EP2183508B1 - Trockene vakuumpumpe mit einer vorrichtung zur abdichtung gegen schmierfluide und an solch einer vorrichtung vorgesehenes zentrifugationselement - Google Patents

Trockene vakuumpumpe mit einer vorrichtung zur abdichtung gegen schmierfluide und an solch einer vorrichtung vorgesehenes zentrifugationselement Download PDF

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Publication number
EP2183508B1
EP2183508B1 EP08761080.4A EP08761080A EP2183508B1 EP 2183508 B1 EP2183508 B1 EP 2183508B1 EP 08761080 A EP08761080 A EP 08761080A EP 2183508 B1 EP2183508 B1 EP 2183508B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pump according
bearing
dry
stator
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EP08761080.4A
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English (en)
French (fr)
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EP2183508A1 (de
Inventor
Albert Cacard
François HOUZE
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Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
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Publication of EP2183508A1 publication Critical patent/EP2183508A1/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation

Definitions

  • the present invention relates to a dry type vacuum pump such as a rotary lobe vacuum pump, in particular of multi-stage type such as "Roots” or “Claw” type or such as a spiral vacuum pump. (“Scroll”) or like a screw vacuum pump.
  • a dry type vacuum pump such as a rotary lobe vacuum pump, in particular of multi-stage type such as "Roots” or “Claw” type or such as a spiral vacuum pump. (“Scroll”) or like a screw vacuum pump.
  • these pumps comprise one or more stages placed in series in which circulates a gas to be pumped between a gas inlet inlet and a gas discharge outlet.
  • the rotary lobe pumps “Roots” comprise two rotors of identical profiles, rotating inside a stator (pump body) in opposite directions. During rotation, the sucked gas is trapped in the free space between the rotors and the stator, then it is discharged by the exhaust. The operation is carried out without any mechanical contact between the rotors and the body of the pump, which allows the total absence of oil in the compression chamber.
  • “Claw” double-nose pumps also include two lobe rotors, rotating in opposite directions in a cylinder, sucking the gas and compressing it.
  • the shape of the lobes is particular to ensure dry compression.
  • the rotors are carried by rotary shafts supported by at least one lubricated bearing, for example with oil or by grease.
  • the rotation of the shafts in the bearings generates pollutants such as grease particles or drops of oil which, when subjected to pressure variations, can migrate to the pumping stages.
  • a shaft seal for a vacuum pump according to the preamble of claim 1 is disclosed in the document JP61-291795 .
  • the object of the present invention is therefore to provide a dry vacuum pump whose sealing device requires little or no maintenance operation on the pump, while ensuring that the pumping stages are free of oil or grease, and more particularly, free from mists or vapors of these lubricants.
  • the subject of the invention is a dry type vacuum pump comprising at least one rotary shaft supported by at least one lubricated bearing and at least one lubricant fluid sealing device capable of coming from said bearing for sealing at the shaft passage, the sealing device being mounted between the lubricated bearing and a dry pumping stage, characterized in that the said sealing device comprises a centrifugal element mounted integrally in rotation on the said shaft and comprising at least a through duct capable of separating the lubricant fluids from the fluid likely to flow from said bearing to the dry pumping stage.
  • the centrifuge element further comprises a filter body placed in the through conduit, such as, for example, a fibrous material.
  • the through pipe is located closer to the shaft than the circumferential surface of the centrifuge element.
  • the diameter of the orifice of the through pipe is greater on the bearing side than on the side of the dry pumping stage.
  • the through pipe has a truncated cone shape whose top is located on the side of the dry pumping stage.
  • a portion of the through pipe has a narrowing or that the through pipe is formed by a recess of the truncated cone-shaped centrifugal element whose axis of revolution coincides with the axis rotation of the centrifuge element and whose vertex communicates with a predefined number of orifices on the side of the pumping stage.
