EP1201322B1 - Procédé de fabrication d'un transducteur à ultrasons - Google Patents

Procédé de fabrication d'un transducteur à ultrasons Download PDF

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Publication number
EP1201322B1
EP1201322B1 EP01121973A EP01121973A EP1201322B1 EP 1201322 B1 EP1201322 B1 EP 1201322B1 EP 01121973 A EP01121973 A EP 01121973A EP 01121973 A EP01121973 A EP 01121973A EP 1201322 B1 EP1201322 B1 EP 1201322B1
Authority
EP
European Patent Office
Prior art keywords
ceramic
composite body
plastic
container
sticks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01121973A
Other languages
German (de)
English (en)
Other versions
EP1201322A3 (fr
EP1201322A2 (fr
Inventor
Axel Brenner
Rainer Dr. Busch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlas Elektronik GmbH
Original Assignee
Atlas Elektronik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atlas Elektronik GmbH filed Critical Atlas Elektronik GmbH
Publication of EP1201322A2 publication Critical patent/EP1201322A2/fr
Publication of EP1201322A3 publication Critical patent/EP1201322A3/fr
Application granted granted Critical
Publication of EP1201322B1 publication Critical patent/EP1201322B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49004—Electrical device making including measuring or testing of device or component part
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor

Definitions

  • the invention relates to a method for producing an ultrasonic transducer of the type defined in the preamble of claim 1.
  • a known ultrasonic transducer of this type US 5,950,291 ), there called Composite Acoustic Transducer, has a plurality of ceramic elements of piezoelectric or electrostrictive ceramic material, such as PZT, which are arranged in a matrix (1-3 composites).
  • the ceramic elements are embedded in a rigid polymer layer and form with this a composite or composite body.
  • the composite body is coated on its top and bottom with an electrode, which contact the extending between the top and bottom ceramic elements.
  • This ultrasonic transducer is manufactured by inserting a ceramic body constituting an array of individual pillar-like ceramic members projecting perpendicularly from a ceramic base into a mold and filling a polymer in the mold to a certain height, the polymer melting the mold Free spaces between the ceramic elements fills. After curing of the plastic forms a ceramic base on the ceramic base covering and the ceramic elements in the lower area enclosing, solid plastic layer. The partially cast in this way ceramic body is removed from the mold and rotated by 180 ° again inserted into the mold so that the free ends of the ceramic elements are supported on the bottom of the mold. Then, in turn, the polymer is poured into the mold to a certain layer height. After hardening of this plastic layer of the cast ceramic body of the mold is removed and removed the ceramic base. The resulting composite body is coated on the top and bottom with the electrodes.
  • the ceramic body having the plurality of ceramic members protruding from the ceramic base is obtained either by a casting method or by sawing a ceramic block. In the latter case, the saw cut are introduced crosswise and although only so deep that still the continuous lower ceramic base remains.
  • the casting process forces a conicity of the ceramic elements so that the ceramic body can be removed from the mold so that the ceramic elements can not be designed with a constant cross section over their length.
  • the disadvantage of the sawing process is due to the high rejection rate, since due to the brittleness of the ceramic material very easily break out of the sawed ceramic elements, whereby the entire ceramic body is unusable.
  • the invention has for its object to simplify the process for the preparation of the ultrasonic transducer described above with low rejection rate and cheaper to design in order to reduce the manufacturing cost of such, a mass-produced performing converter.
