EP4151860A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP4151860A3
EP4151860A3 EP22216232.3A EP22216232A EP4151860A3 EP 4151860 A3 EP4151860 A3 EP 4151860A3 EP 22216232 A EP22216232 A EP 22216232A EP 4151860 A3 EP4151860 A3 EP 4151860A3
Authority
EP
European Patent Office
Prior art keywords
rotor
holweck
component
collar
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22216232.3A
Other languages
German (de)
English (en)
Other versions
EP4151860A2 (fr
Inventor
Sönke Gilbrich
Jan Hofmann
Bernd Koci
Mirko Mekota
Thilo Wille
Michael Schweighöfer
Tobias Stoll
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24166459.8A priority Critical patent/EP4390145A2/fr
Priority to EP24166455.6A priority patent/EP4390144A3/fr
Priority to EP22216232.3A priority patent/EP4151860A3/fr
Publication of EP4151860A2 publication Critical patent/EP4151860A2/fr
Publication of EP4151860A3 publication Critical patent/EP4151860A3/fr
Priority to JP2023076120A priority patent/JP2024091224A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP22216232.3A 2022-12-22 2022-12-22 Pompe à vide Pending EP4151860A3 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP24166459.8A EP4390145A2 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP24166455.6A EP4390144A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP22216232.3A EP4151860A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
JP2023076120A JP2024091224A (ja) 2022-12-22 2023-05-02 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22216232.3A EP4151860A3 (fr) 2022-12-22 2022-12-22 Pompe à vide

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP24166455.6A Division EP4390144A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP24166459.8A Division EP4390145A2 (fr) 2022-12-22 2022-12-22 Pompe à vide

Publications (2)

Publication Number Publication Date
EP4151860A2 EP4151860A2 (fr) 2023-03-22
EP4151860A3 true EP4151860A3 (fr) 2023-04-05

Family

ID=84569606

Family Applications (3)

Application Number Title Priority Date Filing Date
EP22216232.3A Pending EP4151860A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP24166455.6A Pending EP4390144A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP24166459.8A Pending EP4390145A2 (fr) 2022-12-22 2022-12-22 Pompe à vide

Family Applications After (2)

Application Number Title Priority Date Filing Date
EP24166455.6A Pending EP4390144A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP24166459.8A Pending EP4390145A2 (fr) 2022-12-22 2022-12-22 Pompe à vide

Country Status (2)

Country Link
EP (3) EP4151860A3 (fr)
JP (1) JP2024091224A (fr)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
EP1408237A1 (fr) * 2002-10-11 2004-04-14 Alcatel Pompe turbomoléculaire
DE10354204A1 (de) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Molekularpumpe
DE102006031965A1 (de) * 2005-07-15 2007-01-18 Leybold Vacuum Gmbh Rotoren einer Turbomolekularpumpe
EP1330606B1 (fr) * 2000-10-28 2011-07-13 Oerlikon Leybold Vacuum GmbH Pompe a vide cinetique mecanique
EP3002459A1 (fr) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide
KR101758033B1 (ko) * 2013-11-30 2017-07-14 라이볼트 게엠베하 진공 펌프를 위한 로터 디스크 및 로터
US20200378857A1 (en) * 2019-05-30 2020-12-03 Shimadzu Corporation Vacuum pump and leak detector
WO2021245345A1 (fr) * 2020-06-04 2021-12-09 Constellium Issoire Utilisation de produits en alliage aluminium cuivre magnesium performants a haute temperature
EP4006349A1 (fr) * 2019-07-22 2022-06-01 Edwards Japan Limited Pompe à vide et rotor et palette rotative destinés à être utilisés dans une pompe à vide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3650702B1 (fr) 2018-11-12 2020-09-16 Pfeiffer Vacuum Gmbh Utilisation d'une huile synthétique dans une pompe à vide et pompe à vide

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
EP1330606B1 (fr) * 2000-10-28 2011-07-13 Oerlikon Leybold Vacuum GmbH Pompe a vide cinetique mecanique
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
EP1408237A1 (fr) * 2002-10-11 2004-04-14 Alcatel Pompe turbomoléculaire
DE10354204A1 (de) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Molekularpumpe
DE102006031965A1 (de) * 2005-07-15 2007-01-18 Leybold Vacuum Gmbh Rotoren einer Turbomolekularpumpe
KR101758033B1 (ko) * 2013-11-30 2017-07-14 라이볼트 게엠베하 진공 펌프를 위한 로터 디스크 및 로터
EP3002459A1 (fr) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide
US20200378857A1 (en) * 2019-05-30 2020-12-03 Shimadzu Corporation Vacuum pump and leak detector
EP4006349A1 (fr) * 2019-07-22 2022-06-01 Edwards Japan Limited Pompe à vide et rotor et palette rotative destinés à être utilisés dans une pompe à vide
WO2021245345A1 (fr) * 2020-06-04 2021-12-09 Constellium Issoire Utilisation de produits en alliage aluminium cuivre magnesium performants a haute temperature

Also Published As

Publication number Publication date
EP4390144A3 (fr) 2024-07-10
EP4390144A2 (fr) 2024-06-26
EP4151860A2 (fr) 2023-03-22
EP4390145A2 (fr) 2024-06-26
JP2024091224A (ja) 2024-07-04

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