ES2078717T3 - Aparato de reparticion con un sistema de distribucion y alimentacion de gas para manipular y almacenar recipientes transportables estancos a presion. - Google Patents
Aparato de reparticion con un sistema de distribucion y alimentacion de gas para manipular y almacenar recipientes transportables estancos a presion.Info
- Publication number
- ES2078717T3 ES2078717T3 ES92480110T ES92480110T ES2078717T3 ES 2078717 T3 ES2078717 T3 ES 2078717T3 ES 92480110 T ES92480110 T ES 92480110T ES 92480110 T ES92480110 T ES 92480110T ES 2078717 T3 ES2078717 T3 ES 2078717T3
- Authority
- ES
- Spain
- Prior art keywords
- gas supply
- container
- handling
- distribution system
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70541—Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Library & Information Science (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Packaging Frangible Articles (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Dispositivo de repartición (300) dotado de un sistema de distribución de alimentación de gas destinado a la manipulación y al almacenamiento de una multiplicidad de recipientes portátiles estancos a presión (100) del tipo constituido por un alojamiento en forma de caja (102) provista de una abertura de acceso (104) hecha estanca por un medio que forma una puerta separable (124) y por un medio que forma una válvula inyectora de gas (129), comprendiendo dicho dispositivo: un dispositivo de manipulación automática (301) que comprende; un elemento de base dotado de una cabeza que posee la facultad de girar (303); un brazo elevador (304) fijado sobre dicha cabeza que posee la facultad de girar; un robot de manipulación (305) fijado sobre dicho elevador y que comprende un brazo de prolongación (306) y un medio de aprehensión de recipiente (307), y; un dispositivo de almacenamiento vertical (302) que comprende: una estructura (308) formada por un tubo al menos y que comprende una multiplicidad deestantes (309) en forma de puestos de soporte de recipiente que le están fijados, en el que cada estante está provisto de un medio que forma un inyector de gas (311) conectado, por una parte, a dicho medio que forma una válvula inyectora de gas y, por otra parte, a una instalación de alimentación de gas neutro ultra puro comprimido (700) destinado a mantener una presión diferencial positiva p en el interior de cada recipiente soportado con relación al aire ambiente exterior durante la duración del almacenamiento.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP92480110A EP0582017B1 (en) | 1992-08-04 | 1992-08-04 | Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable containers |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2078717T3 true ES2078717T3 (es) | 1995-12-16 |
Family
ID=8211797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES92480110T Expired - Lifetime ES2078717T3 (es) | 1992-08-04 | 1992-08-04 | Aparato de reparticion con un sistema de distribucion y alimentacion de gas para manipular y almacenar recipientes transportables estancos a presion. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5411358A (es) |
EP (1) | EP0582017B1 (es) |
JP (1) | JPH081924B2 (es) |
AT (1) | ATE129359T1 (es) |
CA (1) | CA2094437C (es) |
DE (1) | DE69205570T2 (es) |
ES (1) | ES2078717T3 (es) |
Families Citing this family (112)
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US4981409A (en) * | 1985-04-16 | 1991-01-01 | Canon Kabushiki Kaisha | Cartridge auto changer |
GB2199022B (en) * | 1986-11-20 | 1991-01-02 | Shimizu Construction Co Ltd | Dust tight storage cabinet apparatus for use in clean rooms |
FR2620049B2 (fr) * | 1986-11-28 | 1989-11-24 | Commissariat Energie Atomique | Procede de traitement, stockage et/ou transfert d'un objet dans une atmosphere de haute proprete, et conteneur pour la mise en oeuvre de ce procede |
FR2610609A1 (fr) * | 1987-02-11 | 1988-08-12 | Feralco Sa | Dispositif de manutention de bacs de stockage situes en file |
US4964776A (en) * | 1987-12-01 | 1990-10-23 | Tsubakimoto Chain Co. | Article transfer and storage system |
US5143193A (en) * | 1988-06-30 | 1992-09-01 | Ronald Geraci | Automated library article terminal |
US5064337A (en) * | 1988-07-19 | 1991-11-12 | Tokyo Electron Limited | Handling apparatus for transferring carriers and a method of transferring carriers |
US5059079A (en) * | 1989-05-16 | 1991-10-22 | Proconics International, Inc. | Particle-free storage for articles |
US4995430A (en) * | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
US5284412A (en) * | 1990-08-17 | 1994-02-08 | Tokyo Electron Sagami Limited | Stock unit for storing carriers |
JPH04143959A (ja) * | 1990-10-05 | 1992-05-18 | Mitsubishi Electric Corp | ディスク記憶装置 |
-
1992
- 1992-08-04 ES ES92480110T patent/ES2078717T3/es not_active Expired - Lifetime
- 1992-08-04 DE DE69205570T patent/DE69205570T2/de not_active Expired - Lifetime
- 1992-08-04 EP EP92480110A patent/EP0582017B1/en not_active Expired - Lifetime
- 1992-08-04 AT AT92480110T patent/ATE129359T1/de not_active IP Right Cessation
-
1993
- 1993-04-20 CA CA002094437A patent/CA2094437C/en not_active Expired - Fee Related
- 1993-06-29 JP JP5158473A patent/JPH081924B2/ja not_active Expired - Fee Related
- 1993-08-03 US US08/102,075 patent/US5411358A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH06104332A (ja) | 1994-04-15 |
CA2094437C (en) | 1998-09-15 |
CA2094437A1 (en) | 1994-02-05 |
JPH081924B2 (ja) | 1996-01-10 |
ATE129359T1 (de) | 1995-11-15 |
DE69205570D1 (de) | 1995-11-23 |
US5411358A (en) | 1995-05-02 |
EP0582017A1 (en) | 1994-02-09 |
DE69205570T2 (de) | 1996-06-13 |
EP0582017B1 (en) | 1995-10-18 |
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