EP3647599A3 - Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche - Google Patents
Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche Download PDFInfo
- Publication number
- EP3647599A3 EP3647599A3 EP19201749.9A EP19201749A EP3647599A3 EP 3647599 A3 EP3647599 A3 EP 3647599A3 EP 19201749 A EP19201749 A EP 19201749A EP 3647599 A3 EP3647599 A3 EP 3647599A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- manufacturing same
- scroll
- vacuum pump
- electronics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5813—Cooling the control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2230/00—Manufacture
- F04C2230/60—Assembly methods
- F04C2230/605—Balancing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/805—Fastening means, e.g. bolts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/18—Pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/19—Temperature
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Abstract
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20200624.3A EP3754200B1 (de) | 2019-10-07 | 2019-10-07 | Scrollvakuumpumpe und montageverfahren |
EP19201749.9A EP3647599B1 (de) | 2019-10-07 | 2019-10-07 | Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche |
JP2020160698A JP7220692B2 (ja) | 2019-10-07 | 2020-09-25 | 真空ポンプ、スクロールポンプ及びその製造方法 |
EP22156933.8A EP3974655B1 (de) | 2019-10-07 | 2020-09-29 | Scrollvakuumpumpe und ihr herstellungsverfahren |
EP20198997.7A EP3739166B1 (de) | 2019-10-07 | 2020-09-29 | Scrollvakuumpumpe und ihr herstellungsverfahren |
EP22199874.3A EP4095387A3 (de) | 2019-10-07 | 2020-09-29 | Scrollvakuumpumpe mit integriertem drucksensor |
US17/063,912 US11773849B2 (en) | 2019-10-07 | 2020-10-06 | Vacuum pump, scroll pump, and manufacturing method for such |
JP2022178824A JP2023025010A (ja) | 2019-10-07 | 2022-11-08 | 真空ポンプ、スクロールポンプ及びその製造方法 |
US18/449,111 US20230383750A1 (en) | 2019-10-07 | 2023-08-14 | Vacuum pump, scroll pump, and manufacturing method for such |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19201749.9A EP3647599B1 (de) | 2019-10-07 | 2019-10-07 | Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20200624.3A Division EP3754200B1 (de) | 2019-10-07 | 2019-10-07 | Scrollvakuumpumpe und montageverfahren |
EP20200624.3A Division-Into EP3754200B1 (de) | 2019-10-07 | 2019-10-07 | Scrollvakuumpumpe und montageverfahren |
EP20184951.0 Division-Into | 2020-07-09 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3647599A2 EP3647599A2 (de) | 2020-05-06 |
EP3647599A3 true EP3647599A3 (de) | 2020-07-22 |
EP3647599B1 EP3647599B1 (de) | 2021-12-22 |
Family
ID=68210710
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20200624.3A Active EP3754200B1 (de) | 2019-10-07 | 2019-10-07 | Scrollvakuumpumpe und montageverfahren |
EP19201749.9A Active EP3647599B1 (de) | 2019-10-07 | 2019-10-07 | Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20200624.3A Active EP3754200B1 (de) | 2019-10-07 | 2019-10-07 | Scrollvakuumpumpe und montageverfahren |
Country Status (1)
Country | Link |
---|---|
EP (2) | EP3754200B1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3708840A3 (de) * | 2020-07-22 | 2021-03-10 | Pfeiffer Vacuum Technology AG | Rückschlagventil, vakuumgerät und vakuumpumpe |
DE102020128369A1 (de) * | 2020-10-28 | 2022-04-28 | Leybold Gmbh | Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe |
EP4219947A3 (de) | 2023-06-15 | 2024-02-07 | Pfeiffer Vacuum Technology AG | Scrollpumpe mit optimierter spiralgeometrie |
