EP3647599A3 - Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche - Google Patents

Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche Download PDF

Info

Publication number
EP3647599A3
EP3647599A3 EP19201749.9A EP19201749A EP3647599A3 EP 3647599 A3 EP3647599 A3 EP 3647599A3 EP 19201749 A EP19201749 A EP 19201749A EP 3647599 A3 EP3647599 A3 EP 3647599A3
Authority
EP
European Patent Office
Prior art keywords
pump
manufacturing same
scroll
vacuum pump
electronics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19201749.9A
Other languages
English (en)
French (fr)
Other versions
EP3647599A2 (de
EP3647599B1 (de
Inventor
Michael Willig
Jan Hofmann
Jonas Becker
Gernot Bernhardt
Verena Wangorsch
Stefan Kallenborn
Wolfgang Söhngen
Heiko Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=68210710&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3647599(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority to EP20200624.3A priority Critical patent/EP3754200B1/de
Priority to EP19201749.9A priority patent/EP3647599B1/de
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3647599A2 publication Critical patent/EP3647599A2/de
Publication of EP3647599A3 publication Critical patent/EP3647599A3/de
Priority to JP2020160698A priority patent/JP7220692B2/ja
Priority to EP22199874.3A priority patent/EP4095387A3/de
Priority to EP20198997.7A priority patent/EP3739166B1/de
Priority to EP22156933.8A priority patent/EP3974655B1/de
Priority to US17/063,912 priority patent/US11773849B2/en
Publication of EP3647599B1 publication Critical patent/EP3647599B1/de
Application granted granted Critical
Priority to JP2022178824A priority patent/JP2023025010A/ja
Priority to US18/449,111 priority patent/US20230383750A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10Outer members for co-operation with rotary pistons; Casings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/58Cooling; Heating; Diminishing heat transfer
    • F04D29/5813Cooling the control unit
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/50Pumps with means for introducing gas under pressure for ballasting
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/60Assembly methods
    • F04C2230/605Balancing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/805Fastening means, e.g. bolts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/808Electronic circuits (e.g. inverters) installed inside the machine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/81Sensor, e.g. electronic sensor for control or monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/18Pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/19Temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

Die Erfindung betrifft unter anderem eine Vakuumpumpe, insbesondere Scrollpumpe, mit einem Elektronikgehäuse, in dem eine oder mehrere Elektronikkomponenten angeordnet sind, wobei innerhalb des Elektronikgehäuses für wenigstens eine Elektronikkomponente eine gesonderte Kammer vorgesehen ist, in der die Elektronikkomponente vergossen ist.
EP19201749.9A 2019-10-07 2019-10-07 Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche Active EP3647599B1 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
EP20200624.3A EP3754200B1 (de) 2019-10-07 2019-10-07 Scrollvakuumpumpe und montageverfahren
EP19201749.9A EP3647599B1 (de) 2019-10-07 2019-10-07 Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche
JP2020160698A JP7220692B2 (ja) 2019-10-07 2020-09-25 真空ポンプ、スクロールポンプ及びその製造方法
EP22156933.8A EP3974655B1 (de) 2019-10-07 2020-09-29 Scrollvakuumpumpe und ihr herstellungsverfahren
EP20198997.7A EP3739166B1 (de) 2019-10-07 2020-09-29 Scrollvakuumpumpe und ihr herstellungsverfahren
EP22199874.3A EP4095387A3 (de) 2019-10-07 2020-09-29 Scrollvakuumpumpe mit integriertem drucksensor
US17/063,912 US11773849B2 (en) 2019-10-07 2020-10-06 Vacuum pump, scroll pump, and manufacturing method for such
JP2022178824A JP2023025010A (ja) 2019-10-07 2022-11-08 真空ポンプ、スクロールポンプ及びその製造方法
US18/449,111 US20230383750A1 (en) 2019-10-07 2023-08-14 Vacuum pump, scroll pump, and manufacturing method for such

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19201749.9A EP3647599B1 (de) 2019-10-07 2019-10-07 Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche

Related Child Applications (3)

