EP2402613B1 - Trockenvakuumpumpe - Google Patents

Trockenvakuumpumpe Download PDF

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Publication number
EP2402613B1
EP2402613B1 EP11171594.2A EP11171594A EP2402613B1 EP 2402613 B1 EP2402613 B1 EP 2402613B1 EP 11171594 A EP11171594 A EP 11171594A EP 2402613 B1 EP2402613 B1 EP 2402613B1
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EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
reservoir
return channel
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP11171594.2A
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English (en)
French (fr)
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EP2402613A1 (de
Inventor
Stéphane Crochet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
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Publication of EP2402613A1 publication Critical patent/EP2402613A1/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F01C19/005—Structure and composition of sealing elements such as sealing strips, sealing rings and the like; Coating of these elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/04—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents of internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/021—Control systems for the circulation of the lubricant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/809—Lubricant sump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S418/00—Rotary expansible chamber devices
    • Y10S418/01—Non-working fluid separation

Definitions

  • the present invention relates to a dry type vacuum pump comprising a lubricant seal device mounted between a lubricated bearing and a pumping stage.
  • the invention applies in particular to a dry type vacuum pump comprising two rotary lobes type "Roots" or “Claw", or type spiral or screw or another similar principle.
  • these pumps comprise one or more series pumping stages in which circulates a gas to be pumped between an intake inlet and a discharge outlet.
  • vacuum pumps rotary lobes also known as “Roots” with two or three lobes or double-billed, also known as "Claw”.
  • the rotary lobe pumps comprise two rotors of identical profiles, rotating inside a stator in opposite directions. During rotation, the gas to be pumped is trapped in the free space between the rotors and the stator, and is driven by the rotor to the next stage or after the last stage discharge outlet. The operation is carried out without any mechanical contact between the rotors and the stator, which allows the total absence of oil in the pumping stages.
  • the rotors are carried by rotary shafts supported by lubricated bearings of a motor drive compartment at the end of the shaft.
  • This motor drive compartment is isolated from the pumping stages by a lubricant sealing device through which the rotating shafts are always rotatable.
  • Lubricant sealing devices are already known comprising a lubricant baffle and a so-called rubbing annular seal.
  • the lubricant baffle is mounted on the rotating shaft between the lubricated bearings and the friction ring seal, and rotates solidarily with the rotating shaft in operation.
  • the deflector deflects the lubricant by the effect of centrifugal force and returns it to the bottom of the engine drive compartment via a small pipe whose inlet is disposed opposite the end of the lubricant baffle and the outlet opens to the bottom of the compartment motor drive.
  • This device keeps the lubricant confined in the engine drive compartment.
  • the rubbing annular seal forms a second safety in the event that lubricant residues still pass through the lubricant baffle.
  • Document is also known FR 2 920 207 , a sealing device that uses the effect of centrifugal force to separate the lubricating fluids from the pumped gas.
  • WO 2008/142437 discloses a dry type vacuum pump whose lubricated bearing includes a first lubricant reservoir and a lubricant gap.
  • the vacuum pump also has a second reservoir for recovering the lubricant projected by the spark gap.
  • This second tank has an outlet connected to a lubricant return channel in the first tank.
  • One of the aims of the present invention is to provide a dry type vacuum pump comprising a lubricant seal device mounted between a lubricated bearing and a pumping stage whose life is increased.
  • the vacuum pump includes a second reservoir having a second supply of liquid lubricant, the second reservoir being separated from the first reservoir by a partition wall having a communication hole communicating the first and second reserves of liquid lubricant.
  • a lubricant return channel having an inlet facing said lubricant baffle, opens into the second volume of the second reservoir, above the second reserve of liquid lubricant.
  • the first volume containing the lubricated bearing and the lubricant gap, has a scrambled internal atmosphere of a mixture of gas and lubricant, created in particular by the rotation of the lubricant gap which allows the lubrication of the bearings of the vacuum pump.
