EP1201322B1 - Method of manufacturing an ultrasonic transducer - Google Patents

Method of manufacturing an ultrasonic transducer Download PDF

Info

Publication number
EP1201322B1
EP1201322B1 EP01121973A EP01121973A EP1201322B1 EP 1201322 B1 EP1201322 B1 EP 1201322B1 EP 01121973 A EP01121973 A EP 01121973A EP 01121973 A EP01121973 A EP 01121973A EP 1201322 B1 EP1201322 B1 EP 1201322B1
Authority
EP
European Patent Office
Prior art keywords
ceramic
composite body
plastic
container
sticks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01121973A
Other languages
German (de)
French (fr)
Other versions
EP1201322A2 (en
EP1201322A3 (en
Inventor
Axel Brenner
Rainer Dr. Busch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlas Elektronik GmbH
Original Assignee
Atlas Elektronik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atlas Elektronik GmbH filed Critical Atlas Elektronik GmbH
Publication of EP1201322A2 publication Critical patent/EP1201322A2/en
Publication of EP1201322A3 publication Critical patent/EP1201322A3/en
Application granted granted Critical
Publication of EP1201322B1 publication Critical patent/EP1201322B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49004—Electrical device making including measuring or testing of device or component part
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor

Definitions

  • the invention relates to a method for producing an ultrasonic transducer of the type defined in the preamble of claim 1.
  • a known ultrasonic transducer of this type US 5,950,291 ), there called Composite Acoustic Transducer, has a plurality of ceramic elements of piezoelectric or electrostrictive ceramic material, such as PZT, which are arranged in a matrix (1-3 composites).
  • the ceramic elements are embedded in a rigid polymer layer and form with this a composite or composite body.
  • the composite body is coated on its top and bottom with an electrode, which contact the extending between the top and bottom ceramic elements.
  • This ultrasonic transducer is manufactured by inserting a ceramic body constituting an array of individual pillar-like ceramic members projecting perpendicularly from a ceramic base into a mold and filling a polymer in the mold to a certain height, the polymer melting the mold Free spaces between the ceramic elements fills. After curing of the plastic forms a ceramic base on the ceramic base covering and the ceramic elements in the lower area enclosing, solid plastic layer. The partially cast in this way ceramic body is removed from the mold and rotated by 180 ° again inserted into the mold so that the free ends of the ceramic elements are supported on the bottom of the mold. Then, in turn, the polymer is poured into the mold to a certain layer height. After hardening of this plastic layer of the cast ceramic body of the mold is removed and removed the ceramic base. The resulting composite body is coated on the top and bottom with the electrodes.
  • the ceramic body having the plurality of ceramic members protruding from the ceramic base is obtained either by a casting method or by sawing a ceramic block. In the latter case, the saw cut are introduced crosswise and although only so deep that still the continuous lower ceramic base remains.
  • the casting process forces a conicity of the ceramic elements so that the ceramic body can be removed from the mold so that the ceramic elements can not be designed with a constant cross section over their length.
  • the disadvantage of the sawing process is due to the high rejection rate, since due to the brittleness of the ceramic material very easily break out of the sawed ceramic elements, whereby the entire ceramic body is unusable.
  • the invention has for its object to simplify the process for the preparation of the ultrasonic transducer described above with low rejection rate and cheaper to design in order to reduce the manufacturing cost of such, a mass-produced performing converter.
  • the inventive method has the advantage that the plastic coated with ceramic rods whose cross-sectional profile may be round or square and a solid or hollow profile, are lined up in a matrix-like manner by simple shaking in an upright position, the plastic sheath with its approximately constant thickness a sufficiently constant distance guaranteed between the individual ceramic rods.
  • the plastic filled in the gaps between the juxtaposed ceramic rods in increasing casting preferably a polymer, e.g. Resin or polyurethane, after curing, firmly bonds the jacketed ceramic rods to one another and results in a composite which either already has the desired shape or can be cut or sawn to the desired shape.
  • the plastic-coated ceramic rods are obtained in such a way that cuts of ceramic fibers produced by spinning thread sections in the required length of the ceramic rods with excess, polarized and the latter are provided by moving in a dip with a uniform layer of plastic.
  • the ceramic filaments can also be first encased in an immersion bath with the thickness-constant plastic layer and then cut from the finished coated ceramic rods forming thread sections in the required length with oversize.
  • a high temperature resistant plastic must be chosen for the sheath, since the coated ceramic rods still have to be polarized in a hot oil bath.
  • the container subjected to the shaking movements is covered with a shadow mask whose holes have a slightly larger hole cross section than the cross section of the coated ceramic rods.
  • a shadow mask facilitates the vertical alignment and packaging of the coated ceramic sticks in the container. Before casting the encased in the container wrapped ceramic sticks, the shadow mask is removed.
  • a manufactured according to the inventive ultrasonic transducer is given in claim 9.
  • the in Fig. 3 Ultrasonic transducer excerpts in cross-section has a composite body 12 with a plurality of small ceramic elements 11 of piezoelectric or electrostrictive ceramic, which are firmly embedded in plastic and extending between top and bottom 121, 122 of the composite body 12.
  • the round or square and full or hollow cross-sectional profile having ceramic elements 11 have a columnar shape and are substantially parallel to each other. However, by a slight alignment disorder, the bandwidth of the ultrasonic transducer can be increased.
  • Such an ultrasonic transducer is manufactured according to the following method to reduce manufacturing costs:
  • the ceramic elements 11 with the above-mentioned profile shapes are manufactured as thin coated ceramic rods 20, whose jacket 21 consists of a plastic layer of constant layer thickness.
  • a produced by spinning ceramic yarn 22 the thread thickness can be reduced to about 10 .mu.m, coated in an immersion bath 22 with the plastic shell 21.
  • this is the ceramic yarn 22 by means of a pair of drive rollers 24 which press force fit to the ceramic yarn 22, withdrawn from a supply roll 25 and guided by deflection rollers 26 - 29 through the dip 23, in which by suitable movement of the ceramic yarn 22nd the plastic sheath 21 is deposited from high temperature plastic in a constant layer thickness.
  • the sheathed ceramic thread 22 is cut behind the drive rollers 24 by means of a separating knife 30 in the required length for the ceramic elements 11 with a little bit of excess.
  • the separated and polarized in a hot oil bath thread sections then form the coated ceramic rods 20.
  • the ceramic thread used 22 may have solid or hollow profile, which is arbitrarily round or square.
  • the coated ceramic rods 20 are fed to a one-sided open, box-shaped container 31, which - Fig. 1 indicated by arrows 32, 33 - is subjected to shaking movements. By these shaking movements are substantially upright supplied, coated Ceramic sticks 20 in the container 31 upright packetized, as shown in Fig. 1 is shown.
  • a displaceable in the container 31 in the direction of arrow 34 dividing wall 35 always only respectively a portion of the container 31 is released for filling.
  • the coated ceramic rods 20 are thereby supplied directly to the partition wall 35, and the partition wall 35 is moved with increasing number of filled, coated ceramic rods 20 in the direction of arrow 34 until the container 31 is completely filled.
  • all sheathed ceramic rods 20 are aligned in a matrix-like manner in rows and rows, wherein they lie against one another with their plastic sheaths 21.
  • the container 31 is now in increasing casting with a plastic 36, e.g. a resin or a polyurethane (PU), wherein the plastic material 36 completely fills the cavities present between the abutting coated ceramic rods 20 and establishes a firm connection with the plastic sheaths 21 of the coated ceramic rods 20.
  • a plastic 36 e.g. a resin or a polyurethane (PU)
  • the resulting composite body 12 is removed from the container 31.
  • the container 31 removed composite body 12 is in Fig. 1 shown below in fragmentary form.
  • the composite body 12 is now ground down on its upper side 121 and / or on its lower side 122 until the ceramic rods 20 have a determined by the required transducer frequency length.
  • the holes 38 have a relation to the cross section of the coated ceramic rods 20 slightly larger hole cross-section.
  • the holes 38 are in turn arranged like a matrix in rows and rows and indicate the position of the coated ceramic rods 20 in the container 31.
  • the coated ceramic rods 20 are now filled via the shadow mask 37 into the container 31, wherein the orientation and arrangement of the coated ceramic rods 20 in the container 31 by the also the shaking movements (arrows 32, 33) exposed shadow mask 37 is already predetermined.
  • the shadow mask 37 is removed.
  • the invention is not limited to the embodiment described above, so - unlike in Fig. 1 is shown above - to produce the coated ceramic rods 20 of the ceramic thread produced by spinning 22 thread sections in the required length of the ceramic rods 20 are cut with a little oversize.
  • the trimmed thread sections are polarized and then provided by movement in an immersion bath 23 by applying a plastic layer of constant thickness with the plastic sheath 21.
  • These encased plastic strips 20 thus produced are then - as described above and in Fig. 1 shown - further processed to the composite body 12.
  • coated ceramic rods 20 and larger cross-sectional ceramic rods can be used with a diameter in the millimeter range.
  • These ceramic rods which have been cut to the prescribed length with somewhat excess, are also provided with the plastic jacket of constant thickness by movement in an immersion bath, the thickness being selected again in accordance with the filling factor of the composite body 12.
  • the cross-section of the ceramic rods 20 or ceramic rods is adapted to the clear cross section of the container 31, that in the composite body 12 for the desired working frequency range of the ultrasonic transducer optimized ratio of ceramic and plastic material is achieved.
  • the fill factor of the composite body 12 with ceramic material is set to 40-60%.
  • the dimensions of the container 31 are preferably chosen so that they correspond to the predetermined dimensions of the composite body 12, so that the abraded to nominal frequency composite body 12 only with the electrodes 13, 14 must be coated, as in Fig. 3 is shown.
  • the container 31 may have a fixed standard size, so that the composite body 12 is always supplied in fixed dimensions by the described manufacturing process. The individually required dimensions are then realized by cutting or sawing the composite body 12, and the thus processed composite body 12 is completed with the electrodes 13, 14.
  • the in Fig. 3 Ultrasonic transducer shown in section represents an electroacoustic transducer element, which is usually assembled with similar, further transducer elements to a base or array called, larger arrangement of equidistantly arranged transducer elements.
  • the horizontal and vertical opening angle of the transducer element are determined by the length and width of the composite body 12, and the operating frequency of the transducer element is determined by the height between the top and bottom 121, 122 of the composite body 12.
  • Usual lengths and width dimensions of the composite body 12 are between 1 and 50 mm.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Surgical Instruments (AREA)
  • Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)

