EP1476661B1 - Pompe a vide - Google Patents
Pompe a vide Download PDFInfo
- Publication number
- EP1476661B1 EP1476661B1 EP03702650A EP03702650A EP1476661B1 EP 1476661 B1 EP1476661 B1 EP 1476661B1 EP 03702650 A EP03702650 A EP 03702650A EP 03702650 A EP03702650 A EP 03702650A EP 1476661 B1 EP1476661 B1 EP 1476661B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- seal
- bearing
- oil
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals
Definitions
- the invention relates to a vacuum pump with at least one rotor shaft, which has a rotor section with a rotor, a bearing section with a bearing and axially between the rotor section and the bearing section a shaft seal arrangement.
- Such vacuum pumps can be designed, inter alia, as screw pumps, side channel blower, and Roots pumps.
- the mentioned vacuum pumps have in common that they are dry-compressing vacuum pumps with oil or grease lubricated bearings and / or gearboxes. These pumps are typically used to generate pre-vacuum.
- the task of the sealing arrangement between the actual rotor and the bearing or gearbox is firstly to prevent gas from passing from the rotor section to the bearing section and secondly to prevent the passage of fluid from the bearing section into the rotor section.
- rotor speeds and small rotor shaft diameters For example, in the form of radial shaft seals, slip rings, etc.
- only contact-free shaft seals can be used, which, however, can not completely exclude leaks due to the design.
- a known non-contact shaft seal assembly consists of one or more piston seals as a gas seal and an oil spray ring as an oil seal.
- this can not achieve a reliable and high sealing effect.
- the gas compressed in the rotor section should not come into contact with the oil from the bearing section, since the oil may be decomposed thereby and thereby lose its lubricity.
- the escaping oil, gas or gas mixture can also be toxic or explosive and therefore dangerous.
- the object of the invention is therefore to improve in a vacuum pump, the gas seal and an oil seal having shaft seal.
- the shaft seal arrangement is designed such that between the rotor-side gas seal and the bearing-side oil seal a surrounding the rotor shaft separation chamber is provided which is vented through at least one separation chamber ventilation duct.
- the ventilation duct Through the ventilation duct, the separation chamber is adjusted to a desired gas pressure. This ensures that the drop across the gas seal pressure difference and the above the oil seal decreasing pressure difference can be adjusted.
- the separation chamber can be acted upon by the ventilation duct, for example, with atmospheric gas pressure or with the bearing-side gas pressure, so that the gas pressure in the separation chamber is not below the bearing-side gas pressure. In this way it can be avoided that the oil migrates from the bearing side through the oil seal towards the separation chamber.
- the separation chamber gas pressure can be set higher, so that explosive and / or toxic gases from the rotor section can not escape through the gas seal.
- a shaft seal arrangement is realized, which prevents a passage of gas from the rotor section into the bearing section and oil from the bearing section in the rotor section in a simple manner and reliably even with structurally imperfect gas and oil seals.
- For the separation chamber only a small manufacturing effort and space is required, so that a small and effective means a compact and effective shaft seal arrangement is realized.
- the separation chamber ventilation channel opens outside the pump into the surrounding atmosphere. In this way prevails in the separation chamber always atmospheric pressure and the same gas pressure as in the bearing housing, since this is also vented to the environment. The pressure gradient across the oil seal is then practically equal to zero, so that due to lack of pressure difference and no oil from the bearing section in the direction of separation chamber or rotor section is pressed.
- the gas seal and the oil seal are each designed as non-contact seals.
- the shaft seal arrangement can also be used in vacuum pumps be used with high speeds and high rotor shaft diameters.
- the gas seal is designed as a gap seal or as a labyrinth seal, with piston rings or with floating sealing rings.
- the gas seal is in any case a contact-free throttle seal, which reduces the gas passage to an unavoidable minimum.
- the labyrinth seal of the gas seal has at least one piston ring, which projects into an annular groove of the rotor shaft.
- the piston ring is biased outwards and therefore fixed on the housing side and fixed.
- the piston ring protrudes into the rotor shaft annular groove, whereby a labyrinth-like gap is formed between the piston ring and the annular groove, which acts as a throttle seal.
- the gas seal may have a plurality of such labyrinth seals arranged axially one behind the other.