EP4234932A3 (de) | 2023-06-15 | 2024-01-17 | Pfeiffer Vacuum Technology AG | Scrollpumpe mit verbessertem zugang zum ansaugbereich zu montagezwecken |
EP4253720A3 (de) | 2023-08-08 | 2024-06-19 | Pfeiffer Vacuum Technology AG | Scrollvakuumpumpe und scrollvakuumpumpen-system |
Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5102316A (en) * | 1986-08-22 | 1992-04-07 | Copeland Corporation | Non-orbiting scroll mounting arrangements for a scroll machine |
US5209653A (en) * | 1992-01-17 | 1993-05-11 | Spx Corporation | Vacuum pump |
EP0798463A2 (de) * | 1996-03-29 | 1997-10-01 | Anest Iwata Corporation | Ölfreie Spiralvakuumpumpe |
US5743719A (en) * | 1995-07-21 | 1998-04-28 | Anest Iwata Corporation | Oil-free scroll vacuum pump having a gas ballast part |
US5971725A (en) * | 1996-10-08 | 1999-10-26 | Varian, Inc. | Vacuum pumping device |
US20020025265A1 (en) * | 2000-08-29 | 2002-02-28 | Hideo Ikeda | Motor-driven compressors |
US20050019169A1 (en) * | 2001-11-15 | 2005-01-27 | Hartmut Kriehn | Tempering method for a screw-type vacuum pump |
US7162797B2 (en) * | 2001-07-10 | 2007-01-16 | Kabushiki Kaisha Toyota Jidoshokki | Method of correcting imbalance of a scroll compressor |
US20100028185A1 (en) * | 2008-07-31 | 2010-02-04 | Hitachi Industrial Equipment Systems Co., Ltd. | Scroll Fluid Machine |
US20100223947A1 (en) * | 2006-01-30 | 2010-09-09 | Makoto Shibuya | Electric Compressor and Air Conditioning System for vehicle, Using the Electric Compressor |
JP2013100760A (ja) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | 一体型ターボ分子ポンプ |
FR2985557A1 (fr) * | 2012-01-11 | 2013-07-12 | Valeo Japan Co Ltd | Excentrique balance comprenant une bague et un contrepoids bloques en rotation |
US20140219846A1 (en) * | 2013-02-06 | 2014-08-07 | Emerson Climate Technologies, Inc. | Capacity modulated scroll compressor |
JP2015172358A (ja) * | 2014-03-12 | 2015-10-01 | エドワーズ株式会社 | 真空ポンプの制御装置とこれを備えた真空ポンプ |
CN204941844U (zh) * | 2015-09-10 | 2016-01-06 | 北京北仪优成真空技术有限公司 | 真空泵气镇阀装置及真空泵 |
US9341187B2 (en) * | 2013-08-30 | 2016-05-17 | Emerson Climate Technologies, Inc. | Compressor assembly with liquid sensor |
US9534506B2 (en) * | 2010-10-19 | 2017-01-03 | Edwards Japan Limited | Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump |
US20170211390A1 (en) * | 2014-07-23 | 2017-07-27 | Sanden Holdings Corporation | Scroll type fluid machine |
CN107420301A (zh) * | 2017-06-28 | 2017-12-01 | 湖北维斯曼新能源科技有限公司 | 新型无油涡旋真空泵 |
FR3053090A1 (fr) * | 2016-06-23 | 2017-12-29 | Valeo Japan Co Ltd | Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage. |
US9885358B2 (en) * | 2010-04-16 | 2018-02-06 | Air Squared, Inc. | Three stage scroll vacuum pump |
KR101869386B1 (ko) * | 2016-10-14 | 2018-06-20 | 주식회사 벡스코 | 냉각식 진공펌프 |
DE102018107276A1 (de) * | 2017-03-31 | 2018-10-04 | Kabushiki Kaisha Toyota Jidoshokki | Elektrischer Kompressor |
US20190120237A1 (en) * | 2017-10-25 | 2019-04-25 | Shimadzu Corporation | Vacuum pump |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19913593B4 (de) | 1999-03-24 | 2004-09-23 | Ilmvac Gmbh | Gesteuerter Pumpstand |
JP2003120529A (ja) * | 2001-10-17 | 2003-04-23 | Toyota Industries Corp | 真空ポンプにおけるガス供給装置 |
DE102005042451B4 (de) | 2005-09-06 | 2007-07-26 | Vacuubrand Gmbh + Co Kg | Vakuumpumpvorrichtung |
DE102006050943B4 (de) * | 2006-10-28 | 2020-04-16 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und Verfahren zum Betrieb derselben |
