ES2129031T3 - Sistema de calibracion para analisis de gases de ultra alta pureza. - Google Patents

Sistema de calibracion para analisis de gases de ultra alta pureza.

Info

Publication number
ES2129031T3
ES2129031T3 ES92113931T ES92113931T ES2129031T3 ES 2129031 T3 ES2129031 T3 ES 2129031T3 ES 92113931 T ES92113931 T ES 92113931T ES 92113931 T ES92113931 T ES 92113931T ES 2129031 T3 ES2129031 T3 ES 2129031T3
Authority
ES
Spain
Prior art keywords
high purity
ultra high
gases
analysis
calibration system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92113931T
Other languages
English (en)
Inventor
Gregory Howard Leggert
Michael Harold Sonricker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair Technology Inc
Original Assignee
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair Technology Inc filed Critical Praxair Technology Inc
Application granted granted Critical
Publication of ES2129031T3 publication Critical patent/ES2129031T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0006—Calibrating gas analysers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

SE SUMINISTRA UN DISPOSITIVO DE CALIBRACION PARA EL SUMINISTRO RAPIDO DE MEZCLAS DE GAS DE CALIBRACION DE UNA PUREZA ULTRA ELEVADA Y GAS DE MUESTRA A UN ANALIZADOR DE GAS EN CONDICIONES DE TEMPERATURA ELEVADA. SE SUMINISTRAN RELACIONES DE FLUJO UNIFORME AL ANALIZADOR ALTAMENTE SENSIBLE.
ES92113931T 1991-08-16 1992-08-14 Sistema de calibracion para analisis de gases de ultra alta pureza. Expired - Lifetime ES2129031T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/745,697 US5214952A (en) 1991-08-16 1991-08-16 Calibration for ultra high purity gas analysis

Publications (1)

Publication Number Publication Date
ES2129031T3 true ES2129031T3 (es) 1999-06-01

Family

ID=24997852

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92113931T Expired - Lifetime ES2129031T3 (es) 1991-08-16 1992-08-14 Sistema de calibracion para analisis de gases de ultra alta pureza.

Country Status (6)

Country Link
US (1) US5214952A (es)
EP (1) EP0528386B1 (es)
KR (1) KR0163608B1 (es)
CA (1) CA2076174C (es)
DE (1) DE69228724T2 (es)
ES (1) ES2129031T3 (es)