- the oil seal on the rotor shaft on a rotating slinger which projects into a housing-side annular centrifugal chamber, which is connected to an oil return passage to the bearing housing. In this way, an effective non-contact oil seal is created.
- radial and / or axial non-conical or conical gaps are formed between the oil slinger and the housing-side Schleuderschdonn.
- the slinger and the opposing fixed walls are designed so that the incoming oil is thrown outwards with the rotor shaft rotating and the unsprayed oil runs down into the return channel.
- the oil seal on the axial rotor side of the oil slinger preferably has at least one annular trap chamber with an oil drain channel which opens into the bearing housing.
- the oil seal thus consists of two or more axially behind one another centrifugal or catch chambers with an oil drain channel.
- the oil drainage channels can be combined in a single channel, but it can also be associated with each separate centrifugal or catching chamber own separate oil drain channel. As a result, mutual disturbances in the oil flow are excluded, so that the oil seal is only slightly affected even in case of disturbances in an oil drain channel in their sealing effect.
- each spin or catch chamber of the oil seal is assigned at least one ventilation duct.
- the ventilation duct can be outwardly to the atmosphere but should preferably be led back to the bearing housing.
- the centrifugal chambers can be ventilated via a single common ventilation duct, or else via at least one separate ventilation duct in each case. Ventilation through the ventilation channels ensures that there is no pressure difference within the oil seal, ie between the individual centrifugal chambers. A gas flow and thus entrainment of oil in the direction of separation chamber or rotor section is thus practically impossible. The transfer of gases from the separation chamber in the direction of the bearing housing is therefore largely prevented.
- the separation chamber venting channel opens in the vicinity of the lowest point of the separation chamber and has a slope, so that any leaking liquid can drain from the separation chamber. Even if oil or other liquids from the storage section or from the Rotor section should reach the separation chamber, this could run outward. This ensures that no liquid can accumulate in the separation chamber.
- the bearing is formed axially capped on the rotor side.
- a first barrier for oil is already between the bearing and the shaft seal arrangement. or other liquids from the warehouse realized.
- the rotor shaft is designed as a flying rotor shaft, which is mounted only on the pressure side of the rotor section, on the suction side of the rotor section
- the rotor shaft is designed to be free of bearings. In this way, a bearing in the range of greater negative pressure is avoided, so that even with large pressure differences problematic shaft seal arrangement is avoided on the suction side of the rotor shaft.
- flying rotor shafts have a relatively large shaft diameter. Only by the present shaft seal arrangement and the provision of a separation chamber between the gas seal and the oil seal can be sealed with large rotor shaft diameters high peripheral velocities must be taken without an unreasonably large leakage in purchasing.
- a barrier gas source is connected to the separation chamber ventilation duct through which a sealing gas is introduced into the separation chamber under overpressure. This is necessary and useful if toxic and / or explosive gases are conveyed in the rotor section. By feeding the separation gas, a small separation gas flow is generated from the separation chamber in the direction of the rotor section. In this way, the escape of gas from the rotor section can be prevented.
- a barrier gas for example, air or nitrogen can be used.
- a seal gas line is additionally provided from the seal gas source to the bearing housing or the bearing portion. This ensures that there is no significant pressure drop across the oil seal.
- the sealing gas has a pressure of, for example, 1.3 bar.
- the in the FIGS. 1 to 4 illustrated vacuum pump 10 is a screw vacuum pump for generating an advance vacuum.
- the vacuum pump 10 is essentially formed by a housing in which two rotor shafts are rotatably mounted, of which in the Figures 1-4 only the main rotor shaft 12 is shown.
- Rotor shaft 12 has a rotor portion 14 with a helical rotor 16, a bearing portion 18 with two rolling bearings 20 and axially between the rotor portion 14 and the bearing portion 18 has a portion with a shaft seal assembly 22. At the rotor-side end 24 of the rotor shaft 12, no rolling bearing is provided.
- a gas is drawn in at the flying ends of the rotor sections 14 through a suction line, not shown, in order to generate a negative pressure in a recipient connected to the suction line.
- the sucked gas is compressed by interaction of the illustrated rotor 16 with a second rotor of a second rotor shaft, not shown, to the pressure side of the rotor section 14 and there discharged at approximately atmospheric pressure via a gas outlet, not shown.