  • the inventive method has the advantage that the plastic coated with ceramic rods whose cross-sectional profile may be round or square and a solid or hollow profile, are lined up in a matrix-like manner by simple shaking in an upright position, the plastic sheath with its approximately constant thickness a sufficiently constant distance guaranteed between the individual ceramic rods.
  • the plastic filled in the gaps between the juxtaposed ceramic rods in increasing casting preferably a polymer, e.g. Resin or polyurethane, after curing, firmly bonds the jacketed ceramic rods to one another and results in a composite which either already has the desired shape or can be cut or sawn to the desired shape.
  • the plastic-coated ceramic rods are obtained in such a way that cuts of ceramic fibers produced by spinning thread sections in the required length of the ceramic rods with excess, polarized and the latter are provided by moving in a dip with a uniform layer of plastic.
  • the ceramic filaments can also be first encased in an immersion bath with the thickness-constant plastic layer and then cut from the finished coated ceramic rods forming thread sections in the required length with oversize.
  • a high temperature resistant plastic must be chosen for the sheath, since the coated ceramic rods still have to be polarized in a hot oil bath.
  • the container subjected to the shaking movements is covered with a shadow mask whose holes have a slightly larger hole cross section than the cross section of the coated ceramic rods.
  • a shadow mask facilitates the vertical alignment and packaging of the coated ceramic sticks in the container. Before casting the encased in the container wrapped ceramic sticks, the shadow mask is removed.
  • a manufactured according to the inventive ultrasonic transducer is given in claim 9.
  • the in Fig. 3 Ultrasonic transducer excerpts in cross-section has a composite body 12 with a plurality of small ceramic elements 11 of piezoelectric or electrostrictive ceramic, which are firmly embedded in plastic and extending between top and bottom 121, 122 of the composite body 12.
  • the round or square and full or hollow cross-sectional profile having ceramic elements 11 have a columnar shape and are substantially parallel to each other. However, by a slight alignment disorder, the bandwidth of the ultrasonic transducer can be increased.
  • Such an ultrasonic transducer is manufactured according to the following method to reduce manufacturing costs:
  • the ceramic elements 11 with the above-mentioned profile shapes are manufactured as thin coated ceramic rods 20, whose jacket 21 consists of a plastic layer of constant layer thickness.
  • a produced by spinning ceramic yarn 22 the thread thickness can be reduced to about 10 .mu.m, coated in an immersion bath 22 with the plastic shell 21.
  • this is the ceramic yarn 22 by means of a pair of drive rollers 24 which press force fit to the ceramic yarn 22, withdrawn from a supply roll 25 and guided by deflection rollers 26 - 29 through the dip 23, in which by suitable movement of the ceramic yarn 22nd the plastic sheath 21 is deposited from high temperature plastic in a constant layer thickness.
  • the sheathed ceramic thread 22 is cut behind the drive rollers 24 by means of a separating knife 30 in the required length for the ceramic elements 11 with a little bit of excess.
  • the separated and polarized in a hot oil bath thread sections then form the coated ceramic rods 20.
  • the ceramic thread used 22 may have solid or hollow profile, which is arbitrarily round or square.
  • the coated ceramic rods 20 are fed to a one-sided open, box-shaped container 31, which - Fig. 1 indicated by arrows 32, 33 - is subjected to shaking movements. By these shaking movements are substantially upright supplied, coated Ceramic sticks 20 in the container 31 upright packetized, as shown in Fig. 1 is shown.
  • a displaceable in the container 31 in the direction of arrow 34 dividing wall 35 always only respectively a portion of the container 31 is released for filling.
  • the coated ceramic rods 20 are thereby supplied directly to the partition wall 35, and the partition wall 35 is moved with increasing number of filled, coated ceramic rods 20 in the direction of arrow 34 until the container 31 is completely filled.
