE SE7411634A patent/SE7411634L/xx unknown
- 1974-09-16 LU LU70922A patent/LU70922A1/xx unknown
- 1974-09-17 JP JP49107073A patent/JPS5057656A/ja active Pending
- 1974-09-17 BE BE148607A patent/BE820006A/fr unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2483641A1 (fr) * | 1980-06-02 | 1981-12-04 | Zeiss Jena Veb Carl | Montage optique pour dispositifs de projection lithophotographique |
Also Published As
Publication number | Publication date |
---|---|
DE2346720A1 (de) | 1975-04-03 |
SE7411634L (fr) | 1975-03-18 |
IT1021303B (it) | 1978-01-30 |
NL7412033A (nl) | 1975-03-19 |
DE2346720B2 (de) | 1975-07-17 |
JPS5057656A (fr) | 1975-05-20 |
CH572664A5 (fr) | 1976-02-13 |
LU70922A1 (fr) | 1975-02-24 |
DK481574A (fr) | 1975-06-02 |
BE820006A (fr) | 1975-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |