EP1019770B1 - Microscope a injection de lumiere incidente - Google Patents

Microscope a injection de lumiere incidente Download PDF

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Publication number
EP1019770B1
EP1019770B1 EP99931186A EP99931186A EP1019770B1 EP 1019770 B1 EP1019770 B1 EP 1019770B1 EP 99931186 A EP99931186 A EP 99931186A EP 99931186 A EP99931186 A EP 99931186A EP 1019770 B1 EP1019770 B1 EP 1019770B1
Authority
EP
European Patent Office
Prior art keywords
lens
microscope
beam splitter
diverging
splitter cube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99931186A
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German (de)
English (en)
Other versions
EP1019770A1 (fr
Inventor
Norbert Czarnetzki
Thomas SCHERÜBL
Manfred MATTHÄ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMS GmbH
Tokyo Seimitsu Co Ltd
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of EP1019770A1 publication Critical patent/EP1019770A1/fr
Application granted granted Critical
Publication of EP1019770B1 publication Critical patent/EP1019770B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only

Definitions

  • the invention relates to a microscope with Auflichteinkopplung, wherein the light provided for incident illumination light is directed to the partially reflecting layer of a beam splitter cube and from there through the microscope objective on the sample, while the light reflected from the sample and / or emitted back to the partially reflecting layer and passes through them into the imaging beam path.
  • the quality of images produced in reflected light is - much more than with transmitted light illumination - characterized by mastery of the z.T. strongly disturbing reflections of optical elements in the beam path used together for illumination and imaging. Therefore, in the optical design consistently for each element or each surface in the beam path to ensure that its return reflection is weakened, such as by anti-reflection of the surface for the relevant spectral range and / or the location of the reflection image of the light source (from each surface) far from Image levels is located.
  • the known measures for removing surface reflections on the lenses of the primary tube mainly relate to the broadband anti-reflection of all lens surfaces of a captioned objective system.
  • the curvatures of the individual lenses are generally adapted to today's needs for low-reflex in the intermediate image - in addition to the classical requirements of the imaging system to achieve a diffraction-limited transmission of the object level in the image plane.
  • the microscope objectives are corrected on the image side to infinity, ie a plane wave surface is generated which only generates a real image of the object in the intermediate image plane through the tube lens.
  • a typical procedure when coupling the illumination source in incident light applications is the neutral, dichroic or polarization-optical reflection of a parallelized light beam of the illumination source by means of a planar coupling element, such as plane-parallel, coated divider plate or square divider cubes.
  • the usual light coupling thus takes place in the parallelized infinity beam path between the objective and the tube lens.
  • Figure 1 the conventional arrangement for incident illumination in the parallel beam path between tube lens and lens is shown.
  • incident light coupling between the tube lens and the intermediate image plane offers special advantages, e.g. in terms of space utilization in the primary tube of the microscope, which results in a particular need to solve the above problems.
  • planar divider elements Another solution for eliminating the disturbing influence of surfaces of planar divider elements is described in DE 4446134 A1, where very weak reflections from the fundus must be detected in an interferometric measuring device for measuring the length of the eye.
  • an interferometric measuring device for measuring the length of the eye.
  • planar bodies are used as divider elements for coupling the illumination (semiconductor laser) and for generating a reference beam path of the interferometric measuring principle.
  • the object of the invention is to improve the image quality and thus the utility value properties in a microscope of the type described above by reducing the influence of the stray light.
  • the spherical surface curvature applied to the beam splitter cube acts like a plano-concave lens, which reduces the back reflections of incident light illumination in the intermediate image plane, because the light reflection of this surface is greatly reduced by the concave surface on the divider.
  • a combination of a diverging lens and a converging lens is provided, wherein the surface curvatures of the diverging lens and the converging lens and the negative divisional curvature applied to the beam splitter cube are matched to one another such that the back reflections of the incident light illumination in the intermediate image plane are tuned to one another Minimum be limited.
  • This is achieved by targeted and defined increase of the radii of curvature of the two lenses and the curved surface on the beam splitter cube.
  • the divider body looks like a thick plano-concave lens (negative lens).
  • the diverging lens, the converging lens, and the negative spherical curvature applied to the beam splitter cube replace the conventionally provided tube lens.
  • the diverging lens - for the purpose of achieving highly curved radii - as a bent negative lens (Biconcave lens) and the converging lens are designed as a biconvex lens, both of which cooperate as described above with the polished concave surface on the beam splitter cube.
  • the negative optical effect of the beam splitter and the light beam expansion is counteracted compensating by the preceding diverging lens with an increased positive power of the converging lens.
  • both the converging lens and the diverging lens are arranged individually or jointly displaceable in the direction of the image plane, which due to the displacement of the distance between the two lenses to each other and / or both lenses is variable to the image plane, resulting in a change in the resulting focal length Has.
  • zoom effects can be achieved by distance variations, resulting in benefits for those applications in which the exact calibration of the magnification in the microscopic primary tube required is.
  • the magnification of the entire primary tube is subject to certain variations.
  • a zooming feature of the tube system is desirable, so that the zooming magnification of the entire primary tube can be calibrated by varying the focal length.
  • a known scale can be imaged onto a camera via the primary tube and the magnification scale can be measured.
  • the tube system is tuned, i. his total focal length adjusted by air gap changes to a suitable level.
  • f a is the total focal length before the adjustment
  • f e is the total focal length after the adjustment
  • f 1 is the focal length of the converging lens
  • f 2 is the focal length of the diverging lens
  • d a is the distance between the converging lens and the diverging lens before adjustment
  • d e is the distance between the converging lens and Diverging lens after adjustment
  • s a 'the cutting width before and s e ' the cutting width after adjustment see Fig. 4).
  • a further embodiment of the invention provides that the converging lens and / or the diverging lens are coupled to a motor-driven actuator and this actuator is connected to a device for outputting control commands.
  • the incident light coupling for a microscope according to the invention is shown in FIG.
  • the illuminating beam path 1 provided for incident illumination is directed onto the partially reflecting layer 2 of a beam splitter cube 3.
  • the oblique position of the partially reflecting layer 2 causes the deflection of the illumination beam path 1 in the direction of a sample 4.
  • the light reflected and / or emitted by the sample 4 returns to the partially reflected layer 2 and passes through it into the imaging beam path 5.
  • the beam splitter cube 3 has a negative spherical curvature on its outer surface 6 facing the sample 4 and thus the imaging objective 17.
  • a converging lens 7 and a diverging lens 8 are arranged in the beam path between the beam splitter cube 3 and the imaging objective 17 or the sample 4.
  • the surface curvatures of the converging lens 7, the diverging lens 8 and the curvature of the outer surface 6 are coordinated so that the interfering secondary illumination reflections are suppressed to a minimum by their interaction.
  • This is achieved by the beam splitter cube 3, which acts as a thick plane concave lens during the passage of the imaging beam path due to the curvature of the outer surface 6, producing a negative optical effect, as well as the Lichtbündeletzweitung the diverging lens. 8
  • the negative optical effect of the beam splitter 3 and the diverging lens 8 is counteracted with a relatively high refractive power of the converging lens 7.
  • the increase in the refractive power leads in the converging lens 7 to larger surface curvatures and thus to the desired increased dispersion behavior of the back reflections.
  • FIG 3 the structure of the inventive arrangement using an example with a Nipkow disk is shown as confocal element in the illumination and imaging beam path, in which the negative curved outer surface 6 on the beam splitter cube 3 cooperates with a field lens 9 as a replacement field lens.
  • a converging lens 7 and a diverging lens 8 are provided, wherein in the beam path between the beam splitter cube 3 and the converging lens 7, the Nipkow disc 10 is arranged inclined in the intermediate image plane and wherein the Nipkowsum 10 a wedge pair 11, 12 is assigned.
  • the converging lens 7 has the focal length f 1 , the diverging lens 8 the focal length f 2 .
  • the converging lens 7 is coupled to an actuator 13, the diverging lens 8 with an actuator 14.
  • Both actuators 13 and 14 are connected to a drive unit 15, which has an input module 16 for the input of setting commands.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
  • Lens Barrels (AREA)