- bearing portion 18 of the rotor shaft 12 two rolling bearings are provided for rotatable mounting, of which only the rotor-side roller bearing 20 is shown. Furthermore, the rotor shaft 12 in the bearing portion 18, a gear 26, via which the rotor shaft 12 is driven. For lubrication and cooling of the rolling bearing 20 and the gear or wheels 26 of the bearing housing 28 formed by the bearing housing interior 30 contains an oil reservoir.
- the shaft seal arrangement has essentially three axial sections, namely a gas seal 32 on the rotor side, an oil seal 34 on the bearing side and a separation chamber 36 therebetween.
- the shaft seal arrangement 22 is surrounded by a seal housing 66.
- the gas seal 32 is formed by three piston rings 38, which are arranged axially one behind the other.
- the piston rings 38 are biased outwardly and therefore non-positively connected to the stationary housing.
- the piston rings 38 engage in each case in an annular groove 40 of the rotor shaft 12, so that results in a meandering gap in longitudinal section through the three piston rings 38 in the annular grooves 40. In this way, a non-contact labyrinth seal is formed, which ensures a satisfactory gas seal at pressure differences of less than 0.5 bar.
- the oil seal 34 consists of several parts.
- the bearing-side portion of the oil seal 34 has rotor shaft side to an oil slinger 42, which has a wave-like profile in longitudinal section.
- an oil slinger 42 which has a wave-like profile in longitudinal section.
- the oil slinger 42 is surrounded on the housing side by an annular centrifugal chamber 48, which serves to receive and discharge the oil slid by the slinger 42 outwardly through the oil return passage 46.
- the oil seal 34 has on the oil slinger 42 axially on the rotor side, then two annular oil-trapping chambers 50,52, which rotor shaft side is assigned in each case a circumferential annular groove 58.
- the oil slinger 48 has a larger volume than the two axially adjacent oil trapping chambers 50,52.
- Both the annular rotating centrifugal chamber 48 and the likewise annular oil collecting chambers 50,52 each have their own ventilation duct 59 near their highest point, which leads in each case in the axial direction in the bearing housing 28.
- the three ventilation channels 59 are arranged offset from one another in the circumferential direction.
- the two oil trapping chambers 50, 52 each have, near their lowest point, an oil return passage 54, 56, through which oil, if any, can flow back into the bearing housing 28.
- waiving one or both oil-collecting chambers 50,52 may be used in the annular grooves 58 of the rotor shaft 12 and piston rings to prevent further creep of oil axially in the direction of the rotor.
- the annular and relatively large volume separation chamber 36 between the gas seal 32 and the oil seal 34 has near its highest point a separation chamber vent passage 60 through which the separation chamber is vented to the environment or through which it is connected to a purge gas source.
- the separation chamber ventilation channel 60 has an axial section on the separation chamber side and, at right angles thereto, a radial section which leads to the outside. There is no pressure difference and no oil is pressed by a pressure difference in the direction of the rotor through the oil seal, as well as the bearing housing is vented to the environment or since it is also acted upon by the same barrier gas pressure as the separation chamber.
- a further separation chamber ventilation channel 62 is provided, which has a downward slope and opens into a vertical outlet 64.
- the separation chamber ventilation channel 62 also serves as a drain for optionally up to here reached oil, or for liquids from the rotor section.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Devices (AREA)
Abstract
Claims (12)
- Pompe à vide comprenant au moins un arbre de rotor (12), avec une section de rotor (14) incluant un rotor (16), une section de palier (18) comprenant un palier (20) dans un boitier de palier (28), et un ensemble d'étanchéité de l'arbre (22) situé axialement entre ladite section de rotor (14) et ladite section de palier (18), dans laquelle
ledit ensemble d'étanchéité de l'arbre (22) comprend, côté rotor vu dans la direction axiale, un joint (32) étanche aux gaz et, côté palier vu dans la direction axiale, un joint (34) étanche à l'huile, ledit joint étanche à l'huile étant réalisé comme joint sans contact,
ledit ensemble d'étanchéité de l'arbre (22) comprend une chambre de séparation (36) entre ledit joint (32) étanche aux gaz et ledit joint (34) étanche à l'huile, ladite chambre entourant ledit arbre de rotor (12) et étant aérée par au moins un canal d'aération de la chambre de séparation (60, 62) guidé vers l'extérieur dans l'atmosphère ambiante, et
ledit boitier de palier (28) est aéré par l'atmosphère ambiante de sorte que la même pression de gaz règne dans ladite chambre de séparation (36) que dans ledit boitier de palier (28). - Pompe à vide selon la revendication 1, caractérisée en ce que ledit joint (32) étanche aux gaz est réalisé comme joint d'interstice ou joint labyrinthe.
