EP1759776A4 - Static charge and dust removing device - Google Patents

Static charge and dust removing device

Info

Publication number
EP1759776A4
EP1759776A4 EP05751544A EP05751544A EP1759776A4 EP 1759776 A4 EP1759776 A4 EP 1759776A4 EP 05751544 A EP05751544 A EP 05751544A EP 05751544 A EP05751544 A EP 05751544A EP 1759776 A4 EP1759776 A4 EP 1759776A4
Authority
EP
European Patent Office
Prior art keywords
air
processing space
dust
static charge
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05751544A
Other languages
German (de)
French (fr)
Other versions
EP1759776A1 (en
Inventor
Takahiro Ishijima
Jun Inomata
Shigeru Ohkawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Publication of EP1759776A1 publication Critical patent/EP1759776A1/en
Publication of EP1759776A4 publication Critical patent/EP1759776A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • B08B15/023Fume cabinets or cupboards, e.g. for laboratories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00Cleaning by electrostatic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05FSTATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00Carrying-off electrostatic charges
    • H05F3/04Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2215/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B2215/003Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)
  • Elimination Of Static Electricity (AREA)

Abstract

This static charge and dust removing device has a base box (11) provided with an air flow inlet port (16), and a processing head (23) attached to the base box (11) through a support column (21), with a processing space (24) defined between the air flow inlet port (16) and the processing head (23). A front opening (29) and right and left side openings (28) in the device are formed with air curtains for shutting the processing space (24) from outside by air from the spouts of an air spout pipe (33). Ionized air generated by an ion generator (42) is spouted into the processing space (24), so that the ionized air is blown against an article to be processed disposed in the processing space (24) so as to remove dust from the article to be processed. Thereby, the static charge and dust removing operation for the dust adhering to the article to be processed can be efficiently effected in a short time, and contamination of the working environment due to leakage of removed dust can be prevented.
EP05751544A 2004-06-22 2005-06-15 Static charge and dust removing device Withdrawn EP1759776A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004184158A JP2006007012A (en) 2004-06-22 2004-06-22 Charge removal/dedusting apparatus
PCT/JP2005/010924 WO2005123284A1 (en) 2004-06-22 2005-06-15 Static charge and dust removing device

Publications (2)

Publication Number Publication Date
EP1759776A1 EP1759776A1 (en) 2007-03-07
EP1759776A4 true EP1759776A4 (en) 2008-05-21

Family

ID=35509500

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05751544A Withdrawn EP1759776A4 (en) 2004-06-22 2005-06-15 Static charge and dust removing device

Country Status (6)

