FR2733036B1 - Dispositif de protection anti-contamination rapprochee - Google Patents

Dispositif de protection anti-contamination rapprochee

Info

Publication number
FR2733036B1
FR2733036B1 FR9504526A FR9504526A FR2733036B1 FR 2733036 B1 FR2733036 B1 FR 2733036B1 FR 9504526 A FR9504526 A FR 9504526A FR 9504526 A FR9504526 A FR 9504526A FR 2733036 B1 FR2733036 B1 FR 2733036B1
Authority
FR
France
Prior art keywords
work surface
pct
gas stream
direction substantially
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9504526A
Other languages
English (en)
Other versions
FR2733036A1 (fr
Inventor
Philippe Jacques Mar Chevalier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unir
Original Assignee
Unir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9504526A priority Critical patent/FR2733036B1/fr
Application filed by Unir filed Critical Unir
Priority to US08/945,341 priority patent/US6035549A/en
Priority to ES96913582T priority patent/ES2176454T3/es
Priority to CA002218416A priority patent/CA2218416C/fr
Priority to JP53078096A priority patent/JP4113256B2/ja
Priority to PCT/FR1996/000563 priority patent/WO1996032613A1/fr
Priority to AT96913582T priority patent/ATE219831T1/de
Priority to EP96913582A priority patent/EP0830549B1/fr
Priority to DE69622037T priority patent/DE69622037T2/de
Publication of FR2733036A1 publication Critical patent/FR2733036A1/fr
Application granted granted Critical
Publication of FR2733036B1 publication Critical patent/FR2733036B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Prevention Of Fouling (AREA)
  • Ventilation (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Main Body Construction Of Washing Machines And Laundry Dryers (AREA)
  • Air Bags (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
  • Prostheses (AREA)
  • Cleaning In General (AREA)
FR9504526A 1995-04-14 1995-04-14 Dispositif de protection anti-contamination rapprochee Expired - Fee Related FR2733036B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR9504526A FR2733036B1 (fr) 1995-04-14 1995-04-14 Dispositif de protection anti-contamination rapprochee
ES96913582T ES2176454T3 (es) 1995-04-14 1996-04-12 Dispositivo de proteccion proxima anticontaminacion.
CA002218416A CA2218416C (fr) 1995-04-14 1996-04-12 Dispositif de protection anti-contamination rapprochee
JP53078096A JP4113256B2 (ja) 1995-04-14 1996-04-12 密閉汚染保護装置
US08/945,341 US6035549A (en) 1995-04-14 1996-04-12 Close contamination protection device and method thereof for food
PCT/FR1996/000563 WO1996032613A1 (fr) 1995-04-14 1996-04-12 Dispositif de protection anti-contamination rapprochee
AT96913582T ATE219831T1 (de) 1995-04-14 1996-04-12 Vorrichtung zum schutz gegen kontamination
EP96913582A EP0830549B1 (fr) 1995-04-14 1996-04-12 Dispositif de protection anti-contamination rapprochee
DE69622037T DE69622037T2 (de) 1995-04-14 1996-04-12 Vorrichtung zum schutz gegen kontamination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9504526A FR2733036B1 (fr) 1995-04-14 1995-04-14 Dispositif de protection anti-contamination rapprochee

Publications (2)

Publication Number Publication Date
FR2733036A1 FR2733036A1 (fr) 1996-10-18
FR2733036B1 true FR2733036B1 (fr) 1997-07-04

Family

ID=9478140

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9504526A Expired - Fee Related FR2733036B1 (fr) 1995-04-14 1995-04-14 Dispositif de protection anti-contamination rapprochee

Country Status (9)