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JPH04353761A (ja) * 1991-05-30 1992-12-08 Tadahiro Omi 特殊ガス中の不純物量測定方法及びその測定装置
US5304796A (en) * 1992-03-25 1994-04-19 The Boc Group, Inc. Atmospheric pressure ionization mass spectroscopy method including a silica gel drying step
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FR2714968B1 (fr) * 1994-01-07 1996-03-29 Air Liquide Procédé et dispositif de fourniture de gaz à un analyseur de traces d'impuretés dans un gaz.
US5665902A (en) * 1994-05-10 1997-09-09 American Air Liquide, Inc. Method to analyze particle contaminants in compressed gases
US5524473A (en) * 1995-01-01 1996-06-11 Haskell; Weston W. Gas chromatograph flow calibrator
US5661225A (en) * 1996-09-12 1997-08-26 Air Products And Chemicals, Inc. Dynamic dilution system
FR2755512B1 (fr) * 1996-11-05 1998-12-18 Air Liquide Procede et dispositif de fourniture a un appareil d'un gaz pur charge d'une quantite predeterminee d'au moins une impurete gazeuse
IL125595A (en) * 1997-08-14 2001-08-26 Praxair Technology Inc Ultra high purity gas analysis using atmospheric pressure ionization mass spectrometry
US6435227B1 (en) * 1999-03-29 2002-08-20 California International Chemical Corporation Tank filling apparatus and method
FR2795510B1 (fr) * 1999-06-24 2001-08-03 Air Liquide Installation d'analyse de l'atmosphere d'une enceinte de brasage ou etamage a l'aide d'un alliage metallique
DE10060722A1 (de) * 2000-12-07 2002-06-27 Messer Griesheim Gmbh Herstellung von Gasgemischen mittels Ink-Jet
DE10121458A1 (de) * 2001-05-02 2002-11-14 Siegfried Jahnke Ein Verfahren zur routinemäßigen Kontrolle der Linearitäts- und Empfindlichkeitsparameter von Gasanalysatoren im Absolut- und Differenzmessbereich mittels einer Diffusionskammer
US7063238B2 (en) 2001-06-29 2006-06-20 Robert Hale Cartridge ejector for a beverage dispensing machine
DE60213940T2 (de) 2001-11-01 2007-09-06 Micromass UK Ltd., Simonsway Proben-Einführungssystem
US20030136176A1 (en) * 2002-01-23 2003-07-24 Frank Ruiz Gas pressure/flow control and recovery system
US7700707B2 (en) * 2002-10-15 2010-04-20 Exxonmobil Chemical Patents Inc. Polyolefin adhesive compositions and articles made therefrom
US6997347B2 (en) * 2003-07-02 2006-02-14 Industrial Scientific Corporation Apparatus and method for generating calibration gas
US7390346B2 (en) * 2005-05-12 2008-06-24 Praxair Technology, Inc. System and apparatus for producing primary standard gas mixtures
US7299710B2 (en) * 2005-08-11 2007-11-27 Syagen Technology Hand-held trace vapor/particle sampling system
US8186234B2 (en) * 2005-08-11 2012-05-29 Morpho Detection, Inc. Hand-held trace vapor/particle detection system
GB2432711B (en) * 2005-10-11 2008-04-02 Gv Instr Ion source preparation system
CN101241093B (zh) * 2007-02-07 2011-01-05 中国科学院微电子研究所 一种气敏传感器标定和可靠性测试***
JP2008220235A (ja) * 2007-03-12 2008-09-25 Sanyo Electric Co Ltd 培養装置
FR2924222B1 (fr) * 2007-11-27 2009-11-13 Air Liquide Procede de delivrance de melanges de gaz pour un analyseur
CN101487812B (zh) * 2009-01-20 2012-01-25 天津大学 一种元器件阻温特性与气敏特性测试***
CN101537321B (zh) * 2009-04-16 2011-06-01 中国石油大学(北京) 立式气液两相流体混合稳流装置
AT13428U1 (de) * 2012-10-04 2013-12-15 Avl List Gmbh Vorrichtung und Verfahren zur Analyse eines Messgases, insbesondere des Abgases von Verbrennungskraftmaschinen
CN102967679B (zh) * 2012-11-05 2014-12-31 聚光科技(杭州)股份有限公司 便携式仪器的标定装置及标定方法
DE102013008425B3 (de) * 2013-05-16 2014-05-22 Dräger Safety AG & Co. KGaA Verfahren zur Erkennung von Sensorvergiftungen und Teststation zur Durchführung des Verfahrens
GB2520543B (en) * 2013-11-25 2016-03-23 Nu Instr Ltd Methods of analysing gas samples with apparatus having a dual inlet system
ITMI20150548A1 (it) * 2015-04-15 2016-10-15 Cryotek Eng S R L Miscelatore di fluidi gassosi a doppia partizione
CN104959049B (zh) * 2015-06-11 2017-03-22 中国船舶重工集团公司第七一八研究所 超纯混合气制备***和方法
JP6651753B2 (ja) * 2015-09-09 2020-02-19 富士電機株式会社 微粒子組成分析装置
ITUB20160509A1 (it) * 2016-01-21 2017-07-21 Cryotek Eng S R L Sistema di miscelazione elettronico di fluidi gassosi
TWI772330B (zh) * 2016-10-14 2022-08-01 荷蘭商蜆殼國際研究所 用於定量分析氣態製程流之方法及設備
KR102071906B1 (ko) 2016-12-02 2020-01-31 주식회사 엘지화학 분리판, 및 이를 포함하는 연료전지 스택
CN106925146A (zh) * 2017-03-04 2017-07-07 丽珠集团利民制药厂 一种氮气气体浓度调节装置和调节方法
CN114375395A (zh) * 2019-09-25 2022-04-19 株式会社岛津制作所 气体分析方法和气体分析装置

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EP0370151A1 (en) * 1988-11-21 1990-05-30 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for producing low-concentration gas mixtures, and apparatus for producing the same
EP0370150A1 (en) * 1988-11-21 1990-05-30 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for producing standard gas mixture and apparatus for producing the same
US5053200A (en) * 1989-08-25 1991-10-01 Schaeffer Matthew J Flammable vapor analyzer
JPH0481650A (ja) * 1990-07-25 1992-03-16 Hitachi Ltd 標準ガス調製装置

Also Published As

Publication number Publication date
KR930004760A (ko) 1993-03-23
CA2076174C (en) 1995-11-21
DE69228724D1 (de) 1999-04-29
KR0163608B1 (ko) 1999-05-01
EP0528386B1 (en) 1999-03-24
US5214952A (en) 1993-06-01
CA2076174A1 (en) 1993-02-17
DE69228724T2 (de) 1999-08-19
EP0528386A2 (en) 1993-02-24
EP0528386A3 (en) 1994-08-24

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