EP0856108A1 - Friction vacuum pump with intermediate inlet - Google Patents
Friction vacuum pump with intermediate inletInfo
- Publication number
- EP0856108A1 EP0856108A1 EP96928437A EP96928437A EP0856108A1 EP 0856108 A1 EP0856108 A1 EP 0856108A1 EP 96928437 A EP96928437 A EP 96928437A EP 96928437 A EP96928437 A EP 96928437A EP 0856108 A1 EP0856108 A1 EP 0856108A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ring
- spacer
- stator
- rings
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Definitions
- the invention relates to a friction vacuum pump with the features of the preamble of claim 1.
- a friction pump of this type is known from DE-A-31 24 205. To design the opening of the intermediate inlet into the delivery chamber of the friction vacuum pump, it is stated that it is advantageous to provide an annular channel.
- the present invention has for its object to make the confluence of the intermediate inlet in the delivery chamber of the friction vacuum pump expedient in two respects.
- the components forming the stator in the region of the ring channel should be designed in such a way that they hinder the gases entering the delivery chamber as little as possible.
- simple manufacture of the components located in the area of the ring channel should be ensured.
- a stator of the type according to the invention differs only slightly from a stator for a friction vacuum pump without an intermediate inlet. It is only necessary to equip a spacer ring, which is located at the level of the ring channel, with passage openings - bores, millings or the like. There are no other differences with regard to the manufacture of the stator or its assembly, so that the effort for the manufac tion of a friction vacuum pump with an intermediate inlet is only insignificantly higher than the effort for the production of a friction vacuum pump without an intermediate inlet.
- a spacer ring can be equipped with a large number of passage openings.
- the spacer ring has several sections with a reduced height.
- the sum of these sections can extend over a total of 20 to 80% of the circumference of the spacer ring, so that the conductance of the passage openings can be selected to be very high without impairing the stability of the stator.
- FIG. 1 shows an exemplary embodiment of a friction vacuum pump according to the invention
- FIG. 2 shows a further exemplary embodiment
- Figure 3 is a plan view of a spacer ring of the stator of the embodiment of Figure 2 and
- Figure 4 shows a section through the stator ring of Figure 3 along the line IV-IV.
- the outer housing is designated by 1. It is equipped with a central, inwardly projecting bearing bush 2, in which a shaft 3 is supported by means of a spindle bearing 4.
- the drive motor 5, the rotor 6 of a molecular pump stage and the rotor 7 of a turbomolecular pump stage are coupled to the shaft 3.
- the rotor 7 is equipped with the rotor blades 8 which, together with the stator blades 9 held in the housing 1, form the turbomolecular pump stage.
- the respective pump is connected to the recipient to be evacuated by means of the flange 11.
- the molecular pump (or pump stage) comprises the bell-shaped rotor 6 which overlaps the storage space 12 and is equipped on its outside with thread-like grooves 13 in which the gas is pumped from the high vacuum side to the fore vacuum side during operation of the pump.
- An axially approximately the same length stator is assigned to the rotor 6.
- the gap 10 is located between the stator 14 and the rotor 6. This must be as small as possible in order to achieve a good seal between the thread grooves.
- the forevacuum connector 20 is connected to the forevacuum space 19.
- the stator blades 9 of the turbomolecular pump stage include the stator blades 9 and spacer rings 22 to 24.
- the stator blades 9 are, in a manner known per se, components of blade rings or blade ring sections 25 with outer edges 26, which are located in the assembled condition of the stator between the spacer rings .
- the stator which is made up of spacer rings 22 and vane rings 25 arranged one above the other, is centered by the outer housing 1.
- the turbomolecular pump stage 8, 9 is equipped with an intermediate inlet 28, which can serve different purposes - for example, vacuum generation with a higher pressure level than the pressure in the vacuum chamber connected to the flange 11, not shown, or the test gas inlet when using the pump in a counterflow leak detector.
- the spacer rings 23, 24 located at the level of the intermediate inlet 28 are modified compared to the other spacer rings 22.
- One or both spacer rings 23 and 24 have a reduced outer diameter and, together with the housing 1, form the circumferential ring channel 31, into which the intermediate inlet 28 opens.
