EP0856108A1 - Reibungsvakuumpumpe mit zwischeneinlass - Google Patents
Reibungsvakuumpumpe mit zwischeneinlassInfo
- Publication number
- EP0856108A1 EP0856108A1 EP96928437A EP96928437A EP0856108A1 EP 0856108 A1 EP0856108 A1 EP 0856108A1 EP 96928437 A EP96928437 A EP 96928437A EP 96928437 A EP96928437 A EP 96928437A EP 0856108 A1 EP0856108 A1 EP 0856108A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ring
- spacer
- stator
- rings
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Definitions
- the invention relates to a friction vacuum pump with the features of the preamble of claim 1.
- a friction pump of this type is known from DE-A-31 24 205. To design the opening of the intermediate inlet into the delivery chamber of the friction vacuum pump, it is stated that it is advantageous to provide an annular channel.
- the present invention has for its object to make the confluence of the intermediate inlet in the delivery chamber of the friction vacuum pump expedient in two respects.
- the components forming the stator in the region of the ring channel should be designed in such a way that they hinder the gases entering the delivery chamber as little as possible.
- simple manufacture of the components located in the area of the ring channel should be ensured.
- a stator of the type according to the invention differs only slightly from a stator for a friction vacuum pump without an intermediate inlet. It is only necessary to equip a spacer ring, which is located at the level of the ring channel, with passage openings - bores, millings or the like. There are no other differences with regard to the manufacture of the stator or its assembly, so that the effort for the manufac tion of a friction vacuum pump with an intermediate inlet is only insignificantly higher than the effort for the production of a friction vacuum pump without an intermediate inlet.
- a spacer ring can be equipped with a large number of passage openings.
- the spacer ring has several sections with a reduced height.
- the sum of these sections can extend over a total of 20 to 80% of the circumference of the spacer ring, so that the conductance of the passage openings can be selected to be very high without impairing the stability of the stator.
- FIG. 1 shows an exemplary embodiment of a friction vacuum pump according to the invention
- FIG. 2 shows a further exemplary embodiment
- Figure 3 is a plan view of a spacer ring of the stator of the embodiment of Figure 2 and
- Figure 4 shows a section through the stator ring of Figure 3 along the line IV-IV.
- the outer housing is designated by 1. It is equipped with a central, inwardly projecting bearing bush 2, in which a shaft 3 is supported by means of a spindle bearing 4.
- the drive motor 5, the rotor 6 of a molecular pump stage and the rotor 7 of a turbomolecular pump stage are coupled to the shaft 3.
- the rotor 7 is equipped with the rotor blades 8 which, together with the stator blades 9 held in the housing 1, form the turbomolecular pump stage.
- the respective pump is connected to the recipient to be evacuated by means of the flange 11.
- the molecular pump (or pump stage) comprises the bell-shaped rotor 6 which overlaps the storage space 12 and is equipped on its outside with thread-like grooves 13 in which the gas is pumped from the high vacuum side to the fore vacuum side during operation of the pump.
- An axially approximately the same length stator is assigned to the rotor 6.
- the gap 10 is located between the stator 14 and the rotor 6. This must be as small as possible in order to achieve a good seal between the thread grooves.
- the forevacuum connector 20 is connected to the forevacuum space 19.
- the stator blades 9 of the turbomolecular pump stage include the stator blades 9 and spacer rings 22 to 24.
- the stator blades 9 are, in a manner known per se, components of blade rings or blade ring sections 25 with outer edges 26, which are located in the assembled condition of the stator between the spacer rings .
- the stator which is made up of spacer rings 22 and vane rings 25 arranged one above the other, is centered by the outer housing 1.
- the turbomolecular pump stage 8, 9 is equipped with an intermediate inlet 28, which can serve different purposes - for example, vacuum generation with a higher pressure level than the pressure in the vacuum chamber connected to the flange 11, not shown, or the test gas inlet when using the pump in a counterflow leak detector.