Application Number Title Priority Date Filing Date
EP20200624.3A Division EP3754200B1 (de) 2019-10-07 2019-10-07 Scrollvakuumpumpe und montageverfahren
EP20200624.3A Division-Into EP3754200B1 (de) 2019-10-07 2019-10-07 Scrollvakuumpumpe und montageverfahren
EP20184951.0 Division-Into 2020-07-09

Publications (3)

Publication Number Publication Date
EP3647599A2 EP3647599A2 (de) 2020-05-06
EP3647599A3 true EP3647599A3 (de) 2020-07-22
EP3647599B1 EP3647599B1 (de) 2021-12-22

Family

ID=68210710

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20200624.3A Active EP3754200B1 (de) 2019-10-07 2019-10-07 Scrollvakuumpumpe und montageverfahren
EP19201749.9A Active EP3647599B1 (de) 2019-10-07 2019-10-07 Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP20200624.3A Active EP3754200B1 (de) 2019-10-07 2019-10-07 Scrollvakuumpumpe und montageverfahren

Country Status (1)

Country Link
EP (2) EP3754200B1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3708840A3 (de) * 2020-07-22 2021-03-10 Pfeiffer Vacuum Technology AG Rückschlagventil, vakuumgerät und vakuumpumpe
DE102020128369A1 (de) * 2020-10-28 2022-04-28 Leybold Gmbh Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe
EP4219947A3 (de) 2023-06-15 2024-02-07 Pfeiffer Vacuum Technology AG Scrollpumpe mit optimierter spiralgeometrie
EP4234932A3 (de) 2023-06-15 2024-01-17 Pfeiffer Vacuum Technology AG Scrollpumpe mit verbessertem zugang zum ansaugbereich zu montagezwecken
EP4253720A3 (de) 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe und scrollvakuumpumpen-system

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102316A (en) * 1986-08-22 1992-04-07 Copeland Corporation Non-orbiting scroll mounting arrangements for a scroll machine
US5209653A (en) * 1992-01-17 1993-05-11 Spx Corporation Vacuum pump
EP0798463A2 (de) * 1996-03-29 1997-10-01 Anest Iwata Corporation Ölfreie Spiralvakuumpumpe
US5743719A (en) * 1995-07-21 1998-04-28 Anest Iwata Corporation Oil-free scroll vacuum pump having a gas ballast part
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US20020025265A1 (en) * 2000-08-29 2002-02-28 Hideo Ikeda Motor-driven compressors
US20050019169A1 (en) * 2001-11-15 2005-01-27 Hartmut Kriehn Tempering method for a screw-type vacuum pump
US7162797B2 (en) * 2001-07-10 2007-01-16 Kabushiki Kaisha Toyota Jidoshokki Method of correcting imbalance of a scroll compressor
US20100028185A1 (en) * 2008-07-31 2010-02-04 Hitachi Industrial Equipment Systems Co., Ltd. Scroll Fluid Machine
US20100223947A1 (en) * 2006-01-30 2010-09-09 Makoto Shibuya Electric Compressor and Air Conditioning System for vehicle, Using the Electric Compressor
JP2013100760A (ja) * 2011-11-08 2013-05-23 Shimadzu Corp 一体型ターボ分子ポンプ
FR2985557A1 (fr) * 2012-01-11 2013-07-12 Valeo Japan Co Ltd Excentrique balance comprenant une bague et un contrepoids bloques en rotation
US20140219846A1 (en) * 2013-02-06 2014-08-07 Emerson Climate Technologies, Inc. Capacity modulated scroll compressor
JP2015172358A (ja) * 2014-03-12 2015-10-01 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ
CN204941844U (zh) * 2015-09-10 2016-01-06 北京北仪优成真空技术有限公司 真空泵气镇阀装置及真空泵
US9341187B2 (en) * 2013-08-30 2016-05-17 Emerson Climate Technologies, Inc. Compressor assembly with liquid sensor
US9534506B2 (en) * 2010-10-19 2017-01-03 Edwards Japan Limited Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump
US20170211390A1 (en) * 2014-07-23 2017-07-27 Sanden Holdings Corporation Scroll type fluid machine
CN107420301A (zh) * 2017-06-28 2017-12-01 湖北维斯曼新能源科技有限公司 新型无油涡旋真空泵
FR3053090A1 (fr) * 2016-06-23 2017-12-29 Valeo Japan Co Ltd Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage.
US9885358B2 (en) * 2010-04-16 2018-02-06 Air Squared, Inc. Three stage scroll vacuum pump
KR101869386B1 (ko) * 2016-10-14 2018-06-20 주식회사 벡스코 냉각식 진공펌프
DE102018107276A1 (de) * 2017-03-31 2018-10-04 Kabushiki Kaisha Toyota Jidoshokki Elektrischer Kompressor
US20190120237A1 (en) * 2017-10-25 2019-04-25 Shimadzu Corporation Vacuum pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19913593B4 (de) 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
JP2003120529A (ja) * 2001-10-17 2003-04-23 Toyota Industries Corp 真空ポンプにおけるガス供給装置
DE102005042451B4 (de) 2005-09-06 2007-07-26 Vacuubrand Gmbh + Co Kg Vakuumpumpvorrichtung
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
DE102012220442A1 (de) 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
EP3067560B1 (de) * 2015-03-12 2020-11-18 Pfeiffer Vacuum GmbH Vakuumpumpe mit wenigstens einer Pumpstufe
EP3153708B1 (de) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Scrollpumpe und verfahren zum betreiben einer scrollpumpe

