EP3388682B1 - Pompe à vide avec un radiateur et procédé de fabrication du radiateur - Google Patents

Pompe à vide avec un radiateur et procédé de fabrication du radiateur Download PDF

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Publication number
EP3388682B1
EP3388682B1 EP17166278.6A EP17166278A EP3388682B1 EP 3388682 B1 EP3388682 B1 EP 3388682B1 EP 17166278 A EP17166278 A EP 17166278A EP 3388682 B1 EP3388682 B1 EP 3388682B1
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EP
European Patent Office
Prior art keywords
recesses
heat sink
recess
tool
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17166278.6A
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German (de)
English (en)
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EP3388682A1 (fr
Inventor
Erhard Harapat
Wolfgang Söhngen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17166278.6A priority Critical patent/EP3388682B1/fr
Priority to JP2018047592A priority patent/JP6701249B2/ja
Publication of EP3388682A1 publication Critical patent/EP3388682A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material

Definitions

  • the present invention relates firstly to a vacuum pump according to claim 1.
  • the invention relates to a manufacturing method according to claim 7.
  • An exemplary cooling body of a scroll pump of the prior art has a plurality of cooling ribs for convective heat exchange, which remain during the production of the cooling body by making recesses between the recesses.
  • the recesses are made in a workpiece for the heat sink using an end mill. This allows the formation of a relatively filigree and complex cooling fin structure in relation to a machining plane that runs perpendicular to an axis of rotation of the end mill.
  • the production of the heat sink with an end mill is time-consuming, however, and allows only limited freedom in the design of a recess base. Therefore, in the prior art, the recess base is designed to be flat.
  • This configuration also results in the recess base running perpendicular to all side walls of the cooling fins and other non-milled sections.
  • this can lead to a stagnation of cooling fluid, e.g. air, at least at certain points in the area of the perpendicularly meeting side walls and recess bottoms, especially if the cooling fluid is blown at right angles to the plane of the recess bottoms, i.e. if the end face of the heat sink is blown frontally.
  • cooling fluid e.g. air
  • the object of the invention is achieved by a vacuum pump according to claim 1, and in particular in that a gentle deflection area for the cooling fluid is formed at least at a transition from the end face into a respective recess.
  • the cooling fluid can be, for example, air.
  • air as the coolant, although other coolants are conceivable according to the invention.
  • the gentle deflection area avoids or reduces air congestion.
  • a fan acts on the heat sink with an air flow
  • the deflection area acts in such a way that the air flow is deflected from a first direction in a second, in particular to the first essentially perpendicular direction, so that the air can maintain a steady flow and the convective heat exchange is improved.
  • air currents are formed on the heat sink as part of the free convection, which through the deflection area can be advantageously deflected.
  • the deflection area according to the invention also results in less noise and less dynamic pressure.
  • a smooth transition is consequently to be understood in particular as a transition which is more flow-favorable and / or friction-reducing than conventional transitions, as have been described above with reference to the prior art.
  • the recesses are each designed as an elongated flow channel. This can in particular serve to improve the conduction of air away from the transition between the end face and the recess.
  • the recesses can each be straight. This simplifies their manufacture and improves the air conduction, since disruptive changes in direction are avoided.
  • the recesses can each have a width that is constant in relation to a length of the recess.
  • the recesses each have a height h and a width, the height h, in particular at least in an area running at least approximately parallel to the end face, being equal to or greater than the width.
  • the deflection area is partially circular. This allows a particularly gentle deflection with a low loss of kinetic energy in the air flow. In addition, such a deflection area can be easily produced.
  • a radius of the deflection area is equal to the radius of a disk-shaped tool used to produce the deflection area or greater than the radius of the tool.
  • the recesses are each designed as an incision or a groove.
  • the recesses are each made by at least one disk-shaped tool, in particular a disk milling cutter or a circular saw.
  • the shape of the deflection area can correspond to the shape of the tool.
  • the advantageous deflection area can be implemented automatically, as it were, through the choice of tool.
  • the shape and / or the size of the deflection area can also differ, for example, from the shape or the size of the tool, for example if these are moved at the same time with components perpendicular and parallel to the end face during the production of the heat sink.
  • Disk-shaped tools such as disk milling cutters and circular saws can have a large number of cutting edges due to their design. As a result, a large number of cutting edges are simultaneously in engagement with the workpiece at any point in time. This results in a comparatively high feed speed with a constant feed per cutting edge.
  • the recesses each extend from a central region of the cooling body to an edge region of the cooling body.
  • the recesses can thus ensure good air dissipation.