Abstract

The method involves producing ceramic elements as piezoelectric or electrostrictive rods (20) with a constant thickness plastic coating, feeding them to a container (31) with a vibration drive to pack them vertically, filling the container with plastic, resin or polyurethane, removing the container after setting, grinding until the rods are at a length suitable for a working frequency and arranging electrodes to contact some or all rods. Independent claims are also included for the following: an ultrasonic transducer.

Description

Die Erfindung betrifft ein Verfahren zur Herstellung eines Ultraschallwandlers der im Oberbegriff des Anspruchs 1 definierten Gattung.The invention relates to a method for producing an ultrasonic transducer of the type defined in the preamble of claim 1.

Ein bekannter Ultraschallwandler dieser Art ( US 5 950 291 ), dort Composite Acoustic Transducer genannt, weist eine Vielzahl von Keramikelementen aus piezoelektrischem oder elektrostrikivem Keramikmaterial, z.B. PZT, auf, die matrixartig angeordnet sind (1-3 composites). Die Keramikelemente sind in einer steifen Polymerschicht eingebettet und bilden mit dieser einen Verbund- oder Compositekörper. Der Compositekörper ist auf seiner Ober- und Unterseite mit einer Elektrode beschichtet, welche die zwischen Ober- und Unterseite sich erstreckenden Keramikelemente kontaktieren.A known ultrasonic transducer of this type ( US 5,950,291 ), there called Composite Acoustic Transducer, has a plurality of ceramic elements of piezoelectric or electrostrictive ceramic material, such as PZT, which are arranged in a matrix (1-3 composites). The ceramic elements are embedded in a rigid polymer layer and form with this a composite or composite body. The composite body is coated on its top and bottom with an electrode, which contact the extending between the top and bottom ceramic elements.