  • This environment is separated by the partition wall, the atmosphere of the second tank, into which the lubricant return channel.
  • the second tank does not contain a lubricant gap, nor any other rotating element in operation during operation of the vacuum pump, has a calm gas atmosphere above the liquid lubricant, without lubricant mist, the liquid and gaseous phases being well separated from each other.
  • the lubricant when lubricant mist is drawn from the lubricated bearing to the pumping stage, the lubricant is deflected by the lubricant baffle into the lubricant return channel by the effect of the centrifugal force until it flows into the liquid lubricant reserve of the second insulated tank. Then, during pressure balancing phases where the pressure of the lubricated bearing is greater than the pressure of the pumping stage, the lubricant dropped to the bottom of the reservoir in the second reserve of lubricant at a level lower than the mouth lubricant return channel, can not go up in it.
  • Said second reservoir and said lubricant return channel are for example formed in the housing of a motor drive compartment of said vacuum pump.
  • the conductance of the shaft passage of said partition wall and the conductance at the mouth of the lubricant return channel are calibrated to direct a flow of gas in the lubricant return channel from the second volume to the lubricant baffle. .
  • the difference between the diameter of the shaft passage of the partition wall and the diameter of the rotary shaft is less than 3 millimeters, preferably of the order of 2 millimeters.
  • the dimension of the internal diameter of the mouth of the lubricant return channel is less than 5 millimeters, preferably of the order of 4 millimeters.
  • An annular groove may be provided in the housing facing a peripheral end of the lubricant baffle, said annular groove communicating with the inlet of said lubricant return channel.
  • the vacuum pump comprises two rotary shafts supported by a respective lubricated bearing.
  • Said lubricant return channel may then comprise a first channel portion associated with a first lubricated bearing, a second channel portion associated with a second lubricated bearing and a channel portion common to said first and second channel portion, to maintain a lubricant balance on the two lubricated bearings.
  • the lubricant return channel comprises a groove communicating between said first channel portion and said second channel portion and said lubricant return channel comprises a connecting member assembling on said communicating groove and opening with a tube of junction.
  • Said connecting member may comprise a plate closing said communicating groove and an eccentric junction tube projecting perpendicularly from said wafer.
  • FIGS. 1 to 6 illustrate an example embodiment of a dry type vacuum pump comprising two rotary lobe shafts of "Roots" type.
  • the invention is also applicable to other types of dry type vacuum pumps, such as "Claw” type, or such as spiral or screw type dry vacuum pumps or a another similar principle.
  • the vacuum pump 1 comprises one or more series pumping stages 2 in which circulates a gas to be pumped from an intake inlet to a discharge outlet (not visible).
  • Rotating shafts 3 (only one is visible on the figure 1 ) extend into the pumping stage 2 by rotary lobe rotors 4, and are driven on the discharge stage side into a motor drive compartment 5 of the vacuum pump 1.
  • the pumping stage 2 is called “dry” because in operation, the rotors 4 rotate inside the housing 6 in opposite directions without any mechanical contact between the rotors 4 and the casing 6 of the vacuum pump 1, which allows the total absence of lubricant.
  • the vacuum pump runs horizontally as shown on the figure 1 , that is to say that in operation of the vacuum pump, the rotating shafts 3 are substantially parallel to the ground plane.
  • the rotary shafts 3 are supported at the end of the shaft by two lubricated bearings, for example by grease at the suction stage (not visible) and two lubricated bearings 7a, 7b of the motor drive compartment 5 of the side of the discharge stage, for example lubricated with a liquid lubricant, such as oil.
  • the lubricated bearings 7a, 7b are provided with bearings 9 for guiding and supporting the rotary shafts 3.
  • the vacuum pump 1 comprises a motor (not shown), housed in the engine drive compartment 5, as well as gears (not shown) mounted on the respective rotary shafts 3 for synchronously driving a driving shaft and a driven shaft. .