  • the recesses are arranged as a whole in a star shape, that is to say they each run radially from the inside to the outside. In this way, a particularly even distribution of the air and thus even cooling can be achieved.
  • At least some recesses can run parallel to one another at least over part of their length.
  • At least two recesses can intersect and / or at least one recess can open into at least one further recess.
  • At least one recess runs at least approximately parallel to a secant of a circle around a center of the end face.
  • a respective recess in particular in an edge region of the cooling body, has a gentle outlet.
  • the term outlet does not necessarily have to refer to an end of the recess in one direction of flow, but can also refer, for example, to an end of the recess opposite the deflection area.
  • the recess can be guided quite generally to an edge region of the cooling body or, alternatively, can be defined exclusively in the end face. An outlet can therefore open out, for example, into an edge surface or also gently into the end surface.
  • the transition can, for example, define an angle of less than 90 °, in particular between a recess base or an end of the deflection region and the end face.
  • the transition itself can be gentle and / or continuous, which would correspond to an angle of essentially 0 °.
  • the heat sink can be used, for example, as an element delimiting a pump section of the vacuum pump, in particular as a housing section for these, be trained.
  • the vacuum pump can be a scroll pump, for example.
  • the heat sink can, for example, be designed in one piece with a pump-active spiral structure of the scroll pump. This ensures particularly good heat dissipation from the active pumping area of the scroll pump.
  • a fan is provided in order to apply air to the heat sink.
  • the fan defines a direction of flow which is at least substantially perpendicular to the end face of the cooling body, and in particular can be at least substantially parallel to a main axis of the cooling body.
  • the object of the invention is achieved by a method for producing a heat sink for a vacuum pump according to claim 7.
  • the tool comprises a disk-shaped tool, for example a disk milling cutter or a circular saw.
  • a deflection area for a cooling fluid can be formed at at least one transition from the end face into the recess through the tool will.
  • a deflection area improves the cooling effect of the cooling body and offers further advantages, such as, for example, less noise development when the end face is blown with a cooling fluid.
  • the tool for making the recesses is moved with a radial component in relation to a main axis of the workpiece relative to the workpiece.
  • a main axis of the workpiece can in particular be a central axis and / or run perpendicular to the end face, that is, its normal.
  • the workpiece can, for example, have an essentially cylindrical shape and / or be an essentially round disk.
  • the main axis can be defined e.g. by a cylinder or center axis.
  • the tool for making the recess is moved with an axial component in relation to a main axis of the workpiece relative to the workpiece.
  • the tool is only moved with a radial and / or an axial component, that is to say without a tangential component in relation to an imaginary cylinder about the main axis.
  • machining processes are carried out each for making a recess or a set of recesses, the machining operations being carried out one after the other and, between the machining operations, the workpiece is rotated relative to the tool in relation to a main axis of the workpiece, for example via a dividing apparatus or a C-axis of a machine tool.
  • a respective machining process can be carried out in particular to produce a recess or a set of recesses.
  • the multiple machining operations differ in terms of a radial machining depth in relation to a main axis of the workpiece.
  • This allows recesses of different lengths to be formed.
  • This in turn can advantageously be used to make at least one recess with a second, smaller machining depth in the workpiece between two recesses with a first machining depth.
  • the area between the recesses with the first machining depth which tends to be greatest on the outside with respect to the main axis, can also be used as a cooling-active area.
  • the tool can be designed, for example, as a double or twin tool with two simultaneously effective individual tools arranged at a distance from one another in order to make a set of two recesses in the workpiece with one machining operation.
  • the individual tools can in particular be arranged in parallel. A tool with more than two individual tools is also conceivable.
  • a single machining process for example, several aligned recesses or sets of recesses can be produced.
  • a recess or a set of recesses can first be made and then a further recess or a further set of recesses can be made in the same machining process.
  • the machining process can be started with a radially inward delivery of the tool to form a first recess or a first set of recesses, the tool extending axially at a radially inner end of the first recess or the first set of recesses the workpiece is moved out and moved further in the initially selected radial direction, the tool then being axially retracted again into the workpiece to form a second recess or a second set of recesses and moving further in the initially selected direction that leads to this point in time is possibly a radial outward direction.
  • the tool has a disk diameter D and a disk height H, where D / H 4.
  • the tool has a disk diameter D and a shank with a shank diameter d, where D / d 1.5.
  • a heat sink 10 of a vacuum pump is shown in a perspective view.
  • the heat sink 10 has a plurality of cooling fins 12 which were formed by making recesses 14 by means of an end mill.