  • the conductance of the through-pipe is greater than the conductance of a peripheral passage of the fluid formed between the circumferential surface of the centrifuge element and the inner wall of the stator.
  • the sealing device comprises a check valve placed vis-à-vis the orifice of the through conduit located on the side of the pumping stage.
  • the non-return valve is preferably formed by a disc slidably mounted on the rotary shaft.
  • the peripheral passage has a labyrinth seal.
  • the labyrinth seal may have a plurality of rings mounted in the stator and the circumferential surface of the centrifuge element may have a plurality of corresponding grooves.
  • each ring is open and elastic to be mounted in the stator.
  • each ring at rest is greater than the diameter of the inner wall of the stator so that after insertion of the rings in the stator, they are pressed against the inner wall of the stator by the elastic force of the Ring.
  • the sealing device further comprises a deflector mounted on the shaft between the bearing and the centrifugal element.
  • the invention also relates to a lubricated fluid sealing device centrifugal element intended to be mounted integrally in rotation on a rotary shaft of dry type vacuum pump, between a lubricated bearing and a dry pumping stage, characterized in that it comprises at least one through pipe through which a fluid is able to flow from the bearing to the dry pumping stage to separate the lubricant fluids fluid.
  • the invention applies to a dry type vacuum pump comprising at least one rotary shaft supported by at least one lubricated bearing and at least one lubricant fluid sealing device capable of coming from the bearing for sealing at the level of the shaft passage, the sealing device being mounted between the lubricated bearing and a dry pumping stage.
  • a vacuum pump such as a vacuum pump comprising two rotary lobe shafts, in particular of multi-stage type, such as "Roots” or “Claw” type or of a similar principle, there are therefore four sealing devices at the four levels of the pump.
  • the invention also applies to any type of dry vacuum pump, such as spiral vacuum pumps or screw vacuum pumps.
  • the figure 1 represents a part of the vacuum pump 1 according to a first embodiment of the invention.
  • the inside of the stator 3 of the vacuum pump 1 comprises a bearing 5, a pumping stage 7 and a sealing device 9 to the lubricated fluids for the passage of a rotary shaft 11, mounted between the bearing 5 and the pumping stage 7.
  • the bearing 5 comprises a bearing 13 lubricated with a fluid, such as grease or oil.
  • a fluid such as grease or oil.
  • the bearing 5 is advantageously in communication with an oil sump (not shown) also distributing the oil to the gears of the shafts.
  • the shaft 11 rotatable about the axis of rotation 14 extends into the pump stage 7 where it carries a rotor 15 such as rotating lobes.
  • the pumping stage 7 is said to be “dry” because in operation, the rotors 15 rotate inside the stator 3 in opposite directions without any mechanical contact between the rotors 15 and the body 3 of the pump 1, which allows the total absence of oil.
  • the sealing device 9 greatly limits the passage of lubricating fluids such as grease or oil from the bearing 5 to the dry pumping stages 7 while allowing the shaft 11 to rotate when the vacuum pump 1 is in operation.
  • the sealing device 9 comprises a centrifugal element 17 integrally mounted in rotation on the shaft 11 and comprising at least one through conduit 19 capable of separating the lubricant fluids from the fluid likely to flow from the bearing 5 to the dry pumping stage 7.
  • the fluid capable of flowing from the bearing to the dry pumping stage comprises a mixture of lubricating fluid and gas.
  • the centrifugal element 17 will rotate at the same rotational speed as the shaft 11, for example at 6000 rpm for a primary vacuum pump Roots type.
  • the through pipe 19 carried by the centrifugal element 17 will also rotate about the axis of rotation 14 of the shaft 11 of the pump 1 and at the same speed of rotation.
  • the lubricant fluid in the form of mist, liquid or residual particles having a mass or a density greater than the gas, flowing in the through pipe 19, will be removed from the center 14 of the centrifugal element 17.
  • centrifugal force created by the rapid rotation of the centrifugal element 17 projects the lubricant fluids on the inner side faces 21 of the pipe 19, thus separating the lubricating fluid from the fluid by centrifugation.
  • the sealing device separates the mist and / or the vapor from the lubricant, from the fluid.
  • the diameter of the orifice 39 of the through pipe 19 is greater on the bearing side 5 than on the dry pump stage side 7.