  • the vacuum pump 1 comprises a first reservoir 28 having a first reserve of liquid lubricant 16a.
  • the first reservoir 28 is in communication with the lubricated bearing 7a in a first volume V1 (dashed on the figure 1 ).
  • the vacuum pump 1 also includes a lubricant gap 11, mounted on the driving rotary shaft 3 in the first reservoir 28, one end of the lubricant gap 11 immersed in the first supply of liquid lubricant 16a.
  • the lubricant gap 11 is for example in the form of a disc mounted coaxially with the rotary shaft 3. In operation, the rotation of the driving shaft 3 causes the rotation of the lubricant gap 11, thereby generating a lubricant mist in the bearings 7a, 7b, which allows the lubrication of the bearings 9 of the vacuum pump 1.
  • the vacuum pump 1 further comprises a lubricant sealing device for blocking the passage of lubricants from the engine drive compartment 5 to the pump stages 2.
  • the sealing device comprises a lubricant baffle 12 ( figures 1 and 5 ) and an annular seal 13 mounted on the respective rotary shaft 3, the annular seal 13 being mounted between the lubricant baffle 12 and the pumping stage 2 and the lubricant baffle 12 being mounted between the annular seal 13 and the bearing lubricated 7a, 7b.
  • the annular seal 13 is for example a double-lip rubbing annular seal.
  • the lubricant baffle 12 rotates integrally with the rotary shaft 3, which allows the lubricant and the particles coming from the lubricated bearing 7a, 7b to be deflected by centrifugation, for example towards an annular groove 14 formed in the body of the engine drive compartment. 5 facing the peripheral end of the lubricant baffle 12 (see more specifically the figures 1 and 5 ).
  • the lubricant deflector 12 is for example in the form of a disc mounted coaxially with the rotary shaft 3.
  • the vacuum pump 1 comprises a second reservoir 15 formed in the casing 6 of the vacuum pump 1, comprising a second reserve of liquid lubricant 16b, such as oil.
  • the second tank 15 is separated from the first tank 28 by a partition wall 20 having a communication hole 34 communicating the first and the second reserve of liquid lubricant 16a, 16b.
  • a lubricant return channel 17 of the vacuum pump 1 has an inlet 18 facing the lubricant deflector 12, for example in the annular groove 14.
  • the lubricant return channel 17 extends into the body casing of the motor drive compartment 5, under the lubricated bearings 7a, 7b, and opens through a mouth 19, in the second volume V2 of the second reservoir 15, above the second reserve of liquid lubricant 16b.
  • the first volume V1 containing the lubricated bearings 7a, 7b and the lubricant gap 11, has a scrambled internal atmosphere of a mixture of gas and lubricant, generally air lubricated with oil, created in particular by the rotation of the lubricant gap 11.
  • This environment is separated by the partition wall 20, the atmosphere of the second volume V2 of the second reservoir 15, into which the lubricant return channel 17 opens.
  • the second reservoir 15 does not contain a lubricant gap or any other rotating element in operation during operation of the pump vacuum 1, has a calm gas atmosphere above the liquid lubricant 16b, without lubricant mist, the liquid and gaseous phases being well separated from one another.
  • the housing of the motor drive compartment 5 comprises for example a motor stator 21, an oil sump 22, and an end plate 23 (or support HP (high pressure)) for example cast iron, flocking together and a partition wall separating the second volume V2 (filled with dotted lines on the figure 1 ) of the second tank 15 of the first volume V1 having the first reservoir 28 and the lubricated bearings 7a, 7b.
  • the partition wall 20 is for example integral with the oil sump 22 which assembles with the motor stator 21.
  • the assembly of the motor stator 21 and the oil sump 22 forms the second volume V2 having at the bottom the second reserve of liquid lubricant 16b.
  • the assembly is conventionally performed with an O-ring 24 and fixing means.