- the one or more spacer rings 23 and 24 with a reduced outer diameter also have openings 32, via which the connection of the delivery chamber of the turbomolecular pump stage to the intermediate inlet 28 is established.
- openings can be, for example, several bores, as shown in the case of the spacer ring 24.
- Another possibility is to mill out a spacer ring 23 in such a way that it has a reduced (axial) height in sections. This makes it possible to produce breakthroughs with a high conductance.
- FIGS. 2 to 4 show an embodiment in which the spacer rings 22 to 24 are equipped with centering means. These consist of an outer circumferential recess 34 on one side and an axially directed edge 35 on the other side of the spacer rings. The dimensions are chosen so that the edge 35 on the one hand encompasses and centers the outer edge 26 of the adjacent vane ring disk 25. Furthermore, the outer edge 35 engages in the recess 34 of the adjacent spacer ring, as a result of which the entire stator 21 is centered.
- the ring channel 31 is formed as a circumferential groove in the housing 1, so that it is not necessary to give the or the spacer rings 23 and 24 a reduced outer diameter.
- the openings in the spacer ring 24 are again designed as bores, for example.
- the spacer ring 23 is shown again in FIGS. 3 and 4. It has the centering means (outer edge 35, recess 34).
- the openings 32 are formed in that several sections of the ring have a reduced height to have. In the exemplary embodiment shown, there are four sections of this type which are distributed uniformly over the circumference and each extend over 10% of the circumference.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Rotary Pumps (AREA)
Abstract
The invention concerns a friction vacuum pump (1) with an inlet (11), an outlet (20) and a rotor (6, 7) and stator (14, 21) which are located between the inlet (11) and the outlet (20) and carry blades (7 and 8), respectively. In order to design an intermediate inlet (28), which passes into an annular channel (31) surrounding the stator and rotor blades (7 and 8), respectively, so that it is simple and effective, the invention proposes that the stator (21) consists of annular blades or blade segments (25) and annular spacers (22, 23, 24), the outer edges of the annular blades or blade segments (25) being located between the spacers (22, 23, 24) and at least one spacer (23, 24) located at the height of the annular channel (31) having perforations (32) in it.
Description
Reibungsvakuumpumpe mit Zwischeneinlaß Friction vacuum pump with intermediate inlet
Die Erfindung bezieht sich auf eine ReibungsVakuumpumpe mit den Merkmalen des Oberbegriffs des Anspruchs 1.The invention relates to a friction vacuum pump with the features of the preamble of claim 1.
Eine Reibungspumpe dieser Art ist aus der DE-A-31 24 205 bekannt. Zur Gestaltung der Einmündung des Zwischenein¬ lasses in den Förderraum der Reibungsvakuum pumpe ist angegeben, daß es vorteilhaft ist, einen Ringkanal vor¬ zusehen.A friction pump of this type is known from DE-A-31 24 205. To design the opening of the intermediate inlet into the delivery chamber of the friction vacuum pump, it is stated that it is advantageous to provide an annular channel.
Die vorliegende Erfindung liegt die Aufgabe zugrunde, die Einmündung des Zwischeneinlasses in den Förderraum der ReibungsVakuumpumpe in zweifacher Hinsicht zweck¬ mäßig zu gestalten. Zum einen sollen die den Stator bil¬ denden Bauteile im Bereich des Ringkanals derart ausge¬ bildet sein, daß sie die in den Förderraum eintretenden Gase möglichst wenig behindern. Zum anderen soll eine einfache Herstellung der sich im Bereich des Ringkanais befindlichen Bauteile gewährleistet sein.The present invention has for its object to make the confluence of the intermediate inlet in the delivery chamber of the friction vacuum pump expedient in two respects. On the one hand, the components forming the stator in the region of the ring channel should be designed in such a way that they hinder the gases entering the delivery chamber as little as possible. On the other hand, simple manufacture of the components located in the area of the ring channel should be ensured.