Patent Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102316A (en) * 1986-08-22 1992-04-07 Copeland Corporation Non-orbiting scroll mounting arrangements for a scroll machine
US5209653A (en) * 1992-01-17 1993-05-11 Spx Corporation Vacuum pump
US5743719A (en) * 1995-07-21 1998-04-28 Anest Iwata Corporation Oil-free scroll vacuum pump having a gas ballast part
EP0798463A2 (de) * 1996-03-29 1997-10-01 Anest Iwata Corporation Ölfreie Spiralvakuumpumpe
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US20020025265A1 (en) * 2000-08-29 2002-02-28 Hideo Ikeda Motor-driven compressors
US7162797B2 (en) * 2001-07-10 2007-01-16 Kabushiki Kaisha Toyota Jidoshokki Method of correcting imbalance of a scroll compressor
US20050019169A1 (en) * 2001-11-15 2005-01-27 Hartmut Kriehn Tempering method for a screw-type vacuum pump
US20100223947A1 (en) * 2006-01-30 2010-09-09 Makoto Shibuya Electric Compressor and Air Conditioning System for vehicle, Using the Electric Compressor
US20100028185A1 (en) * 2008-07-31 2010-02-04 Hitachi Industrial Equipment Systems Co., Ltd. Scroll Fluid Machine
US9885358B2 (en) * 2010-04-16 2018-02-06 Air Squared, Inc. Three stage scroll vacuum pump
US9534506B2 (en) * 2010-10-19 2017-01-03 Edwards Japan Limited Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump
JP2013100760A (ja) * 2011-11-08 2013-05-23 Shimadzu Corp 一体型ターボ分子ポンプ
FR2985557A1 (fr) * 2012-01-11 2013-07-12 Valeo Japan Co Ltd Excentrique balance comprenant une bague et un contrepoids bloques en rotation
US20140219846A1 (en) * 2013-02-06 2014-08-07 Emerson Climate Technologies, Inc. Capacity modulated scroll compressor
US9341187B2 (en) * 2013-08-30 2016-05-17 Emerson Climate Technologies, Inc. Compressor assembly with liquid sensor
JP2015172358A (ja) * 2014-03-12 2015-10-01 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ
US20170211390A1 (en) * 2014-07-23 2017-07-27 Sanden Holdings Corporation Scroll type fluid machine
CN204941844U (zh) * 2015-09-10 2016-01-06 北京北仪优成真空技术有限公司 真空泵气镇阀装置及真空泵
FR3053090A1 (fr) * 2016-06-23 2017-12-29 Valeo Japan Co Ltd Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage.
KR101869386B1 (ko) * 2016-10-14 2018-06-20 주식회사 벡스코 냉각식 진공펌프
DE102018107276A1 (de) * 2017-03-31 2018-10-04 Kabushiki Kaisha Toyota Jidoshokki Elektrischer Kompressor
CN107420301A (zh) * 2017-06-28 2017-12-01 湖北维斯曼新能源科技有限公司 新型无油涡旋真空泵
US20190120237A1 (en) * 2017-10-25 2019-04-25 Shimadzu Corporation Vacuum pump