  • a part of the through conduit 19 has a narrowing 53 formed by a recess of the centrifugal element 17 in the form of a truncated cone whose axis of revolution coincides with the axis of rotation 14 of the centrifugal element 17 and whose top communicates with a predefined number of orifices 39 on the side of the pumping stage 7.
  • the frustoconical shape will in particular allow, by the effect of centrifugal force, to guide the vapors and mists of lubricants trapped along the walls in order to evacuate them from the pipe 19.
  • the lubricated fluid is then directed to the base of the centrifuge element 17 allowing the sealing device to be self-cleaning.
  • the figure 2 represents a centrifugal element 17 having eight orifices 39 of through pipes 19 and an opening 25 in the center of the centrifugal element 17 for the passage of the shaft 11.
  • the centrifuge element 17 advantageously comprises a filter body placed in the through conduit 19, such as a fibrous material (not shown).
  • the fibrous material may for example be based on steel wool or glass wool.
  • the vapors and / or oil mist trapped in the filter body will also be projected towards the walls of the centrifugal element 17, and then guided towards the base thereof.
  • the filter body self-cleans.
  • the sealing device 9 comprises a deflector 27 mounted on the shaft 11 between the bearing 5 and the centrifugal element 17.
  • the deflector 27 makes it possible to modify the flow of the fluid coming from the bearing 5 to form a first means of coarse separation of the lubricants in the form of liquids, greases and particles originating from the bearing 5.
  • a corresponding groove 29 is provided in the stator 3 located opposite the peripheral end 31 of the deflector 27.
  • a channel (not shown) starts from the groove 29 and extends into the stator 3 of the pump 1.
  • This channel can communicate with the oil pan of lubricated bearings.
  • the lubricant flowing in the groove 29 is then driven into the channel and then to the oil sump.
  • the through pipe 19 is situated closer to the shaft 11 than to the circumferential surface 33 of the centrifugal element 17, as illustrated by FIG. figure 2 .
  • the complementary rolling effect is produced by a localized overpressure between the deflector 27 and the centrifugal element 17. It is due to the small space between the deflector 27 and the centrifugal element 17.
  • the rolling effect also makes it possible to reject the lubricants at the periphery of the deflector 27.
  • the conductance of the through conduit 19 is greater than the conductance of the peripheral passage of the fluid formed between the circumferential surface 33 of the centrifugal element 17 and the inner wall 35 of the stator 3.
  • the flow of the fluid is preferred through the through conduit 19 of the centrifuge element 17 rather than the periphery thereof, when the pressure on the bearing side 5 is higher.
  • the fluid is well filtered by the centrifugal element 17 and the pressure differential on either side of it is limited, the flow through the peripheral passage being very small in view of the high conductance.
  • the sealing device 9 comprises a non-return valve 37 vis-a-vis the orifice 39 of the through pipe 19, situated on the side of the pumping stage 7.
  • the position of the valve 37 makes it possible to orient the preferred path of the fluid as a function of the pressure differential.
  • the fluid When moved away from the orifice 39, the fluid preferably flows through the through conduit 19 since it has the largest conductance.
  • the fluid When pressed against the orifice 39, the fluid preferably flows through the peripheral passage of the centrifugal element 17.
  • the opening and closing of the pipe 19 by the valve 37 is naturally controlled by the pressure difference on either side thereof.
  • the valve 37 is placed on the shaft 11 so as to be in a position remote from the orifice 39 when the pressure on the bearing side 5 is greater than the pressure of the pumping stage 7.
  • the sealing device 9 is optimized because the turbulent movements of gas and lubricants inside the through pipe 19 are avoided, the flow through the through pipe 19 occurring only in a only sense.
  • the pressures on either side of the sealing device 9 can therefore be automatically equilibrated by two separate passages depending on whether the fluid is loaded with lubricants or not.
  • nonreturn valve 37 by a simple disc mounted in axial sliding on the shaft 11, for example a metal disc, the travel of the valve 37 being defined by the centrifugal element 17 and a stop 41 fixed to the tree 11.
