EP1021653B1 - Gekühlte schraubenvakuumpumpe - Google Patents

Gekühlte schraubenvakuumpumpe Download PDF

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Publication number
EP1021653B1
EP1021653B1 EP98937514A EP98937514A EP1021653B1 EP 1021653 B1 EP1021653 B1 EP 1021653B1 EP 98937514 A EP98937514 A EP 98937514A EP 98937514 A EP98937514 A EP 98937514A EP 1021653 B1 EP1021653 B1 EP 1021653B1
Authority
EP
European Patent Office
Prior art keywords
rotor
pump according
pump
cooling
coolant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98937514A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1021653A1 (de
Inventor
Rudolf Bahnen
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1021653A1 publication Critical patent/EP1021653A1/de
Application granted granted Critical
Publication of EP1021653B1 publication Critical patent/EP1021653B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies

Definitions

  • the invention relates to a cooled screw vacuum pump with two rotating systems, each consist of a screw rotor and a shaft with a flying rotor bearing on every shaft has two spaced apart bearings, and with a cavity open on the bearing side in each rotor, in which is each a rotor internal cooling (see FR-A-1 290 239).
  • the amount of oil that the screw vacuum pump produces after State of the art passed through the cavity can be limited because in this cavity is not only the bearing but also the bearing bracket must become. There is therefore a risk of insufficient cooling of the pressure side area of the Screw vacuum pump, especially in this area Development of heat due to the compression work performed is greatest. Because of the existing cavity in the rotor is also the wall thickness of the rotor limited in the area of the bearing cavity. This succeeds es only at very high temperature gradients arising in the area of the screw threads on the pressure side Heat over the suction side area of the rotor, to drain the shaft and the cooling oil.
  • a high Temperature or insufficient cooling of the pressure side Range of a screw vacuum pump has to Consequence that there is uneven expansion of the rotors and thus to local game consumption between the rotors and between each of the rotors and the housing comes.
  • the rotors may start up relatively large games can be avoided.
  • Relatively large Games have a deterioration in pump characteristics result.
  • There is also the previously known Screw vacuum pump the risk of overheating of the bearing in the cavity, especially since it only can be lubricated with relatively warm oil. Finally can only use the known screw vacuum pump vertically arranged shafts are operated.
  • the present invention is based on the object a screw vacuum pump of the type mentioned to be equipped with improved cooling.
  • this object is achieved in that the bearing on the rotor side of the bearing outside the Cavity is located in the rotor.
  • the invention enables it, the rotor from the inside without obstruction by bearings and cool the bearing bracket effectively, so that the unwanted Game consumption especially in this critical Area no longer occur.
  • Each rotor expediently consists of two sections different thread profiles, the depth of the Thread of the pressure side section is smaller than the depth of the thread of the suction-side section. A smaller thread depth in the pressure side section creates more space for housing the cavity with the internal cooling.
  • Figure 1 shows a section through an embodiment for a screw vacuum pump 1 according to the invention, namely at the level of that of the two rotating ones Systems equipped with the drive motor 2 is. The synchronization of the two rotating systems takes place with the help of gear wheels 3.
  • the rotating systems housed in housing 4 are each comprised of the rotor 5 and the shaft 6. Each Rotor 5 is flying, that is, supported on one side.
  • the shaft 6 is supported by the bearings 7 and 8 as well as the bearing bracket 11 and 12 in the housing 4.
  • face side housing covers 13, 14 are provided, of which the rotor-side cover 13 with an inlet connector 15 is equipped.
  • Part of the transmission side Cover 14 is the bearing bracket 12.
  • the rotor 5 consists of two form-fitting with each other connected rotor sections 17, 18 with different Profiles 19, 20.
  • the suction-side rotor section 17 has a large-volume profile 19 to achieve high Volume flows in the helical scoop.
  • the pressure side section 18 of the rotor 5 has both a reduced profile volume as well as a lower one Diameter. This takes the cross section of the helical Scooping rooms. An inner compression will achieved, the compaction work reduced.
  • the inner wall of the housing 4 is the rotor gradation adjusted (gradation 21).
  • Gradation 21 The inner wall of the housing 4 is the rotor gradation adjusted (gradation 21).
  • dash-dotted line Line 22 indicates that the housing is at the height of the Gradation 21 can be formed divisible. This is it is possible to the suction-side rotor section 17 and suction-side part 4 'of the housing 4 by rotor sections with other profiles, lengths and / or diameters as well as adapted housing sections 4 ' replace the pump to different applications to be able to adapt.
  • the one following the pressure side end of the threads Outlet of the pump 1 is designated 24. It is led out to the side. Flows into the outlet also a housing bore 25 which the scoop in the height at which its cross-section - be it by gradation and / or by changing the thread profile - decreases, connects to the outlet. In the housing bore 25 there is a check valve 26, which is at overpressure opens in the scoop and the suction thread of rotor section 17 with outlet 24 shorts. For sealing the helical scoops shaft seals 27 are provided from the bearing, which is between the bearing 7 and the rotor section 18 are located.
  • the cooling system of the illustrated embodiment includes an internal rotor cooling and a casing jacket cooling.
  • the rotor is used to achieve internal rotor cooling 5 with a cavity open to its bearing side 31 equipped, which extends almost through the entire rotor 5 can extend.
  • the pressure side Section 18 is hollow.
  • the suction side Section 17 closes the suction end of the cavity 31.
  • the shaft 6, which is expedient with the rotor 5 or with the pressure-side section 18 of the rotor 5 is integrally formed, is also hollow (Cavity 32). Is in the cavities 31, 32 a central cooling tube 33, the bearing side of the Shaft 6 is brought out and on the rotor side just before suction-side end of the cavity 31 opens.