- Pompe à vide selon la revendication 2, caractérisée en ce que ledit joint de labyrinthe comprend au moins un segment de piston (38) en saillie dans une rainure annulaire (40) dudit arbre de rotor (12).
- Pompe à vide selon l'une des revendications 1 - 3, caractérisée en ce que ledit joint étanche aux gaz (34) comprend un anneau de projection d'huile (42) circonférentiel sur ledit arbre de rotor (12), ledit anneau saillant dans une chambre de projection (48) annulaire, côté boitier, raccordée à un canal de retour d'huile (46) s'étendant jusqu'au boitier de palier (28).
- Pompe à vide selon l'une des revendications 1 - 4, caractérisée en ce que des fentes radiales ou axialement coniques ou non coniques sont prévues entre ledit anneau de projection d'huile (42) et les parois de la chambre de projection, côté boitier.
- Pompe à vide selon l'une des revendications 1 - 5, caractérisée en ce que ledit joint d'étanchéité à l'huile (34) comprend, côté rotor par rapport à l'anneau de projection d'huile, vu dans la direction axiale, au moins une chambre de réception d'huile (50, 52) annulaire avec au moins un canal de drainage d'huile (54, 56) s'étendant jusqu'à un boitier de palier (28) entourant le palier (20).
- Pompe à vide selon l'une des revendications 4 - 6, caractérisée en ce que chaque chambre de réception et de projection (48, 50, 52) dudit joint étanche à l'huile (34) est associée à au moins un canal d'aération.
- Pompe à vide selon l'une des revendications 1 - 7, caractérisée en ce que ledit arbre de rotor (12) est flottant et est réalisé sans palier sur le côté d'aspiration de la section de rotor (14).
- Pompe à vide selon l'une des revendications 1 - 8, caractérisée en ce que ledit canal d'aération de la chambre de séparation (60, 62) s'ouvre dans la région du point le plus bas de ladite chambre de séparation (36) et présente une pente de sorte qu'une liquide peut s'écouler de ladite chambre de séparation (36).
- Pompe à vide selon l'une des revendications 1 - 9, caractérisée en ce que ledit palier est muni d'un couvercle sur le côté rotor, vu dans la direction axiale.
- Pompe à vide comprenant au moins un arbre de rotor (12), avec une section de rotor (14) incluant un rotor (16), une section de palier (18) comprenant un palier (20) dans un boitier de palier (28), et un ensemble d'étanchéité de l'arbre (22) situé axialement entre ladite section de rotor (14) et ladite section de palier (18), dans laquelle
ledit ensemble d'étanchéité de l'arbre (22) comprend, côté rotor vu dans la direction axiale, un joint (32) étanche aux gaz et, côté palier vu dans la direction axiale, un joint (34) étanche à l'huile, ledit joint étanche à l'huile étant réalisé comme joint sans contact,
ledit ensemble d'étanchéité de l'arbre (22) comprend une chambre de séparation (36) entre ledit joint (32) étanche aux gaz et ledit joint (34) étanche à l'huile, ladite chambre entourant ledit arbre de rotor (12) et étant aérée par au moins un canal d'aération de la chambre de séparation (60, 62), et
