EP3032106A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3032106A1
EP3032106A1 EP15177253.0A EP15177253A EP3032106A1 EP 3032106 A1 EP3032106 A1 EP 3032106A1 EP 15177253 A EP15177253 A EP 15177253A EP 3032106 A1 EP3032106 A1 EP 3032106A1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
vacuum pump
pump
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15177253.0A
Other languages
German (de)
English (en)
Other versions
EP3032106B1 (fr
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102014118083.6A external-priority patent/DE102014118083A1/de
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15177253.0A priority Critical patent/EP3032106B1/fr
Priority to JP2015238692A priority patent/JP6138897B2/ja
Publication of EP3032106A1 publication Critical patent/EP3032106A1/fr
Application granted granted Critical
Publication of EP3032106B1 publication Critical patent/EP3032106B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump.
  • An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft, on which a plurality of rotor disks are arranged offset axially.
  • a respective rotor disk has a plurality of circumferentially distributed rotor blades.
  • the exemplary turbomolecular pump comprises a stator with a plurality of stator disks, each of which comprises a plurality of circumferentially distributed stator blades.
  • the rotor disks and the stator disks are alternately arranged in the axial direction.
  • the exemplary turbomolecular pump has certain vacuum performance values, such as e.g. Suction and compression ratio, which are set at a target speed of the rotor.
  • vacuum performance values such as e.g. Suction and compression ratio
  • customer requirements in terms of vacuum performance can vary greatly. In practice, therefore, many different vacuum pump models are maintained for different requirements, or a vacuum pump is elaborately designed to meet specific requirements or even specifically developed accordingly.
  • a vacuum pump according to claim 1 in an axial region of the rotor, in the no at least one pure rotor region is provided, in which at least two rotor sections succeed each other without an intermediate stator section, and / or at least one pure stator section is provided in which at least two stator sections follow one another without an intervening rotor section.
  • stator or rotor sections are intentionally omitted in relation to a pump structure not according to the invention.
  • the rotor and stator sections are, in particular, so-called rotor or stator disks, each of which has a plurality of rotor blades or stator blades distributed in the circumferential direction and insofar have a disk shape in that they have a height measured in the axial direction, which is smaller and in particular much smaller than their diameter.
  • the rotor and stator sections are in particular stacked one above the other, alternating in the prior art, i. a rotor disk follows a stator disk and vice versa.
  • an exemplary turbomolecular pump with alternately arranged rotor and stator sections is used, as is known per se in the prior art.
  • This turbomolecular pump has certain vacuum technical performance values. If requirements now apply to the turbomolecular pump, which deviate from the vacuum-related performance values of the pump, for example are lower, only individual or several rotor and / or stator sections are removed or omitted during assembly. As a result, the power values of the pump which are possible within the framework of the design of the turbomolecular pump are indeed changed, for example reduced. However, this allows the requirements to be met in a very simple manner, while the pump does not have to be changed constructively.
  • stator section in the vacuum pump also fulfills structural tasks in addition to its vacuum-related function
  • stator section may be replaced by a replacement part for the structural tasks, such as e.g. a spacer, are replaced in the pure rotor area.
  • a replacement part for the structural tasks such as e.g. a spacer
  • an axial spacing can therefore be provided between the two rotor sections of the pure rotor region.
  • the vacuum pump has at least one lateral tap.
  • the side tap is different from an inlet and an outlet of the vacuum pump.
  • the invention can be used selectively in this embodiment in order to individually set the vacuum-related performance values of pump areas in front of and behind the tap.
  • the achievable pressure in a chamber connected to the lateral tap in which e.g. a larger amount of residual gas is allowed or desired, can be adjusted.
  • a complex design change of the vacuum pump is not necessary.
  • the lateral tap may be provided in at least a portion of the rotor.
  • the lateral tap may be arranged between an inlet and an outlet of the vacuum pump.
  • the pure rotor region can be arranged in the axial direction immediately before or behind the lateral tap or near a lateral tap.
  • the vacuum pump can also have no lateral tap.
  • a stator section is arranged in the axial direction between the first rotor section in the pumping direction and the second rotor section in the pumping direction.
  • the rotor sections are each formed by a rotor disk produced separately from the rotor shaft and fastened to the rotor shaft. In other words, it can therefore be a disk rotor.
  • a solid rotor may be provided, in which the rotor sections are integrally connected to the rotor shaft.
  • the vacuum pump shown as a turbomolecular pump 10 comprises an inlet 30 surrounded by an inlet flange 31 and a plurality of pumping stages for conveying the gas present at the inlet 30 to an outlet.
  • the outlet is in Fig. 1 not shown (but see, for example, the outlet 32 of in Fig. 2 illustrated pump).
  • the turbomolecular pump 10 has no lateral tap.
  • the turbomolecular pump 10 comprises a stator with a static housing 36 and a rotor 12 arranged in the housing 36 with a rotor shaft 14 rotatably mounted about a rotation axis R.
  • the turbomolecular pump 10 comprises a plurality of pump-connected with each other in series turbomolecular pumping stages with a plurality of connected to the rotor shaft 14, formed as a turbomolecular rotor disks 16 rotor sections and a plurality of axially between the rotor disks 16 and arranged in the housing 36, designed as a turbomolecular stator 22 stator sections by spacer rings 40 in a desired axial distance are held each other.
