FR2014489A7 - Uhv chamber for vapour deposition - Google Patents

Uhv chamber for vapour deposition

Info

Publication number
FR2014489A7
FR2014489A7 FR6922034A FR6922034A FR2014489A7 FR 2014489 A7 FR2014489 A7 FR 2014489A7 FR 6922034 A FR6922034 A FR 6922034A FR 6922034 A FR6922034 A FR 6922034A FR 2014489 A7 FR2014489 A7 FR 2014489A7
Authority
FR
France
Prior art keywords
uhv
vapour deposition
bell jar
uhv chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6922034A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gesellschaft fuer Kernforschung mbH
Original Assignee
Gesellschaft fuer Kernforschung mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681767928 external-priority patent/DE1767928C3/en
Application filed by Gesellschaft fuer Kernforschung mbH filed Critical Gesellschaft fuer Kernforschung mbH
Application granted granted Critical
Publication of FR2014489A7 publication Critical patent/FR2014489A7/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Chamber is cooled by cryopump and comprises UHV metallic bell jar surrounded by HV bell jar which are vacuum sealed. Sinusoidal tubes are mounted on UHV bell jar's envelope which receive liquid refrigerant, such as liquid nitrogen. Electric heaters are connected to molecular turbo-pump and they are also mounted there.
FR6922034A 1968-07-02 1969-06-30 Uhv chamber for vapour deposition Expired FR2014489A7 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681767928 DE1767928C3 (en) 1968-07-02 Chamber for treating substances and / or for examining processes in an ultra-high vacuum, in particular for the vapor deposition of thin layers on a carrier material

Publications (1)

Publication Number Publication Date
FR2014489A7 true FR2014489A7 (en) 1970-04-17

Family

ID=5699542

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6922034A Expired FR2014489A7 (en) 1968-07-02 1969-06-30 Uhv chamber for vapour deposition

Country Status (1)

Country Link
FR (1) FR2014489A7 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0510656A2 (en) * 1991-04-25 1992-10-28 Hitachi, Ltd. Evacuation system and method therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0510656A2 (en) * 1991-04-25 1992-10-28 Hitachi, Ltd. Evacuation system and method therefor
EP0510656A3 (en) * 1991-04-25 1993-08-04 Hitachi, Ltd. Evacuation system and method therefor
US5259735A (en) * 1991-04-25 1993-11-09 Hitachi, Ltd. Evacuation system and method therefor

Also Published As

Publication number Publication date
DE1767928A1 (en) 1971-09-30
DE1767928B2 (en) 1976-01-08

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