NO136167C - Anordning for fremstilling av masker for mikrokretser. - Google Patents
Anordning for fremstilling av masker for mikrokretser.Info
- Publication number
- NO136167C NO136167C NO740827A NO740827A NO136167C NO 136167 C NO136167 C NO 136167C NO 740827 A NO740827 A NO 740827A NO 740827 A NO740827 A NO 740827A NO 136167 C NO136167 C NO 136167C
- Authority
- NO
- Norway
- Prior art keywords
- microcreets
- masks
- manufacture
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Amplifiers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US416885A US3903536A (en) | 1973-11-19 | 1973-11-19 | Device for generating masks for microcircuits |
Publications (3)
Publication Number | Publication Date |
---|---|
NO740827L NO740827L (no) | 1975-05-21 |
NO136167B NO136167B (no) | 1977-04-18 |
NO136167C true NO136167C (no) | 1977-07-27 |
Family
ID=23651711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO740827A NO136167C (no) | 1973-11-19 | 1974-03-08 | Anordning for fremstilling av masker for mikrokretser. |
Country Status (4)
Country | Link |
---|---|
US (1) | US3903536A (no) |
DE (1) | DE2411508C2 (no) |
FR (1) | FR2251842B1 (no) |
NO (1) | NO136167C (no) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE399628B (sv) * | 1975-02-13 | 1978-02-20 | Westerberg Erik Gerhard Natana | Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar |
US4095891A (en) * | 1976-12-27 | 1978-06-20 | Gca Corporation | On-the-fly photoresist exposure apparatus |
US4119976A (en) * | 1977-04-25 | 1978-10-10 | Itek Corporation | Phototypesetter lens carriage arrangement |
SE407715B (sv) * | 1977-05-17 | 1979-04-09 | Bofors Aerotronics Ab | Anvendning av en anordning for att alstra stora datorbereknade hologram med hog upplosning |
US4209240A (en) * | 1978-10-10 | 1980-06-24 | California Institute Of Technology | Reticle exposure apparatus and method |
JPS5645021A (en) * | 1979-09-19 | 1981-04-24 | Hitachi Ltd | Moving apparatus |
SE449531B (sv) * | 1980-12-11 | 1987-05-04 | Gerhard Westerberg | Forfarande och anordning for kontroll av mikromasker |
JPS59129633A (ja) * | 1983-01-08 | 1984-07-26 | Canon Inc | ステージ装置 |
DE102012217241A1 (de) * | 2012-09-25 | 2014-03-27 | Schaeffler Technologies Gmbh & Co. Kg | Lagerelement für zwei Raumrichtungen |
JP7020078B2 (ja) * | 2017-11-24 | 2022-02-16 | 株式会社島津製作所 | フーリエ変換型分光光度計 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1900566A (en) * | 1930-05-23 | 1933-03-07 | Clarence W Kanolt | Depthograph plate holder |
US1857706A (en) * | 1931-08-17 | 1932-05-10 | Zabrocki Tony | Camera back |
US2259084A (en) * | 1938-03-28 | 1941-10-14 | Rosenhaft Walter | Hand camera for the production therewith of small-sized photographs in series |
US2459552A (en) * | 1945-08-07 | 1949-01-18 | Justus S Stoner | Apparatus for producing photographic multiple copies |
GB961227A (en) * | 1961-07-12 | 1964-06-17 | Crosfield Electronics Ltd | Improvements in or relating to image reproduction systems |
NL301413A (no) * | 1963-12-05 | |||
FR2038520A5 (no) * | 1969-03-18 | 1971-01-08 | Panhard & Levassor |
-
1973
- 1973-11-19 US US416885A patent/US3903536A/en not_active Expired - Lifetime
-
1974
- 1974-03-08 NO NO740827A patent/NO136167C/no unknown
- 1974-03-11 DE DE2411508A patent/DE2411508C2/de not_active Expired
- 1974-03-11 FR FR7408228A patent/FR2251842B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NO136167B (no) | 1977-04-18 |
FR2251842B1 (no) | 1978-02-10 |
DE2411508C2 (de) | 1985-11-14 |
US3903536A (en) | 1975-09-02 |
DE2411508A1 (de) | 1975-05-22 |
NO740827L (no) | 1975-05-21 |
FR2251842A1 (no) | 1975-06-13 |
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