une source de gaz d'arrêt est raccordée audit boitier de palier (28) et au canal d'aération (60) de sorte qu'environ la même pression de gaz règne dans ladite chambre de séparation (36) que dans ledit boitier de palier (28). - Pompe à vide selon la revendication 11, caractérisée par les caractéristiques supplémentaires d'une quelconque des revendications 2-10.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10207929 | 2002-02-23 | ||
DE10207929A DE10207929A1 (de) | 2002-02-23 | 2002-02-23 | Vakuumpumpe |
PCT/EP2003/001598 WO2003071134A1 (fr) | 2002-02-23 | 2003-02-18 | Pompe a vide |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1476661A1 EP1476661A1 (fr) | 2004-11-17 |
EP1476661B1 true EP1476661B1 (fr) | 2012-01-11 |
Family
ID=27674929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03702650A Expired - Lifetime EP1476661B1 (fr) | 2002-02-23 | 2003-02-18 | Pompe a vide |
Country Status (6)
Country | Link |
---|---|
US (1) | US7153093B2 (fr) |
EP (1) | EP1476661B1 (fr) |
JP (2) | JP2005517866A (fr) |
AU (1) | AU2003205775A1 (fr) |
DE (1) | DE10207929A1 (fr) |
WO (1) | WO2003071134A1 (fr) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0326613D0 (en) * | 2003-11-14 | 2003-12-17 | Boc Group Plc | Vacuum pump |
US7543822B2 (en) * | 2004-07-12 | 2009-06-09 | A.W. Chesterton Company | Composite rotary seal assembly |
DE102005015212A1 (de) * | 2005-04-02 | 2006-10-05 | Leybold Vacuum Gmbh | Wellendichtung |
DE102005041003A1 (de) * | 2005-08-29 | 2007-03-01 | Man Turbo Ag | Wellendichtung für einen Getriebeexpander oder -kompressor |
US20080044279A1 (en) * | 2006-08-17 | 2008-02-21 | Orlowski David C | Adaptor Frame |
JP5046379B2 (ja) * | 2007-03-30 | 2012-10-10 | アネスト岩田株式会社 | オイルフリーロータリコンプレッサのロータ軸シール装置 |
JP2008255797A (ja) * | 2007-03-30 | 2008-10-23 | Anest Iwata Corp | オイルフリーロータリコンプレッサのロータ軸シール装置 |
JP2008255796A (ja) * | 2007-03-30 | 2008-10-23 | Anest Iwata Corp | オイルフリーロータリ圧縮機の軸封装置 |
DE102007039237A1 (de) | 2007-08-20 | 2009-02-26 | Daimler Ag | Pumpe und Brennstoffzellensystem mit einer derartigen Pumpe |
DE102008055793B3 (de) * | 2008-11-04 | 2010-09-02 | Voith Patent Gmbh | Vorrichtung zur Abdichtung einer mit einem flüssigen Schmiermittel geschmierten Lagerung |
DE102010045881A1 (de) * | 2010-09-17 | 2012-03-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102010041939A1 (de) * | 2010-10-04 | 2012-04-05 | Robert Bosch Gmbh | Pumpengehäuse sowie Pumpe |
JP5425049B2 (ja) * | 2010-12-17 | 2014-02-26 | 株式会社神戸製鋼所 | 水噴射式スクリュ圧縮機 |
CN102654127A (zh) * | 2011-03-04 | 2012-09-05 | 中国科学院沈阳科学仪器研制中心有限公司 | 一种真空泵用轴封结构 |
JP2013002590A (ja) * | 2011-06-20 | 2013-01-07 | Ulvac Japan Ltd | 真空装置 |
DE102011108092A1 (de) | 2011-07-19 | 2013-01-24 | Multivac Sepp Haggenmüller Gmbh & Co. Kg | Reinigungsverfahren und -system für Vakuumpumpe |
EP2570673B1 (fr) * | 2011-09-13 | 2014-05-07 | Pierburg Pump Technology GmbH | Pompe à vide électrique pour véhicule automobile |
CN102661280A (zh) * | 2012-04-28 | 2012-09-12 | 山东三牛机械有限公司 | 罗茨风机主动轴轴端密封*** |
EP2941566B1 (fr) * | 2012-12-31 | 2018-10-17 | Thermo King Corporation | Dispositif et procédé pour prolonger la durée de vie d'un joint pour arbre tournant pour un compresseur ouvert |
CN104047707A (zh) * | 2013-03-11 | 2014-09-17 | 伊顿公司 | 增压器 |
CN103883357B (zh) * | 2014-03-20 | 2016-04-13 | 泸州市长江液压件装备有限公司 | 一种齿轮分流马达的旋转密封机构、齿轮分流马达 |
CN105065276A (zh) * | 2015-07-22 | 2015-11-18 | 宋东方 | 干式螺杆真空泵组合式密封装置 |
