JPS551107A - Exposure device - Google Patents
Exposure deviceInfo
- Publication number
- JPS551107A JPS551107A JP7221278A JP7221278A JPS551107A JP S551107 A JPS551107 A JP S551107A JP 7221278 A JP7221278 A JP 7221278A JP 7221278 A JP7221278 A JP 7221278A JP S551107 A JPS551107 A JP S551107A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- radiation source
- optical systems
- away
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Radiography Using Non-Light Waves (AREA)
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To place a positioning unit under the atmosphere and effect exposure thereunder, by positioning optical systems over a mask and placing a radiation source away from the mask in the adjustment of their positions and by placing the radiation source near over the mask and placing the optical systems away from the mask in the exposure.
CONSTITUTION: Before radiation is applied from a radiation source chamber 8 to a copied piece through the mask 6 to copy an image, the radiation source is placed away from the mask 6 by a radiation source mechanism 17 and the positioning between the copied piece and the mask 6 is confirmed by the optical systems 21, 22. The optical systems are positioned over the mask 6 while the radiation source remains away from the mask 6. To perform the exposure, the radiation source is placed near over the mask 6 while the optical systems 21, 22 remain away from the mask. Therefore, the positioning unit can be placed under the atmosphere to effect the exposure thereunder.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7221278A JPS551107A (en) | 1978-06-16 | 1978-06-16 | Exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7221278A JPS551107A (en) | 1978-06-16 | 1978-06-16 | Exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS551107A true JPS551107A (en) | 1980-01-07 |
Family
ID=13482700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7221278A Pending JPS551107A (en) | 1978-06-16 | 1978-06-16 | Exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS551107A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59188123A (en) * | 1983-04-08 | 1984-10-25 | Nec Corp | X-ray exposure device |
JPH0569402U (en) * | 1992-02-27 | 1993-09-21 | 山武ハネウエル株式会社 | Positioner |
GB2276340A (en) * | 1992-10-08 | 1994-09-28 | Onoda Cement Co Ltd | Method and apparatus for coating electrostatic powder |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50129044A (en) * | 1974-03-29 | 1975-10-11 | ||
JPS5141551A (en) * | 1974-08-08 | 1976-04-07 | Laitram Corp | |
JPS52113167A (en) * | 1976-03-19 | 1977-09-22 | Nippon Telegr & Teleph Corp <Ntt> | X-ray exposing device |
-
1978
- 1978-06-16 JP JP7221278A patent/JPS551107A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50129044A (en) * | 1974-03-29 | 1975-10-11 | ||
JPS5141551A (en) * | 1974-08-08 | 1976-04-07 | Laitram Corp | |
JPS52113167A (en) * | 1976-03-19 | 1977-09-22 | Nippon Telegr & Teleph Corp <Ntt> | X-ray exposing device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59188123A (en) * | 1983-04-08 | 1984-10-25 | Nec Corp | X-ray exposure device |
JPS6350853B2 (en) * | 1983-04-08 | 1988-10-12 | Nippon Denki Kk | |
JPH0569402U (en) * | 1992-02-27 | 1993-09-21 | 山武ハネウエル株式会社 | Positioner |
GB2276340A (en) * | 1992-10-08 | 1994-09-28 | Onoda Cement Co Ltd | Method and apparatus for coating electrostatic powder |
GB2276340B (en) * | 1992-10-08 | 1996-05-15 | Onoda Cement Co Ltd | Apparatus for electrostatic powder coating |
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