Erfindungsgemäß wird diese Aufgabe durch die kennzeich¬ nenden Merkmale der Ansprüche gelöst. Ein Stator der er¬ findungsgemäßen Art unterscheidet sich nur wenig von ei¬ nem Stator für eine ReibungsVakuumpumpe ohne Zwischen¬ einlaß. Es ist lediglich erforderlich, einen Abstands¬ ring, der sich in Höhe des Ringkanals befindet, mit Durchtrittsöffnungen - Bohrungen, Fräsungen oder der¬ gleichen - auszurüsten. Sonstige Unterschiede sind weder in Bezug auf die Herstellung des Stators noch auf seine Montage vorhanden, so daß der Aufwand für die Herstel-
lung einer ReibungsVakuumpumpe mit Zwischeneinlaß nur unwesentlich höher ist als der Aufwand für die Herstel¬ lung einer ReibungsVakuumpumpe ohne Zwischeneinlaß. Ein Abstandsring kann mit einer Vielzahl von Durchtrittsöff¬ nungen ausgerüstet werden. Besonders zweckmäßig ist es, wenn der Abstandsring mehrere Abschnitte mit reduzierter Höhe aufweist. Die Summe dieser Abschnitte kann sich über insgesamt 20 bis 80 % des Umfanges des Abstandsrin¬ ges erstrecken, so daß der Leitwert der Durchtrittsöff¬ nungen sehr hoch gewählt werden kann, ohne die Stabili¬ tät des Stators zu beeinträchtigen.According to the invention, this object is achieved by the characterizing features of the claims. A stator of the type according to the invention differs only slightly from a stator for a friction vacuum pump without an intermediate inlet. It is only necessary to equip a spacer ring, which is located at the level of the ring channel, with passage openings - bores, millings or the like. There are no other differences with regard to the manufacture of the stator or its assembly, so that the effort for the manufac tion of a friction vacuum pump with an intermediate inlet is only insignificantly higher than the effort for the production of a friction vacuum pump without an intermediate inlet. A spacer ring can be equipped with a large number of passage openings. It is particularly expedient if the spacer ring has several sections with a reduced height. The sum of these sections can extend over a total of 20 to 80% of the circumference of the spacer ring, so that the conductance of the passage openings can be selected to be very high without impairing the stability of the stator.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von den Figuren 1 bis 4 dargestellten Ausfüh¬ rungsbeispielen erläutert werden. Es zeigenFurther advantages and details of the invention will be explained with reference to the exemplary embodiments shown in FIGS. 1 to 4. Show it
Figur 1 ein Ausführungsbeispiel für eine Reibungs¬ vakuumpumpe nach der Erfindung,FIG. 1 shows an exemplary embodiment of a friction vacuum pump according to the invention,
Figur 2 ein weiteres Ausführungsbeispiel,FIG. 2 shows a further exemplary embodiment,
Figur 3 ein Draufsicht auf einen Abstandsring des Stators des Ausführungsbeispieles nach Figur 2 undFigure 3 is a plan view of a spacer ring of the stator of the embodiment of Figure 2 and
Figur 4 einen Schnitt durch den Statorring nach Figur 3 entlang der Linie IV-IV.Figure 4 shows a section through the stator ring of Figure 3 along the line IV-IV.
Beim Ausführungsbeispiel nach Figur 1 ist das äußere Ge¬ häuse mit 1 bezeichnet. Es ist mit einer zentralen, nach innen hineinragenden Lagerbuchse 2 ausgerüstet, in der sich eine Welle 3 mittels einer Spindellagerung 4 ab¬ stützt. Mit der Welle 3 gekoppelt sind der Antriebsmotor 5, der Rotor 6 einer Molekularpumpenstufe sowie der Rotor 7 einer Turbomolekularpumpenstufe.
Der Rotor 7 ist mit den Rotorschaufeln 8 ausgerüstet, die gemeinsam mit den im Gehäuse 1 gehaltenen Stator¬ schaufeln 9 die Turbomolekularpumpenstufe bilden. Mit¬ tels des Flansches 11 wird die jeweilige Pumpe an den zu evakuierenden Rezipienten angeschlossen.In the exemplary embodiment according to FIG. 1, the outer housing is designated by 1. It is equipped with a central, inwardly projecting bearing bush 2, in which a shaft 3 is supported by means of a spindle bearing 4. The drive motor 5, the rotor 6 of a molecular pump stage and the rotor 7 of a turbomolecular pump stage are coupled to the shaft 3. The rotor 7 is equipped with the rotor blades 8 which, together with the stator blades 9 held in the housing 1, form the turbomolecular pump stage. The respective pump is connected to the recipient to be evacuated by means of the flange 11.