  • the motor stator 21 further comprises means 26 for cooling the motor with a refrigerant fluid. These means are partly concealed by a resin in which an axial housing 27 is formed in the axis of rotation of the drive shaft to accommodate the motor rotor (not shown).
  • the bottom of the first volume V1 formed by the oil sump 22 and the end flange 23 assembled comprises the first reserve of liquid lubricant 16a, for lubricating the rotary elements of the lubricated bearings 7a, 7b ( figures 3 and 5 ).
  • a filling orifice 30 at the top right of the oil sump communicating with the first volume V1.
  • the filling orifice 30 is closed by a plug 31.
  • the oil sump 22 also comprises a purge port 32 which is obstructed and communicates with the bottom 28 and an obstructed tank portion 33 for emptying the vacuum pump 1.
  • the partition wall 20 has a communication hole 34 below the set point N of the liquid lubricant for leveling the lubricating liquids of the first and second liquid lubricant reserves 16a, 16b.
  • the communication hole 34 is thus located below the mouth 19 of the lubricant fluid return channel 17. This ensures the level of liquid lubricant of the second reserve 16b at the same time as the level of liquid lubricant. the first reserve 16a by the filling means, purging, draining the oil sump 22.
  • the conductance of the shaft passage 35 of the partition wall 20 and the conductance at the mouth 19 of the lubricant return channel 17 are calibrated to direct a flow of gas in the lubricant return channel 17 from the second volume V2 to the lubricant baffle 12.
  • the conductance between the first V1 and the second volume V2 is defined by the space provided between the driving shaft 3 and the shaft passage 35 of the partition wall 20.
  • the difference between the diameter of the shaft passage 35 and the diameter of the rotary shaft 3 is less than 3 millimeters, preferably of the order of 2 millimeters.
  • the dimension of the internal diameter of the mouth 19 of the lubricant return channel 17 is less than 5 millimeters, preferably of the order of 4 millimeters.
  • the small space at the shaft passage 35 promotes an overpressure in the second volume V2 with respect to the first volume V1 and the low conductance of the lubricant return channel 17 promotes the acceleration of the dry gas in the return channel lubricating fluid 17, which allows the formation of the gas barrier at the lubricant baffle 12.
  • the lubricant return channel 17 can comprise a first channel portion 17a associated with the first lubricated bearing 7a, a second channel portion 17b associated with the second lubricated bearing 7b and a common channel portion 17c with the first and second channel portion 17a, 17b.
  • Each channel portion 17a, and 17b has an inlet located in the annular groove 14 facing the lubricant baffle 12 associated with the lubricated bearing 7a, 7b respective.
  • the lubricant fluid return channel 17 thus communicates between the first and second lubricated bearings 7a, 7b in order to maintain a lubricant balance on the two lubricated bearings 7a, 7b.
  • the lubricant return channel 17 has a communicating groove 36 between the first channel portion 17a and the second channel portion 17b.
  • the lubricant return channel 17 further comprises a connecting member 37 assembled on the communicating groove 36 and opening through a connecting tube 38.
  • the connecting member 37 comprises for example a wafer 39 closing the communicating groove 36 and a junction tube 38 eccentric from the middle of the wafer 39. protruding perpendicularly from the wafer 39.
  • the connecting tube 38 is eccentric to allow rotation of the rotating elements, such as the lubricant gap 11 of the lubricated bearing 7a of the driving shaft 3.