DE102012220442A1 (de) | 2012-11-09 | 2014-05-15 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems |
EP3067560B1 (de) * | 2015-03-12 | 2020-11-18 | Pfeiffer Vacuum GmbH | Vakuumpumpe mit wenigstens einer Pumpstufe |
EP3153708B1 (de) | 2015-10-06 | 2019-07-17 | Pfeiffer Vacuum Gmbh | Scrollpumpe und verfahren zum betreiben einer scrollpumpe |
-
2019
- 2019-10-07 EP EP20200624.3A patent/EP3754200B1/de active Active
- 2019-10-07 EP EP19201749.9A patent/EP3647599B1/de active Active
Patent Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5102316A (en) * | 1986-08-22 | 1992-04-07 | Copeland Corporation | Non-orbiting scroll mounting arrangements for a scroll machine |
US5209653A (en) * | 1992-01-17 | 1993-05-11 | Spx Corporation | Vacuum pump |
US5743719A (en) * | 1995-07-21 | 1998-04-28 | Anest Iwata Corporation | Oil-free scroll vacuum pump having a gas ballast part |
EP0798463A2 (de) * | 1996-03-29 | 1997-10-01 | Anest Iwata Corporation | Ölfreie Spiralvakuumpumpe |
US5971725A (en) * | 1996-10-08 | 1999-10-26 | Varian, Inc. | Vacuum pumping device |
US20020025265A1 (en) * | 2000-08-29 | 2002-02-28 | Hideo Ikeda | Motor-driven compressors |
US7162797B2 (en) * | 2001-07-10 | 2007-01-16 | Kabushiki Kaisha Toyota Jidoshokki | Method of correcting imbalance of a scroll compressor |
US20050019169A1 (en) * | 2001-11-15 | 2005-01-27 | Hartmut Kriehn | Tempering method for a screw-type vacuum pump |
US20100223947A1 (en) * | 2006-01-30 | 2010-09-09 | Makoto Shibuya | Electric Compressor and Air Conditioning System for vehicle, Using the Electric Compressor |
US20100028185A1 (en) * | 2008-07-31 | 2010-02-04 | Hitachi Industrial Equipment Systems Co., Ltd. | Scroll Fluid Machine |
US9885358B2 (en) * | 2010-04-16 | 2018-02-06 | Air Squared, Inc. | Three stage scroll vacuum pump |
US9534506B2 (en) * | 2010-10-19 | 2017-01-03 | Edwards Japan Limited | Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump |
JP2013100760A (ja) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | 一体型ターボ分子ポンプ |
FR2985557A1 (fr) * | 2012-01-11 | 2013-07-12 | Valeo Japan Co Ltd | Excentrique balance comprenant une bague et un contrepoids bloques en rotation |
US20140219846A1 (en) * | 2013-02-06 | 2014-08-07 | Emerson Climate Technologies, Inc. | Capacity modulated scroll compressor |
US9341187B2 (en) * | 2013-08-30 | 2016-05-17 | Emerson Climate Technologies, Inc. | Compressor assembly with liquid sensor |
JP2015172358A (ja) * | 2014-03-12 | 2015-10-01 | エドワーズ株式会社 | 真空ポンプの制御装置とこれを備えた真空ポンプ |
US20170211390A1 (en) * | 2014-07-23 | 2017-07-27 | Sanden Holdings Corporation | Scroll type fluid machine |
CN204941844U (zh) * | 2015-09-10 | 2016-01-06 | 北京北仪优成真空技术有限公司 | 真空泵气镇阀装置及真空泵 |
FR3053090A1 (fr) * | 2016-06-23 | 2017-12-29 | Valeo Japan Co Ltd | Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage. |
KR101869386B1 (ko) * | 2016-10-14 | 2018-06-20 | 주식회사 벡스코 | 냉각식 진공펌프 |
DE102018107276A1 (de) * | 2017-03-31 | 2018-10-04 | Kabushiki Kaisha Toyota Jidoshokki | Elektrischer Kompressor |
CN107420301A (zh) * | 2017-06-28 | 2017-12-01 | 湖北维斯曼新能源科技有限公司 | 新型无油涡旋真空泵 |
US20190120237A1 (en) * | 2017-10-25 | 2019-04-25 | Shimadzu Corporation | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
EP3754200A2 (de) | 2020-12-23 |
EP3647599A2 (de) | 2020-05-06 |
EP3754200A3 (de) | 2021-02-17 |
EP3754200B1 (de) | 2021-12-08 |
EP3647599B1 (de) | 2021-12-22 |
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