Die Molekularpumpe (bzw. -pumpenstufe) umfaßt den den Lagerraum 12 übergreifenden, glockenförmigen Rotor 6, der auf seiner Außenseite mit gewindeähnlichen Nuten 13 ausgerüstet ist, in denen beim Betrieb der Pumpe die Gasförderung von der Hochvakuumseite zur Vorvakuumseite stattfindet. Dem Rotor 6 ist ein axial etwa gleich lan¬ ger Stator zugeordnet. Zwischen dem Stator 14 und dem Rotor 6 befindet sich der Spalt 10. Dieser muß möglichst klein sein, um eine gute Abdichtung zwischen den Gewin¬ denuten zu erreichen. An den Vorvakuumraum 19 ist der Vorvakuumstutzen 20 angeschlossen.The molecular pump (or pump stage) comprises the bell-shaped rotor 6 which overlaps the storage space 12 and is equipped on its outside with thread-like grooves 13 in which the gas is pumped from the high vacuum side to the fore vacuum side during operation of the pump. An axially approximately the same length stator is assigned to the rotor 6. The gap 10 is located between the stator 14 and the rotor 6. This must be as small as possible in order to achieve a good seal between the thread grooves. The forevacuum connector 20 is connected to the forevacuum space 19.
Zum Stator 21 der Turbomolekularpumpenstufe gehören die Statorschaufeln 9 und Distanzringe 22 bis 24. Die Sta¬ torschaufeln 9 sind in an sich bekannter Weise Bestand¬ teile von Schaufelringen oder Schaufelringabschnitten 25 mit äußeren Rändern 26, die sich in montiertem Zusrand des Stators zwischen den Distanzringen befinden. Der aus abwechselnd übereinander angeordneten Distanzringen 22 und Schaufelringen 25 aufgebaute Stator wird durch das äußere Gehäuse 1 zentriert.The stator blades 9 of the turbomolecular pump stage include the stator blades 9 and spacer rings 22 to 24. The stator blades 9 are, in a manner known per se, components of blade rings or blade ring sections 25 with outer edges 26, which are located in the assembled condition of the stator between the spacer rings . The stator, which is made up of spacer rings 22 and vane rings 25 arranged one above the other, is centered by the outer housing 1.
Die Turbomolekularpumpenstufe 8, 9 ist mit einem Zwischeneinlaß 28 ausgerüstet, der unterschiedlichen Zwecken - z.B. der Vakuumerzeugung mit einem gegenüber dem Druck in der am Flansch 11 angeschlossenen, nicht dargestellten Vakuumkammer höheren Druckniveau oder dem Testgaseinlaß beim Einsatz der Pumpe in einem Gegenstromlecksucher - dienen kann. Die in Höhe des Zwischeneinlasses 28 befindlichen Distanzringe 23, 24 sind gegenüber den übrigen Distanzringen 22 modifiziert.
Einer oder beide Distanzringe 23 bzw. 24 weisen einen reduzierten Außendurchmesser auf und bilden gemeinam mit dem Gehäuse 1 den umlaufenden Ringkanal 31, in den der Zwischeneinlaß 28 mündet. Der oder die Distanzringe 23 bzw. 24 mit reduziertem Außendurchmesser weisen ferner Durchbrechungen 32 auf, über die die Verbindung des Förderraumes der Turbomolekularpumpenstufe mit dem Zwischeneinlaß 28 hergestellt wird. Diese Durchbrechungen können z.B. mehrere Bohrungen sein, wie beim Distanzring 24 dargestellt. Eine andere Möglichkeit besteht darin, einen Distanzring 23 derart auszufräsen, daß er abschnittsweise eine reduzierte (axiale) Höhe aufweist. Die Herstellung von Durchbrechungen mit hohem Leitwert ist dadurch möglich.The turbomolecular pump stage 8, 9 is equipped with an intermediate inlet 28, which can serve different purposes - for example, vacuum generation with a higher pressure level than the pressure in the vacuum chamber connected to the flange 11, not shown, or the test gas inlet when using the pump in a counterflow leak detector. The spacer rings 23, 24 located at the level of the intermediate inlet 28 are modified compared to the other spacer rings 22. One or both spacer rings 23 and 24 have a reduced outer diameter and, together with the housing 1, form the circumferential ring channel 31, into which the intermediate inlet 28 opens. The one or more spacer rings 23 and 24 with a reduced outer diameter also have openings 32, via which the connection of the delivery chamber of the turbomolecular pump stage to the intermediate inlet 28 is established. These openings can be, for example, several bores, as shown in the case of the spacer ring 24. Another possibility is to mill out a spacer ring 23 in such a way that it has a reduced (axial) height in sections. This makes it possible to produce breakthroughs with a high conductance.