Country Link
US (1) US20090158537A1 (en)
EP (1) EP1759776A4 (en)
JP (1) JP2006007012A (en)
CN (1) CN1972763A (en)
TW (1) TW200600200A (en)
WO (1) WO2005123284A1 (en)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919794B2 (en) * 2006-12-20 2012-04-18 株式会社キーエンス Static eliminator
WO2009018679A1 (en) * 2007-08-06 2009-02-12 Acxing Industrial Co., Ltd. Air curtain generating device
US9168569B2 (en) 2007-10-22 2015-10-27 Stokely-Van Camp, Inc. Container rinsing system and method
US8147616B2 (en) * 2007-10-22 2012-04-03 Stokely-Van Camp, Inc. Container rinsing system and method
JP2009285627A (en) * 2008-05-30 2009-12-10 Sunx Ltd Apparatus for removing static electricity and dust
JP2010000486A (en) * 2008-06-23 2010-01-07 Sunx Ltd Static eliminating/dust removing device
JP2010005600A (en) * 2008-06-30 2010-01-14 Sunx Ltd Dust removing apparatus
US8141190B2 (en) * 2008-07-28 2012-03-27 Gentex Optics, Inc. Walk-up workstation employing ionizing air nozzles and insulating panels
CN101683649A (en) * 2008-09-26 2010-03-31 无锡海达安全玻璃有限公司 Improved dust removing device of printing glass
JP2010095267A (en) * 2008-10-15 2010-04-30 Trinc:Kk Dust remover for container
JP5336949B2 (en) * 2009-06-30 2013-11-06 サントリーホールディングス株式会社 Resin container charge removal method, resin container sterilization filling method, resin container filling capping method, resin container charge removal device and resin container sterilization filling system
JP5541564B2 (en) * 2009-09-03 2014-07-09 株式会社テクノ菱和 Ionizer system
TW201136674A (en) * 2010-04-21 2011-11-01 Hon Hai Prec Ind Co Ltd Dust elimination device
US8370989B2 (en) * 2010-07-31 2013-02-12 Cheng Uei Precision Industry Co., Ltd. Static eliminator with dust removal feature
US8508907B2 (en) 2010-11-01 2013-08-13 eFluxor LLC Method and device for collecting electrostatic charge from the atmosphere
DE202011101114U1 (en) * 2010-11-13 2012-08-28 Waldner Laboreinrichtungen Gmbh & Co. Kg off device
CN102284450A (en) * 2011-06-15 2011-12-21 震宇(芜湖)实业有限公司 Electrostatic dust removing device of plastic part
ES2481821T3 (en) 2011-06-17 2014-07-31 Kiro Robotics S.L. Machine and method for the automatic preparation of intravenous medication
SG10201502124SA (en) 2011-06-17 2015-05-28 Kiro Robotics Sl Machine And Method For The Automatic Preparation Of Intravenous Medication
CN102652945A (en) * 2011-12-31 2012-09-05 东莞华贝电子科技有限公司 Automatic dust removal device of circuit board
CN102601075A (en) * 2012-03-12 2012-07-25 四川科伦药业股份有限公司 Suspension ring washing and counting device
CN103381412B (en) * 2012-05-03 2016-05-25 珠海格力电器股份有限公司 Dust arrester
CN102641643B (en) * 2012-05-14 2016-06-01 昆山天卓贸易有限公司 Electrostatic precipitation system
CN102814301A (en) * 2012-09-07 2012-12-12 高精科技(苏州)有限公司 Static dust removing device
CN102861741A (en) * 2012-09-19 2013-01-09 成都果范创想科技有限公司 Dust removing device capable of controlling dust removing strength
CN102873061A (en) * 2012-10-04 2013-01-16 天津天星电子有限公司 Air shower with lower exhaust air
JP5814902B2 (en) * 2012-11-22 2015-11-17 株式会社伸興 Dust remover
CN103008290B (en) * 2012-11-27 2016-01-20 安徽鑫龙电器股份有限公司 A kind of electrostatic precipitator
CN103861842A (en) * 2012-12-17 2014-06-18 中国振华集团永光电子有限公司 Pre-encapsulation LED (light emitting diode) module dust blowing method and device
CN103068134A (en) * 2012-12-20 2013-04-24 深圳市华测检测技术股份有限公司 Processing device and processing method before detection
US9211568B2 (en) * 2013-03-12 2015-12-15 Taiwan Semiconductor Manufacturing Company Limited Clean function for semiconductor wafer scrubber
BR112015026271B1 (en) * 2013-05-20 2021-01-19 Omron Corporation washing position verification system
TWI483704B (en) * 2013-05-28 2015-05-11 Uni Ring Tech Co Ltd Self - propelled cleaning equipment - Dust detection method and device
KR101531653B1 (en) * 2013-07-16 2015-06-25 제이케이엔지니어링주식회사 Tunnel Type Cleaning Apparatus for Container
CN103495574B (en) * 2013-10-18 2015-06-03 宁波泰立电子科技有限公司 Cavity cleaning device of ion fan of cavity filter
KR101666150B1 (en) * 2014-02-17 2016-10-24 한국생산기술연구원 Cleaning apparatus of ampoule cap for injection
CN104259137A (en) * 2014-08-29 2015-01-07 京东方光科技有限公司 Dedusting antistatic device
CN104294415B (en) * 2014-10-08 2016-10-19 泉州市中研智能机电研究院有限公司 A kind of dedusting cotton fluffer
CN104624558A (en) * 2014-12-30 2015-05-20 昆山恩都照明有限公司 Automatic blowing dust removing device
CN105215040B (en) * 2015-09-28 2018-02-02 芜湖宏景电子股份有限公司 Auto navigation accessory dust arrester
CN105161992B (en) * 2015-10-12 2018-11-27 浙江国正安全技术有限公司 A kind of 10kv switchgear of purifying and dedusting
CN105327897A (en) * 2015-11-30 2016-02-17 重庆市贵荣塑胶制品有限公司 Manual electrostatic dust collection method for computer keyboard
CN105855242A (en) * 2016-04-25 2016-08-17 昆山瑞鸿诚自动化设备科技有限公司 Plasma blowing and dedusting equipment
CN106238428B (en) * 2016-09-19 2018-06-29 连云港康达智精密技术有限公司 Eyeglass dust removal machine
CN106669311A (en) * 2016-12-15 2017-05-17 中航复合材料有限责任公司 Honeycomb core material dust-removing device
CN108745818A (en) * 2018-06-28 2018-11-06 江阴名鸿车顶***有限公司 Electrostatic precipitation system
CN108787625B (en) * 2018-07-18 2023-09-29 郴州市海利微电子科技有限公司 Ion wind surface treatment machine
CN108746077A (en) * 2018-08-21 2018-11-06 江西联益光学有限公司 lens cleaning device
CN109877116A (en) * 2019-03-14 2019-06-14 合肥清若科技有限公司 A kind of dedicated dust-extraction unit of computer
CN109985859B (en) * 2019-04-24 2023-11-28 伟通工业设备(江苏)有限公司 Uniform ion type electrostatic dust collection device for UV (ultraviolet) curing anti-fog coating line
CN111251973B (en) * 2020-03-18 2022-08-12 周家祥 Quick destatic oil transport vehicle
JP7037210B2 (en) * 2020-07-01 2022-03-16 有限会社タクショー Cleaner
CN112090912A (en) * 2020-09-22 2020-12-18 东南大学 Modularized air curtain separation downdraft welding smoke dust collecting device
JP7501353B2 (en) * 2020-12-25 2024-06-18 トヨタ自動車株式会社 Dust removal device, vehicle and dust removal method
CN113230761A (en) * 2021-05-28 2021-08-10 威斯坦(厦门)实业有限公司 Smoke dust filtering system for 3D printer and control method thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02154423A (en) * 1988-12-06 1990-06-13 Nec Corp Manufacture of semiconductor device
US4987630A (en) * 1989-01-17 1991-01-29 Delco Electronics Overseas Corporation Destaticizing and cleaning apparatus
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
GB2253271A (en) * 1991-02-27 1992-09-02 Seiko Instr Inc Dust cleaner and dust cleaning method
US5506744A (en) * 1994-04-28 1996-04-09 Fortrend Engineering Ionized airflow manifold for static reduction
US20020152636A1 (en) * 2000-07-24 2002-10-24 Ernst Gerard W. Apparatus and method for cleaning charged particles from objects
US6490746B1 (en) * 2000-07-24 2002-12-10 Eastman Kodak Company Apparatus and method for cleaning objects having generally irregular, undulating surface features
US6565669B1 (en) * 2000-10-31 2003-05-20 Intel Corporation Vibrating wafer particle cleaner