Also Published As

Publication number Publication date
EP3754200A2 (de) 2020-12-23
EP3647599A2 (de) 2020-05-06
EP3754200A3 (de) 2021-02-17
EP3754200B1 (de) 2021-12-08
EP3647599B1 (de) 2021-12-22

Similar Documents

Publication Publication Date Title
EP3647599A3 (de) Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche
BR112017017865A2 (pt) compressor espiral
EP3926138A3 (de) Verfahren zur beurteilung der zuverlässigkeit von hydraulisch betätigten vorrichtungen und zugehörige systeme
MX2018003305A (es) Composicion, junta roscada para tuberias incluyendo recubrimiento lubricante solido formado a partir de la composicion y metodo para producir la junta roscada para tuberias.
SG138546A1 (en) Component of variable thickness having residual compressive stresses therein, and method therefor
SG11201810964UA (en) Sputtering target and production method therefor
EP3578334A3 (de) Innenraumkomponente eines fahrzeugs
EP3719319A3 (de) Verdichter
CO2022004699A2 (es) Composición mejorada
EP3572669A3 (de) Anschlussbaugruppe mit speisepumpe und elastischem element
EP4273403A3 (de) Rotorpaar für einen verdichterblock einer schraubenmaschine
MX2020014007A (es) Sistema para prensaestopas lubricado de doble sello y camisa rotatoria.
EP2690327A3 (de) Hydraulisches Wegeventil
EP2937593A3 (de) Gasdruckfeder
FR3032997B1 (fr) Lame de decoration d’une menuiserie et son procede de fabrication
WO2020249658A8 (en) Extruder screw handling device
CN105443735A (zh) 一种通气帽以及减速机
BR112017002009A2 (pt) revestimento de bomba para uma bomba centrífuga e método para produzir uma parte lateral de um revestimento de bomba para uma bomba centrífuga
EP3617511A3 (de) Scrollpumpen und herstellungsverfahren für solche
LU100831B1 (de) Kreiselpumpe mit einem Pumpengehäuse
DE1243816B (de) Mehrstufige Drehkolbenvakuumpumpe vom Rootstyp
MX2022007408A (es) Paneles de yeso, asi como un kit y un metodo para construir un panel de yeso.
WO2020005185A3 (en) Centrifugal pump impeller
DE102014001722B4 (de) Filtergehäuse und Fluidfilter
KR20180079514A (ko) 오일펌프용 릴리프 밸브의 플런저 테이퍼부의 각도 설계 방법

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

RIC1 Information provided on ipc code assigned before grant

Ipc: F04C 25/02 20060101ALI20200615BHEP

Ipc: F04D 19/04 20060101AFI20200615BHEP

Ipc: F01C 21/10 20060101ALI20200615BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20201202

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20210215

RIN1 Information on inventor provided before grant (corrected)

Inventor name: SCHAEFER, HEIKO

Inventor name: SOEHNGEN, WOLFGANG

Inventor name: BECKER, JONAS

Inventor name: BERNHARDT, GERNOT

Inventor name: WANGORSCH, VERENA

Inventor name: HOFMANN, JAN

Inventor name: KALLENBORN, STEFAN

Inventor name: WILLIG, MICHAEL

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20210831

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502019003050

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1457256

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220115

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220322

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220322

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220323

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220422

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

REG Reference to a national code

Ref country code: DE

Ref legal event code: R026

Ref document number: 502019003050

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220422

PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

26 Opposition filed

Opponent name: EDWARDS LIMITED

Effective date: 20220922

PLAX Notice of opposition and request to file observation + time limit sent

Free format text: ORIGINAL CODE: EPIDOSNOBS2

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PLBB Reply of patent proprietor to notice(s) of opposition received

Free format text: ORIGINAL CODE: EPIDOSNOBS3

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20221031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221007

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221031

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221031

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221007

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231020

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20231026

Year of fee payment: 5

Ref country code: CZ

Payment date: 20231004

Year of fee payment: 5

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20191007

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20231227

Year of fee payment: 5

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222