  • the rotor disks 16 and stator disks 22 provide an axial pumping action directed in the pumping direction P in a scooping region.
  • the turbomolecular pump 10 also comprises three Holweck pump stages, which are arranged one inside the other in the radial direction and pump-connected with one another in series.
  • the rotor-side part of the Holweck pump stages comprises two cylinder jacket-shaped Holweck rotor sleeves 46, 48 fastened to and carried by the rotor shaft 14, which are oriented coaxially with the axis of rotation R and are nested one inside the other.
  • two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the rotation axis R and nested in one another.
  • the pump-active surfaces of the Holweck pump stages are in each case formed by the radial lateral surfaces which lie opposite one another with the formation of a narrow radial Holweck gap, namely in each case a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52.
  • one of the pump-active surfaces is smooth, in the present case, for example, the Holweck rotor sleeve 46 and 48, wherein the opposite pump-active surface of the respective Holweck stator 50 and 52 structuring with helical about the axis of rotation R around in the axial direction extending grooves, in which the gas is driven by the rotation of the rotor 12 and thereby pumped.
  • the rotatable mounting of the rotor shaft 14 is effected by a rolling bearing 54 in the region of the outlet and a permanent magnet bearing 56 in the region of the inlet 30.
  • the permanent magnet bearing 56 comprises a rotor-side bearing half 60 and a stator-side bearing half 58, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings, wherein the magnetic rings facing each other with formation of a radial bearing gap.
  • an emergency or catch bearing 62 is provided, which is designed as an unlubricated rolling and idle in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor 12 with respect to the stator engages to a radial stop for the rotor 12, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection nut 64 is provided on the rotor shaft 14 with an outer diameter increasing towards the rolling bearing 54, which is provided with a scraper of a plurality with a working medium, such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact.
  • a working medium such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact.
  • the resource is transferred by capillary action from the resource reservoir via the scraper to the rotating spray nut 64 and due to the centrifugal force along the spray nut 64 in the direction of increasing outer diameter of the spray nut 64 to the rolling bearing 54 promoted where it is e.g. fulfills a lubricating function.
  • the turbomolecular pump 10 includes a drive motor 68 for rotatably driving the rotor whose rotor is formed by the rotor shaft 14.
  • a control unit not shown, controls the drive motor 68.
  • the turbomolecular group 10 of Fig. 1 comprises a pure rotor region 28 and a pure stator region 29.
  • the pure rotor region 28 two rotor disks 16 follow each other without an intervening stator disk 22.
  • a stator disk 22 is missing between the rotor disks 16.
  • two stator disks 22 follow without an intervening rotor disk 16 on each other. Accordingly, here a rotor disk 16 between the stator disks 22 is missing.
  • the two rotor disks 16 in the pure rotor region 28 and the two stator disks 22 in the pure stator region 29 are each arranged at an axial distance from one another.
  • a respective stator disk 22 is designed in the form of two half-rings, which can be placed between the rotor disks 16 from the side, that is to say in the radial direction.
  • the stator discs 22 are placed on the spacers 40 and supported by them. Individual stator disks 22 can thereby be removed or omitted particularly simply in order to adapt the turbomolecular pump 10 to specific requirements in terms of its vacuum-related performance.
  • FIG. 2 another turbomolecular pump 10 is shown, however, which has a lateral tap 26.
  • the lateral tap 26 is provided for connection to an additional, not shown, vacuum chamber in which a vacuum of a different quality is to be set than is the case in a chamber connected to the inlet 30.
  • the lateral tap 26 defines a tapping portion 34 of the rotor 12, in which the lateral tap 26 opens.
  • no stator disks 22 are arranged in the tapping region 34.
  • a large axial distance is provided, which corresponds essentially to the axial extent of the tapping region 34.
  • the tapping region 34 is therefore kept free of pump-active elements.
  • Gas entering the pump via the lateral tap 26 is pumped in the pumping direction P - in Fig. 2 So down - pumped further and finally reaches an outlet 32.
  • a pure rotor region 28 is provided in an axial region of the rotor 12 into which no lateral tapping opens.
  • the pure rotor region 28 here comprises three successive rotor disks 16 without intermediate stator disks 22.
  • the pure rotor region 28 is arranged in the pumping direction P immediately before the tapping region 34.
  • a stator disk 22 is arranged between the first rotor disk 16 and the second rotor disk 16.
  • the turbomolecular pump 10 has alternately arranged rotor disks 16 and stator disks 22 in the axial direction.
  • FIG. 3 another turbomolecular pump 10 is shown with a lateral tap.
  • the lateral tap defines a tap region 34 in which no stator disks 22 are arranged.
  • a pure rotor region 28 is provided, in which likewise no stator disks 22 are arranged.
  • a stator disk 22 is arranged between the first pair of rotor disks 16 in the pumping direction.
  • rotor disks 16 and stator disks 22 are provided in the alternating arrangement known per se.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP15177253.0A 2014-12-08 2015-07-17 Pompe à vide Active EP3032106B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15177253.0A EP3032106B1 (fr) 2014-12-08 2015-07-17 Pompe à vide
JP2015238692A JP6138897B2 (ja) 2014-12-08 2015-12-07 真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014118083.6A DE102014118083A1 (de) 2014-12-08 2014-12-08 Turbomolekularpumpe
EP15177253.0A EP3032106B1 (fr) 2014-12-08 2015-07-17 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3032106A1 true EP3032106A1 (fr) 2016-06-15
EP3032106B1 EP3032106B1 (fr) 2020-02-12