  • the recesses 14 lie in one plane with a respective recess base.
  • the cooling fins 12 and a central section 16 each have side walls which are perpendicular to this plane.
  • the complex cooling fin structure of the heat sink 10 can only be produced with great expenditure of time.
  • the vertical transitions between the cooling fins 12 or central section 16 and the respective recess bases lead to relatively poor air conduction, in particular to an accumulation of air in the area of the transitions.
  • this configuration results in a great deal of noise when blowing onto the cooling fin structure.
  • an inventive heat sink 20 of a vacuum pump is also shown in a perspective view.
  • the heat sink 20 has a plurality of recesses 22 which extend radially or in a star shape with respect to a main axis A of the heat sink 20.
  • the heat sink 20 has an essentially cylindrical basic shape, the main axis A coincides with a cylinder axis of the cylindrical basic shape.
  • a pump-active spiral of a scroll pump can be formed on the side of the cooling body 20 facing away, that is not visible, ie the cooling body 20 is then a component of a scroll vacuum pump.
  • the heat sink 20 has an end face 24 into which the recesses 22 are made, and comprises an edge face 28 which essentially corresponds to a cylinder jacket face.
  • a respective recess 22 has a gentle deflection area 32 for a cooling fluid, in particular air, at a transition 30 from the end face 24 into the recess 22.
  • the deflection region 32 is arranged at a radially inner end of the respective recess 22.
  • the respective recess 22 has a gentle outlet 34.
  • the recess 22 has a recess base 36.
  • a fan (not shown) which conveys air for forced convective cooling essentially along the main axis A against the end face 24.
  • a respective deflection area 32 acts in such a way that a corresponding part of the air flow is deflected and continues to flow radially outward through the respective recess 22.
  • the blown cooling air is thus distributed essentially in a star shape over the cooling body 20 in accordance with the orientation of the recesses 22 and is guided radially outward. In this way, a particularly uniform and effective heat dissipation is achieved and, in particular due to the gentle deflection areas 32, the development of noise is minimized.
  • a respective recess 22 was made in the workpiece by means of a machining process. After finishing the editing process, the Workpiece rotated around the main axis A relative to the tool and a next machining operation with radial infeed was carried out. Individual machining processes differ in a radial machining depth. Two groups of recesses were formed, the groups differing from one another with regard to a radial machining depth.
  • the deflection regions 32 of the recesses 22 can each have a recess base which is part-circular and thus has a deflection radius of curvature.
  • the radius of curvature of the circumference of the tool in particular a disk milling cutter or circular saw, can be less than or equal to this radius of curvature. If the radii are the same size, the gentle deflection area 32 results almost automatically when the tool is radially infeed in the direction of axis A. If the tool radius of curvature is smaller than the deflection radius, the tool is moved along a corresponding movement profile in order to produce the gentle deflection area 32.
  • the heat sink 20 of the Figs. 3 and 4 can not only be produced relatively easily, quickly and thus inexpensively by means of a tool which comprises at least one disk-shaped tool such as a disk milling cutter and / or a circular saw.
  • the heat sink 20 also has a relatively large cooling active surface, which leads to a particularly good cooling effect. Due to the larger surface and the additional deflection of the blown air, a significantly improved cooling performance with at the same time lower noise development can be expected.
  • a short recess 22 is formed between two long recesses 22 over an angular range of more than 270 °. All recesses 22 extend to the edge area 28, the inner ends of the short recesses 22 on a circle around the Center Z lie, which is larger than a circle around the center Z, on which the inner ends of the long recesses 22 lie.
  • a shank 40 which defines the axis of rotation U of this disk milling cutter has a diameter d, a machining disk 42 arranged on the shaft 40 and provided radially on the outside with a plurality of cutting edges 44 having a disk diameter D and a disk height H.
  • D / H 4 and D / d 1.5 are practically advantageous embodiments.
  • Fig. 4 shows an example of the profile of two recesses 22, each of which at the transition 30 from the end face 24 of the cooling body 22 has a gentle, ie particularly flow-favorable and friction-reducing deflection area 32, followed by a recess base 36 running parallel to the end face 24 and, in turn, an outlet 34 into the Have edge area 28.
  • the end face 24 lies above the recess base 36 at a height h.
  • the width of the recesses 22 can correspond to the height H of the disk 42 of the tool (FIG. 6), although this is not mandatory, ie the tool can in principle also be used to produce recesses whose width is greater than the height of the machining disk 42.
  • the height h of the recesses 22 is in each case at least equal to the width of the recesses 22.
  • the height h is preferably greater than the width.
  • the recesses 22 between the deflection area 32 and the outlet 34 are deeper than they are wide.
  • the radius R of the deflection area 32 of a recess 22 is preferably equal to the radius D / 2 of the machining disk 42, which is used to produce this recess 22, but can also be greater than this radius D / 2.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Milling Processes (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Claims (13)