Die Figuren 2 bis 4 zeigen ein Ausführungsbeispiel, bei dem die Distanzringe 22 bis 24 mit Zentriermitteln aus¬ gerüstet sind. Diese bestehen aus einer äußeren umlau¬ fenden Aussparung 34 auf der einen Seite und aus einem axial gerichteten Rand 35 auf der anderen Seite der Di¬ stanzringe. Die Abmessungen sind so gewählt, daß der Rand 35 zum einen den äußeren Rand 26 der anliegenden Schaufelringscheibe 25 umfaßt und dadurch zentriert. Weiterhin greift der äußere Rand 35 in die Aussparung 34 des benachbarten Distanzringes ein, wodurch eine Zentrierung des gesamten Stators 21 erreicht wird.FIGS. 2 to 4 show an embodiment in which the spacer rings 22 to 24 are equipped with centering means. These consist of an outer circumferential recess 34 on one side and an axially directed edge 35 on the other side of the spacer rings. The dimensions are chosen so that the edge 35 on the one hand encompasses and centers the outer edge 26 of the adjacent vane ring disk 25. Furthermore, the outer edge 35 engages in the recess 34 of the adjacent spacer ring, as a result of which the entire stator 21 is centered.
Beim Ausführungsbeispiel nach Figur 2 ist der Ringkanal 31 als umlaufende Nut im Gehäuse 1 ausgebildet, so daß es nicht erforderlich ist, dem oder den Distanzringen 23 bzw. 24 einen reduzierten Außendurchmesser zu geben. Beim Distanzring 24 sind die Durchbrechungen beispiels¬ weise wieder als Bohrungen ausgebildet. Der Distanzring 23 ist in den Figuren 3 uund 4 nochmals dargestellt. Er weist die Zentriermittel (äußerer Rand 35, Aussparung 34) auf. Die Durchbrechungen 32 werden dadurch gebildet, daß mehrere Abschnitte des Ringes eine reduzierte Höhe
haben. Beim dargestellten Ausführungsbeispiel sind vier gleichmäßig über den Umfang verteilte Abschnitte dieser Art vorhanden, die sich jeweils über 10 % des Umfanges erstrecken.
In the embodiment of Figure 2, the ring channel 31 is formed as a circumferential groove in the housing 1, so that it is not necessary to give the or the spacer rings 23 and 24 a reduced outer diameter. The openings in the spacer ring 24 are again designed as bores, for example. The spacer ring 23 is shown again in FIGS. 3 and 4. It has the centering means (outer edge 35, recess 34). The openings 32 are formed in that several sections of the ring have a reduced height to have. In the exemplary embodiment shown, there are four sections of this type which are distributed uniformly over the circumference and each extend over 10% of the circumference.
Claims
ReibungsVakuumpumpe (1) mit einem Einlaß (11) , mit einem Auslaß (21), mit einem Rotor (6, 7) und einem Stator (14, 21), welche zwischen Einlaß (1) und Auslaß (21) angeordnet sind und Rotor-Statorschau¬ feln (7 bzw. 8) kragen, sowie mit einem Zwischen¬ einlaß (28) , der in einen die Stator- und Rotor¬ schaufeln (7 bzw. 8) umgebenden Ringkanal (31) mun¬ det, dadurch gekennzeichnet, daß der Stator (21) aus Schaufelringen oder Schaufelringabschnitten (25) und Abstandsringen (22, 23, 24) besteht, daß die Schaufelringe oder Schaufelringabschnitte (25) äußere Ranger (26) aufweisen, die sich zwischen den Abstandsringen (22, 23, 24) befinden, und daß min¬ destens ein in Hohe des Ringkanals (31) befindliche Abstandsring (23, 24) mit Durchbrechungen (32) aus¬ gerüstet ist.Friction vacuum pump (1) with an inlet (11), with an outlet (21), with a rotor (6, 7) and a stator (14, 21), which are arranged between inlet (1) and outlet (21) and rotor -Stator blades (7 or 8) collar, as well as with an intermediate inlet (28) which mun¬ det into an annular channel (31) surrounding the stator and rotor blades (7 or 8), characterized in that that the stator (21) consists of blade rings or blade ring sections (25) and spacer rings (22, 23, 24), that the blade rings or blade ring portions (25) have outer rangers (26) which are located between the spacer rings (22, 23, 24 ) and that at least one spacer ring (23, 24) located at the height of the ring channel (31) is equipped with openings (32).