Dieser Ultraschallwandler wird in der Weise gefertigt, daß ein Keramikkörper, der ein Array von einzelnen, von einem Keramiksockel rechtwinklig abstehenden, säulenartigen Keramikelementen darstellt, in eine Gußform eingesetzt und ein Polymer in die Gußform bis zu einer bestimmten Höhe eingefüllt wird, wobei das Polymer die Freiräume zwischen den Keramikelementen ausfüllt. Nach Aushärten des Kunststoffes bildet sich auf dem Keramiksockel eine den Keramiksockel überdeckende und die Keramikelemente in deren unteren Bereich umschließende, feste Kunststoffschicht. Der in dieser Weise teilweise vergossene Keramikkörper wird der Gußform entnommen und um 180° gedreht wieder so in die Gußform eingesetzt, daß die freien Enden der Keramikelemente sich am Boden der Gußform abstützen. Dann wird wiederum das Polymer in die Gußform bis zu einer bestimmten Schichthöhe eingefüllt. Nach Erhärten dieser Kunststoffschicht wird der vergossene Keramikkörper der Gußform entnommen und der Keramiksockel abgetrennt. Der so entstandene Verbundkörper wird auf der Ober- und Unterseite mit den Elektroden beschichtet.This ultrasonic transducer is manufactured by inserting a ceramic body constituting an array of individual pillar-like ceramic members projecting perpendicularly from a ceramic base into a mold and filling a polymer in the mold to a certain height, the polymer melting the mold Free spaces between the ceramic elements fills. After curing of the plastic forms a ceramic base on the ceramic base covering and the ceramic elements in the lower area enclosing, solid plastic layer. The partially cast in this way ceramic body is removed from the mold and rotated by 180 ° again inserted into the mold so that the free ends of the ceramic elements are supported on the bottom of the mold. Then, in turn, the polymer is poured into the mold to a certain layer height. After hardening of this plastic layer of the cast ceramic body of the mold is removed and removed the ceramic base. The resulting composite body is coated on the top and bottom with the electrodes.

Der Keramikkörper mit der Vielzahl von vom Keramiksockel abstehenden Keramikelementen wird entweder mittels eines Gießverfahrens oder durch Sägen eines Keramikblocks gewonnen. Im letzteren Fall werden die Sägeschnitt kreuzweise eingebracht und zwar nur so tief, daß noch der durchgehende untere Keramiksockel verbleibt. Das Gießverfahren erzwingt eine Konizität der Keramikelemente, damit der Keramikkörper entformt werden kann, so daß die Keramikelemente nicht mit über ihre Länge konstantem Querschnitt ausgeführt werden können. Der Nachteil des Sägeverfahrens liegt in der hohen Ausschußrate begründet, da infolge der Sprödigkeit des Keramikmaterials sehr leicht einzelne der gesägten Keramikelemente ausbrechen, wodurch der gesamte Keramikkörper unbrauchbar wird.The ceramic body having the plurality of ceramic members protruding from the ceramic base is obtained either by a casting method or by sawing a ceramic block. In the latter case, the saw cut are introduced crosswise and although only so deep that still the continuous lower ceramic base remains. The casting process forces a conicity of the ceramic elements so that the ceramic body can be removed from the mold so that the ceramic elements can not be designed with a constant cross section over their length. The disadvantage of the sawing process is due to the high rejection rate, since due to the brittleness of the ceramic material very easily break out of the sawed ceramic elements, whereby the entire ceramic body is unusable.

Aus Smith, "Composite piezoelectric materials for medical ultrasonic imaging transducers-a review" (ISAF '86. PROCEEDINGS OF THE SIXTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS,NEW YORK, Seiten 249-256 ) ist ein Ultraschallwandler bekannt mit einer Vielzahl von in einem Verbundkörper aus Kunststoff eingebetteten Keramikelemente, gefertigt aus einzelnen Keramikstäbchen.Out Smith, "Composite Piezoelectric Materials for Medical Ultrasonic Imaging Transducers-A Review" (ISAF '86, PROCEEDINGS OF THE SIXTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, NEW YORK, pp. 249-256 An ultrasonic transducer is known with a plurality of ceramic elements embedded in a plastic composite body made of individual ceramic rods.

Der Erfindung liegt die Aufgabe zugrunde, das Verfahren zur Herstellung des eingangs beschriebenen Ultraschallwandlers bei geringer Ausschußquote zu vereinfachen und kostengünstiger zu gestalten, um die Fertigungskosten für einen solchen, einen Massenartikel darstellenden Wandler zu senken.The invention has for its object to simplify the process for the preparation of the ultrasonic transducer described above with low rejection rate and cheaper to design in order to reduce the manufacturing cost of such, a mass-produced performing converter.

Die Aufgabe ist erfindungsgemäß durch die Merkmale im Anspruch 1 gelöst.The object is achieved by the features in claim 1.

Das erfindungsgemäße Verfahren hat den Vorteil, daß die mit Kunststoff ummantelten Keramikstäbchen, deren Querschnittsprofil rund oder eckig und ein Voll- oder Hohlprofil sein kann, durch einfache Rüttelbewegungen in aufrechter Stellung matrixartig aneinandergereiht werden, wobei der Kunststoffmantel mit seiner annähernd konstanten Dicke einen ausreichend konstanten Abstand zwischen den einzelnen Keramikstäbchen gewährleistet. Der in den Lücken zwischen den aneinandergereihten Keramikstäbchen im steigenden Guß eingefüllte Kunststoff, vorzugsweise ein Polymer, z.B. Harz oder Polyurethan, bindet nach Aushärten die ummantelten Keramikstäbchen fest aneinander und ergibt einen Verbundkörper, der entweder bereits die gewünschte Form aufweist oder zu der gewünschten Form zugeschnitten oder zugesägt werden kann.The inventive method has the advantage that the plastic coated with ceramic rods whose cross-sectional profile may be round or square and a solid or hollow profile, are lined up in a matrix-like manner by simple shaking in an upright position, the plastic sheath with its approximately constant thickness a sufficiently constant distance guaranteed between the individual ceramic rods. The plastic filled in the gaps between the juxtaposed ceramic rods in increasing casting, preferably a polymer, e.g. Resin or polyurethane, after curing, firmly bonds the jacketed ceramic rods to one another and results in a composite which either already has the desired shape or can be cut or sawn to the desired shape.

Zweckmäßige Ausführungsformen des erfindungsgemäßen Verfahrens mit vorteilhaften Weiterbildungen und Ausgestaltungen der Erfindung ergeben sich aus den weiteren Ansprüchen.Advantageous embodiments of the method according to the invention with advantageous developments and embodiments of the invention will become apparent from the other claims.

Gemäß einer vorteilhaften Ausführungsform der Erfindung werden die kunststoffummantelten Keramikstäbchen in der Weise gewonnen, daß von durch Spinnen hergestellten Keramikfäden Fadenabschnitte in der geforderten Länge der Keramikstäbchen mit Übermaß abgeschnitten, polarisiert und letztere durch Bewegen in einem Tauchbad mit einer gleichmäßigen Kunststoffschicht versehen werden.According to an advantageous embodiment of the invention, the plastic-coated ceramic rods are obtained in such a way that cuts of ceramic fibers produced by spinning thread sections in the required length of the ceramic rods with excess, polarized and the latter are provided by moving in a dip with a uniform layer of plastic.