Claims (5)

  1. Microscope à injection de lumière incidente, dans lequel la lumière prévue pour l'éclairage incident est dirigée sur la couche partiellement réfléchissante (2) d'un cube diviseur de rayons (3) et de là par objectif de reproduction sur un échantillon (4), pendant que la lumière réfléchie et/ou émise par l'échantillon (4) retourne à la couche partiellement réfléchissante (2) et arrive à travers celle-ci dans la marche des rayons de reproduction (5), où le cube diviseur de rayons (3) présente à sa face extérieure (6) orientée vers l'objectif de reproduction une courbure sphérique négative, caractérisé en ce que sont prévues dans le système de lentilles du tube du microscope entre l'objectif de reproduction et le cube diviseur de rayons (3) une lentille convergente (7) et une lentille convergente (8), où la lentille divergente (8), en plus de la face extérieure courbée (6) du cube diviseur de rayons (3), provoque un élargissement du faisceau lumineux, la puissance de réfraction positive de la lentille convergente (7) s'oppose à cet élargissement du faisceau lumineux et de ce fait, des réflexes d'éclairage secondaires sont limités à un minimum.
  2. Microscope selon la revendication 1, dans lequel un élément à foyer commun est disposé dans le plan de l'image intermédiaire, caractérisé en ce que sont prévues dans le système de lentilles du tube une lentille divergente (8) et une lentille convergente (7) et dans la marche des rayons de reproduction (5) une lentille de champ (9), où les courbures de face de la lentille convergente (7), de la lentille divergente (8), du cube diviseur de rayons (3) agissant comme lentille plan-concave en raison de la courbure de face et de la lentille de champ (9) sont accordées de telle sorte les unes aux autres que des réflexes d'éclairage secondaires sont limités à un minimum.
  3. Microscope selon l'une des revendications précédentes, caractérisé en ce que la lentille convergente (7) est réalisée comme lentille bi-convexe et la lentille divergente (8) comme lentille bi-concave.
  4. Microscope selon l'une des revendications précédentes, caractérisé en ce qu'à la fois la lentille convergente (7) et la lentille divergente (8) sont disposées dans le sens du plan de l'image d'une manière déplaçable individuellement ou conjointement, où par suite du déplacement, l'écart des deux lentilles (7, 8) l'une relativement à l'autre et/ou des deux lentilles (7, 8) au plan de l'image peut être modifié ce qui entraîne une modification de la distance focale qui en résulte.
  5. Microscope selon la revendication 4, caractérisé en ce que la lentille convergente (7) et/ou la lentille divergente (8) sont couplées avec des organes de positionnement (13, 14) entraînés par moteur et sont reliées par ceux-ci à une unité de commande (15) et à un module d'entrée (16) pour l'entrée de commandes de positionnement.
EP99931186A 1998-08-04 1999-06-25 Microscope a injection de lumiere incidente Expired - Lifetime EP1019770B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19835073 1998-08-04
DE19835073A DE19835073A1 (de) 1998-08-04 1998-08-04 Mikroskop mit Auflichteinkopplung
PCT/EP1999/004431 WO2000008510A1 (fr) 1998-08-04 1999-06-25 Microscope a injection de lumiere incidente