Pumpe nach Anspruch 1, dadurch gekennzeichnet, daß mindestens ein Abstandsring (23, 24) mit reduzier¬ tem Außendurchmesser zusammen mit dem Pumpengehause den Ringkanal (31) bildet.Pump according to claim 1, characterized in that at least one spacer ring (23, 24) with reduced outer diameter forms the annular channel (31) together with the pump housing.
3. Pumpe nach Anspruch 1, dadurch gekennzeichnet, daß eine den oder die Abstandsringe (23, 24) umgebende, umlaufende Nut im Pumpengehäuse den Ringkanal (31) bildet. 3. Pump according to claim 1, characterized in that one or the spacer rings (23, 24) surrounding, circumferential groove in the pump housing forms the annular channel (31).
4. Pumpe nach Anspruch 1, 2 oder 3, dadurch gekenn¬ zeichnet, daß die Abstandsringe (22, 23, 24) mit Zentriermitteln ausgerüstet sind, die aus einer äußeren, umlaufenden Aussparung (34) auf der einen Seite und aus einem axial gerichteten Rand (35) auf der anderen Seite der Distanzringe bestehen.4. Pump according to claim 1, 2 or 3, characterized gekenn¬ characterized in that the spacer rings (22, 23, 24) are equipped with centering, which from an outer circumferential recess (34) on one side and from an axially directed Edge (35) on the other side of the spacer rings.
5. Pumpe nach Anspruch 4, dadurch gekennzeichnet, daß die Ränder (35) die Schaufelringe oder Schaufelringabschnitte (25) umfassen und zentrie¬ ren.5. Pump according to claim 4, characterized in that the edges (35) comprise the vane rings or vane ring sections (25) and center ren.
6. Pumpe nach Anspruch 5, dadurch gekennzeichnet, daß die Ränder (35) in die Aussparung (34) benachbarter Distanzringe eingreifen.6. Pump according to claim 5, characterized in that the edges (35) engage in the recess (34) of adjacent spacer rings.
7. Pumpe nach einem der vorhergehenden Ansprüche, da¬ durch gekennzeichnet, daß mindestens ein in Höhe des Ringkanals (31) befindlicher Distanzring (23, 24) mit Durchtrittsöffnungen (32) ausgerüstet ist.7. Pump according to one of the preceding claims, da¬ characterized in that at least one at the level of the ring channel (31) located spacer ring (23, 24) is equipped with through openings (32).
8. Pumpe nach einem der vorhergehenden Ansprüche 1 bis 6, dadurch gekennzeichnet, daß die Durchtrittsöff¬ nungen (32) dadurch gebildet sind, daß ein Distanz¬ ring (23, 24) mehrere Abschnitte (36) mit reduzier¬ ter Höhe aufweist.8. Pump according to one of the preceding claims 1 to 6, characterized in that the passage openings (32) are formed in that a spacer ring (23, 24) has a plurality of sections (36) with a reduced height.