Gemäß einer alternativen Ausführungsform der Erfindung können die Keramikfäden auch zuerst in einem Tauchbad mit der dickenkonstanten Kunststoffschicht ummantelt werden und davon dann die fertig ummantelten Keramikstäbchen bildende Fadenabschnitte in der geforderten Länge mit Übermaß abgeschnitten werden. In diesem Fall muß für die Ummantelung ein hochtemperaturfester Kunststoff gewählt werden, da die ummantelten Keramikstäbchen noch in einem heißen Ölbad polarisiert werden müssen.According to an alternative embodiment of the invention, the ceramic filaments can also be first encased in an immersion bath with the thickness-constant plastic layer and then cut from the finished coated ceramic rods forming thread sections in the required length with oversize. In this case, a high temperature resistant plastic must be chosen for the sheath, since the coated ceramic rods still have to be polarized in a hot oil bath.

Gemäß einer vorteilhaften Ausführungsform der Erfindung wird der den Rüttelbewegungen ausgesetzte Behälter mit einer Lochmaske abgedeckt, deren Löcher einen etwas größeren Lochquerschnitt besitzen als der Querschnitt der ummantelten Keramikstäbchen. Durch eine solche Lochmaske wird das vertikale Ausrichten und Paketieren der ummantelten Keramikstäbchen im Behälter erleichtert. Vor Vergießen der im Behälter paketierten, ummantelten Keramikstäbchen wird die Lochmaske wieder entfernt.According to an advantageous embodiment of the invention, the container subjected to the shaking movements is covered with a shadow mask whose holes have a slightly larger hole cross section than the cross section of the coated ceramic rods. Such a shadow mask facilitates the vertical alignment and packaging of the coated ceramic sticks in the container. Before casting the encased in the container wrapped ceramic sticks, the shadow mask is removed.

Ein nach dem erfindungsgemäßen Verfahren gefertigter Ultraschallwandler ist in Anspruch 9 angegeben.A manufactured according to the inventive ultrasonic transducer is given in claim 9.

Die Erfindung ist anhand eines in der Zeichnung dargestellten Ausführungsbeispiels im folgenden näher beschrieben. Es zeigen:

Fig. 1
eine schematisierte Darstellung des Verfahrensablaufs bei der Herstellung eines Ultraschallwandlers,
Fig. 2
ausschnittweise eine Draufsicht eines nach dem Verfahren in Fig. 1 hergestellten Verbundkörpers des Ultraschallwandlers,
Fig. 3
ausschnittweise einen Schnitt des endgefertigten, kompletten Ultraschallwandlers gemäß Schnittlinie III - III in Fig. 2,
Fig. 4
eine Modifikation des Herstellungsverfahrens gemäß Fig. 1,
Fig. 5
ausschnittweise eine perspektivische Draufsicht eines Ultraschallwandlers gemäß einem weiteren Ausführungsbeispiel.
The invention is described in more detail below with reference to an embodiment shown in the drawing. Show it:
Fig. 1
a schematic representation of the procedure in the manufacture of an ultrasonic transducer,
Fig. 2
a detail of a top view of a process according to Fig. 1 manufactured composite body of the ultrasonic transducer,
Fig. 3
a section of the finished, complete ultrasonic transducer according to section line III - III in Fig. 2 .
Fig. 4
a modification of the manufacturing method according to Fig. 1 .
Fig. 5
a perspective view in perspective of an ultrasonic transducer according to another embodiment.

Der in Fig. 3 ausschnittweise im Querschnitt skizzierte Ultraschallwandler weist einen Verbundkörper 12 mit einer Vielzahl von kleinen Keramikelementen 11 aus piezoelektrischer oder elektrostriktiver Keramik auf, die voneinander beabstandet in Kunststoff fest eingebettet sind und sich zwischen Ober- und Unterseite 121, 122 des Verbundkörpers 12 erstrecken. Die rundes oder eckiges und volles oder hohles Querschnittsprofil aufweisenden Keramikelemente 11 haben Säulenform und verlaufen im wesentlichen parallel zueinander. Durch eine leichte Unordnung in der Ausrichtung kann jedoch die Bandbreite des Ultraschallwandlers erhöht werden. Auf der Ober- und Unterseite 121, 122 des Verbundkörpers 12, in denen die Stirnflächen der Wandlerelemente 11 jeweils frei zugänglich liegen, ist jeweils eine Elektrode 13, 14 in Form eines Films aus elektrisch leitendem Material aufgebracht, der im Ausführungsbeispiel der Fig. 3 die beiden Seiten vollständig überdeckt und alle Keramikelemente 11 kontaktiert.The in Fig. 3 Ultrasonic transducer excerpts in cross-section has a composite body 12 with a plurality of small ceramic elements 11 of piezoelectric or electrostrictive ceramic, which are firmly embedded in plastic and extending between top and bottom 121, 122 of the composite body 12. The round or square and full or hollow cross-sectional profile having ceramic elements 11 have a columnar shape and are substantially parallel to each other. However, by a slight alignment disorder, the bandwidth of the ultrasonic transducer can be increased. On the top and bottom 121, 122 of the composite body 12, in which the end faces of the transducer elements 11 are each freely accessible, in each case one electrode 13, 14 applied in the form of a film of electrically conductive material, which in the embodiment of Fig. 3 the two sides completely covered and contacted all the ceramic elements 11.

Ein solcher Ultraschallwandler wird zur Reduzierung der Fertigungskosten nach folgendem Verfahren hergestellt:Such an ultrasonic transducer is manufactured according to the following method to reduce manufacturing costs:

Die Keramikelemente 11 mit vorgenannten Profilformen werden als dünne ummantelte Keramikstäbchen 20 gefertigt, deren Mantel 21 aus einer Kunststoffschicht konstanter Schichtdicke besteht. Wie in Fig. 1 für das hier vorgestellte Ausführungsbeispiel des Fertigungsvorgangs illustriert ist, wird ein durch Spinnen hergestellter Keramikfaden 22, dessen Fadenstärke bis auf ca. 10µm reduziert werden kann, in einem Tauchbad 22 mit dem Kunststoffmantel 21 beschichtet. Wie beispielhaft in Fig. 1 angedeutet ist, wird hierzu der Keramikfaden 22 mittels eines Paars von Antriebsrollen 24, die sich an den Keramikfaden 22 kraftschlüssig andrücken, von einem Vorratswickel 25 abgezogen und mittels Umlenkrollen 26 - 29 durch das Tauchbad 23 geführt, in dem durch geeignete Bewegung an den Keramikfaden 22 der Kunststoffmantel 21 aus Hochtemperaturkunststoff in konstanter Schichtdicke angelagert wird. Der ummantelte Keramikfaden 22 wird hinter den Antriebsrollen 24 mittels eines Trennmessers 30 in der für die Keramikelemente 11 geforderten Länge mit etwas Übermaß abgeschnitten. Die abgetrennten und in einem heißen Ölbad polarisierten Fadenabschnitte bilden dann die ummantelten Keramikstäbchen 20. Der verwendete Keramikfaden 22 kann Voll- oder Hohlprofil aufweisen, das beliebig rund oder eckig ausgeführt ist.The ceramic elements 11 with the above-mentioned profile shapes are manufactured as thin coated ceramic rods 20, whose jacket 21 consists of a plastic layer of constant layer thickness. As in Fig. 1 is illustrated for the presented here embodiment of the manufacturing process, a produced by spinning ceramic yarn 22, the thread thickness can be reduced to about 10 .mu.m, coated in an immersion bath 22 with the plastic shell 21. As exemplified in Fig. 1 is indicated, this is the ceramic yarn 22 by means of a pair of drive rollers 24 which press force fit to the ceramic yarn 22, withdrawn from a supply roll 25 and guided by deflection rollers 26 - 29 through the dip 23, in which by suitable movement of the ceramic yarn 22nd the plastic sheath 21 is deposited from high temperature plastic in a constant layer thickness. The sheathed ceramic thread 22 is cut behind the drive rollers 24 by means of a separating knife 30 in the required length for the ceramic elements 11 with a little bit of excess. The separated and polarized in a hot oil bath thread sections then form the coated ceramic rods 20. The ceramic thread used 22 may have solid or hollow profile, which is arbitrarily round or square.

Die ummantelten Keramikstäbchen 20 werden einem einseitig offenen, kastenförmigen Behälter 31 zugeführt, der - wie in Fig. 1 durch Pfeile 32, 33 angedeutet ist - Rüttelbewegungen ausgesetzt ist. Durch diese Rüttelbewegungen werden die im wesentlichen aufrecht zugeführten, ummantelten Keramikstäbchen 20 in dem Behälter 31 aufrechtstehend paketiert, wie dies in Fig. 1 dargestellt ist. Um das Befüllen des Behälters 31 mit Keramikstäbchen 20, das vergleichbar ist mit dem automatisierten Verpacken von Zigaretten in einer Zigarettenschachtel, unabhängig von der Größe des Behälters 31 zuverlässig zu gestalten, wird mittels einer im Behälter 31 in Richtung Pfeil 34 verschiebbaren Trennwand 35 immer nur jeweils ein Abschnitt des Behälters 31 zur Befüllung freigegeben. Die ummantelten Keramikstäbchen 20 werden dabei unmittelbar an der Trennwand 35 zugeführt, und die Trennwand 35 wird mit zunehmender Anzahl von eingefüllten, ummantelten Keramikstäbchen 20 in Richtung Pfeil 34 verschoben, bis der Behälter 31 vollständig gefüllt ist.The coated ceramic rods 20 are fed to a one-sided open, box-shaped container 31, which - Fig. 1 indicated by arrows 32, 33 - is subjected to shaking movements. By these shaking movements are substantially upright supplied, coated Ceramic sticks 20 in the container 31 upright packetized, as shown in Fig. 1 is shown. In order to make the filling of the container 31 with ceramic rods 20, which is comparable to the automated packaging of cigarettes in a cigarette box, regardless of the size of the container 31 reliable, by means of a displaceable in the container 31 in the direction of arrow 34 dividing wall 35 always only respectively a portion of the container 31 is released for filling. The coated ceramic rods 20 are thereby supplied directly to the partition wall 35, and the partition wall 35 is moved with increasing number of filled, coated ceramic rods 20 in the direction of arrow 34 until the container 31 is completely filled.

Am Schluß des Befüllvorgangs sind alle ummantelten Keramikstäbchen 20 matrixartig in Reihen und Zeilen ausgerichtet, wobei sie mit ihren Kunststoffmänteln 21 aneinanderliegen. Der Behälter 31 wird nunmehr im steigenden Guß mit einem Kunststoff 36, z.B. einem Harz oder einem Polyurethan (PU), aufgefüllt, wobei der Kunststoff 36 die zwischen den aneinanderliegenden, ummantelten Keramikstäbchen 20 vorhandenen Hohlräume vollständig ausfüllt und eine feste Verbindung mit den Kunststoffmänteln 21 der ummantelte Keramikstäbchen 20 herstellt.At the end of the filling process, all sheathed ceramic rods 20 are aligned in a matrix-like manner in rows and rows, wherein they lie against one another with their plastic sheaths 21. The container 31 is now in increasing casting with a plastic 36, e.g. a resin or a polyurethane (PU), wherein the plastic material 36 completely fills the cavities present between the abutting coated ceramic rods 20 and establishes a firm connection with the plastic sheaths 21 of the coated ceramic rods 20.

Nach Aushärten des eingegossenen Kunststoffs 36 wird der so entstandene Verbundkörper 12 dem Behälter 31 entnommen. Der dem Behälter 31 entnommene Verbundkörper 12 ist in Fig. 1 unten ausschnittweise dargestellt. Um die geforderte Arbeitsfrequenz des Ultraschallwandlers zu erreichen, wird nunmehr der Verbundkörper 12 auf seiner Oberseite 121 und/oder auf seiner Unterseite 122 soweit abgeschliffen, bis die Keramikstäbchen 20 eine durch die geforderte Wandlerfrequenz bestimmte Länge aufweisen.After curing of the cast-in plastic 36, the resulting composite body 12 is removed from the container 31. The container 31 removed composite body 12 is in Fig. 1 shown below in fragmentary form. In order to achieve the required operating frequency of the ultrasonic transducer, the composite body 12 is now ground down on its upper side 121 and / or on its lower side 122 until the ceramic rods 20 have a determined by the required transducer frequency length.