  1. Pompe à vide, en particulier pompe à spirales,
    comportant un dissipateur thermique (20) pourvu d'une face frontale (24) qui est sollicitée par un fluide de refroidissement lors du fonctionnement de la pompe à vide,
    dans laquelle
    il est prévu une soufflante pour solliciter le dissipateur thermique (20) avec de l'air, la soufflante définissant une direction d'écoulement qui est au moins sensiblement perpendiculaire à la face frontale (24) du dissipateur thermique (20),
    une structure de refroidissement ayant une pluralité d'évidements (22) ménagés dans la face frontale (24) et s'étendant le long de la face frontale (24) est formée dans la face frontale (24),
    une zone de déviation douce (32) pour le fluide de refroidissement est formée au moins au niveau d'une transition (30) de la face frontale (24) vers un évidement respectif (22), zone qui fait dévier le flux d'air, généré par la soufflante, depuis une première direction, à savoir la direction d'écoulement, vers une seconde direction, à savoir radialement vers l'extérieur, les évidements (22) s'étendent chacun en étoile depuis une zone centrale du dissipateur thermique (20) vers une zone de bord du dissipateur thermique (20), et
    un évidement court (22) respectif est ménagé sur une zone angulaire de plus de 270° entre deux évidements longs (22).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    les évidements (22) sont chacun réalisés sous forme de canal d'écoulement allongé, et/ou en ce que
    les évidements (22) sont chacun rectilignes.
  3. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    les évidements (22) présentent chacun une largeur qui est constante par rapport à une longueur de l'évidement (22), et/ou en ce que les évidements (22) présentent chacun une hauteur (h) et une largeur, la hauteur (h) étant égale à la largeur ou supérieure à la largeur, en particulier au moins dans une zone s'étendant au moins approximativement parallèlement à la face frontale (24).
  4. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    les évidements (22) sont chacun réalisés sous forme d'entaille ou de rainure.
  5. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la zone de déviation (32) est réalisée en forme de cercle partiel.
  6. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    au moins certains évidements (22) s'étendent parallèlement les uns aux autres au moins sur une partie de leur longueur.
  7. Procédé de fabrication d'un dissipateur thermique (20) pour une pompe à vide selon l'une des revendications précédentes, comprenant les étapes consistant à :
    fournir une pièce à œuvrer ayant une face frontale (24) à titre d'élément de départ pour le dissipateur thermique (20), et
    ménager une pluralité d'évidements (22), s'étendant le long de la face frontale (24), dans la pièce à œuvrer au moyen d'un outil,
    l'outil étant réalisé en forme de disque et comprenant en particulier une fraise à disque ou une scie circulaire.
  8. Procédé selon la revendication 7,
    caractérisé en ce que
    une zone de déviation (32) pour un fluide de refroidissement est formée par l'outil au niveau d'au moins une transition (30) de la face frontale (24) vers l'évidement (22).
  9. Procédé selon la revendication 7 ou 8,
    caractérisé en ce que
    pour chaque évidement (22) ou chaque jeu d'évidements (22), il se produit exactement un mouvement relatif entre l'outil et la pièce à œuvrer, pendant lequel l'évidement (22) ou les évidements (22) sont ménagés dans la pièce à œuvrer.
  10. Procédé selon l'une au moins des revendications 7 à 9,
    caractérisé en ce que
    l'outil pour ménager les évidements (22) est déplacé par rapport à la pièce à œuvrer avec une composante radiale par rapport à un axe principal (A) de la pièce à œuvrer.
  11. Procédé selon l'une au moins des revendications 7 à 10,
    caractérisé en ce que
    plusieurs opérations d'usinage sont effectuées pour ménager un évidement (22) ou un jeu d'évidements (22), les opérations d'usinage étant effectuées en succession et, entre les opérations d'usinage, par rapport à un axe principal (A) de la pièce à œuvrer, la pièce à œuvrer étant tournée par rapport à l'outil, ou inversement.
  12. Procédé selon l'une au moins des revendications 7 à 11,
    caractérisé en ce que
    l'outil présente un diamètre de disque (D) et une hauteur de disque (H), où D/H ≥ 4.
  13. Procédé selon l'une au moins des revendications 7 à 12,
    caractérisé en ce que
    l'outil présente un diamètre de disque (D) et une tige avec un diamètre de tige (d), où D/d ≥ 1,5.
EP17166278.6A 2017-04-12 2017-04-12 Pompe à vide avec un radiateur et procédé de fabrication du radiateur Active EP3388682B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17166278.6A EP3388682B1 (fr) 2017-04-12 2017-04-12 Pompe à vide avec un radiateur et procédé de fabrication du radiateur
JP2018047592A JP6701249B2 (ja) 2017-04-12 2018-03-15 真空ポンプの為の冷却体、及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17166278.6A EP3388682B1 (fr) 2017-04-12 2017-04-12 Pompe à vide avec un radiateur et procédé de fabrication du radiateur