  • sealing device and liquid lubricant reservoirs arranged on the discharge side of the vacuum pump
  • the sealing device and the liquid lubricant reservoirs can be arranged on the suction side as well. end of the lower pressure stage, replacing lubrication with grease.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (8)

  1. Trockenvakuumpumpe, umfassend:
    - mindestens eine Pumpstufe (2),
    - mindestens eine rotierende Welle (3), die von einem geschmierten Lager (7a, 7b) getragen wird,
    - mindestens eine Ringdichtung (13), die auf der rotierenden Welle (3) montiert ist,
    - einen ersten Behälter (28), umfassend eine erste flüssiges Schmiermittel-Reserve (16a), wobei der erste Behälter (28) mit dem geschmierten Lager (7a, 7b) in einem ersten Volumen (V1) in Verbindung steht,
    - einen Schmiermittelverteiler, der auf der rotierenden Welle (3) in dem ersten Behälter (28) montiert ist, wobei ein Ende des Schmiermittelverteilers in der ersten flüssiges Schmiermittel-Reserve (16a) liegt,
    - einen zweiten Behälter (15), umfassend eine zweite flüssiges Schmiermittel-Reserve (16b), und
    - einen Schmiermittelrücklaufkanal (17), der in dem zweiten Volumen (V2) des zweiten Behälters (15) mündet,
    - mindestens einen Schmiermittelabweiser (12), der auf der rotierenden Welle montiert ist, wobei die Ringdichtung (13) zwischen dem Schmiermittelabweiser (12) und der Pumpstufe (2) montiert ist, wobei der Schmiermittelabweiser (12) zwischen dem geschmierten Lager (7a, 7b) und der Ringdichtung (13) montiert ist, wobei der zweite Behälter (15) vom ersten Behälter (28) durch eine Trennwand (20) getrennt ist, die ein Verbindungsloch (34) aufweist, das die erste und die zweite flüssiges Schmiermittel-Reserve (16a, 16b) in Verbindung bringt,
    dadurch gekennzeichnet, dass
    der Schmiermittelrücklaufkanal (17), von dem ein Eingang (18) sich gegenüber dem Schmiermittelabweiser (12) befindet, über der zweiten flüssigen Schmiermittelreserve (16b) des zweiten Volumens (V2) des zweiten Behälters (15) mündet.
  2. Vakuumpumpe nach Anspruch 1, bei der der zweite Behälter (15) und der Schmiermittelrücklaufkanal (17) in dem Gehäuse (6) eines Motorantriebsbereichs (5) der Vakuumpumpe (1) angeordnet sind.
  3. Vakuumpumpe nach einem der vorhergehenden Ansprüche, bei der die Dimension des Innendurchmessers der Mündung (19) des Schmiermittelrücklaufkanals (17) kleiner als 5 Millimeter ist.
  4. Vakuumpumpe nach einem der vorhergehenden Ansprüche, bei der die Abweichung zwischen dem Durchmesser des Wellendurchgangs (35) der Trennwand (20) und dem Durchmesser der rotierenden Welle (3) kleiner als 3 Millimeter ist.
  5. Vakuumpumpe nach einem der Ansprüche 1 bis 4, bei der eine Ringnut (14) in dem Gehäuse (6) gegenüber einem Umfangsende des Schmiermittelabweisers (12) angeordnet ist und mit dem Eingang (18) des Schmiermittelrücklaufkanals (17) in Verbindung steht.
  6. Vakuumpumpe nach einem der Ansprüche 1 bis 5, umfassend zwei rotierende Wellen (3), wobei die rotierenden Wellen (3) von einem jeweiligen geschmierten Lager (7a, 7b) getragen werden, und bei der der Schmiermittelrücklaufkanal (17) einen ersten Kanalabschnitt (17a), der einem ersten geschmierten Lager (7a) zugeordnet ist, einen zweiten Kanalabschnitt (17b), der einem zweiten geschmierten Lager (7b) zugeordnet ist, und einen gemeinsamen Kanalabschnitt (17c) des ersten und zweiten Kanalabschnitts (17a, 17b) umfasst.
  7. Vakuumpumpe nach Anspruch 6, bei der der Schmiermittelrücklaufkanal (17) eine Verbindungsnut (36) zwischen dem ersten Kanalabschnitt (17a) und dem zweiten Kanalabschnitt (17b) umfasst, und der Schmiermittelrücklaufkanal (17) ein Anschlusselement (37) umfasst, das sich mit der Verbindungsnut (36) verbindet und durch ein Verbindungsrohr (38) mündet.
