DK0387115T3 - Fremgangsmåde og apparat til detektering og måling af en fysisk størrelse - Google Patents

Fremgangsmåde og apparat til detektering og måling af en fysisk størrelse

Info

Publication number
DK0387115T3
DK0387115T3 DK90400407.4T DK90400407T DK0387115T3 DK 0387115 T3 DK0387115 T3 DK 0387115T3 DK 90400407 T DK90400407 T DK 90400407T DK 0387115 T3 DK0387115 T3 DK 0387115T3
Authority
DK
Denmark
Prior art keywords
pct
measuring
sec
magnitude
date
Prior art date
Application number
DK90400407.4T
Other languages
English (en)
Inventor
Michel Rene Lequime
Original Assignee
Bertin & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bertin & Cie filed Critical Bertin & Cie
Application granted granted Critical
Publication of DK0387115T3 publication Critical patent/DK0387115T3/da

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02041Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044Imaging in the frequency domain, e.g. by using a spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/0209Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
DK90400407.4T 1989-02-14 1990-02-14 Fremgangsmåde og apparat til detektering og måling af en fysisk størrelse DK0387115T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8901900A FR2643145A1 (fr) 1989-02-14 1989-02-14 Procede et dispositif de detection et de mesure d'une grandeur physique

Publications (1)

Publication Number Publication Date
DK0387115T3 true DK0387115T3 (da) 1992-11-02

Family

ID=9378771

Family Applications (1)

Application Number Title Priority Date Filing Date
DK90400407.4T DK0387115T3 (da) 1989-02-14 1990-02-14 Fremgangsmåde og apparat til detektering og måling af en fysisk størrelse

Country Status (12)

Country Link
US (1) US5200796A (da)
EP (1) EP0387115B1 (da)
JP (1) JPH03504047A (da)
KR (1) KR910700445A (da)
AT (1) ATE78917T1 (da)
BR (1) BR9005186A (da)
DE (1) DE69000227T2 (da)
DK (1) DK0387115T3 (da)
ES (1) ES2034824T3 (da)
FR (1) FR2643145A1 (da)
GR (1) GR3006035T3 (da)
WO (1) WO1990009564A1 (da)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2673023B1 (fr) * 1991-02-14 1993-06-11 Bertin & Cie Recepteur de demultiplexage sequentiel pour un reseau de capteurs optiques a codage de modulation spectrale.
EP0506357B1 (en) * 1991-03-26 1995-12-13 Hamamatsu Photonics K.K. Optical voltage detector
GB2258725B (en) * 1991-07-30 1995-06-21 Rosemount Ltd A method of decoding a spectrally modulated light signal
US5483335A (en) * 1993-03-18 1996-01-09 Tobias; Reginald Multiplex spectroscopy
US5485268A (en) * 1993-03-18 1996-01-16 Tobias; Reginald Multiplex spectroscopy
DE4314535C2 (de) * 1993-05-03 1997-05-07 Sick Ag Inferferometrisches Gaskomponenten-Meßgerät
GB9401459D0 (en) * 1994-01-26 1994-03-23 Secr Defence Method and apparatus for measurement of unsteady gas temperatures
US5465859A (en) * 1994-04-28 1995-11-14 International Business Machines Corporation Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique
CA2122782C (en) * 1994-05-03 1999-07-27 Wojtek J. Bock Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method
JPH08247858A (ja) * 1995-03-07 1996-09-27 Toshiba Corp 光温度分布センサ及び温度分布測定方法
DE10027533C1 (de) * 2000-06-02 2001-11-15 Ufz Leipzighalle Gmbh Verfahren und Anordnung zur mehrkanaligen Messung von Temperaturen mittels optischer Detektion der energetischen Bandlücke von Festkörpern
US6842254B2 (en) * 2002-10-16 2005-01-11 Fiso Technologies Inc. System and method for measuring an optical path difference in a sensing interferometer
US7559701B2 (en) 2007-03-19 2009-07-14 General Electric Company High-temperature pressure sensor and method of assembly
US8223334B1 (en) * 2008-09-26 2012-07-17 J.A. Woollam Co., Inc. Method of improving ellipsometric and the like data
US8659820B1 (en) 2011-06-17 2014-02-25 L-3 Communications Spectral sensing demodulator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
GB8320107D0 (en) * 1983-07-26 1983-08-24 Barr & Stroud Ltd Optical monitoring apparatus
US4770535A (en) * 1985-02-08 1988-09-13 The Board Of Trustees Of The Leland Stanford Junior University Distributed sensor array and method using a pulsed signal source
FR2595820B1 (fr) * 1986-03-13 1990-01-05 Bertin & Cie Dispositif a fibres optiques pour la detection a distance d'une grandeur physique, en particulier de la temperature
DE3623265C2 (de) * 1986-07-10 1994-11-03 Siemens Ag Verfahren und Anordnung zur faseroptischen Messung einer Weglänge oder einer Weglängenänderung