Publications (2)

Publication Number Publication Date
EP1019770A1 EP1019770A1 (fr) 2000-07-19
EP1019770B1 true EP1019770B1 (fr) 2006-01-11

Family

ID=7876339

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99931186A Expired - Lifetime EP1019770B1 (fr) 1998-08-04 1999-06-25 Microscope a injection de lumiere incidente

Country Status (6)

Country Link
US (1) US6307690B1 (fr)
EP (1) EP1019770B1 (fr)
JP (1) JP3782303B2 (fr)
DE (2) DE19835073A1 (fr)
HK (1) HK1031767A1 (fr)
WO (1) WO2000008510A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005070477A (ja) * 2003-08-26 2005-03-17 Yokogawa Electric Corp 焦点移動機構およびそれを用いた光学顕微鏡
US20050270544A1 (en) * 2004-06-04 2005-12-08 Optoplex Corporation Variable dispersion step-phase interferometers
WO2006046502A1 (fr) * 2004-10-27 2006-05-04 Nikon Corporation Procédé de fabrication d’un élément optique, élément optique, disque de nipkow, système optique confocal et dispositif de mesure en 3d
DE102005045165B4 (de) * 2005-09-21 2008-04-17 Leica Microsystems Cms Gmbh Mikroskop-Fluoreszenz-Filtersystem und umschaltbares Mikroskop zur Erzeugung von Überlagerungsbildern
JP2008225095A (ja) * 2007-03-13 2008-09-25 Olympus Corp 光走査型観察装置
US9885878B2 (en) * 2013-04-10 2018-02-06 Fei Efa, Inc. Apparatus and method for annular optical power management
DE102014005309A1 (de) * 2014-04-10 2015-10-15 Carl Zeiss Microscopy Gmbh Einrichtung für mikroskopische Anwendungen
US10054776B1 (en) * 2015-04-09 2018-08-21 Molecular Devices, Llc Low-autofluorescence and low-reflectance optical components for microscopes, and microscopes utilizing same
CN111474715A (zh) * 2020-04-23 2020-07-31 歌尔股份有限公司 光学***及增强现实设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3924702A1 (de) * 1988-10-03 1990-04-05 Jenoptik Jena Gmbh Optischer strahlenteiler
US5801882A (en) * 1993-10-28 1998-09-01 Olympus Optical Company, Ltd. Real image mode finder optical system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3736060A (en) * 1971-02-11 1973-05-29 Altair Scient Inc Optical contour scanner
US3796477A (en) * 1972-09-25 1974-03-12 Xomox Corp Lens housing and lens cover for objective lens ring of an operating microscope
JPS54137030U (fr) 1978-03-16 1979-09-22
JPH01180508A (ja) * 1988-01-12 1989-07-18 Canon Inc 変倍顕微鏡
IL103900A (en) 1992-11-26 1998-06-15 Electro Optics Ind Ltd Optical system
DE19541237B4 (de) * 1994-11-12 2006-04-13 Carl Zeiss Pankratisches Vergrößerungssystem
DE19511937C2 (de) 1995-03-31 1997-04-30 Zeiss Carl Jena Gmbh Konfokales Auflichtmikroskop

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3924702A1 (de) * 1988-10-03 1990-04-05 Jenoptik Jena Gmbh Optischer strahlenteiler
US5801882A (en) * 1993-10-28 1998-09-01 Olympus Optical Company, Ltd. Real image mode finder optical system

Also Published As

Publication number Publication date
EP1019770A1 (fr) 2000-07-19
WO2000008510A1 (fr) 2000-02-17
JP3782303B2 (ja) 2006-06-07
HK1031767A1 (en) 2001-06-22
US6307690B1 (en) 2001-10-23
DE19835073A1 (de) 2000-02-10
DE59913043D1 (de) 2006-04-06
JP2002522801A (ja) 2002-07-23

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