- the spacer rings 23, 24 located at the level of the intermediate inlet 28 are modified compared to the other spacer rings 22.
- One or both spacer rings 23 and 24 have a reduced outer diameter and, together with the housing 1, form the circumferential ring channel 31, into which the intermediate inlet 28 opens.
- the one or more spacer rings 23 and 24 with a reduced outer diameter also have openings 32, via which the connection of the delivery chamber of the turbomolecular pump stage to the intermediate inlet 28 is established.
- openings can be, for example, several bores, as shown in the case of the spacer ring 24.
- Another possibility is to mill out a spacer ring 23 in such a way that it has a reduced (axial) height in sections. This makes it possible to produce breakthroughs with a high conductance.
- FIGS. 2 to 4 show an embodiment in which the spacer rings 22 to 24 are equipped with centering means. These consist of an outer circumferential recess 34 on one side and an axially directed edge 35 on the other side of the spacer rings. The dimensions are chosen so that the edge 35 on the one hand encompasses and centers the outer edge 26 of the adjacent vane ring disk 25. Furthermore, the outer edge 35 engages in the recess 34 of the adjacent spacer ring, as a result of which the entire stator 21 is centered.
- the ring channel 31 is formed as a circumferential groove in the housing 1, so that it is not necessary to give the or the spacer rings 23 and 24 a reduced outer diameter.
- the openings in the spacer ring 24 are again designed as bores, for example.
- the spacer ring 23 is shown again in FIGS. 3 and 4. It has the centering means (outer edge 35, recess 34).
- the openings 32 are formed in that several sections of the ring have a reduced height to have. In the exemplary embodiment shown, there are four sections of this type which are distributed uniformly over the circumference and each extend over 10% of the circumference.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE29516599U DE29516599U1 (de) | 1995-10-20 | 1995-10-20 | Reibungsvakuumpumpe mit Zwischeneinlaß |
DE29516599U | 1995-10-20 | ||
PCT/EP1996/003524 WO1997015760A1 (de) | 1995-10-20 | 1996-08-09 | Reibungsvakuumpumpe mit zwischeneinlass |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0856108A1 true EP0856108A1 (de) | 1998-08-05 |
EP0856108B1 EP0856108B1 (de) | 2002-07-03 |
Family
ID=8014363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96928437A Expired - Lifetime EP0856108B1 (de) | 1995-10-20 | 1996-08-09 | Reibungsvakuumpumpe mit zwischeneinlass |
Country Status (5)
Country | Link |
---|---|
US (1) | US6030189A (de) |
EP (1) | EP0856108B1 (de) |
JP (1) | JP3939352B2 (de) |
DE (2) | DE29516599U1 (de) |
WO (1) | WO1997015760A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10337517B2 (en) | 2012-01-27 | 2019-07-02 | Edwards Limited | Gas transfer vacuum pump |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19821634A1 (de) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
DE59912629D1 (de) * | 1998-05-26 | 2006-02-16 | Leybold Vakuum Gmbh | Gerät mit evakuierbarer Kammer |
JP3038432B2 (ja) | 1998-07-21 | 2000-05-08 | セイコー精機株式会社 | 真空ポンプ及び真空装置 |
JP3010529B1 (ja) * | 1998-08-28 | 2000-02-21 | セイコー精機株式会社 | 真空ポンプ、及び真空装置 |
US6193461B1 (en) * | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
DE19951954A1 (de) * | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE10008691B4 (de) | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10032607B4 (de) * | 2000-07-07 | 2004-08-12 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät |
DE10111603A1 (de) * | 2001-03-10 | 2002-09-12 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe mit zusätzlichem Gaseinlass |
EP1249613B1 (de) | 2001-03-15 | 2004-01-28 | VARIAN S.p.A. | Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring |
DE10150015A1 (de) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür |
GB0124731D0 (en) | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
JP2007071139A (ja) * | 2005-09-08 | 2007-03-22 | Osaka Vacuum Ltd | 複合真空ポンプのロータ |
US20080066859A1 (en) * | 2006-08-30 | 2008-03-20 | Michiaki Kobayashi | Plasma processing apparatus capable of adjusting pressure within processing chamber |
JP5190214B2 (ja) * | 2007-03-29 | 2013-04-24 | 東京エレクトロン株式会社 | ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法 |
DE102008013142A1 (de) * | 2008-03-07 | 2009-09-10 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
JP5486184B2 (ja) * | 2008-12-10 | 2014-05-07 | エドワーズ株式会社 | 真空ポンプ |
DE102009011082A1 (de) | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
EP2757265B1 (de) * | 2013-01-22 | 2016-05-18 | Agilent Technologies, Inc. | Spiralenförmige Pumpstufe und Vakuumpumpe mit der Pumpstufe |
DE202013010204U1 (de) * | 2013-11-11 | 2015-02-13 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
EP3133290B1 (de) * | 2015-08-20 | 2021-06-09 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US20190032669A1 (en) * | 2016-02-12 | 2019-01-31 | Edwards Japan Limited | Vacuum pump, and flexible cover and rotor used in vacuum pump |
GB2601515B (en) | 2020-12-02 | 2022-12-28 | Agilent Technologies Inc | Vacuum pump with elastic spacer |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1403493A1 (de) * | 1961-01-20 | 1969-01-30 | Akad Wissenschaften Ddr | Molekularpumpe |
DE2119857A1 (de) * | 1971-04-23 | 1972-11-02 | Leybold-Heraeus GmbH & Co KG, 5000 Köln | Einrichtung zur Ölversorgung von Lagerstellen |
DE2214702A1 (de) * | 1972-03-25 | 1973-09-27 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe |
DE2442614A1 (de) * | 1974-09-04 | 1976-03-18 | Siemens Ag | Turbomolekularpumpe |
DE3124205A1 (de) * | 1981-06-19 | 1982-12-30 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Lecksuchanordnung |
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
DE3133781A1 (de) * | 1981-08-26 | 1983-03-10 | Leybold-Heraeus GmbH, 5000 Köln | Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
JPS6341695A (ja) * | 1986-08-07 | 1988-02-22 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
DE3722164C2 (de) * | 1987-07-04 | 1995-04-20 | Balzers Pfeiffer Gmbh | Turbomolekularpumpe |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
DE58905785D1 (de) * | 1989-07-20 | 1993-11-04 | Leybold Ag | Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe. |
DE9013671U1 (de) * | 1990-09-29 | 1992-01-30 | Leybold AG, 6450 Hanau | Stator für eine Turbomolekularvakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE9304435U1 (de) * | 1993-03-24 | 1993-06-09 | Leybold AG, 6450 Hanau | Hochvakuumpumpe mit Einlaßflansch |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
-
1995
- 1995-10-20 DE DE29516599U patent/DE29516599U1/de not_active Expired - Lifetime
-
1996
- 1996-08-09 EP EP96928437A patent/EP0856108B1/de not_active Expired - Lifetime
- 1996-08-09 WO PCT/EP1996/003524 patent/WO1997015760A1/de active IP Right Grant
- 1996-08-09 JP JP51621997A patent/JP3939352B2/ja not_active Expired - Fee Related
- 1996-08-09 US US09/051,893 patent/US6030189A/en not_active Expired - Lifetime
- 1996-08-09 DE DE59609415T patent/DE59609415D1/de not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
See references of WO9715760A1 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10337517B2 (en) | 2012-01-27 | 2019-07-02 | Edwards Limited | Gas transfer vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
JP3939352B2 (ja) | 2007-07-04 |
US6030189A (en) | 2000-02-29 |
WO1997015760A1 (de) | 1997-05-01 |
JPH11513775A (ja) | 1999-11-24 |
DE29516599U1 (de) | 1995-12-07 |
EP0856108B1 (de) | 2002-07-03 |
DE59609415D1 (de) | 2002-08-08 |
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