Also Published As

Publication number Publication date
EP0387115B1 (fr) 1992-07-29
DE69000227D1 (de) 1992-09-03
WO1990009564A1 (fr) 1990-08-23
JPH03504047A (ja) 1991-09-05
EP0387115A1 (fr) 1990-09-12
DE69000227T2 (de) 1993-03-18
KR910700445A (ko) 1991-03-15
BR9005186A (pt) 1991-08-06
GR3006035T3 (da) 1993-06-21
ES2034824T3 (es) 1993-04-01
ATE78917T1 (de) 1992-08-15
FR2643145A1 (fr) 1990-08-17
US5200796A (en) 1993-04-06

Similar Documents

Publication Publication Date Title
DK0387115T3 (da) Fremgangsmåde og apparat til detektering og måling af en fysisk størrelse
DE69810288D1 (de) Elektrische messung der ölqualität
DE69621031T2 (de) Integriert-optischer,interferometrischer sensor
FR2412062A1 (fr) Pyrometre optique et technique pour la mesure d'une temperature
FI97491C (fi) Anturijärjestely kaasukomponenttien mittaamiseksi optisesti
EP1286150A3 (en) Interferometric optical component analyzer based on orthogonal filters
ES2049786T5 (es) Procedimiento para el funcionamiento de un detector optico de humos y detector de humos para ejecutar el procedimiento.
SE7400508L (da)
DE3865582D1 (de) Laserinterferometer zur interferometrischen laengenmessung.
EP0623801A3 (de) Interferometrisches Messverfahren für Absolutmessungen sowie dafür geeignete Laserinterferometeranordnung.
FR2648600B1 (fr) Appareil opto-electronique de mesure a distance d'une grandeur physique
ES2181700T3 (es) Dispositivo y procedimiento para la generacion de señales opticamente detectables aplicando potenciales electricos a liquidos de muestras.
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
ATE137586T1 (de) Methode zum detektieren und messen von äusseren einwirkungen
PT82544A (pt) Aperfeicoamentos em, e relativos a, instrumentos de medida
EP0478785A4 (en) Apparatus for measuring wavelength of light by high precision detection of interference fringe
SE8800097L (sv) Foerfarande foer att faststaella en upptraedande diskrepans mellan tvaa optiska vaegstraeckor samt anordning anpassad foer utfoerande av foerfarandet
NO944996L (no) Lysmåler
ATE110842T1 (de) Vorrichtung und verfahren zur messung absoluter drehungen in mehreren raumrichtungen.
KR900018655A (ko) 광택 측정장치
WO1992018845A3 (en) Methods of and apparatus for measurement using acousto-optic devices
SU1656356A1 (ru) Способ измерени флуктуаций акустического давлени
Das et al. Fiber Bragg grating based acoustic sensing with interferometric interrogation
JPS577179A (en) Laser gyro using ring laser
JPS5387783A (en) Minute temperature detecting system