  • the cooling pipe 33 and that formed by the cooling pipe 33 and the hollow shaft 6 Annulus stand for the supply and discharge of a Coolant available.
  • the sump 37 and the line system 38 are designed such that the pump 1 shown in any position can be operated between vertical and horizontal. Coolant levels that are at horizontal and at Set the vertical position of pump 1 are shown.
  • the coolant pump 36 outside (as shown) or inside (e.g. on the second, invisible shaft of the pump 1 in height of the drive motor 2) of the housing 4 is located the opening 34 of the cooling tube 33 outside or inside the housing 4.
  • Coolant is used to operate the internal cooling of the rotor 5 from the coolant pump 36 from the coolant sump 37 via the cooling tube 33 into the cavity 31 in the rotor 5 promoted. From there it flows over the annulus between cooling pipe 33 and shaft 6 back into the swamp 37.
  • the cavity 31 is at the level of the pressure side Range of threads of pump 1 so that this area is effectively cooled.
  • the cross section of the annular space is expediently reduced between cooling pipe 33 and shaft 6 in the area of his pressure side end e.g. in that the cooling pipe 33 has a larger outside diameter in this area. This creates a narrow passage 39. This constriction ensures a complete filling of the coolant leading spaces.
  • cooling tube 3 It can be useful as a material for the cooling tube 3 a poorly heat-conducting material (e.g. plastic / stainless steel or the like.) This will a more effective cooling of the rotor 5 and a more uniform Temperature control of the pump components close to the shaft 1 reached.
  • a poorly heat-conducting material e.g. plastic / stainless steel or the like.
  • the housing jacket cooling shown includes cavities or channels in the housing 4. Provided in the area of the rotor 5 Cooling channels are at 41, in the area of the engine 2 located cooling channels designated 42.
  • the cooling channels 41 located in the area of the rotor 5 have the task, in particular, in the print side Area of the rotor 5 to dissipate heat generated. On the other hand, they should the housing 4 in height temper the entire rotor as evenly as possible. After all, they are supposed to replenish the heat absorbed hand in outside.
  • the cavities through which the coolant flows 41 therefore extend the full length of the rotor 5.
  • the housing cover 13 serves as a suction side Completion of the cavities 41. Also on the outlet side the housing 4 effectively cooled.
  • the cooling channels located at the level of the drive motor 2 42 also have the tasks described. she cause temperature control of the drive motor (winding side) and the bearing bracket 7. Finally they significantly increase the heat emission outer surfaces of the pump 1. This is useful at least at the level of the cooling channels 41 and 42 with ribs 44 equipped.
  • the cooling channels 41, 42 are supplied with coolant also with the help of the coolant pump 36, and via lines 45 and 46 if they are parallel should be flowed through. Depending on the thermal requirements there is also the possibility of using them one by one to supply with coolant. One of the lines 45 or 46 could then be omitted. About not shown in detail The coolant comes out of the holes Cavities 41, 42 back into the sump 37.
  • FIG. 1 In the exemplary embodiment shown in FIG. 1 are - as already mentioned - the housing 4 and the rotor 5 divisible at the level of line 22. Thereby there is the possibility of the suction-side sections of rotor 5 (section 17) and housing 4 (section 4 ') to be replaced by other components.
  • Pump 1 can be on Different applications can be customized by using rotor sections 17 with different profiles 19, different Length, different slope and / or different diameters, each together with an adapted housing section become. Different sized profiles can be placed on the Suction side to achieve high pumping speeds, various long profiles on the suction side to achieve this lower final pressures and / or different volume gradations to achieve e.g.
  • the coolant flowing through the screw vacuum pump 1 can water, oil (mineral oil, PTFE oil or the like) or some other liquid. Is expedient the use of oil to make bearings 7, 8 and to be able to lubricate the gears 3. A separate tour of coolant and lubricant as well as corresponding This eliminates the need for seals. It must only for a metered supply of oil to the bearings 7, 8 are taken care of.
  • the rotors 5 and the housing 4 made of relatively inexpensive aluminum materials consist.
  • the proposed cooling and above all cause uniform temperature control of pump 1, that it is even at different operating temperatures and relatively small columns not too local Game consumption comes up, one starting rotor to rotor and / or rotor on housing result.
  • a further reduction of the column is possible if for the inner, more thermally stressed components (Rotors, bearings, bearing brackets, gears) of the pump 1 Materials are used that have a smaller coefficient of thermal expansion have as the material for the less thermally stressed housing 4.
  • An example of one Material selection is steel (e.g. CrNi steel) for the internal components and aluminum for the housing.
  • Materials for the internal components can also be bronze, Brass or nickel silver are used.
  • the internal cooling comprises of the rotor 5, a cooling sleeve 51, which is supported on the bearing side on the housing 4 and in the cavity 31 protrudes.
  • the cooling bush 51 surrounds the shaft 6, which is no longer hollow, the cavity (31) and in the area of its suction end carries the rotor 5.
  • One or more cooling channels 52 are provided for coolant, which in a manner not shown in detail by the coolant pump 36 are supplied.
  • the gap 53 is between Cooling sleeve 51 and rotor 5 chosen as small as possible.
  • the bushing 51 with a thread 54 provided, the one directed towards the scoop Has pumping action. There are dirt particles present there thereby held back.
  • the gap 55 between the socket 51 and the shaft 6 is also relatively small to use the thread 56 on the inside the socket 51 to produce a pumping effect. It acts in the direction of seal 27 / bearing 7 and stops Oil particles away from the pumping chamber.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP98937514A 1997-10-10 1998-06-19 Gekühlte schraubenvakuumpumpe Expired - Lifetime EP1021653B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19745616 1997-10-10
DE19745616A DE19745616A1 (de) 1997-10-10 1997-10-10 Gekühlte Schraubenvakuumpumpe
PCT/EP1998/003756 WO1999019630A1 (de) 1997-10-10 1998-06-19 Gekühlte schraubenvakuumpumpe