  • all sheathed ceramic rods 20 are aligned in a matrix-like manner in rows and rows, wherein they lie against one another with their plastic sheaths 21.
  • the container 31 is now in increasing casting with a plastic 36, e.g. a resin or a polyurethane (PU), wherein the plastic material 36 completely fills the cavities present between the abutting coated ceramic rods 20 and establishes a firm connection with the plastic sheaths 21 of the coated ceramic rods 20.
  • a plastic 36 e.g. a resin or a polyurethane (PU)
  • the resulting composite body 12 is removed from the container 31.
  • the container 31 removed composite body 12 is in Fig. 1 shown below in fragmentary form.
  • the composite body 12 is now ground down on its upper side 121 and / or on its lower side 122 until the ceramic rods 20 have a determined by the required transducer frequency length.
  • the holes 38 have a relation to the cross section of the coated ceramic rods 20 slightly larger hole cross-section.
  • the holes 38 are in turn arranged like a matrix in rows and rows and indicate the position of the coated ceramic rods 20 in the container 31.
  • the coated ceramic rods 20 are now filled via the shadow mask 37 into the container 31, wherein the orientation and arrangement of the coated ceramic rods 20 in the container 31 by the also the shaking movements (arrows 32, 33) exposed shadow mask 37 is already predetermined.
  • the shadow mask 37 is removed.
  • the invention is not limited to the embodiment described above, so - unlike in Fig. 1 is shown above - to produce the coated ceramic rods 20 of the ceramic thread produced by spinning 22 thread sections in the required length of the ceramic rods 20 are cut with a little oversize.
  • the trimmed thread sections are polarized and then provided by movement in an immersion bath 23 by applying a plastic layer of constant thickness with the plastic sheath 21.
  • These encased plastic strips 20 thus produced are then - as described above and in Fig. 1 shown - further processed to the composite body 12.
  • coated ceramic rods 20 and larger cross-sectional ceramic rods can be used with a diameter in the millimeter range.
  • These ceramic rods which have been cut to the prescribed length with somewhat excess, are also provided with the plastic jacket of constant thickness by movement in an immersion bath, the thickness being selected again in accordance with the filling factor of the composite body 12.
  • the cross-section of the ceramic rods 20 or ceramic rods is adapted to the clear cross section of the container 31, that in the composite body 12 for the desired working frequency range of the ultrasonic transducer optimized ratio of ceramic and plastic material is achieved.
  • the fill factor of the composite body 12 with ceramic material is set to 40-60%.
  • the dimensions of the container 31 are preferably chosen so that they correspond to the predetermined dimensions of the composite body 12, so that the abraded to nominal frequency composite body 12 only with the electrodes 13, 14 must be coated, as in Fig. 3 is shown.
  • the container 31 may have a fixed standard size, so that the composite body 12 is always supplied in fixed dimensions by the described manufacturing process. The individually required dimensions are then realized by cutting or sawing the composite body 12, and the thus processed composite body 12 is completed with the electrodes 13, 14.
  • the in Fig. 3 Ultrasonic transducer shown in section represents an electroacoustic transducer element, which is usually assembled with similar, further transducer elements to a base or array called, larger arrangement of equidistantly arranged transducer elements.
  • the horizontal and vertical opening angle of the transducer element are determined by the length and width of the composite body 12, and the operating frequency of the transducer element is determined by the height between the top and bottom 121, 122 of the composite body 12.
  • Usual lengths and width dimensions of the composite body 12 are between 1 and 50 mm.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Surgical Instruments (AREA)
  • Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)