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4194232A (en) * 1978-03-31 1980-03-18 Cumming James M Ion treatment of photographic film
JP3112987B2 (en) * 1991-07-11 2000-11-27 ヒムエレクトロ株式会社 Dust remover
WO2002001292A1 (en) * 2000-06-27 2002-01-03 Brooks-Pri Automation (Switzerland) Gmbh Device and method for cleaning articles used in the production of semiconductor components
JP3466581B2 (en) * 2001-05-22 2003-11-10 株式会社ディスカバリー Hair brush cleaner
JP2002213786A (en) * 2001-11-01 2002-07-31 Hitachi Ltd Air shower device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02154423A (en) * 1988-12-06 1990-06-13 Nec Corp Manufacture of semiconductor device
US4987630A (en) * 1989-01-17 1991-01-29 Delco Electronics Overseas Corporation Destaticizing and cleaning apparatus
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
GB2253271A (en) * 1991-02-27 1992-09-02 Seiko Instr Inc Dust cleaner and dust cleaning method
US5506744A (en) * 1994-04-28 1996-04-09 Fortrend Engineering Ionized airflow manifold for static reduction
US20020152636A1 (en) * 2000-07-24 2002-10-24 Ernst Gerard W. Apparatus and method for cleaning charged particles from objects
US6490746B1 (en) * 2000-07-24 2002-12-10 Eastman Kodak Company Apparatus and method for cleaning objects having generally irregular, undulating surface features
US6565669B1 (en) * 2000-10-31 2003-05-20 Intel Corporation Vibrating wafer particle cleaner

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005123284A1 *

Also Published As

Publication number Publication date
JP2006007012A (en) 2006-01-12
WO2005123284A1 (en) 2005-12-29
US20090158537A1 (en) 2009-06-25
EP1759776A1 (en) 2007-03-07
TW200600200A (en) 2006-01-01
CN1972763A (en) 2007-05-30

Similar Documents

Publication Publication Date Title
EP1759776A4 (en) Static charge and dust removing device
TW200728011A (en) Laser beam processing machine
US20140137903A1 (en) Dust removing device
EP1784069A3 (en) Cooling apparatus for flat display device
JP2010120154A (en) Dust prevention device of machine tool stand
TWI596666B (en) Cutting device
WO2005120958A8 (en) Method and apparatus for vacuum sealing
US9623539B2 (en) Carving cabinet having protective carving barrier
KR20090024632A (en) Clean bench and method of producing raw material for single crystal silicon
JP2009078307A (en) Polishing work table device with powder dust collector
WO2004042789A3 (en) Wafer container cleaning system
SG144879A1 (en) Process for wafer backside polymer removal and wafer front side scavenger plasma
CN204271057U (en) Novel wafer conveying robot
USRE48554E1 (en) Air gun system and method
TW201325822A (en) Machine processing device
CN202264015U (en) Soot removing device of plasma cutting machine
JP2005040744A (en) Air blow cleaning device
CN2844752Y (en) The chemical laboratory exhaust apparatus
JP2013022712A (en) Machining device
CN203292130U (en) Semi-automatic dust blowing device
CN110362163A (en) A kind of computer cabinet convenient for deashing
JP2010115697A (en) Draining device for workpiece
PT1368132E (en) COVERING DEVICE FOR A STRONG WORK PACK
WO2004011161A3 (en) Manipulating device for photomasks that provides possibilities for cleaning and inspection of photomasks
CN204834585U (en) Be used for clean turnover case of silicon chip moving

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20061220

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE IT

RBV Designated contracting states (corrected)

Designated state(s): DE IT

DAX Request for extension of the european patent (deleted)
RBV Designated contracting states (corrected)

Designated state(s): DE IT

A4 Supplementary search report drawn up and despatched

Effective date: 20080422

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20081015