9. Pumpe nach Anspruch 8, dadurch gekennzeichnet, daß die Abschnitte (36) mit reduzierter Höhe gleich¬ mäßig über den Umfang des Distanzringes (23, 24) verteilt sind und sich jeweils über 5 % bis 15 % des Umfanges erstrecken. 9. Pump according to claim 8, characterized in that the sections (36) with a reduced height are evenly distributed over the circumference of the spacer ring (23, 24) and each extend over 5% to 15% of the circumference.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE29516599U | 1995-10-20 | ||
| DE29516599U DE29516599U1 (en) | 1995-10-20 | 1995-10-20 | Friction vacuum pump with intermediate inlet |
| PCT/EP1996/003524 WO1997015760A1 (en) | 1995-10-20 | 1996-08-09 | Friction vacuum pump with intermediate inlet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0856108A1 true EP0856108A1 (en) | 1998-08-05 |
| EP0856108B1 EP0856108B1 (en) | 2002-07-03 |
Family
ID=8014363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP96928437A Expired - Lifetime EP0856108B1 (en) | 1995-10-20 | 1996-08-09 | Friction vacuum pump with intermediate inlet |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6030189A (en) |
| EP (1) | EP0856108B1 (en) |
| JP (1) | JP3939352B2 (en) |
| DE (2) | DE29516599U1 (en) |
| WO (1) | WO1997015760A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US10337517B2 (en) | 2012-01-27 | 2019-07-02 | Edwards Limited | Gas transfer vacuum pump |
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| JP3010529B1 (en) * | 1998-08-28 | 2000-02-21 | セイコー精機株式会社 | Vacuum pump and vacuum device |
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| JP3788558B2 (en) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | Turbo molecular pump |
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| EP1249613B1 (en) * | 2001-03-15 | 2004-01-28 | VARIAN S.p.A. | Turbine pump with a stator stage integrated with a spacer ring |
| DE10150015A1 (en) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers |
| GB0124731D0 (en) | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
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| DE10353034A1 (en) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Multi-stage friction vacuum pump |
| JP2007071139A (en) * | 2005-09-08 | 2007-03-22 | Osaka Vacuum Ltd | Composite vacuum pump rotor |
| US20080066859A1 (en) * | 2006-08-30 | 2008-03-20 | Michiaki Kobayashi | Plasma processing apparatus capable of adjusting pressure within processing chamber |
| JP5190214B2 (en) * | 2007-03-29 | 2013-04-24 | 東京エレクトロン株式会社 | Turbo molecular pump, substrate processing apparatus, and deposit control method for turbo molecular pump |
| DE102008013142A1 (en) * | 2008-03-07 | 2009-09-10 | Oerlikon Leybold Vacuum Gmbh | Turbo-molecular pump for producing vacuum, has auxiliary inlet arranged lateral to rotor longitudinal axis, where gas is sucked via auxiliary inlet in auxiliary inlet area of pump chamber, and rotor disks arranged in auxiliary inlet area |
| JP5486184B2 (en) * | 2008-12-10 | 2014-05-07 | エドワーズ株式会社 | Vacuum pump |
| DE102009011082A1 (en) | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
| GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
| EP2757265B1 (en) * | 2013-01-22 | 2016-05-18 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage. |
| DE202013010204U1 (en) * | 2013-11-11 | 2015-02-13 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
| EP3133290B1 (en) * | 2015-08-20 | 2021-06-09 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| KR102576491B1 (en) * | 2016-02-12 | 2023-09-08 | 에드워즈 가부시키가이샤 | Vacuum pump and flexible cover and rotor used in the vacuum pump |
| GB2601515B (en) | 2020-12-02 | 2022-12-28 | Agilent Technologies Inc | Vacuum pump with elastic spacer |
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- 1995-10-20 DE DE29516599U patent/DE29516599U1/en not_active Expired - Lifetime
-
1996
- 1996-08-09 WO PCT/EP1996/003524 patent/WO1997015760A1/en active IP Right Grant
- 1996-08-09 JP JP51621997A patent/JP3939352B2/en not_active Expired - Fee Related
- 1996-08-09 DE DE59609415T patent/DE59609415D1/en not_active Expired - Lifetime
- 1996-08-09 EP EP96928437A patent/EP0856108B1/en not_active Expired - Lifetime
- 1996-08-09 US US09/051,893 patent/US6030189A/en not_active Expired - Lifetime
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10337517B2 (en) | 2012-01-27 | 2019-07-02 | Edwards Limited | Gas transfer vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| DE59609415D1 (en) | 2002-08-08 |
| EP0856108B1 (en) | 2002-07-03 |
| JPH11513775A (en) | 1999-11-24 |
| WO1997015760A1 (en) | 1997-05-01 |
| US6030189A (en) | 2000-02-29 |
| JP3939352B2 (en) | 2007-07-04 |
| DE29516599U1 (en) | 1995-12-07 |
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