ES2034824T3 - Procedimiento y aparato para detectar y medir una magnitud fisica. - Google Patents

Procedimiento y aparato para detectar y medir una magnitud fisica.

Info

Publication number
ES2034824T3
ES2034824T3 ES199090400407T ES90400407T ES2034824T3 ES 2034824 T3 ES2034824 T3 ES 2034824T3 ES 199090400407 T ES199090400407 T ES 199090400407T ES 90400407 T ES90400407 T ES 90400407T ES 2034824 T3 ES2034824 T3 ES 2034824T3
Authority
ES
Spain
Prior art keywords
pct
magnitude
sec
measure
detect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES199090400407T
Other languages
English (en)
Inventor
Michel Rene Lequime
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bertin Technologies SAS
Original Assignee
Bertin et Cie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bertin et Cie SA filed Critical Bertin et Cie SA
Application granted granted Critical
Publication of ES2034824T3 publication Critical patent/ES2034824T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PROCEDIMIENTO Y DISPOSITIVO DE MEDICION DE UNA MAGNITUD FISICA, MEDIANTE UNA FUENTE DE LUZ INCOHERENTE (10), UN CAPTADOR INTERFEROMETRICO (14) QUE MODULA EL ESPECTRO DEL HAZ LUMINOSO EMITIDO POR LA FUENTE A UNA FRECUENCIA CARACTERISTICA FUNCION DE LA MAGNITUD A MEDIR, UN INTERFEROMETRO DESMODULADOR (18) Y UNOS ELEMENTOS (22) DE ANALISIS ESPECTRAL CUYA RESOLUCION OPTICA LOS HACE INSENSIBLES A LAS FRECUENCIAS DE MODULACION GENERADAS POR EL CAPTADOR (14) Y EL INTERFEROMETRO DESMODULADOR (18), Y SENSIBLES A SU DIFERENCIA. EL INVENTO SE APLICA ESPECIALMENTE EN LA MEDICION DE MAGNITUDES FISICAS COMO SON: LA TEMPERATURA, UN DESPLAZAMIENTO, UN CAMPO ELECTRICO, ETC...
ES199090400407T 1989-02-14 1990-02-14 Procedimiento y aparato para detectar y medir una magnitud fisica. Expired - Lifetime ES2034824T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8901900A FR2643145A1 (fr) 1989-02-14 1989-02-14 Procede et dispositif de detection et de mesure d'une grandeur physique

Publications (1)

Publication Number Publication Date
ES2034824T3 true ES2034824T3 (es) 1993-04-01

Family

ID=9378771

Family Applications (1)

Application Number Title Priority Date Filing Date
ES199090400407T Expired - Lifetime ES2034824T3 (es) 1989-02-14 1990-02-14 Procedimiento y aparato para detectar y medir una magnitud fisica.

Country Status (12)

Country Link
US (1) US5200796A (es)
EP (1) EP0387115B1 (es)
JP (1) JPH03504047A (es)
KR (1) KR910700445A (es)
AT (1) ATE78917T1 (es)
BR (1) BR9005186A (es)
DE (1) DE69000227T2 (es)
DK (1) DK0387115T3 (es)
ES (1) ES2034824T3 (es)
FR (1) FR2643145A1 (es)
GR (1) GR3006035T3 (es)
WO (1) WO1990009564A1 (es)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2673023B1 (fr) * 1991-02-14 1993-06-11 Bertin & Cie Recepteur de demultiplexage sequentiel pour un reseau de capteurs optiques a codage de modulation spectrale.
EP0506357B1 (en) * 1991-03-26 1995-12-13 Hamamatsu Photonics K.K. Optical voltage detector
GB2258725B (en) * 1991-07-30 1995-06-21 Rosemount Ltd A method of decoding a spectrally modulated light signal
US5483335A (en) * 1993-03-18 1996-01-09 Tobias; Reginald Multiplex spectroscopy
US5485268A (en) * 1993-03-18 1996-01-16 Tobias; Reginald Multiplex spectroscopy
DE4314535C2 (de) * 1993-05-03 1997-05-07 Sick Ag Inferferometrisches Gaskomponenten-Meßgerät
GB9401459D0 (en) * 1994-01-26 1994-03-23 Secr Defence Method and apparatus for measurement of unsteady gas temperatures
US5465859A (en) * 1994-04-28 1995-11-14 International Business Machines Corporation Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique
CA2122782C (en) * 1994-05-03 1999-07-27 Wojtek J. Bock Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method
JPH08247858A (ja) * 1995-03-07 1996-09-27 Toshiba Corp 光温度分布センサ及び温度分布測定方法
DE10027533C1 (de) * 2000-06-02 2001-11-15 Ufz Leipzighalle Gmbh Verfahren und Anordnung zur mehrkanaligen Messung von Temperaturen mittels optischer Detektion der energetischen Bandlücke von Festkörpern
US6842254B2 (en) * 2002-10-16 2005-01-11 Fiso Technologies Inc. System and method for measuring an optical path difference in a sensing interferometer
US7559701B2 (en) 2007-03-19 2009-07-14 General Electric Company High-temperature pressure sensor and method of assembly
US8223334B1 (en) * 2008-09-26 2012-07-17 J.A. Woollam Co., Inc. Method of improving ellipsometric and the like data
US8659820B1 (en) 2011-06-17 2014-02-25 L-3 Communications Spectral sensing demodulator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
GB8320107D0 (en) * 1983-07-26 1983-08-24 Barr & Stroud Ltd Optical monitoring apparatus
US4770535A (en) * 1985-02-08 1988-09-13 The Board Of Trustees Of The Leland Stanford Junior University Distributed sensor array and method using a pulsed signal source
FR2595820B1 (fr) * 1986-03-13 1990-01-05 Bertin & Cie Dispositif a fibres optiques pour la detection a distance d'une grandeur physique, en particulier de la temperature
DE3623265C2 (de) * 1986-07-10 1994-11-03 Siemens Ag Verfahren und Anordnung zur faseroptischen Messung einer Weglänge oder einer Weglängenänderung

Also Published As

Publication number Publication date
EP0387115B1 (fr) 1992-07-29
DE69000227D1 (de) 1992-09-03
WO1990009564A1 (fr) 1990-08-23
JPH03504047A (ja) 1991-09-05
EP0387115A1 (fr) 1990-09-12
DE69000227T2 (de) 1993-03-18
KR910700445A (ko) 1991-03-15
BR9005186A (pt) 1991-08-06
GR3006035T3 (es) 1993-06-21
ATE78917T1 (de) 1992-08-15
FR2643145A1 (fr) 1990-08-17
DK0387115T3 (da) 1992-11-02
US5200796A (en) 1993-04-06

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