EP1045454A4 - Solar cell and method of producing the same, and mask for photolithography for producing solar cell - Google Patents

Solar cell and method of producing the same, and mask for photolithography for producing solar cell

Info

Publication number
EP1045454A4
EP1045454A4 EP99945707A EP99945707A EP1045454A4 EP 1045454 A4 EP1045454 A4 EP 1045454A4 EP 99945707 A EP99945707 A EP 99945707A EP 99945707 A EP99945707 A EP 99945707A EP 1045454 A4 EP1045454 A4 EP 1045454A4
Authority
EP
European Patent Office
Prior art keywords
solar cell
producing
film
photolithography
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99945707A
Other languages
German (de)
French (fr)
Other versions
EP1045454A1 (en
Inventor
Kozo Miyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Publication of EP1045454A1 publication Critical patent/EP1045454A1/en
Publication of EP1045454A4 publication Critical patent/EP1045454A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Abstract

A high-quality solar cell the interface of which is free from contamination is disclosed. On a substrate, a transparent electrode film, an amorphous silicon film, and a metal electrode film are successively formed in multilayer and etched to a desired pattern by using a resist film having two thicknesses. Solar cell elements are insulated from each other through a predetermined protective film, and a conductive paste is applied over the protective film to electrically connect the solar cell elements in series.
EP99945707A 1998-07-27 1999-03-09 Solar cell and method of producing the same, and mask for photolithography for producing solar cell Withdrawn EP1045454A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP21073998 1998-07-27
JP21073998 1998-07-27
PCT/JP1999/001130 WO2000007249A1 (en) 1998-07-27 1999-03-09 Solar cell and method of producing the same, and mask for photolithography for producing solar cell

Publications (2)

Publication Number Publication Date
EP1045454A1 EP1045454A1 (en) 2000-10-18
EP1045454A4 true EP1045454A4 (en) 2001-10-24

Family

ID=16594321

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99945707A Withdrawn EP1045454A4 (en) 1998-07-27 1999-03-09 Solar cell and method of producing the same, and mask for photolithography for producing solar cell

Country Status (4)

Country Link
US (1) US6323056B1 (en)
EP (1) EP1045454A4 (en)
JP (1) JP4168413B2 (en)
WO (1) WO2000007249A1 (en)

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Publication number Priority date Publication date Assignee Title
DE102004024461A1 (en) * 2004-05-14 2005-12-01 Konarka Technologies, Inc., Lowell Device and method for producing an electronic component with at least one active organic layer
US7781672B2 (en) * 2004-06-01 2010-08-24 Konarka Technologies, Inc. Photovoltaic module architecture
US20070079866A1 (en) * 2005-10-07 2007-04-12 Applied Materials, Inc. System and method for making an improved thin film solar cell interconnect
US20070240759A1 (en) * 2006-04-13 2007-10-18 Applied Materials, Inc. Stacked thin film photovoltaic module and method for making same using IC processing
GB2446838A (en) * 2007-02-20 2008-08-27 David John Ruchat Photovoltaic device and manufacturing method
DE102007032283A1 (en) * 2007-07-11 2009-01-15 Stein, Wilhelm, Dr. Thin-film solar cell module and method for its production
GB2459274A (en) * 2008-04-15 2009-10-21 Renewable Energy Corp Asa Wafer based solar panels
JP5616887B2 (en) * 2008-07-16 2014-10-29 メルク パテント ゲーエムベーハー Photovoltaic module creation method
US20100323471A1 (en) * 2008-08-21 2010-12-23 Applied Materials, Inc. Selective Etch of Laser Scribed Solar Cell Substrate
KR101144808B1 (en) * 2008-09-01 2012-05-11 엘지전자 주식회사 Manufacturing Method For Thin-Film Type Solar Cell And The Same thereof
KR101531700B1 (en) * 2008-12-01 2015-06-25 주성엔지니어링(주) Method for manufacturing Thin film type Solar Cell
KR101464001B1 (en) 2008-12-15 2014-11-21 엘지전자 주식회사 Manufacturing method of solar cell and etching paste
JP2012119343A (en) * 2009-03-31 2012-06-21 Shibaura Mechatronics Corp Solar battery manufacturing method, solar battery manufacturing apparatus, and solar battery
JP2011216801A (en) * 2010-04-02 2011-10-27 Sanyo Electric Co Ltd Photoelectric converter and method for manufacturing the same
US9059347B2 (en) * 2010-06-18 2015-06-16 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and manufacturing method thereof
US9205505B2 (en) * 2010-07-22 2015-12-08 Ferro Corporation Hermetically sealed electronic device using solder bonding
GB2483922B (en) 2010-09-25 2013-11-20 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
WO2012054495A2 (en) * 2010-10-18 2012-04-26 Wake Forest University Hybrid photovoltaic devices and applications thereof
DE102010052863A1 (en) * 2010-12-01 2012-06-06 Forschungszentrum Jülich GmbH Process for the production of a solar module and a solar module
JP2013026339A (en) * 2011-07-19 2013-02-04 Fujifilm Corp Thin-film solar cell and manufacturing method thereof
WO2013020592A1 (en) 2011-08-10 2013-02-14 Schmid Technology Center Gmbh Cell array and method of making the same
KR101189309B1 (en) * 2011-10-11 2012-10-09 엘지이노텍 주식회사 Solar cell and solar cell module
KR101251841B1 (en) * 2011-11-28 2013-04-09 엘지이노텍 주식회사 Solar cell apparatus and method of fabricating the same
KR102098100B1 (en) * 2013-09-17 2020-04-08 엘지이노텍 주식회사 Solar cell and method of fabricating the same
NL2014040B1 (en) * 2014-12-23 2016-10-12 Stichting Energieonderzoek Centrum Nederland Method of making a curent collecting grid for solar cells.
TWI553892B (en) * 2015-12-31 2016-10-11 台灣中油股份有限公司 Solar cell module having perovskite donor layer
CN106340548B (en) * 2016-09-23 2018-01-23 深圳市创益科技发展有限公司 A kind of Weak light type amorphous silicon thin-film solar cells and its manufacturing process
GB2575792B (en) 2018-07-20 2021-11-03 Dyson Technology Ltd Stack for an energy storage device
JP7190556B2 (en) 2019-03-22 2022-12-15 株式会社カネカ Solar cell manufacturing method and solar cell in-process product