  • the radius of the valve 37 is provided sufficiently large to be able to obstruct the orifices 39 of the through pipes 19 opening on the side of the pumping stage 7.
  • valve 37 is thus pushed by the fluid flow to the pumping stage 7 and retained by the stop 41 (see FIG. figure 1 ) when the pressure of the bearing 5 is greater than the pressure of the pumping stage 7, thus releasing the passage through the through pipe 19 of the centrifugal element 17.
  • valve 37 is attracted to the centrifugal element 17 by the fluid flow when the pressure of the bearing 5 is lower than the pressure of the pump stage 7, obstructing the passage of the fluid in the through pipe 19.
  • the peripheral passage of the fluid is formed by a labyrinth seal 43.
  • the labyrinth seal 43 comprises a series of baffles limiting the conductance of the passage between the stator 3 and the centrifugal element 17.
  • the baffles are formed by corresponding grooves and grooves respectively carried by the stator and the rotary member and centered vis-à-vis non-contact to prevent significant friction at high rotational speeds of the rotary member.
  • the peripheral passage is thus formed between the circumferential surface 33 of the centrifugal element 17 and the stator 3 of the pump 1, which makes it possible to avoid friction at the high rotational speed of the centrifugal element. 17.
  • the invention advantageously provides and independently of the pipe 19, a labyrinth seal 43 characterized in that it comprises a plurality of rings 45 mounted in the stator 3 and in that the circumferential surface 33 of the centrifuge element 17 has several corresponding grooves 47.
  • the rings 45 are distinct elements of the stator 3 and are open and resilient in order to be mounted in the stator 3.
  • This arrangement facilitates assembly.
  • each ring 45 at rest is greater than the diameter of the inner wall 35 of the stator 3 so that after insertion of the rings 45 in the stator 3, they are pressed against the inner wall 35 of the stator 3 by the elastic force of the ring 45.
  • an auxiliary mounting tube is disposed around the centrifugal element 17 carrying the rings 45, so that the rings 45 are compressed, the ends of each ring 45 joining.
  • the elasticity of the rings 45 is chosen so that they remain firmly fixed to the stator 3.
  • a labyrinth seal 43 is thus obtained between the stator 3 and the centrifugal element 17 whose grooves 47 and grooves 45 are easy to fabricate, center and assemble.
  • this type of labyrinth seal 43 applies to both the centrifugal element 17 of the present invention and any rotary element rotating in a stator, such as a rotor or a rotating shaft.
  • the flow of fluid from the bearing 5 is deflected by the baffle 27, separating coarsely the particles and lubricating liquids.
  • valve 37 is pushed towards the pumping stage 7 thus freeing access to the through conduit 19 so that a majority of the fluid flows through the centrifuge element 17.
  • the gas is thus separated from the lubricating fluids by centrifugation.
  • the valve 37 is attracted to the centrifuge element 17, obstructing the passage of fluid in the through conduit 19, so that a majority of the fluid flows through the peripheral passage, causing the lubricant residues.
  • constriction 53 of the through conduit 19 may be formed by a constriction of the conduit 19 (not shown).
  • FIGS 4 and 5 illustrate other advantageous embodiments of the invention in which the diameter of the orifice 39 of the through pipe 19 is greater on the bearing side 5 than on the side of the dry pumping stage 7.
  • the through pipe 19 has a narrowing section forming a step whose reduced diameter portion opens on the side of the dry pumping stage 7.
  • This variant has the advantage of being simple.
  • such a pipe 19 can be obtained for example by drilling with a stepped forest.
  • the through pipe 19 has a truncated cone shape whose top is located on the side of the dry pumping stage 7.
  • the shrinkage 53, partial or continuous, of the through-pipe 19 makes it possible to brake the lubricant residues projected on the internal lateral faces 21 of the pipe 19.
  • the through pipe 19 has the shape of a tube ( figure 6 ).
  • a vacuum pump 1 comprising at least one sealing device 9 for lubricating fluids comprising a centrifugal element 17 mounted to rotate integrally with the shaft 11 and comprising at least one through conduit 19, makes it possible to provide a Lubricant tightness without friction parts and therefore without wear, requiring little maintenance.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Claims (17)

