FR2118411A5 - Cathode and target for high frequency sputtering - using parallel plate dielectric targets - Google Patents
Cathode and target for high frequency sputtering - using parallel plate dielectric targetsInfo
- Publication number
- FR2118411A5 FR2118411A5 FR7047130A FR7047130A FR2118411A5 FR 2118411 A5 FR2118411 A5 FR 2118411A5 FR 7047130 A FR7047130 A FR 7047130A FR 7047130 A FR7047130 A FR 7047130A FR 2118411 A5 FR2118411 A5 FR 2118411A5
- Authority
- FR
- France
- Prior art keywords
- cathode
- target
- high frequency
- parallel plate
- frequency sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
H.F. sputtering appts is a partially evacuated chamber contg. an anode (I) and a target (II) sepd. from but partially parallel with (I). A cathode (III) is sepd. from (II) which shields (III) from (I), and H.F. a.c. current is applied between (III) and (I), and transfer means pass power from (III) to (II) to sputter a material onto the pref. dielectric (II).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7047130A FR2118411A5 (en) | 1970-12-17 | 1970-12-17 | Cathode and target for high frequency sputtering - using parallel plate dielectric targets |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7047130A FR2118411A5 (en) | 1970-12-17 | 1970-12-17 | Cathode and target for high frequency sputtering - using parallel plate dielectric targets |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2118411A5 true FR2118411A5 (en) | 1972-07-28 |
Family
ID=9066517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7047130A Expired FR2118411A5 (en) | 1970-12-17 | 1970-12-17 | Cathode and target for high frequency sputtering - using parallel plate dielectric targets |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2118411A5 (en) |
-
1970
- 1970-12-17 FR FR7047130A patent/FR2118411A5/en not_active Expired
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |