EP0697524B1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire Download PDF

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Publication number
EP0697524B1
EP0697524B1 EP95401896A EP95401896A EP0697524B1 EP 0697524 B1 EP0697524 B1 EP 0697524B1 EP 95401896 A EP95401896 A EP 95401896A EP 95401896 A EP95401896 A EP 95401896A EP 0697524 B1 EP0697524 B1 EP 0697524B1
Authority
EP
European Patent Office
Prior art keywords
rotor
bell
stator
shaft
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95401896A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0697524A1 (fr
Inventor
Denis Perrillat-Amede
Didier Pierrejean
François Reverdy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0697524A1 publication Critical patent/EP0697524A1/fr
Application granted granted Critical
Publication of EP0697524B1 publication Critical patent/EP0697524B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Definitions

  • the present invention relates to a pump turbomolecular comprising a stator and a rotor, the rotor comprising an active part of the bell type and a shaft central, the stator comprising an external part and a internal part penetrating into the cavity of said part active in bell and supporting the stator part of the drive motor, the rotor shaft supporting the part rotor of the drive motor, said central shaft (5) and the bell-shaped active part (3) of the rotor being in one piece without assembly.
  • a pump is known, see DE-A-3 713 534 or EP-A-0 470 637.
  • the motor rotor electric drive is fixed around the central shaft which is itself assembled to the active part itself by a screw, the rotor of the electric motor being formed, depending on the type of motor, windings, iron or magnets permanent.
  • the permanent magnet motor is usually preferred, for its performance, its size and the stability of its rotation speed.
  • the speed of rotation is limited by the resistance materials constituting the rotor, but also by the dynamic behavior of the rotor which is linked among other things to the rotor stiffness.
  • the rotor assembly of known pumps is hardly rigid, it is bulky, expensive and difficult to degas. In particular, it is difficult to obtain a good rigidity of the shaft-part assembly active and good resistance of permanent magnets to centrifugal forces. It is necessary to fret the magnets.
  • the subject of the invention is therefore a vacuum pump turbomolecular, as defined above, characterized in that said central shaft and said active part in rotor bell are in non-magnetic material, said shaft having a bore central in which is housed the rotor part of said drive motor, consisting of a permanent magnet cylindrical.
  • said permanent magnet has a section circular with two diametrically opposite flats. This provision allows the evacuation of air during the introduction of the magnet into the bore of the shaft.
  • Figure 2 shows the section of the permanent magnet used as the rotor of the electric drive motor.
  • Figure 3 shows a small mounting variant.
  • a vacuum pump fin type turbomolecular This pump has a rotor 1 and a stator 2.
  • the rotor 1 comprises a part active 3 in the shape of a bell and comprising fins 4 and a central shaft 5.
  • the active part 3 with its fins 4 and the central shaft 5 are one and the same piece made in a single block without assembly and in a material not magnetic.
  • the stator 2 is in two assembled parts: an external part 6 in which stages are mounted fixed fins 7 and an internal part 8 which penetrates into the cavity 9 of the active part 3 in the shape of a bell rotor 1.
  • This internal part 8 of the stator carries the part stator of an electric drive motor comprising a magnetic circuit 10 and windings 11.
  • the part rotor of the drive motor consists of a single cylindrical multipolar permanent magnet 12 introduced at the bottom of a central bore 13 of the central shaft 5.
  • the pump described is a pump fins, but the invention applies equally well to Holweck drum type molecular pumps and the term turbomolecular pump used includes both pumps with fins than those of the Holweck type.
  • the pump of the invention thanks to its rotor monobloc, without assembly, and including the motor rotor drive is located not around the central shaft, but housed in a central bore of the shaft, and made up of a single cylindrical permanent magnet, allows a excellent rigidity of the rotating assembly, compactness and lower cost and minimizes the internal degassing of the suction side pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP95401896A 1994-08-19 1995-08-16 Pompe à vide turbomoléculaire Expired - Lifetime EP0697524B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9410147 1994-08-19
FR9410147A FR2723767B1 (fr) 1994-08-19 1994-08-19 Pompe a vide turbomoleculaire

Publications (2)

Publication Number Publication Date
EP0697524A1 EP0697524A1 (fr) 1996-02-21
EP0697524B1 true EP0697524B1 (fr) 1999-03-10

Family

ID=9466397

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95401896A Expired - Lifetime EP0697524B1 (fr) 1994-08-19 1995-08-16 Pompe à vide turbomoléculaire

Country Status (5)

Country Link
US (1) US5542825A (ja)
EP (1) EP0697524B1 (ja)
JP (1) JPH0868388A (ja)
DE (1) DE69508163T2 (ja)
FR (1) FR2723767B1 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE508445C2 (sv) * 1997-01-28 1998-10-05 Magnetal Ab Vakuumpump av höghastighetstyp
DE19718791A1 (de) * 1997-05-03 1998-11-05 Mannesmann Vdo Ag Fördereinheit
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
JP3856661B2 (ja) * 2001-06-06 2006-12-13 株式会社荏原製作所 真空ポンプ
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
JP2007309245A (ja) * 2006-05-19 2007-11-29 Boc Edwards Kk 真空ポンプ
US8513826B2 (en) * 2008-06-26 2013-08-20 Ed Mazur Wind turbine
FR2974175B1 (fr) * 2011-04-14 2013-10-11 Mecanique Magnetique Sa Dispositif de detection de la position axiale d'un arbre tournant et application a une pompe turbo-moleculaire
DE202012000611U1 (de) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH477629A (de) * 1967-08-18 1969-08-31 Pfeiffer Vakuumtechnik Vakuumpumpe mit elektrischem Antrieb, insbesondere Turbomolekularpumpe
US3535052A (en) * 1967-08-18 1970-10-20 Pfeiffer Vakuumtechnik Electrically driven vacuum pump
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
US4725750A (en) * 1980-11-20 1988-02-16 Hughes Aircraft Company Permanent magnet rotary machine
JPS58163255A (ja) * 1982-03-24 1983-09-28 Okuma Mach Works Ltd 永久磁石式同期モ−タの回転子
US4629921A (en) * 1982-09-14 1986-12-16 Gavaletz John S Dynamoelectric machine rotor
US4588914A (en) * 1984-06-05 1986-05-13 Westinghouse Electric Corp. Permanent magnet rotor for high speed motors and generators
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JPS62282192A (ja) * 1986-05-30 1987-12-08 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
FR2659396B1 (fr) * 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide pour vide moleculaire propre.
JPH04219493A (ja) * 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ

Also Published As

Publication number Publication date
DE69508163D1 (de) 1999-04-15
EP0697524A1 (fr) 1996-02-21
FR2723767B1 (fr) 1997-01-03
FR2723767A1 (fr) 1996-02-23
DE69508163T2 (de) 1999-08-05
JPH0868388A (ja) 1996-03-12
US5542825A (en) 1996-08-06

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