Claims (10)

  1. Procédé pour fabriquer un transducteur à ultrasons, lequel présente un corps composite (12) en matière plastique comprenant une pluralité d'éléments en céramique (11) en céramique piézoélectrique ou électrostrictive incorporés qui s'étendent entre ses côtés supérieur et inférieur (121, 122) et des électrodes (13, 14), lesquelles viennent en contact avec les éléments en céramique (11) sur les côtés supérieur et inférieur (121, 122) du corps composite (12), caractérisé par les étapes suivantes :
    - les éléments en céramique (11) sont fabriqués sous la forme de baguettes en céramique (20) enrobées dans une enveloppe en matière plastique (21) d'épaisseur constante,
    - les baguettes en céramique (20) enrobées sont acheminées à un récipient (31) ouvert d'un côté et soumis à des secousses (32, 33) et y sont mises en paquets verticaux sous l'effet des secousses,
    - le récipient (31) remplis des baguettes en céramique (20) enrobées est rempli d'une matière plastique (36), par exemple de la résine ou du polyuréthane, en coulée ascendante,
    - le corps composite (12) ainsi obtenu est retiré du récipient (31) après durcissement et poncé sur son côté supérieur et/ou inférieur (121, 122) jusqu'à ce que les baguettes en céramique (20) présentent une longueur donnée déterminée par la fréquence de fonctionnement du transducteur à ultrasons et
    - les électrodes (13, 14) sont appliquées sur les côtés supérieur et inférieur (121, 122) du corps composite (12) de telle sorte qu'elles viennent en contact avec la totalité ou seulement des groupes de baguettes en céramique (20).
  2. Procédé selon la revendication 1, caractérisé en ce que les dimensions intérieures du récipient (31) sont déterminées conformément aux dimensions souhaitées du corps composite (12).
  3. Procédé selon la revendication 1, caractérisé en ce que les dimensions intérieures du récipient (31) sont déterminées indépendamment des dimensions du corps composite (12) et que la forme du corps composite (12) est ensuite taillée sur mesure.
  4. Procédé selon l'une des revendications 1 à 3, caractérisé en ce que le récipient (31) soumis aux secousses est recouvert par un masque perforé (37) qui prédéfinit la position des baguettes en céramique (20) enrobées dans le récipient (31) et dont les trous (38) présentent une section transversale de trou légèrement plus grande que la section transversale des baguettes en céramique (20) enrobées et que le masque perforé (37) est retiré avant le remplissage avec la matière plastique (36).
  5. Procédé selon l'une des revendications 1 à 4, caractérisé en ce que les baguettes en céramique (20) enrobées constituées de fils en céramique (22) produits par filage, lesquels sont enrobés d'une couche de matière plastique d'épaisseur constante dans un bain de trempage (23), sont coupées à la longueur exigée avec une surcote.
  6. Procédé selon l'une des revendications 1 à 4, caractérisé en ce que pour fabriquer les baguettes en céramique (20) enrobées constituées de fils en céramique (22) produits par filage, des portions de fils sont coupées à la longueur exigée avec une surcote et sont munies de l'enveloppe en matière plastique (21) en les déplaçant dans un bain de trempage (23).
  7. Procédé selon l'une des revendications 1 à 6, caractérisé en ce que la section transversale des baguettes en céramique (20) est adaptée à la section transversale libre du récipient (31) de manière à obtenir dans le corps composite (12) un rapport de matériau céramique et plastique optimal pour la plage de fréquences de fonctionnement du transducteur à ultrasons.
  8. Procédé selon la revendication 7, caractérisé en ce que la section transversale des baguettes en céramique (20) est choisie en tenant compte des écarts mutuels nécessaires, prédéfinis par l'épaisseur de l'enveloppe en matière plastique (21), de telle sorte que le facteur de remplissage du matériau céramique dans le corps composite (12) est de 40 à 60 %.
  9. Transducteur à ultrasons comprenant un corps composite (12) en matière plastique comprenant une pluralité d'éléments en céramique (11) en céramique piézoélectrique ou électrostrictive incorporés qui s'étendent entre les côtés supérieur et inférieur (121, 122) du corps composite (12) et des électrodes (13, 14) qui viennent en contact avec les éléments en céramique (11) sur les côtés supérieur et inférieur (121, 122) du corps composite (12), caractérisé en ce que les éléments en céramique (11) sont des baguettes en céramique (20) enrobées munies par préfabrication d'une enveloppe en matière plastique (21) d'épaisseur constante, lesquelles sont alignées les unes contre les autres avec juxtaposition directe à la manière d'une matrice, que l'espace libre qui demeure entre les baguettes en céramique (20) enrobées est rempli d'une matière plastique, par exemple de la résine ou du polyuréthane, et que les électrodes (13, 14) viennent en contact avec la totalité ou seulement des groupes de baguettes en céramique (20) enrobées.
  10. Transducteur à ultrasons selon la revendication 9, caractérisé en ce que les sections transversales de l'enrobage et de la céramique des baguettes en céramique (20) enrobées sont adaptées l'une à l'autre de sorte que le corps composite (12) présente un facteur de remplissage de céramique optimal pour la plage de fréquences de fonctionnement (largeur de bande) du transducteur à ultrasons.
EP01121973A 2000-10-24 2001-09-13 Procédé de fabrication d'un transducteur à ultrasons Expired - Lifetime EP1201322B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10052636A DE10052636B4 (de) 2000-10-24 2000-10-24 Verfahren zur Herstellung eines Ultraschallwandlers
DE10052636 2000-10-24