ITUB20152676A1 (it) * | 2015-07-30 | 2017-01-30 | Nuovo Pignone Tecnologie Srl | Disposizione di raffreddamento di tenute a gas secco e metodo |
KR101721933B1 (ko) * | 2015-11-06 | 2017-04-03 | 홍우산업기계(주) | 오일 밀봉장치 및 이를 포함하는 블로어 |
DE202016003924U1 (de) | 2016-06-24 | 2017-09-27 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit Sperrgaszufuhr |
DE102016007672A1 (de) | 2016-06-24 | 2017-12-28 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit Sperrgaszufuhr |
GB2558954B (en) | 2017-01-24 | 2019-10-30 | Edwards Ltd | Pump sealing |
WO2020095328A1 (fr) * | 2018-11-08 | 2020-05-14 | Elgi Equipments Ltd | Compresseur d'air à vis sans huile à injection d'eau |
JP7436345B2 (ja) | 2020-10-30 | 2024-02-21 | 株式会社荏原製作所 | 軸封装置、回転機械、および軸封装置の組み立て方法 |
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JPS61104187A (ja) | 1984-10-29 | 1986-05-22 | Hitachi Ltd | 真空ポンプ用軸封装置 |
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JPS63285279A (ja) | 1987-05-15 | 1988-11-22 | Hitachi Ltd | 真空ポンプの軸封装置 |
JP3493850B2 (ja) * | 1995-11-22 | 2004-02-03 | 石川島播磨重工業株式会社 | 機械駆動式過給機のシール構造 |
DE29522263U1 (de) | 1995-12-02 | 2001-08-02 | Pfeiffer Vacuum GmbH, 35614 Aßlar | Mehrwellenvakuumpumpe |
JPH1061671A (ja) * | 1996-08-22 | 1998-03-06 | Nippon Seiko Kk | 密封装置 |
BE1010821A3 (nl) | 1996-12-23 | 1999-02-02 | Atlas Copco Airpower Nv | Droge compressor met asafdichtingen en werkwijze om een asafdichting in dergelijke compressor aan te brengen. |
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GB9708397D0 (en) | 1997-04-25 | 1997-06-18 | Boc Group Plc | Improvements in vacuum pumps |
BE1011349A3 (nl) | 1997-09-04 | 1999-07-06 | Atlas Copco Airpower Nv | Compressoreenheid met minstens een olievrij compressorelement voorzien van een asafdichting. |
DE29807796U1 (de) * | 1998-04-30 | 1999-09-09 | GHH-RAND Schraubenkompressoren GmbH & Co. KG, 46145 Oberhausen | Dichtungsanordnung für einen Wellenzapfen eines trockenlaufenden Rotationsschraubenverdichters |
JP2001207984A (ja) * | 1999-11-17 | 2001-08-03 | Teijin Seiki Co Ltd | 真空排気装置 |
DE19963170A1 (de) * | 1999-12-27 | 2001-06-28 | Leybold Vakuum Gmbh | Vakuumpumpe mit Wellendichtmitteln |
ITMI20021222A1 (it) * | 2002-06-05 | 2003-12-05 | Nuovo Pignone Spa | Sistema di tenuta per compressori centrifughi che eleborano gas letali |
-
2002
- 2002-02-23 DE DE10207929A patent/DE10207929A1/de not_active Withdrawn
-
2003
- 2003-02-18 AU AU2003205775A patent/AU2003205775A1/en not_active Abandoned
- 2003-02-18 JP JP2003570008A patent/JP2005517866A/ja active Pending
- 2003-02-18 US US10/505,608 patent/US7153093B2/en not_active Expired - Fee Related
- 2003-02-18 EP EP03702650A patent/EP1476661B1/fr not_active Expired - Lifetime
- 2003-02-18 WO PCT/EP2003/001598 patent/WO2003071134A1/fr active Application Filing
-
2009
- 2009-08-20 JP JP2009190920A patent/JP5135301B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
AU2003205775A1 (en) | 2003-09-09 |
WO2003071134A1 (fr) | 2003-08-28 |
JP2009270581A (ja) | 2009-11-19 |
JP2005517866A (ja) | 2005-06-16 |
JP5135301B2 (ja) | 2013-02-06 |
US20050147517A1 (en) | 2005-07-07 |
US7153093B2 (en) | 2006-12-26 |
EP1476661A1 (fr) | 2004-11-17 |
DE10207929A1 (de) | 2003-09-04 |
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