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758526A (en) * 1986-02-17 1988-07-19 Messerschmitt-Bolkow-Blohm Gmbh Procedure for producing an integrated system of thin-film solar cells connected in series
JPS63308316A (en) * 1987-06-10 1988-12-15 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH02189981A (en) * 1989-01-19 1990-07-25 Ricoh Co Ltd Semiconductor device and manufacture thereof
JPH04116986A (en) * 1990-09-07 1992-04-17 Canon Inc Integrated solar cell and manufacture of the same
US5147468A (en) * 1990-10-17 1992-09-15 Mitsubishi Denki Kabushiki Kaisha Photovoltaic semiconductor device and method for manufacturing the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4419530A (en) * 1982-02-11 1983-12-06 Energy Conversion Devices, Inc. Solar cell and method for producing same
JPS61229370A (en) * 1985-04-03 1986-10-13 Oki Electric Ind Co Ltd Manufacture of photo sensor element
JPS6284569A (en) * 1985-10-08 1987-04-18 Sanyo Electric Co Ltd Manufacture of photovoltaic device
JPH03151673A (en) * 1989-11-08 1991-06-27 Sanyo Electric Co Ltd Manufacture of photovoltaic device
JPH0690014A (en) * 1992-07-22 1994-03-29 Mitsubishi Electric Corp Thin solar cell and its production, etching method and automatic etching device, and production of semiconductor device
JP3537196B2 (en) * 1994-11-08 2004-06-14 松下電器産業株式会社 Method of manufacturing solar cell module
JPH08254813A (en) * 1995-03-16 1996-10-01 Fujitsu Ltd Phase shift mask and production of semiconductor device using that
JPH10161294A (en) * 1996-12-03 1998-06-19 Toppan Printing Co Ltd Halftone phase shift mask blank, halftone phase shift mask and its production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758526A (en) * 1986-02-17 1988-07-19 Messerschmitt-Bolkow-Blohm Gmbh Procedure for producing an integrated system of thin-film solar cells connected in series
JPS63308316A (en) * 1987-06-10 1988-12-15 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH02189981A (en) * 1989-01-19 1990-07-25 Ricoh Co Ltd Semiconductor device and manufacture thereof
JPH04116986A (en) * 1990-09-07 1992-04-17 Canon Inc Integrated solar cell and manufacture of the same
US5147468A (en) * 1990-10-17 1992-09-15 Mitsubishi Denki Kabushiki Kaisha Photovoltaic semiconductor device and method for manufacturing the same

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 147 (E - 741) 11 April 1989 (1989-04-11) *
PATENT ABSTRACTS OF JAPAN vol. 014, no. 467 (E - 0989) 11 October 1990 (1990-10-11) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 367 (E - 1245) 7 August 1992 (1992-08-07) *
See also references of WO0007249A1 *

Also Published As

Publication number Publication date
US6323056B1 (en) 2001-11-27
EP1045454A1 (en) 2000-10-18
JP4168413B2 (en) 2008-10-22
WO2000007249A1 (en) 2000-02-10

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