Zur Beschleunigung des Befüllvorgangs des Behälters 31 mit ummantelten Keramikstäbchen 20 kann - wie dies in Fig. 4 dargestellt ist - die offene Oberseite des Behälters 31 mit einer Lochmaske 37 abgedeckt werden, deren Löcher 38 einen gegenüber dem Querschnitt der ummantelten Keramikstäbchen 20 etwas größeren Lochquerschnitt aufweisen. Die Löcher 38 sind wiederum matrixartig in Zeilen und Reihen angeordnet und geben die Lage der ummantelten Keramikstäbchen 20 im Behälter 31 vor. Die ummantelten Keramikstäbchen 20 werden nunmehr über die Lochmaske 37 in den Behälter 31 eingefüllt, wobei die Ausrichtung und Anordnung der ummantelten Keramikstäbchen 20 im Behälter 31 durch die ebenfalls den Rüttelbewegungen (Pfeile 32, 33) ausgesetzte Lochmaske 37 bereits vorbestimmt wird. Zum Einfüllen des Kunststoffs 36 in den mit den ummantelten Keramikstäbchen 20 gefüllten Behälter 31 wird die Lochmaske 37 entfernt.To accelerate the filling process of the container 31 with coated ceramic rods 20 can - as in Fig. 4 is shown - the open top of the container 31 are covered with a shadow mask 37, the holes 38 have a relation to the cross section of the coated ceramic rods 20 slightly larger hole cross-section. The holes 38 are in turn arranged like a matrix in rows and rows and indicate the position of the coated ceramic rods 20 in the container 31. The coated ceramic rods 20 are now filled via the shadow mask 37 into the container 31, wherein the orientation and arrangement of the coated ceramic rods 20 in the container 31 by the also the shaking movements (arrows 32, 33) exposed shadow mask 37 is already predetermined. To fill the plastic 36 in the filled with the coated ceramic rods 20 container 31, the shadow mask 37 is removed.

Die Erfindung ist nicht auf das vorstehend beschriebene Ausführungsbeispiel beschränkt, so können - anders als in Fig. 1 oben dargestellt ist - zur Fertigung der ummantelten Keramikstäbchen 20 von dem durch Spinnen hergestellten Keramikfaden 22 Fadenabschnitte in der geforderten Länge der Keramikstäbchen 20 mit etwas Übermaß abgeschnitten werden. Die abgelängten Fadenabschnitte werden polarisiert und dann durch Bewegung in einem Tauchbad 23 durch Aufbringen einer Kunststoffschicht konstanter Schichtdicke mit dem Kunststoffmantel 21 versehen. Diese solchermaßen hergestellten ummantelten Kunststoffstäbchen 20 werden dann - wie vorstehend beschrieben und in Fig. 1 dargestellt - zu dem Verbundkörper 12 weiterverarbeitet.The invention is not limited to the embodiment described above, so - unlike in Fig. 1 is shown above - to produce the coated ceramic rods 20 of the ceramic thread produced by spinning 22 thread sections in the required length of the ceramic rods 20 are cut with a little oversize. The trimmed thread sections are polarized and then provided by movement in an immersion bath 23 by applying a plastic layer of constant thickness with the plastic sheath 21. These encased plastic strips 20 thus produced are then - as described above and in Fig. 1 shown - further processed to the composite body 12.

Anstelle der aus Keramikfäden gewonnenen, recht dünnen, ummantelten Keramikstäbchen 20 können auch querschittsgrößere Keramikstäbe mit einem Durchmesser im Millimeterbereich verwendet werden. Auch diese auf die vorgeschriebene Länge mit etwas Übermaß zugeschnittenen Keramikstäbe werden durch Bewegung in einem Tauchbad mit dem Kunststoffmantel konstanter Dicke versehen, wobei die Dicke wieder entsprechend dem Füllfaktor des Verbundkörpers 12 gewählt wird. Grundsätzlich wird in allen Fällen der Querschnittsbemessung der Keramikelemente 11 der Querschnitt der Keramikstäbchen 20 oder Keramikstäbe so an den lichten Querschnitt des Behälters 31 angepaßt, daß in dem Verbundkörper 12 ein für den gewünschten Arbeitsfrequenzbereich des Ultraschallwandlers optimiertes Verhältnis von Keramik- und Kunststoffmaterial erzielt wird. Bei einem relativ großen Arbeitsfrequenzbereich des Ultraschallwandlers mit einer Mittenfrequenz von ca. 100 kHz wird beispielsweise der Füllfaktor des Verbundkörpers 12 mit Keramikmaterial zu 40 - 60 % festgelegt.Instead of the ceramic fibers obtained, quite thin, coated ceramic rods 20 and larger cross-sectional ceramic rods can be used with a diameter in the millimeter range. These ceramic rods, which have been cut to the prescribed length with somewhat excess, are also provided with the plastic jacket of constant thickness by movement in an immersion bath, the thickness being selected again in accordance with the filling factor of the composite body 12. In principle, in all cases of the cross-sectional dimensioning of the ceramic elements 11, the cross-section of the ceramic rods 20 or ceramic rods is adapted to the clear cross section of the container 31, that in the composite body 12 for the desired working frequency range of the ultrasonic transducer optimized ratio of ceramic and plastic material is achieved. With a relatively large operating frequency range of the ultrasonic transducer with a center frequency of about 100 kHz, for example, the fill factor of the composite body 12 with ceramic material is set to 40-60%.

Die Abmessungen des Behälters 31 werden vorzugsweise so gewählt, daß sie den vorgegebenen Abmessungen des Verbundkörpers 12 entsprechen, so daß der auf Nennfrequenz abgeschliffene Verbundkörper 12 nur noch mit den Elektroden 13, 14 beschichtet werden muß, wie dies in Fig. 3 dargestellt ist. Alternativ kann der Behälter 31 eine feste Normgröße aufweisen, so daß durch den beschriebenen Herstellvorgang der Verbundkörper 12 immer in festen Abmessungen geliefert wird. Die individuell geforderten Abmessungen werden dann durch Schneiden oder Sägen des Verbundkörpers 12 realisiert, und der so bearbeitete Verbundkörper 12 wird mit den Elektroden 13, 14 komplettiert.The dimensions of the container 31 are preferably chosen so that they correspond to the predetermined dimensions of the composite body 12, so that the abraded to nominal frequency composite body 12 only with the electrodes 13, 14 must be coated, as in Fig. 3 is shown. Alternatively, the container 31 may have a fixed standard size, so that the composite body 12 is always supplied in fixed dimensions by the described manufacturing process. The individually required dimensions are then realized by cutting or sawing the composite body 12, and the thus processed composite body 12 is completed with the electrodes 13, 14.