Publications (2)

Publication Number Publication Date
EP1021653A1 EP1021653A1 (de) 2000-07-26
EP1021653B1 true EP1021653B1 (de) 2002-08-07

Family

ID=7845648

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98937514A Expired - Lifetime EP1021653B1 (de) 1997-10-10 1998-06-19 Gekühlte schraubenvakuumpumpe

Country Status (7)

Country Link
US (1) US6544020B1 (zh)
EP (1) EP1021653B1 (zh)
JP (1) JP4225686B2 (zh)
KR (1) KR100517788B1 (zh)
DE (2) DE19745616A1 (zh)
TW (1) TW430722B (zh)
WO (1) WO1999019630A1 (zh)

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CN103688059A (zh) * 2011-06-20 2014-03-26 爱斯佰股份有限公司 直接冷却螺旋式真空泵

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CN113137367B (zh) * 2021-05-10 2023-04-25 南通贝科真空机械有限公司 一种具有转子冷却功能的螺杆式真空泵
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Publication number Priority date Publication date Assignee Title
CN103688059A (zh) * 2011-06-20 2014-03-26 爱斯佰股份有限公司 直接冷却螺旋式真空泵
CN103688059B (zh) * 2011-06-20 2016-01-27 爱斯佰股份有限公司 直接冷却螺旋式真空泵

Also Published As

Publication number Publication date
KR20010030993A (ko) 2001-04-16
WO1999019630A1 (de) 1999-04-22
EP1021653A1 (de) 2000-07-26
TW430722B (en) 2001-04-21
JP4225686B2 (ja) 2009-02-18
US6544020B1 (en) 2003-04-08
DE19745616A1 (de) 1999-04-15
KR100517788B1 (ko) 2005-09-30
JP2001520352A (ja) 2001-10-30
DE59805126D1 (de) 2002-09-12

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