Family

ID=57003097

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15177253.0A Active EP3032106B1 (fr) 2014-12-08 2015-07-17 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3032106B1 (fr)
JP (1) JP6138897B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4293232A1 (fr) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pompe

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (fr) * 1959-12-17
JPH09303288A (ja) * 1996-05-16 1997-11-25 Daikin Ind Ltd ターボ分子ポンプの翼
EP1201928A2 (fr) * 2000-10-24 2002-05-02 Pfeiffer Vacuum GmbH Disques pour pompe turbomoléculaire
WO2005033521A1 (fr) * 2003-09-30 2005-04-14 The Boc Group Plc Pompe a vide
EP1850011A2 (fr) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Disque de rotor ou de stator pour une pompe moléculaire
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03237295A (ja) * 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (fr) * 1959-12-17
JPH09303288A (ja) * 1996-05-16 1997-11-25 Daikin Ind Ltd ターボ分子ポンプの翼
EP1201928A2 (fr) * 2000-10-24 2002-05-02 Pfeiffer Vacuum GmbH Disques pour pompe turbomoléculaire
WO2005033521A1 (fr) * 2003-09-30 2005-04-14 The Boc Group Plc Pompe a vide
EP1850011A2 (fr) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Disque de rotor ou de stator pour une pompe moléculaire
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4293232A1 (fr) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pompe

Also Published As

Publication number Publication date
JP2016109137A (ja) 2016-06-20
JP6138897B2 (ja) 2017-05-31
EP3032106B1 (fr) 2020-02-12

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