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KR102082895B1 (ko) * 2018-02-02 2020-04-20 엘에스엠트론 주식회사 유압트랜스미션용 냉각장치
CN114535675B (zh) * 2022-04-02 2023-04-25 徐州乔南仪表有限公司 一种铣铁开槽用的刀具及其开槽方法

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EP0540420A2 (fr) * 1991-10-31 1993-05-05 Sumitomo Metal Industries, Ltd. Refroidisseur à ailettes et procédé de fabrication
JP2001336488A (ja) * 1999-09-27 2001-12-07 Tokico Ltd スクロール式流体機械
US20030094815A1 (en) * 2001-11-16 2003-05-22 Dong-Won Seo Alternator having vacuum pump capable of improving cooling characteristic
US6779593B1 (en) * 2003-04-30 2004-08-24 Hewlett-Packard Development Company, L.P. High performance cooling device with heat spreader
US20060054311A1 (en) * 2004-09-15 2006-03-16 Andrew Douglas Delano Heat sink device with independent parts

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JPS6052307A (ja) * 1983-09-02 1985-03-25 今田　淳一 部材結合装置
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JP2007198153A (ja) * 2006-01-24 2007-08-09 Anest Iwata Corp スクロール流体機械
JP6195722B2 (ja) * 2013-03-29 2017-09-13 アネスト岩田株式会社 スクロール式流体機械
JP2018053795A (ja) * 2016-09-28 2018-04-05 三井精機工業株式会社 スクロールコンプレッサの冷却機構

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0540420A2 (fr) * 1991-10-31 1993-05-05 Sumitomo Metal Industries, Ltd. Refroidisseur à ailettes et procédé de fabrication
JP2001336488A (ja) * 1999-09-27 2001-12-07 Tokico Ltd スクロール式流体機械
US20030094815A1 (en) * 2001-11-16 2003-05-22 Dong-Won Seo Alternator having vacuum pump capable of improving cooling characteristic
US6779593B1 (en) * 2003-04-30 2004-08-24 Hewlett-Packard Development Company, L.P. High performance cooling device with heat spreader
US20060054311A1 (en) * 2004-09-15 2006-03-16 Andrew Douglas Delano Heat sink device with independent parts

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JP2018178996A (ja) 2018-11-15
JP6701249B2 (ja) 2020-05-27

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