Der in Fig. 3 im Schnitt dargestellte Ultraschallwandler stellt ein elektroakustisches Wandlerelement dar, das üblicherweise mit gleichartigen, weiteren Wandlerelementen zu einer Basis oder Array genannten, größeren Anordnung äquidistant angeordneter Wandlerelemente zusammengestellt wird. Der horizontale und vertikale Öffnungswinkel des Wandlerelements werden dabei von Länge und Breite des Verbundkörpers 12 bestimmt, und die Arbeitsfrequenz des Wandlerelements wird durch die Höhe zwischen Ober- und Unterseite 121, 122 des Verbundkörpers 12 vorgegeben. Übliche Längen und Breitenabmessungen des Verbundkörpers 12 liegen dabei zwischen 1 und 50 mm.The in Fig. 3 Ultrasonic transducer shown in section represents an electroacoustic transducer element, which is usually assembled with similar, further transducer elements to a base or array called, larger arrangement of equidistantly arranged transducer elements. The horizontal and vertical opening angle of the transducer element are determined by the length and width of the composite body 12, and the operating frequency of the transducer element is determined by the height between the top and bottom 121, 122 of the composite body 12. Usual lengths and width dimensions of the composite body 12 are between 1 and 50 mm.

In dem Ultraschallwandler können aber auch eine Mehrzahl von solchen Wandlerelementen realisiert werden, wenn die Längen- und Breitenabmessung des Verbundkörpers 12 größer gemacht und die Elektroden 13, 14 strukturiert werden, so daß immer nur Gruppen von Keramikstäbchen 20 stirnseitig kontaktiert sind. Die Beschichtung des Verbundkörpers 12 mit den Elektroden 131 - 134 auf seiner Oberseite 121 und mit den Elektroden 141 - 144 auf der Unterseite 122 kann dabei so vorgenommen werden, wie dies in Fig. 5 schematisiert dargestellt ist. Anstelle dieser linearen Strukturierung der Elektroden 13, 14 können je nach Anwendungsfall auch andere Strukturierungen, z.B. eine ringförmige, in Betracht kommen.In the ultrasonic transducer but also a plurality of such transducer elements can be realized when the length and width dimension of the composite body 12 made larger and the electrodes 13, 14 are structured, so that only groups of ceramic rods 20 are contacted end face. The coating of the composite body 12 with the electrodes 131-134 on its upper side 121 and with the electrodes 141-144 on the lower side 122 can be carried out as described in US Pat Fig. 5 is shown schematically. Instead of this linear structuring of the electrodes 13, 14, depending on the application, other structures, for example an annular one, can also be considered.

Claims (10)

  1. Method for producing an ultrasonic transducer which has a composite body (12) consisting of plastic with a multiplicity of embedded ceramic elements (11) which extend between its topside and underside (121, 122) and consist of piezoelectric or electrostrictive ceramic and electrodes (13, 14) which contact the ceramic elements (11) on the topside and underside (121, 122) of the composite body (12), characterized by the following method steps:
    - the ceramic elements (11) are manufactured as ceramic sticks (20) encased with a plastic casing (21) of constant thickness,
    - the encased ceramic sticks (20) are delivered to a container (31) open on one side and exposed to vibrating movements (32, 33) and are packed together, upright, therein as a result of the vibrating movements,
    - the container (31) filled with the encased ceramic sticks (20) is filled with a plastic (36), for example resin or polyurethane, by uphill casting,
    - the composite body (12) that is obtained is removed, after curing, from the container (31) and is ground down on its topside and/or underside (121, 122) until the ceramic sticks (20) have a length determined by the operating frequency of the ultrasonic transducer, and
    - the electrodes (13, 14) are applied to the topside and underside (121, 122) of the composite body (12) such that they contact all or only groups of the ceramic sticks (20).
  2. Method according to Claim 1, characterized in that the internal dimensions of the container (31) are defined correspondingly to the desired dimensions of the composite body (12).
  3. Method according to Claim 1, characterized in that the internal dimensions of the container (31) are defined independently of the dimensions of the composite body (12), and in that the shape of the composite body (12) is subsequently cut to size.
  4. Method according to one of Claims 1-3, characterized in that the container (31) exposed to the vibrating movements is covered with a holed mask (37) which predetermines the position of the encased ceramic sticks (20) in the container (31) and the holes (38) of which have a hole cross section somewhat larger than the cross section of the encased ceramic sticks (20), and in that the holed mask (37) is removed before the plastic (36) is introduced.
  5. Method according to one of Claims 1-4, characterized in that the encased ceramic sticks (20) are cut off in the required length, with oversize, from ceramic threads (22) produced by spinning and which are encased with a plastic layer of constant layer thickness in an immersion bath (23).
  6. Method according to one of Claims 1-4, characterized in that, in order to manufacture the encased ceramic sticks (20) from ceramic threads (22) produced by spinning, thread portions are cut off in the required length, with oversize, and are provided with the plastic casing (21) as a result of movement in an immersion bath (23).
  7. Method according to one of Claims 1-6, characterized in that the cross section of the ceramic sticks (20) is adapted to the clear cross section of the container (31) so as to achieve in the composite body (12) a ratio of ceramic material to plastic material which is optimized in terms of the operating frequency range of the ultrasonic transducer.
  8. Method according to Claim 7, characterized in that the cross section of the ceramic sticks (20) is selected, taking into account the required mutual spacings predetermined by the thickness of the plastic casings (21), such that the filling factor of the ceramic material in the composite body (12) is 40-60%.
  9. Ultrasonic transducer with a composite body (12) consisting of plastic which has a multiplicity of ceramic elements (11) which are embedded in the plastic, extend between the topside and underside (121, 122) of the composite body (12) and consist of piezoelectric or electrostrictive ceramic, and with electrodes (13, 14) which contact the ceramic elements (11) on the topside and underside (121, 122) of the composite body (12), characterized in that the ceramic elements (11) are encased ceramic sticks (20) which are provided by premanufacture with a plastic casing (21) of constant thickness and which are aligned up so as to abut one another directly in a matrix-like manner, in that the free space remaining between the encased ceramic sticks (20) is filled with a plastic, for example resin or polyurethane, and in that the electrodes (13, 14) contact all or only groups of the encased ceramic sticks (20).
  10. Ultrasonic transducer according to Claim 9, characterized in that the cross sections of the casing and of the ceramic of the encased ceramic sticks (20) are coordinated with one another such that the composite body (12) has a ceramic filling factor which is optimal for the operating frequency range (bandwidth) of the ultrasonic transducer.
EP01121973A 2000-10-24 2001-09-13 Method of manufacturing an ultrasonic transducer Expired - Lifetime EP1201322B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10052636A DE10052636B4 (en) 2000-10-24 2000-10-24 Method of manufacturing an ultrasonic transducer
DE10052636 2000-10-24

Publications (3)