  1. Vakuumpumpe vom trockenen Typ mit mindestens einer Drehwelle (11), die durch mindestens ein geschmiertes Lager (5) abgestützt ist, und mindestens einer Dichtungsvorrichtung (9) für die Schmierfluide, die vom Lager (5) stammen können, für die Dichtheit auf der Höhe des Wellendurchgangs, wobei die Dichtungsvorrichtung (9) zwischen dem geschmierten Lager (5) und einer Trockenpumpstufe (7) montiert ist, dadurch gekennzeichnet, dass die Dichtungsvorrichtung (9) ein Zentrifugenelement (17) umfasst, das drehfest an der Welle (11) montiert ist und mindestens eine Durchgangsleitung (19) umfasst, die die Schmierfluide von dem Fluid trennen kann, das vom Lager (5) zur Trockenpumpstufe (7) zirkulieren kann.
  2. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass das Zentrifugenelement (17) außerdem einen Filterkörper umfasst, der in der Durchgangsleitung (19) angeordnet ist.
  3. Vakuumpumpe nach Anspruch 2, dadurch gekennzeichnet, dass der Filterkörper ein faserförmiges Material ist.
  4. Vakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Durchgangsleitung (19) näher an der Drehwelle (11) liegt als an der Umfangsoberfläche (33) des Zentrifugenelements (17).
  5. Vakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass ein Abschnitt der Durchgangsleitung (19) eine Verengung (53) aufweist.
  6. Vakuumpumpe nach Anspruch 5, dadurch gekennzeichnet, dass der Durchmesser der Öffnung (39) der Durchgangsleitung (19) auf der Seite des Lagers (5) größer ist als auf der Seite der Trockenpumpstufe (7).
  7. Vakuumpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die Durchgangsleitung (19) eine Kegelstumpfform aufweist, deren Scheitel auf der Seite der Trockenpumpstufe (7) liegt.
  8. Vakuumpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die Durchgangsleitung (19) durch eine Aussparung des Zentrifugenelements (17) in Kegelstumpfform gebildet ist, deren Rotationsachse mit der Drehachse (14) des Zentrifugenelements (17) zusammenfällt und deren Scheitel mit einer im Voraus definierten Anzahl von Öffnungen (39) auf der Seite der Pumpstufe (7) in Verbindung steht.
  9. Vakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die spezifische Leitfähigkeit der Durchgangsleitung (19) größer ist als die spezifische Leitfähigkeit eines Umfangsdurchgangs des Fluids, der zwischen der Umfangsoberfläche (33) des Zentrifugenelements (17) und der Innenwand (35) des Stators (3) gebildet ist.
  10. Vakuumpumpe nach Anspruch 9, dadurch gekennzeichnet, dass die Dichtungsvorrichtung (9) ein Rückschlagventil (37) umfasst, das gegenüber der Öffnung (39) der Durchgangsleitung (19) angeordnet ist, die auf der Seite der Pumpstufe (7) liegt.
  11. Vakuumpumpe nach Anspruch 10, dadurch gekennzeichnet, dass das Rückschlagventil (37) durch eine Scheibe gebildet ist, die gleitend auf der Drehwelle (11) montiert ist.
  12. Vakuumpumpe nach einem der Ansprüche 9 bis 11, dadurch gekennzeichnet, dass der Umfangsdurchgang eine Labyrinthdichtung (43) umfasst.
  13. Vakuumpumpe nach Anspruch 12, dadurch gekennzeichnet, dass die Labyrinthdichtung (43) mehrere Ringe (45) umfasst, die im Stator (3) montiert sind, und dass die Umfangsoberfläche (33) des Zentrifugenelements (17) mehrere entsprechende Nuten (47) besitzt.
  14. Vakuumpumpe nach Anspruch 13, dadurch gekennzeichnet, dass jeder Ring (45) offen und elastisch ist, um im Stator (3) montiert zu werden.
  15. Vakuumpumpe nach Anspruch 14, dadurch gekennzeichnet, dass der Außendurchmesser jedes Rings (45) in Ruhestellung größer ist als der Durchmesser der Innenwand (35) des Stators (3), so dass nach dem Einsetzen der Ringe (45) in den Stator (3) diese durch die elastische Kraft des Rings (45) gegen die Innenwand (35) des Stators (3) gepresst werden.
  16. Vakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Dichtungsvorrichtung (9) außerdem eine Ablenkvorrichtung (27) umfasst, die an der Drehwelle (11) zwischen dem Lager (5) und dem Zentrifugenelement (17) montiert ist.
  17. Zentrifugenelement einer Dichtungsvorrichtung für Schmierfluide, das drehfest an einer Drehwelle (11) einer Vakuumpumpe vom trockenen Typ (1) zwischen einem geschmierten Lager (5) und einer Trockenpumpstufe (7) montiert werden soll, dadurch gekennzeichnet, dass es mindestens eine Durchgangsleitung (19) umfasst, durch die ein Fluid vom Lager (5) zur Trockenpumpstufe (7) zirkulieren kann, um die Schmierfluide vom Fluid zu trennen.
EP08761080.4A 2007-08-23 2008-06-16 Trockene vakuumpumpe mit einer vorrichtung zur abdichtung gegen schmierfluide und an solch einer vorrichtung vorgesehenes zentrifugationselement Active EP2183508B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0757146A FR2920207B1 (fr) 2007-08-23 2007-08-23 Pompe a vide de type seche comportant un dispositif d'etancheite aux fluides lubrifiants et elements centrifugeur equipant un tel dispositif
PCT/EP2008/057574 WO2009024370A1 (fr) 2007-08-23 2008-06-16 Pompe a vide de type seche comportant un dispositif d'etancheite aux fluides lubrifiants et element centrifugeur equipant un tel dispositif