Publications (3)

Publication Number Publication Date
EP1201322A2 EP1201322A2 (fr) 2002-05-02
EP1201322A3 EP1201322A3 (fr) 2009-03-18
EP1201322B1 true EP1201322B1 (fr) 2010-03-03

Family

ID=7660849

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01121973A Expired - Lifetime EP1201322B1 (fr) 2000-10-24 2001-09-13 Procédé de fabrication d'un transducteur à ultrasons

Country Status (5)

Country Link
US (1) US6574842B2 (fr)
EP (1) EP1201322B1 (fr)
AT (1) ATE459431T1 (fr)
DE (2) DE10052636B4 (fr)
DK (1) DK1201322T3 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7867178B2 (en) * 2003-02-26 2011-01-11 Sanuwave, Inc. Apparatus for generating shock waves with piezoelectric fibers integrated in a composite
DE10323493B3 (de) * 2003-05-23 2004-07-15 Atlas Elektronik Gmbh Unterwasserantenne
US7082655B2 (en) * 2003-12-18 2006-08-01 Ge Inspection Technologies, Lp Process for plating a piezoelectric composite
DE102005032212B3 (de) * 2005-07-09 2006-10-19 Atlas Elektronik Gmbh Unterwasserantenne
FR2889403B1 (fr) * 2005-07-29 2007-11-09 Thales Sa Procede de fabrication d'un transducteur acoutique
DE102006015493B4 (de) * 2006-04-03 2010-12-23 Atlas Elektronik Gmbh Elektroakustischer Wandler
US7812508B2 (en) * 2008-02-06 2010-10-12 Innowattech Ltd. Power harvesting from railway; apparatus, system and method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995003632A1 (fr) 1993-07-19 1995-02-02 Fiber Materials, Inc. Procede de fabrication de materiau piezocomposite
US5539965A (en) 1994-06-22 1996-07-30 Rutgers, The University Of New Jersey Method for making piezoelectric composites
US5592730A (en) 1994-07-29 1997-01-14 Hewlett-Packard Company Method for fabricating a Z-axis conductive backing layer for acoustic transducers using etched leadframes
US6225728B1 (en) * 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5929337A (en) * 1994-11-11 1999-07-27 M & A Packaging Services Limited Non-mechanical contact ultrasound system for monitoring contents of a moving container
JPH08323748A (ja) * 1995-05-29 1996-12-10 Toho Rayon Co Ltd 成形材料及びその製造方法
US5691960A (en) * 1995-08-02 1997-11-25 Materials Systems, Inc. Conformal composite acoustic transducer panel and method of fabrication thereof
DE19743859C2 (de) * 1997-10-04 2000-11-16 Stn Atlas Elektronik Gmbh Verfahren zur Herstellung eines Verbund-Ultraschallwandlers
WO1999048621A2 (fr) * 1998-03-26 1999-09-30 Exogen, Inc. Matrices d'elements transducteurs souples

Also Published As

Publication number Publication date
DE10052636A1 (de) 2002-05-08
US20020063495A1 (en) 2002-05-30
DE10052636B4 (de) 2004-07-08
US6574842B2 (en) 2003-06-10
DE50115369D1 (de) 2010-04-15
EP1201322A3 (fr) 2009-03-18
ATE459431T1 (de) 2010-03-15
EP1201322A2 (fr) 2002-05-02
DK1201322T3 (da) 2010-05-17

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