Publication Number Publication Date
EP1201322A2 EP1201322A2 (en) 2002-05-02
EP1201322A3 EP1201322A3 (en) 2009-03-18
EP1201322B1 true EP1201322B1 (en) 2010-03-03

Family

ID=7660849

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01121973A Expired - Lifetime EP1201322B1 (en) 2000-10-24 2001-09-13 Method of manufacturing an ultrasonic transducer

Country Status (5)

Country Link
US (1) US6574842B2 (en)
EP (1) EP1201322B1 (en)
AT (1) ATE459431T1 (en)
DE (2) DE10052636B4 (en)
DK (1) DK1201322T3 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7867178B2 (en) * 2003-02-26 2011-01-11 Sanuwave, Inc. Apparatus for generating shock waves with piezoelectric fibers integrated in a composite
DE10323493B3 (en) * 2003-05-23 2004-07-15 Atlas Elektronik Gmbh Underwater antenna for acoustic monitoring of sea region e.g. for ship, using electroacoustic transducers embedded in acoustically transparent material
US7082655B2 (en) * 2003-12-18 2006-08-01 Ge Inspection Technologies, Lp Process for plating a piezoelectric composite
DE102005032212B3 (en) * 2005-07-09 2006-10-19 Atlas Elektronik Gmbh Antenna for underwater has an electro-acoustic modulator system having a composite body with ceramic elements embedded in a polymer and made from piezoelectric/electrostrictive ceramic material
FR2889403B1 (en) * 2005-07-29 2007-11-09 Thales Sa PROCESS FOR PRODUCING AN ACOUTICAL TRANSDUCER
DE102006015493B4 (en) 2006-04-03 2010-12-23 Atlas Elektronik Gmbh Electroacoustic transducer
US7812508B2 (en) * 2008-02-06 2010-10-12 Innowattech Ltd. Power harvesting from railway; apparatus, system and method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995003632A1 (en) 1993-07-19 1995-02-02 Fiber Materials, Inc. Method of fabricating a piezocomposite material
US5539965A (en) 1994-06-22 1996-07-30 Rutgers, The University Of New Jersey Method for making piezoelectric composites
US5592730A (en) 1994-07-29 1997-01-14 Hewlett-Packard Company Method for fabricating a Z-axis conductive backing layer for acoustic transducers using etched leadframes
US6225728B1 (en) * 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5929337A (en) * 1994-11-11 1999-07-27 M & A Packaging Services Limited Non-mechanical contact ultrasound system for monitoring contents of a moving container
JPH08323748A (en) * 1995-05-29 1996-12-10 Toho Rayon Co Ltd Molding material and manufacture thereof
US5691960A (en) * 1995-08-02 1997-11-25 Materials Systems, Inc. Conformal composite acoustic transducer panel and method of fabrication thereof
DE19743859C2 (en) * 1997-10-04 2000-11-16 Stn Atlas Elektronik Gmbh Method of manufacturing a composite ultrasonic transducer
WO1999048621A2 (en) * 1998-03-26 1999-09-30 Exogen, Inc. Arrays made from flexible transducer elements

Also Published As

Publication number Publication date
EP1201322A2 (en) 2002-05-02
DE10052636B4 (en) 2004-07-08
EP1201322A3 (en) 2009-03-18
US20020063495A1 (en) 2002-05-30
ATE459431T1 (en) 2010-03-15
US6574842B2 (en) 2003-06-10
DE50115369D1 (en) 2010-04-15
DK1201322T3 (en) 2010-05-17
DE10052636A1 (en) 2002-05-08

Similar Documents

Publication Publication Date Title
EP1358855B1 (en) Process for manufacturing parts by freeform laser-sintering
EP2180986B1 (en) Device and method for the production of a light-conducting component
DE2802237C2 (en) Injection mold for the production of injection molded parts consisting of at least two different plastic compounds and having at least two different areas
EP1201322B1 (en) Method of manufacturing an ultrasonic transducer
EP3374145B1 (en) Device for injection moulding and overmoulding objects
DE102018214081A1 (en) Stator for an electrical machine
DE2830472B2 (en) Process for the serial encasing of electrical components, in particular capacitors
WO2005027310A1 (en) Laminated armature core for an electric motor
EP0303058B1 (en) Method and device for producing fillings for cosmetic sticks and the like
DE19743859C2 (en) Method of manufacturing a composite ultrasonic transducer
DE1614834C2 (en) Method for producing a semiconductor arrangement
DE1729027A1 (en) Device for the production of moldings with a honeycomb structure
DE3045638C2 (en) Method and mold for manufacturing a stationary gear unit
DE1296375B (en) Method for producing an endless drive belt
DE102019007023B4 (en) Structural component and method for its manufacture
EP1785264A1 (en) Apparatus and process for making an elastic band
CH628108A5 (en) Process and apparatus for producing hollow blocks
DE19804729A1 (en) Lightweight rectangular building block with several blind slits
CH662474A5 (en) MOLDING SET AND METHOD FOR MOLDING CHOCOLATE BLOCKS.
WO2005096400A1 (en) Method and device for producing composite macrofibres
DE3714590A1 (en) Process for producing rod-shaped spacers from cement-bound material, profile for forming such spacers and device for carrying out the process
WO1999055476A1 (en) Method and device for casting three-dimensional structured objects
DE447121C (en) Device for producing elongated hollow bodies made of plastic material, such as concrete or the like, provided with recesses in the walls.
DE19650885B4 (en) Process for the preparation of ceramic-polymer composites
DE493761C (en) Process for the production of screens, in particular multi-color screens

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ATLAS ELEKTRONIK GMBH

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

17P Request for examination filed

Effective date: 20090428

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

AKX Designation fees paid

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 50115369

Country of ref document: DE

Date of ref document: 20100415

Kind code of ref document: P

REG Reference to a national code

Ref country code: DK

Ref legal event code: T3

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20100303

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100614

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100604

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100705

26N No opposition filed

Effective date: 20101206

BERE Be: lapsed

Owner name: ATLAS ELEKTRONIK G.M.B.H.

Effective date: 20100930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100930

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DK

Payment date: 20110926

Year of fee payment: 11

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100913

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100913

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100303

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20120920

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20120921

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20121010

Year of fee payment: 12

REG Reference to a national code

Ref country code: DE

Ref legal event code: R082

Ref document number: 50115369

Country of ref document: DE

Representative=s name: ,

REG Reference to a national code

Ref country code: DK

Ref legal event code: EBP

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121001

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20130913

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50115369

Country of ref document: DE

Effective date: 20140401

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20140530

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130913

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140401

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130930