Publications (2)

Publication Number Publication Date
EP2183508A1 EP2183508A1 (de) 2010-05-12
EP2183508B1 true EP2183508B1 (de) 2017-08-02

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EP08761080.4A Active EP2183508B1 (de) 2007-08-23 2008-06-16 Trockene vakuumpumpe mit einer vorrichtung zur abdichtung gegen schmierfluide und an solch einer vorrichtung vorgesehenes zentrifugationselement

Country Status (7)

Country Link
US (1) US8465269B2 (de)
EP (1) EP2183508B1 (de)
JP (1) JP5037688B2 (de)
KR (1) KR101227220B1 (de)
CN (1) CN101784824B (de)
FR (1) FR2920207B1 (de)
WO (1) WO2009024370A1 (de)

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JP5631155B2 (ja) * 2010-10-27 2014-11-26 三菱重工業株式会社 軸シール機構及びこれを備える回転機械
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CN105650282B (zh) * 2014-11-12 2017-09-15 中国科学院沈阳科学仪器股份有限公司 一种离心非接触式密封结构
CN105736704A (zh) * 2014-12-11 2016-07-06 舍弗勒技术有限两合公司 唇形油封及轴承
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DE202016106107U1 (de) * 2016-10-31 2018-02-01 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe mit Sperrkammerdichtung
EP3536962B1 (de) * 2018-03-07 2021-06-02 Entecnia Consulting, S.L.U. Drehschieber-vakuumpumpe und auslassbaugruppe dafür
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CN113175480B (zh) * 2021-05-18 2023-01-06 杰锋汽车动力***股份有限公司 一种氢气循环泵轴承结构

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WO2009024370A1 (fr) 2009-02-26
KR20100036374A (ko) 2010-04-07
FR2920207A1 (fr) 2009-02-27
US8465269B2 (en) 2013-06-18
FR2920207B1 (fr) 2009-10-09
CN101784824B (zh) 2013-07-03
KR101227220B1 (ko) 2013-01-28
CN101784824A (zh) 2010-07-21
JP5037688B2 (ja) 2012-10-03
US20100189583A1 (en) 2010-07-29
EP2183508A1 (de) 2010-05-12
JP2010537109A (ja) 2010-12-02

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