  8. Vakuumpumpe nach Anspruch 7, bei der das Anschlusselement (37) eine Platte (39), die die Verbindungsnut (36) verschließt, und ein exzentrisches Verbindungsrohr (38) umfasst, das senkrecht auf die Platte (39) herausragt.
EP11171594.2A 2010-06-30 2011-06-27 Trockenvakuumpumpe Active EP2402613B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1002756A FR2962173B1 (fr) 2010-06-30 2010-06-30 Pompe a vide de type seche

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EP2402613B1 true EP2402613B1 (de) 2015-10-21

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US10204365B2 (en) 2010-07-07 2019-02-12 T-Mobile Usa, Inc. Managing service provider service options
DE202014007850U1 (de) * 2014-09-27 2016-01-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
IT201700096517A1 (it) * 2017-08-28 2019-02-28 Jurop S P A Compressore volumetrico con dispositivo di raccolta lubrificante
CN110761752B (zh) * 2019-11-21 2023-08-22 西安德林石油工程有限公司 一种天然气井口抽气增压方法以及装置
CN110761746B (zh) * 2019-11-21 2023-08-11 西安德林石油工程有限公司 一种气井排液方法以及装置
CN115434902B (zh) * 2022-11-07 2022-12-30 中国空气动力研究与发展中心超高速空气动力研究所 一种大流量高真空抽气***的设计方法
CN116006464B (zh) * 2023-02-03 2024-02-23 安徽应流机电股份有限公司 特殊风冷罗茨真空泵

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Publication number Priority date Publication date Assignee Title
US1696882A (en) * 1925-12-16 1928-12-25 Connersville Blower Co Blower
DE1939717B2 (de) * 1969-08-05 1978-03-23 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Waelzkolbenpumpe
DE3344953A1 (de) * 1983-12-13 1985-06-20 Leybold-Heraeus GmbH, 5000 Köln Zweiwellen-vakuumpumpe mit getrieberaum-evakuierung
US5044895A (en) * 1984-12-22 1991-09-03 Leybold Aktiengesellschaft Oil supply device for a rotary machine
JPS63158595U (de) * 1987-04-03 1988-10-18
JPH03130592A (ja) * 1989-10-12 1991-06-04 Anlet Co Ltd 内部洗浄可能な多段式ルーツ真空ポンプ
JPH0447189A (ja) * 1990-06-15 1992-02-17 Hitachi Ltd ドライスクリユー真空ポンプ
DE19736017A1 (de) * 1997-08-20 1999-02-25 Peter Frieden Trockenverdichtende Vakuumpumpe oder Kompressor
DE19820523A1 (de) * 1998-05-08 1999-11-11 Peter Frieden Schraubenspindel-Vakuumpumpe mit Rotorkühlung
JP5046379B2 (ja) * 2007-03-30 2012-10-10 アネスト岩田株式会社 オイルフリーロータリコンプレッサのロータ軸シール装置
GB0709529D0 (en) * 2007-05-18 2007-06-27 Boc Group Plc Vacuum pump
FR2920207B1 (fr) * 2007-08-23 2009-10-09 Alcatel Lucent Sas Pompe a vide de type seche comportant un dispositif d'etancheite aux fluides lubrifiants et elements centrifugeur equipant un tel dispositif

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KR101813281B1 (ko) 2018-01-30
JP5759800B2 (ja) 2015-08-05
US20120003105A1 (en) 2012-01-05
JP2012013074A (ja) 2012-01-19
CN102312837A (zh) 2012-01-11
FR2962173A1 (fr) 2012-01-06
FR2962173B1 (fr) 2012-08-03
US8858204B2 (en) 2014-10-14
CN102312837B (zh) 2015-08-19
EP2402613A1 (de) 2012-01-04
KR20120002490A (ko) 2012-01-05

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