Country Link
US (1) US6035549A (fr)
EP (1) EP0830549B1 (fr)
JP (1) JP4113256B2 (fr)
AT (1) ATE219831T1 (fr)
CA (1) CA2218416C (fr)
DE (1) DE69622037T2 (fr)
ES (1) ES2176454T3 (fr)
FR (1) FR2733036B1 (fr)
WO (1) WO1996032613A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19712975A1 (de) * 1997-03-27 1998-10-01 Gwe Ges Fuer Wasseraufbereitun Verfahren zur Optimierung der Luftführung in einer Reinluft-Kabine
US6096135A (en) * 1998-07-21 2000-08-01 Applied Materials, Inc. Method and apparatus for reducing contamination of a substrate in a substrate processing system
FR2785040B1 (fr) 1998-10-22 2001-01-19 U N I R Ultra Propre Nutrition Dispositif et procede pour la protection rapprochee de produits ou objets sensibles a des agents contaminants vehicules par l'air ambiant
US20040251175A1 (en) * 1998-10-30 2004-12-16 Adams Thomas C. Apparatuses and methods for making glued screen assemblies
US7350315B2 (en) 2003-12-22 2008-04-01 Lam Research Corporation Edge wheel dry manifold
US7089687B2 (en) * 2004-09-30 2006-08-15 Lam Research Corporation Wafer edge wheel with drying function
FR2973100B1 (fr) * 2011-03-22 2018-02-09 Institut National De Recherche En Sciences Et Technologies Pour L'environnement Et L'agriculture (Irstea) Installation de diffusion de flux d'air

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021928A (en) * 1973-12-18 1977-05-10 Research Corporation Cross-flow modular tobacco curing system
FR2485700B1 (fr) * 1980-06-24 1986-02-28 Aurore Sa Procede pour etablir un ecoulement laminaire determine et poste de travail en comportant application
US4750276A (en) * 1984-05-10 1988-06-14 Donald Paul Smith Impingement thermal treatment apparatus with collector plate
US4872400A (en) * 1988-12-12 1989-10-10 Air Concepts, Inc. Laboratory work station with controllable environment
JP2644912B2 (ja) * 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
FI88541C (fi) * 1991-04-23 1993-05-25 Ilmateollisuus Oy Foerfarande och anordning foer att aostadkomma en luftvaexling foer ett behandlingsrum
US5211106A (en) * 1991-05-22 1993-05-18 Oscar Mayer Foods Corporation Apparatus and method for cooking casingless shaped food products
US5351415A (en) * 1992-05-18 1994-10-04 Convey, Inc. Method and apparatus for maintaining clean articles
DE69205570T2 (de) * 1992-08-04 1996-06-13 Ibm Verteilungseinrichtung mit Gaszufuhr-Abgabevorrichtung zum Handhaben und Speichern von abdichtbaren tragbaren unter Druck stehenden Behältern.
ATE129360T1 (de) * 1992-08-04 1995-11-15 Ibm Unter druck stehende koppelsysteme zum transferieren von einem halbleiterwafer zwischen einem tragbaren abdichtbaren unter druckstehenden behälter und einer bearbeitungsanlage.
US5628121A (en) * 1995-12-01 1997-05-13 Convey, Inc. Method and apparatus for maintaining sensitive articles in a contaminant-free environment
US5724748A (en) * 1996-07-24 1998-03-10 Brooks; Ray G. Apparatus for packaging contaminant-sensitive articles and resulting package

Also Published As

Publication number Publication date
EP0830549A1 (fr) 1998-03-25
CA2218416C (fr) 2008-07-08
FR2733036A1 (fr) 1996-10-18
WO1996032613A1 (fr) 1996-10-17
CA2218416A1 (fr) 1996-10-17
ES2176454T3 (es) 2002-12-01
EP0830549B1 (fr) 2002-06-26
JP4113256B2 (ja) 2008-07-09
DE69622037D1 (de) 2002-08-01
DE69622037T2 (de) 2002-11-21
ATE219831T1 (de) 2002-07-15
US6035549A (en) 2000-03-14
JPH11503815A (ja) 1999-03-30

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Legal Events

Date Code Title Description
CL Concession to grant licences
TQ Partial transmission of property
ST Notification of lapse

Effective date: 20101230